CN212170121U

CN212170121U - Paste buffing device

Info

Publication number: CN212170121U
Application number: CN202020655867.1U
Authority: CN
Inventors: 苗泽民
Original assignee: Suzhou Epi Photoelectric Material Co ltd
Current assignee: Yangfan Semiconductor Jiangsu Co ltd
Priority date: 2020-04-26
Filing date: 2020-04-26
Publication date: 2020-12-18
Anticipated expiration: 2030-04-26

Abstract

The utility model discloses a paste buffing device, including the frame, its characterized in that: a sliding table for placing the polishing disk is arranged on the frame in a sliding manner along the horizontal direction, a press roller which is parallel to the sliding table and is used for pressing the polishing leather on the polishing disk is rotationally arranged above the sliding table on the frame, two feeding rollers which are parallel to the compression roller and are used for enabling the polishing leather to pass through are arranged above the compression roller on the machine frame, the machine frame is provided with a separating roller which is arranged below the two feeding rollers in parallel, a back paper sheet passes through the separating roller and the feeding rollers, the machine frame is provided with a motor which is connected with the press roller and is used for driving the press roller to rotate, the technical proposal is that the polishing leather is put between two feed rollers, and the backing paper sheet reversely penetrates out from the space between the feed rollers and the compression roller, the polishing leather can be conveyed downwards by pulling the backing paper sheet, so that the end part of the polishing leather enters between the compression roller and the polishing disc, and the polishing leather is uniformly and flatly attached to the polishing disc under the pressure of the compression roller.

Description

Paste buffing device

Technical Field

The utility model relates to a wafer polishing technical field, more specifically say, it relates to a paste polishing leather clothing device.

Background

Wafer polishing is an important process for processing a semiconductor wafer having a mirror surface by removing a mechanically damaged layer on the surface of the wafer by chemical polishing, mechanical polishing, or chemical mechanical polishing. The chemical polishing is to use chemical non-selective corrosion to achieve the purpose of surface polishing, and the wafer surface has few residual mechanical damage layers but has poor accuracy of surface state and geometric dimension. The mechanical polishing is to achieve the purpose of surface polishing by mechanical friction, the wafer surface which is as bright as a mirror can be easily obtained, the geometric dimension precision of the wafer is higher, but the depth of the residual mechanical damage layer is influenced by the polishing type and the granularity. Chemical mechanical polishing is to make the surface of a wafer and polishing material react chemically to generate water-soluble substance, and to wipe off the chemical reactant through controlled mechanical friction, so as to achieve the purpose of polishing.

The chemical mechanical polishing is widely adopted due to high polishing precision and efficiency, a relatively fragile wafer material is adopted, a soft polishing leather (cloth) and a light forward pressure are selected in the polishing process to ensure that the wafer is not damaged, a good polishing process enables the chemical corrosion action and the mechanical friction action to be balanced, and the chemical mechanical polishing of the wafer is finished on a special polishing machine. The single-side polishing of the wafer is generally carried out, during the operation, the wafer is adhered to a slide plate by paraffin or adsorbed on the slide plate by a special liner under the action of surface tension, the processing surface is contacted with a polishing disk of a polishing machine, the surface of the polishing disk is adhered with velvet woolen, suede leather or polyurethane polishing leather, a certain flow of polishing liquid is injected into the surface of the rotating polishing disk, and the polishing processing of the wafer is completed through the chemical mechanical processing process. However, the process of attaching the polishing skin to the surface of the polishing disc mainly comprises manual operation, when some polishing skins with larger areas are attached, the polishing skins are firstly separated from the backing paper sheet manually, then one side of the polishing skins is aligned with the edge of the polishing disc and is slowly attached to the polishing disc, and the process needs to ensure that the polishing skins are uniformly and flatly attached to the polishing disc. However, the manual peeling method is very easy to form air bubbles, wrinkles and deformation, the larger the polishing peel is, the more difficult the operation is, the defects cannot be completely distinguished by human eyes, the thickness tolerance and the surface flatness of the polished wafer do not meet the requirements, the wafer is directly scrapped, the peeling efficiency is low due to the fact that the wafer is not adhered, and the cost is wasted.

SUMMERY OF THE UTILITY MODEL

Not enough to prior art exists, the utility model aims to provide a paste buffing device, it has can reduce artificial intervention, promotes the veneer quality, prevents that bad factors such as bubble, fold and deformation from appearing in the veneer.

In order to achieve the above purpose, the utility model provides a following technical scheme:

the utility model provides a paste buffing device, includes the frame, its characterized in that: the frame is provided with the slip table that is used for placing the polishing dish along the horizontal direction slip, the frame is located the slip table top and rotates and is provided with the compression roller parallel in order to be used for pressing the polishing skin on the polishing dish with the slip table, the frame is located the compression roller top and is provided with two feed rolls parallel in order to be used for making the polishing skin pass, the frame is located two feed roll below parallel arrangement and has the separation roller, supply the backing paper piece to pass between separation roller and the feed roll, be provided with in the frame and be connected in order to be used for driving pressure roller pivoted motor with the compression roller.

Preferably, the rotation direction of the compression roller is consistent with that of the uppermost feeding roller, the two feeding rollers rotate in opposite directions, and the separation roller and the compression roller rotate in the same direction.

Preferably, the compression roller is connected with the separation roller through a transmission belt, and the separation roller is meshed with the two feeding rollers sequentially through gears.

Preferably, the linear speeds of the feed rollers of the press roller and the separation roller are consistent.

Preferably, the frame is rotatably provided with a guide roller proximate to the pressure roller for feeding the polishing skin to the polishing pad.

Preferably, the machine frame is provided with a guide bent plate for guiding the polishing leather between the press roller and the guide roller.

Preferably, the upper surface of the compression roller is covered with resistance-increasing leather.

Preferably, the rack is provided with a mark post for positioning the sliding table.

Compared with the prior art, the utility model discloses following beneficial effect has:

1. the polishing leather is placed between the two feeding rollers, the backing paper sheet reversely penetrates out of the feeding rollers and the compression roller, the polishing leather can be downwards fed by pulling the backing paper sheet, the end part of the polishing leather enters the space between the compression roller and the polishing disc, the polishing leather is uniformly and flatly attached to the polishing disc under the pressure of the compression roller, the sliding table is driven to slide by friction force, the effect of automatically attaching the polishing leather is achieved, manual leather attaching operation is replaced, the leather attaching efficiency is high, and hollowing bubbles, wrinkles and deformation cannot occur;

2. the press roller is driven to rotate by the motor, the feed roller and the separation roller are driven to be linked by the press roller through the transmission belt and the gear, the linear speeds are consistent, the automatic and stable separation of the backing paper sheets, the feeding and the skin sticking are realized, the manual driving is not needed, the skin sticking is more accurate, and the efficiency is higher;

3. through direction bent plate and guide roll, be convenient for automatically send polishing skin to polishing dish on, promote the frictional force of skinning through increasing the resistance skin, prevent to skid, can be convenient for fix a position the initial position of slip table through the sighting rod.

Drawings

Fig. 1 is a schematic structural diagram of the present embodiment.

In the figure: 1. a frame; 11. a guide rail; 111. a sliding table; 12. a compression roller; 121. resistance increasing leather; 122. a transmission belt; 13. a feed roller; 14. a separation roller; 15. a guide roller; 16. a guide bent plate; 17. a marker post; 2. a motor; 3. a polishing disk; 4. polishing the leather; 5. backing paper sheets; 6. a gear.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings.

A device for sticking a polishing leather 4 refers to fig. 1, and comprises a frame 1, wherein the frame 1 comprises a guide rail 11, a sliding table 111 is arranged on the guide rail 11 in a sliding manner along the horizontal direction, and a groove for placing a polishing disc 3 is arranged on the sliding table 111; a press roll 12 is arranged above the sliding table 111 of the frame 1 through a bearing in a rotating way, the press roll 12 is parallel to the sliding table 111 and has a gap with the polishing disc 3, the polishing skin 4 is adhered to the polishing disc 3 through the rotation of the press roll 12, two feed rolls 13 are arranged above the press roll 12 of the frame 1 through a bearing in a rotating way, the two feed rolls 13 are parallel to the press roll 12 and are used for enabling the polishing skin 4 to pass through, a separation roll 14 is arranged below the two feed rolls 13 of the frame 1 through a bearing in a rotating way, the separation roll 14 is parallel to the feed rolls 13, a backing paper sheet 5 passes through between the separation roll 14 and the feed rolls 13 and is separated by pulling the backing paper sheet 5, a motor 2 connected with the press roll 12 and used for driving the press roll 12 to rotate is arranged on the frame 1, the press roll 12 is driven by the motor 2 to flatly press the polishing skin 4 on the polishing disc 3, the sliding table 111 moves along, the polishing skin 4 was flat without bubbling, wrinkles and deformation.

The rotation direction of the press roll 12 is consistent with that of the uppermost feed roll 13, the rotation directions of the two feed rolls 13 are opposite, and the rotation directions of the separation roll 14 and the press roll 12 are consistent. The central shafts of the compression roller 12 and the separation roller 14 are connected through the transmission belt 122, the separation roller 14 and the central shafts of the two feeding rollers 13 are meshed through the gear 6 in sequence, the linear speeds of the feeding rollers 13 of the compression roller 12 and the separation roller 14 are consistent, the motor 2 is enabled to drive the rollers to rotate, the linear speeds are kept consistent, transmission is stable, slipping is avoided, and automatic film pasting is achieved.

The frame 1 is rotatably provided with a guide roller 15 through a bearing, the guide roller 15 is close to and parallel to the compression roller 12 and is used for conveying the end part of the polishing skin 4 to the polishing disc 3; the frame 1 is provided with a guide bent plate 16 for guiding the polishing skin 4 between the pressing roller 12 and the guide roller 15, and for feeding the polishing skin 4 between the pressing roller 12 and the guide roller 15. The upper surface of the compression roller 12 is covered with resistance increasing leather 121, the resistance increasing leather 121 is made of rubber and used for increasing friction force and preventing slipping, a mark post 17 used for positioning the sliding table 111 is arranged on the rack 1, an operator can conveniently position the sliding table 111, and the end part of the polishing leather 4 is aligned to the polishing disc 3.

The present embodiment is only for explaining the present invention, and it is not limited to the present invention, and those skilled in the art can make modifications without inventive contribution to the present embodiment as required after reading the present specification, but all of them are protected by patent law within the scope of the claims of the present invention.

Claims

1. The utility model provides a paste buffing device, includes the frame, its characterized in that: the frame is provided with the slip table that is used for placing the polishing dish along the horizontal direction slip, the frame is located the slip table top and rotates and is provided with the compression roller parallel in order to be used for pressing the polishing skin on the polishing dish with the slip table, the frame is located the compression roller top and is provided with two feed rolls parallel in order to be used for making the polishing skin pass, the frame is located two feed roll below parallel arrangement and has the separation roller, supply the backing paper piece to pass between separation roller and the feed roll, be provided with in the frame and be connected in order to be used for driving pressure roller pivoted motor with the compression roller.

2. The skin attaching and polishing device according to claim 1, wherein: the rotating direction of the compression roller is consistent with that of the uppermost feeding roller, the two feeding rollers are opposite in rotating direction, and the rotating directions of the separation roller and the compression roller are consistent.

3. The skin attaching and polishing device according to claim 2, wherein: the compression roller is connected with the separation roller through a transmission belt, and the separation roller is meshed with the two feeding rollers through gears in sequence.

4. A device for applying buffing according to claim 3, wherein: the linear speeds of the compression roller and the feeding roller of the separation roller are consistent.

5. The skin attaching and polishing device according to claim 1, wherein: the frame is rotatably provided with a guide roller which is close to the pressure roller and used for sending the polishing leather to the polishing disk.

6. The device for sticking and polishing leather according to claim 5, wherein: the frame is provided with a direction bent plate used for guiding the polishing leather to a position between the compression roller and the guide roller.

7. The skin attaching and polishing device according to claim 1, wherein: the upper surface of the compression roller is covered with resistance increasing leather.

8. The skin attaching and polishing device according to claim 1, wherein: and a marker post for positioning the sliding table is arranged on the frame.