CN212274847U - Device for detecting quartz boat - Google Patents
Device for detecting quartz boat Download PDFInfo
- Publication number
- CN212274847U CN212274847U CN202021339564.5U CN202021339564U CN212274847U CN 212274847 U CN212274847 U CN 212274847U CN 202021339564 U CN202021339564 U CN 202021339564U CN 212274847 U CN212274847 U CN 212274847U
- Authority
- CN
- China
- Prior art keywords
- quartz boat
- flat plate
- height gauge
- detection
- height
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a device for detecting a quartz boat, which comprises a detection platform horizontally arranged, and a height gauge, a standard check block and the quartz boat which are arranged on the detection platform; the height gauge is horizontally placed on the detection table, a vernier of the height gauge is connected with the flat plate through a connecting rod, the standard check block is placed below the flat plate, and the flat plate slides down to the top surface of the standard check block along the height gauge to check the flatness and the height size; the quartz boat is horizontally placed on the detection table, and the calibrated flat plate is pushed into the groove teeth of the quartz boat along the height gauge so as to verify the precision of the quartz boat. The utility model discloses increase connecting rod, flat board and standard check block on the basis of tongue. The flat plate is connected with the height gauge through a connecting rod, and the height and the flatness of the flat plate are calibrated through the standard calibration block. And (5) simulating the using state of the silicon wafer to detect the verticality of 4 groove rods of the quartz boat, the flatness of the groove teeth and the precision size. The detection cost is low, the detection time is short, the detection steps are simple and convenient, and the size precision is high.
Description
Technical Field
The utility model relates to a quartz boat detects the field, and specifically speaking especially involves a device for detecting quartz boat.
Background
In the integrated circuit and photovoltaic diffusion process, a quartz boat is required to be used as a carrier of wafers (silicon wafers). Therefore, the flatness, the verticality, the parallelism, the single spacing size and the total spacing size of the quartz boat are required correspondingly.
The current detection method for the quartz boat is as follows: respectively measuring the sizes of 4 groove rod groove teeth by adopting three-coordinate detection or a height gauge with a dial indicator; measuring the verticality of 4 groove rods by a square; and subtracting the values measured by the height gauge of the dial indicator to obtain the flatness and the parallelism.
The detection methods have the defects of high cost, long detection time, complicated detection steps and difficulty in ensuring the size precision.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a device for detecting quartz boat to the not enough among the prior art to solve the problem that exists among the prior art.
The utility model provides a technical problem can adopt following technical scheme to realize:
a device for detecting a quartz boat comprises a detection table, a height gauge, a standard check block and the quartz boat, wherein the detection table is horizontally arranged, and the height gauge, the standard check block and the quartz boat are arranged on the detection table;
the height gauge is horizontally placed on the detection table, a vernier of the height gauge is connected with the flat plate through a connecting rod, the standard check block is placed below the flat plate, and the flat plate slides down to the top surface of the standard check block along the height gauge to check the flatness and the height size;
the quartz boat is horizontally placed on the detection table, and the calibrated flat plate is pushed into the groove teeth of the quartz boat along the height gauge so as to verify the precision of the quartz boat.
Further, examine test table and include four support columns, adjacent support column passes through the spliced pole and connects, is equipped with the marble flat board at the top of support column.
Furthermore, a connecting hole is formed in a vernier of the height gauge, and the connecting rod is connected with the vernier through the connecting hole.
Furthermore, the flat plate is detachably connected with the vernier of the height gauge through a connecting rod.
Compared with the prior art, the beneficial effects of the utility model reside in that:
and a connecting rod, a flat plate and a standard check block are added on the basis of the height gauge. The flat plate is connected with the height gauge through a connecting rod, and the height and the flatness of the flat plate are calibrated through the standard calibration block. And (5) simulating the using state of the silicon wafer to detect the verticality of 4 groove rods of the quartz boat, the flatness of the groove teeth and the precision size. The detection cost is low, the detection time is short, the detection steps are simple and convenient, and the size precision is high.
Drawings
Fig. 1 is a schematic view of the device for detecting quartz boat of the present invention.
Detailed Description
In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the following embodiments.
Referring to fig. 1, the device for detecting the quartz boat of the present invention comprises a detection table (1) horizontally placed, and a height gauge (2), a standard calibration block (3) and a quartz boat (4) placed on the detection table (1);
the height gauge (2) is horizontally placed on the detection table (1), a vernier (21) of the height gauge (2) is connected with the flat plate (6) through a connecting rod (5), the standard check block (3) is placed below the flat plate (6), and the flat plate (6) slides down to the top surface of the standard check block (3) along the height gauge (2) to check the flatness and the height;
the quartz boat (4) is horizontally placed on the detection table (1), and the calibrated flat plate (6) is pushed into the groove teeth of the quartz boat (4) along the height gauge (2) so as to verify the precision of the quartz boat (4).
The detection table (1) comprises four supporting columns (11), the adjacent supporting columns (11) are connected through connecting columns, and marble slabs (12) are arranged at the tops of the supporting columns (11).
A connecting hole is formed in the vernier (21) of the height gauge (2), and the connecting rod (5) is connected with the vernier (21) through the connecting hole.
The flat plate (6) is detachably connected with the vernier (21) of the height gauge (2) through the connecting rod (5).
The utility model discloses a testing process as follows:
firstly, a flat plate (6) is connected with a height gauge (2) through a connecting rod (5), a standard check block is placed on a marble platform, and the flat plate (6) slides downwards to the top surface of the standard check block (3) along the height gauge (2) to check the flatness and the height size; and then the calibrated flat plate (6) is pushed into the groove teeth of the quartz boat (4) along the height gauge (2), and the requirements of the quartz boat (4) on the size precision, the flatness and the parallelism are verified by simulating the actual use state of a silicon wafer.
The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (4)
1. The utility model provides a device for detecting quartz boat which characterized in that: the device comprises a detection platform (1) which is horizontally arranged, and a height gauge (2), a standard check block (3) and a quartz boat (4) which are arranged on the detection platform (1);
the height gauge (2) is horizontally placed on the detection table (1), a vernier (21) of the height gauge (2) is connected with the flat plate (6) through a connecting rod (5), the standard check block (3) is placed below the flat plate (6), and the flat plate (6) slides down to the top surface of the standard check block (3) along the height gauge (2) to check the flatness and the height;
the quartz boat (4) is horizontally placed on the detection table (1), and the calibrated flat plate (6) is pushed into the groove teeth of the quartz boat (4) along the height gauge (2) so as to verify the precision of the quartz boat (4).
2. The apparatus of claim 1, wherein: the detection table (1) comprises four supporting columns (11), the adjacent supporting columns (11) are connected through connecting columns, and marble slabs (12) are arranged at the tops of the supporting columns (11).
3. The apparatus of claim 1, wherein: a connecting hole is formed in the vernier (21) of the height gauge (2), and the connecting rod (5) is connected with the vernier (21) through the connecting hole.
4. The apparatus of claim 1, wherein: the flat plate (6) is detachably connected with the vernier (21) of the height gauge (2) through the connecting rod (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021339564.5U CN212274847U (en) | 2020-07-09 | 2020-07-09 | Device for detecting quartz boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021339564.5U CN212274847U (en) | 2020-07-09 | 2020-07-09 | Device for detecting quartz boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212274847U true CN212274847U (en) | 2021-01-01 |
Family
ID=73900062
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021339564.5U Active CN212274847U (en) | 2020-07-09 | 2020-07-09 | Device for detecting quartz boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212274847U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114739273A (en) * | 2022-03-08 | 2022-07-12 | 深圳市捷佳伟创新能源装备股份有限公司 | Checking fixture |
-
2020
- 2020-07-09 CN CN202021339564.5U patent/CN212274847U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114739273A (en) * | 2022-03-08 | 2022-07-12 | 深圳市捷佳伟创新能源装备股份有限公司 | Checking fixture |
| CN114739273B (en) * | 2022-03-08 | 2024-05-10 | 深圳市捷佳伟创新能源装备股份有限公司 | Gauge |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4782953B2 (en) | Probe card characteristic measuring device, probe device, and probe method | |
| CN212274847U (en) | Device for detecting quartz boat | |
| CN201407985Y (en) | Simple straightness measuring instrument of long stem piece | |
| CN212903026U (en) | Detection device for quartz boat | |
| CN205102755U (en) | Blue glass lump material straightness detection device that hangs down | |
| CN104330009A (en) | Component height size measuring method and measuring tool thereof | |
| CN206891901U (en) | Concrete slump test instrument | |
| CN208736273U (en) | A kind of measurement bracket for testing product rigging position | |
| CN211783328U (en) | Equipment for detecting thickness of wafer | |
| CN211907406U (en) | Wafer placing and aligning device | |
| CN212030422U (en) | Temporary rapid step detection device for quartz ring for semiconductor | |
| CN210981105U (en) | Rock sample basic parameter measuring device | |
| CN205138353U (en) | Frame check out test set | |
| CN209894822U (en) | Calibration device of concrete carbonization depth measuring instrument | |
| CN104677261A (en) | Standard silicon wafer thickness measuring device | |
| CN206053372U (en) | A kind of scanning instrument for steel bar calibrating installation | |
| CN205940375U (en) | Ball core measurement tester | |
| CN109708557A (en) | A kind of calibrating installation of concrete carburized depth meter | |
| CN219223635U (en) | Laser measuring equipment | |
| CN218673632U (en) | Flatness detection device | |
| CN214502392U (en) | A calibrating device that is arranged in displacement sensor that pottery brick roughness detected | |
| CN211147512U (en) | Measuring device for high-speed rail parts | |
| CN205192398U (en) | Low dip formula comparator | |
| CN219572994U (en) | Calibration pedestal device of road displacement sensor | |
| CN217686992U (en) | Tool for measuring height of pin outlet of element after passing through furnace |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |