CN212233721U - Special liquid storage and supply movable device for electronic factory - Google Patents
Special liquid storage and supply movable device for electronic factory Download PDFInfo
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- CN212233721U CN212233721U CN202020734084.2U CN202020734084U CN212233721U CN 212233721 U CN212233721 U CN 212233721U CN 202020734084 U CN202020734084 U CN 202020734084U CN 212233721 U CN212233721 U CN 212233721U
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- cabinet body
- storage
- negative pressure
- storage cabinet
- liquid storage
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- 239000007788 liquid Substances 0.000 title claims abstract description 32
- 238000009423 ventilation Methods 0.000 claims abstract description 6
- 239000000428 dust Substances 0.000 claims description 5
- 239000002912 waste gas Substances 0.000 claims description 2
- 238000009434 installation Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 5
- 239000002994 raw material Substances 0.000 description 4
- 239000011550 stock solution Substances 0.000 description 4
- 238000001914 filtration Methods 0.000 description 2
- 210000000056 organ Anatomy 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The utility model discloses air feed stoste storage facilities field especially relates to a special liquid storage supply mobile device for electron factory, include: the air-exchange system is arranged in the storage cabinet body, and the bottom of the storage cabinet body is provided with fixable trundles; the top of the inner space of the storage cabinet body is also provided with a negative pressure sensor, and the negative pressure sensor is connected with a negative pressure meter on the control cabinet body; by adopting the utility model, the fixed caster wheel ensures the mobility and portability, adapts to the environment of the factory, and the ventilation system ensures the safety of storing liquid or raw liquid bottles; the double-door double-layer placing space is matched with the movable sliding rail, so that the original liquid bottle can be replaced and maintained more quickly.
Description
Technical Field
The utility model discloses air feed stoste storage facilities field especially relates to a special liquid storage supply mobile device for electron factory.
Background
Gas supply systems for supplying gases are used in production plants in the semiconductor chip, photovoltaic element, and other industries. The storage of the bottles of raw liquid in the gas supply system is a critical problem, especially in the liquid supply, the position of the bottles of raw liquid cannot be too far from the control system and the problem of occupying space is also considered.
In addition, the raw liquid bottle is also in the working process, and in case of failure, leakage occurs, and the raw liquid bottle generally needs to be placed independently or additionally provided with an air exchange system, but is generally expensive and inconvenient to move.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a can store raw material bottle to be convenient for remove, inside atmospheric pressure is measurable, and can ventilate special liquid storage device of taking a breath.
A special liquid storage supply mobile unit for an electronics plant, comprising: the air-exchange system is arranged in the storage cabinet body, and the bottom of the storage cabinet body is provided with fixable trundles;
the storage cabinet body is divided into an upper layer cabinet body and a lower layer cabinet body, an upper supporting platform and a lower supporting platform are arranged, an upper cabinet door and a lower cabinet door are arranged on the upper supporting platform and the lower supporting platform, and an upper moving slide rail and a lower moving slide rail are arranged on the side wall of the interior of the storage cabinet body; the upper support platform is slidably mounted with the upper movable slide rail, and the lower support platform is slidably mounted with the lower movable slide rail; the upper support platform is also provided with an upper fixing clamp, and the lower support platform is also provided with a lower fixing clamp;
the top of the inner space of the storage cabinet body is also provided with a negative pressure sensor, and the negative pressure sensor is connected with a negative pressure meter on the control cabinet body.
Furthermore, a dust filtering net is arranged in the air inlet hole
Furthermore, an observation window is arranged on the upper cabinet door.
Further, still be provided with the bee calling organ on the control cabinet body, bee calling organ is connected with the negative pressure table.
Furthermore, the upper supporting platform and the lower supporting platform are both provided with handles.
Further, the fixable caster comprises a knob fixing seat and a universal caster.
The utility model has the advantages that:
the utility model discloses a control cabinet body, the storage cabinet body and air exchange system, the control cabinet body is the industrial computer commonly used generally, mature prior art, be used for controlling electron field front end equipment to storing in the storage cabinet raw material liquid bottle and calling, the storage cabinet body sets up the double open type design of upper cabinet door and lower cabinet door, and be provided with two supporting platforms, can satisfy simultaneously, the demand of placing of different specification raw material liquid bottles, upper supporting platform and lower supporting platform cooperate upper movable slide rail and lower movable slide rail, make supporting platform can conveniently pull out, be convenient for overhaul change raw material liquid bottle; the air exchange system arranged in the storage cabinet body can also ensure that dangerous or harmful gas cannot be leaked out of the device after the stock solution bottle is accidentally leaked out, and the negative pressure sensor arranged at the top of the internal space of the storage cabinet body is communicated with the negative pressure meter arranged on the control cabinet body, so that negative pressure unbalance caused by the leakage of the stock solution bottle in the device can be fed back at the first time, and the safety of the device is ensured; the fixed casters arranged at the bottom of the storage cabinet body can ensure the portability of the device and ensure the free movement and fixation of the whole device in a factory;
by adopting the utility model, the fixed caster wheel ensures the mobility and portability, adapts to the environment of the factory, and the ventilation system ensures the safety of storing liquid or raw liquid bottles; the double-door double-layer placing space is matched with the movable sliding rail, so that the original liquid bottle can be replaced and maintained more quickly.
Drawings
FIG. 1 is a schematic view of the inclined structure of the present invention;
fig. 2 is a schematic diagram of a side view internal structure of the present invention;
fig. 3 is a schematic front view of the present invention;
reference numerals: 1-control cabinet body, 101-negative pressure meter, 102-buzzer, 2-storage cabinet body, 201-upper cabinet door, 202-lower cabinet door, 203-observation window, 3-upper moving slide rail, 4-lower moving slide rail, 5-upper supporting platform, 6-lower supporting platform, 7-upper fixing clamp, 8-lower fixing clamp, 9-fixable truckle, 10-handle, 11-air inlet, 12-air valve and 13-negative pressure sensor.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Referring to fig. 1-3, a mobile device for storing and supplying special liquid for an electronic factory comprises a storage cabinet 2, a control cabinet 1 and an air exchange system, wherein the control cabinet 1 is fixedly arranged at the top of the storage cabinet 2, the air exchange system is arranged inside the storage cabinet 2, and the bottom of the storage cabinet 2 is provided with fixable casters 9;
the storage cabinet body 2 is divided into an upper layer cabinet body and a lower layer cabinet body, an upper supporting platform 5 and a lower supporting platform 6 are arranged, an upper cabinet door 201 and a lower cabinet door 202 are arranged on the upper supporting platform and the lower supporting platform, and an upper movable slide rail 3 and a lower movable slide rail 4 are arranged on the side wall of the inner part of the storage cabinet body 2; the upper support platform 5 is slidably mounted with the upper movable slide rail 3, and the lower support platform 6 is slidably mounted with the lower movable slide rail 4; the upper supporting platform 5 is also provided with an upper fixing clamp 7, and the lower supporting platform 6 is also provided with a lower fixing clamp 8;
the top of the inner space of the storage cabinet body 2 is also provided with a negative pressure sensor 13, and the negative pressure sensor 13 is connected with a negative pressure meter 101 on the control cabinet body 1.
The utility model discloses a control cabinet body 1, the storage cabinet body 2 and air exchange system, control cabinet body 1 is the industrial computer commonly used generally, mature prior art, be used for controlling electron field front end equipment to store in the storage cabinet 2 in the stoste bottle and call, storage cabinet body 2 sets up the double open type design of upper cabinet door 201 and lower cabinet door 202, and be provided with two supporting platforms, can satisfy simultaneously, the demand of placing of different specification stoste bottle, upper supporting platform 5 and lower supporting platform 6 cooperate and move slide rail 3 and move slide rail 4 down, make supporting platform can conveniently pull out, be convenient for overhaul and change the stoste bottle; the ventilation system arranged in the storage cabinet body 2 can also ensure that dangerous or harmful gas cannot be leaked out of the device after the stock solution bottle is accidentally leaked out, the negative pressure sensor 13 arranged at the top of the internal space of the storage cabinet body 2 is communicated with the negative pressure meter 10 arranged on the control cabinet body 1, negative pressure unbalance caused by the leakage of the stock solution bottle in the device can be fed back at the first time, and the safety of the device is ensured; the fixed caster wheels 9 arranged at the bottom of the storage cabinet body 2 can ensure the portability of the device and ensure the free movement and fixation of the whole device in a factory.
By adopting the utility model, the fixed caster wheel 9 ensures the mobility and portability, adapts to the environment of the factory, and the ventilation system ensures the safety of the stored liquid or the raw liquid bottle; the double-door double-layer placing space is matched with the movable sliding rail, so that the original liquid bottle can be replaced and maintained more quickly.
Referring to fig. 1-3, a special mobile liquid storage and supply device for electronic factories, further, the ventilation system includes an air inlet hole 11 formed on a lower cabinet door 202 and an air valve 12 formed at the top of the inner space of a storage cabinet 2; the air valve 12 is communicated with the internal space of the storage cabinet body 2 and an external waste gas treatment device;
in this embodiment, a dust filter screen is further arranged in the air inlet 11; the dust filtering net can filter out dust and impurities, so that the inner space of the device is kept clean.
In this embodiment, further, the upper cabinet door is provided with an observation window 203; through observation window 203, can confirm trouble internal condition fast, the staff safety of being convenient for confirms the interior condition of equipment fast.
In this embodiment, further, a buzzer 102 is further disposed on the control cabinet 1, and the buzzer 102 is connected with the negative pressure meter 101; when the data of the negative pressure meter 101 is cheap within a certain range, the buzzer 102 can give an alarm to remind workers of overhauling and maintaining.
In this embodiment, further, the upper supporting platform (5) and the lower supporting platform (6) are both provided with handles 10.
In this embodiment, the fixable caster 9 further includes a knob fixing seat 92 and a caster 91.
The specific embodiments described herein are merely illustrative of the spirit of the invention. Various modifications, additions and substitutions for the specific embodiments described may be made by those skilled in the art without departing from the scope and spirit of the invention as defined by the accompanying claims.
Claims (7)
1. A special liquid storage and supply movable device for an electronic factory is characterized by comprising a storage cabinet body (2), a control cabinet body (1) and an air exchange system, wherein the control cabinet body (1) is fixedly arranged at the top of the storage cabinet body (2), the air exchange system is arranged inside the storage cabinet body (2), and the bottom of the storage cabinet body (2) is provided with fixable trundles (9);
the storage cabinet body (2) is divided into an upper layer cabinet body and a lower layer cabinet body, an upper supporting platform (5) and a lower supporting platform (6) are arranged, an upper cabinet door (201) and a lower cabinet door (202) are arranged on the upper supporting platform, and an upper moving slide rail (3) and a lower moving slide rail (4) are arranged on the side wall of the interior of the storage cabinet body (2); the upper support platform (5) is slidably mounted with the upper movable sliding rail (3), and the lower support platform (6) is slidably mounted with the lower movable sliding rail (4); an upper fixing clamp (7) is further arranged on the upper supporting platform (5), and a lower fixing clamp (8) is further arranged on the lower supporting platform (6);
the top of the inner space of the storage cabinet body (2) is also provided with a negative pressure sensor (13), and the negative pressure sensor (13) is connected with a negative pressure meter (101) on the control cabinet body (1).
2. The mobile installation for the storage and supply of special liquids for electronic plants according to claim 1, characterized in that said ventilation system comprises air intake openings (11) made on the lower cabinet door (202) and air valves (12) made at the top of the internal space of the storage cabinet (2); the air valve (12) is communicated with the inner space of the storage cabinet body (2) and an external waste gas treatment device.
3. A mobile special liquid storage and supply device for electronic factories according to claim 2 characterized in that a dust filter screen is arranged in the air inlet hole (11).
4. The mobile special liquid storage and supply device for electronic factories of claim 1 characterized in that the upper cabinet door (201) is opened with a viewing window (203).
5. A mobile special liquid storage and supply device for electronic factories according to claim 1 characterized in that said control cabinet (1) is further provided with a buzzer (102), said buzzer (102) is connected with a negative pressure meter (101).
6. A mobile special liquid storage and supply device for electronic factories according to claim 1 characterized in that said upper support platform (5) and lower support platform (6) are provided with handles (10).
7. A mobile special liquid storage and supply device for electronic factories according to claim 1 characterized in that said fixable caster (9) comprises knob holders (92) and universal casters (91).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020734084.2U CN212233721U (en) | 2020-05-07 | 2020-05-07 | Special liquid storage and supply movable device for electronic factory |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020734084.2U CN212233721U (en) | 2020-05-07 | 2020-05-07 | Special liquid storage and supply movable device for electronic factory |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212233721U true CN212233721U (en) | 2020-12-29 |
Family
ID=73997993
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020734084.2U Active CN212233721U (en) | 2020-05-07 | 2020-05-07 | Special liquid storage and supply movable device for electronic factory |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212233721U (en) |
-
2020
- 2020-05-07 CN CN202020734084.2U patent/CN212233721U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: Room 301, Building 8, No. 68 Weijian Road, Chashan Town, Dongguan City, Guangdong Province, 523000 Patentee after: Rongke Precision Manufacturing (Guangdong) Co.,Ltd. Country or region after: China Address before: 518000 building E-4, sunshine Science Park, No.5, Jinlong 2nd Road, Baolong street, Longgang District, Shenzhen City, Guangdong Province Patentee before: Shenzhen Rongke Semiconductor Equipment Co.,Ltd. Country or region before: China |