CN212170043U

CN212170043U - Chemical mechanical polishing retaining ring

Info

Publication number: CN212170043U
Application number: CN202020589190.6U
Authority: CN
Inventors: 相红旗; 姚力军; 潘杰
Original assignee: Ningbo Yingwei Taike New Material Co ltd
Current assignee: Ningbo Yingwei Taike New Material Co ltd
Priority date: 2020-04-20
Filing date: 2020-04-20
Publication date: 2020-12-18
Anticipated expiration: 2030-04-20

Abstract

The utility model relates to a chemical machinery retaining ring's technical field specifically is chemical machinery polishing retaining ring for metal ring and plastic ring bond together through the adhesive among the solution prior art, thereby leaded to the adhesive probably excessive, dropped out slag form granule after the adhesive is broken, and made metal ring and retaining ring joint strength than weak problem. The utility model discloses a becket and plastics ring, the becket includes installation face and faying face, it has the slot to open on the faying face, be equipped with the flange through moulding plastics and slot joint on the plastics ring. In the utility model, the flange of the plastic ring is directly integrated with the groove in the injection molding process, thereby greatly improving the bonding strength between the metal ring and the plastic ring; the metal ring and the plastic ring do not need to be bonded together through an adhesive, so that the problems that the adhesive is likely to overflow and the adhesive falls off slag-shaped particles after being crushed are solved.

Description

Chemical mechanical polishing retaining ring

Technical Field

The utility model relates to a chemical mechanical polishing retaining ring's technical field, more specifically relates to chemical mechanical polishing retaining ring.

Background

One of the key processes in the fabrication of semiconductor chips is chemical mechanical polishing, also known as chemical mechanical planarization. In the chemical mechanical polishing process, the silicon wafer is pressed on the surface of the polishing pad with a certain pressure in a face-down mode, the silicon wafer and the polishing pad do relative rotation movement, and meanwhile, polishing liquid is introduced to conduct chemical mechanical polishing. The silicon wafer can be held in its position for rotation and movement relative to the polishing pad without being carried out of its position by centrifugal forces generated by the rotation and by frictional forces of the relative movement, which is achieved by the action of a retaining ring surrounding the silicon wafer.

The prior art cmp retaining ring includes: a stainless steel metal ring with a high modulus of rigidity and a plastic ring made of a relatively wear-resistant and chemically resistant material. The plastic ring is a plastic ring which is obtained by transversely cutting a plastic pipe material one by one. The two rings of metal ring and plastic ring are laminated and fixed together by adhesive, and the surface of the plastic ring is generally adhered after additional process treatment to enhance the adhesion strength.

The metal ring and the plastic ring are bonded together by using the adhesive, the adhesive overflows, the adhesive is broken and falls off slag-shaped particles in the polishing process, and the bonding strength between the metal ring and the plastic ring is weak. Therefore, there is a need for a retaining ring and a method of manufacturing the same that reduces the risk of adhesive overflow and breakage and improves the strength of the connection between the metal ring and the plastic ring.

SUMMERY OF THE UTILITY MODEL

Based on above problem, the utility model provides a chemical mechanical polishing retaining ring for metal ring and plastic ring bond together through the adhesive among the solution prior art, thereby have leaded to the adhesive probably excessive, and the broken back of adhesive drops the form granule of slagging tap, and makes metal ring and retaining ring joint strength than weak problem.

The utility model discloses a realize above-mentioned purpose and specifically adopt following technical scheme:

the retaining ring for chemical mechanical polishing comprises a metal ring and a plastic ring, wherein the metal ring comprises a mounting surface and a bonding surface, a groove is formed in the bonding surface, and a flange clamped with the groove through injection molding is arranged on the plastic ring.

Preferably, the number of the grooves is at least one.

Preferably, a groove wall is formed between two adjacent grooves, and a gap is formed on the groove wall.

Preferably, the gap communicates two adjacent grooves.

In a preferable mode, the cross section of the gap is square or rectangular or trapezoidal or inverted T-shaped.

Preferably, a concave structure is formed in the groove.

Preferably, the recessed structure is a threaded hole or a smooth hole.

In a preferred mode, the cross-sectional shape of the groove is a trapezoid or an inverted T shape.

The utility model has the advantages that:

(1) in the utility model, the groove is arranged on the joint surface of the metal ring, the metal ring and the retaining ring are injected together, and the flange of the plastic ring is directly integrated with the groove in the injection molding process, so that the joint strength between the metal ring and the plastic ring can be greatly improved; the metal ring and the plastic ring do not need to be bonded together through an adhesive, so that the problems that the adhesive can overflow and the slag-shaped particles fall after the adhesive is crushed do not exist.

(2) The utility model discloses the quantity of well slot is at least one, and a plurality of slots can make the intensity of connecting between becket and plastic ring bigger.

(3) In the utility model, a groove wall is formed between two adjacent grooves, and the groove wall is provided with a gap; the gap is communicated with two adjacent grooves. When the groove is arranged along the circumferential direction of the joint surface, the injection molding material filled opening can form a connecting structure along the radial direction of the metal ring after being cooled, the structure is clamped by metal around the opening, and the connecting strength between the metal ring and the plastic ring can be greatly improved under the two conditions; when the groove is arranged along the radial direction of the joint surface, the injection molding material filled with the notch can form a connecting structure along the circumferential direction of the metal ring after being cooled, and the structure is clamped by metal around the notch.

(4) The utility model discloses open threaded hole or smooth hole in the well ditch inslot, the area of threaded hole or smooth hole pithead can be more than, equals or is less than the area at the bottom of the hole, and during injection molding material also can get into threaded hole or smooth hole when moulding plastics, the injection molding material directly becomes integrative with the becket in threaded hole or smooth hole after the cooling, the joint strength between increase becket and plastics ring that like this can be further.

(5) The utility model discloses in simplified the manufacturing process of production retaining ring to reduce the manufacturing cost of retaining ring, improved the production efficiency of retaining ring.

Drawings

FIG. 1 is a schematic front sectional view of the present invention;

FIG. 2 is a schematic top view of the present invention;

FIG. 3 is a schematic view of the top view of the metal ring of the present invention with two grooves on the bonding surface;

FIG. 4 is a schematic view of a partial sectional structure of a metal ring when the cross-sectional shape of the groove of the present invention is trapezoidal;

FIG. 5 is a schematic view of a partial sectional structure of a metal ring when the cross-sectional shape of the groove of the present invention is an inverted T shape;

FIG. 6 is a schematic view of the metal ring with a notch on the wall of the groove according to the present invention;

FIG. 7 is a schematic cross-sectional view taken along line A-A of FIG. 6 according to the present invention;

fig. 8 is the utility model discloses when the shape of opening is trapezoidal the local sectional structure sketch of opening department on the becket slot wall:

FIG. 9 is a schematic view of a sectional view of the notch of the metal ring groove wall when the notch of the present invention is shaped like an inverted T;

FIG. 10 is a schematic top view of a metal ring with a recess in the groove of the present invention;

fig. 11 is a schematic cross-sectional view taken along line B-B of fig. 10 in accordance with the present invention;

fig. 12 is a schematic cross-sectional view at C-C of fig. 10 according to the present invention;

FIG. 13 is a schematic view of the top view of the metal ring with one groove and a concave structure formed in the groove according to the present invention;

fig. 14 is a schematic view of the sectional structure at D-D in fig. 13 according to the present invention:

reference numerals: 1 metal ring, 101 groove, 102 notch, 103 concave structure, 104 groove wall, 2 plastic ring, 201 flange, 202 chute.

Detailed Description

For a better understanding of the present invention, the present invention will be described in further detail with reference to the accompanying drawings and the following embodiments.

Example 1:

as shown in fig. 1-3, the retaining ring for chemical mechanical polishing comprises a metal ring 1 and a plastic ring 2, wherein the metal ring 1 comprises a mounting surface and a bonding surface, the bonding surface is provided with a groove 101, the plastic ring 2 is provided with a flange 201 clamped with the groove 101 by injection molding, and the groove 101 is preferably arranged along the circumferential direction of the bonding surface.

The working principle is as follows: when manufacturing the retaining ring, firstly, the connecting groove component is arranged on the combining surface of the metal ring 1, then the injection molding material is injected into the groove 101 in the injection molding mode, the injection molding material is preferably polyphenylene sulfide resin material, so that the injection molding material directly forms the plastic ring 2 after cooling, and the portion of the plastic ring 2 in the groove 101 forms a flange 201, so that the flange 201 is injection molded directly in one piece with the groove 101, thereby the metal ring 1 and the plastic ring 2 are directly formed into a whole, thus directly avoiding the bonding of the metal ring 1 and the plastic ring 2 by adhesive, on one hand, the strength between the metal ring 1 and the plastic ring 2 is better, on the other hand, the problems that the adhesive is likely to overflow and the adhesive falls off slag-shaped particles after being crushed can not exist, it is therefore of great positive importance to make the groove 101 in the joint surface of the metal ring 1 and to join the plastic ring 2 and the metal ring 1 together by injection moulding.

Example 2:

as shown in fig. 4, on the basis of the above embodiment 1, the cross-sectional shape of the groove 101 is trapezoidal, and the trapezoidal groove 101 is easy to machine.

Example 3:

as shown in fig. 5, in the case of embodiment 1, the cross-sectional shape of the groove 101 is an inverted T shape, and when the injection molding material is injected into the groove of the inverted T-shaped groove 101, the strength of the connection between the metal ring 1 and the plastic ring 2 can be improved.

Example 4:

as shown in fig. 6 to 7, on the basis of the above embodiment 1, the number of the grooves 101 is plural, a wall of the groove 101 is formed between two adjacent grooves 101, a notch 102 is opened on the wall of the groove 101, and the notch 102 communicates with two adjacent grooves 101.

When the groove 101 is arranged along the radial direction of the joint surface, the injection molding material filling notch 102 can form a connecting structure along the circumferential direction of the metal ring 1 after being cooled, and the structure is tightly clamped by metal around the notch 102; when the groove 101 is arranged along the circumferential direction of the joint surface, the injection molding material filling notch 102 can form a connecting structure along the radial direction of the metal ring 1 after being cooled, the structure is tightly clamped by metal around the notch 102, and the connecting strength between the metal ring 1 and the plastic ring 2 can be greatly improved under the two conditions.

Example 5:

as shown in figure 8, on the basis of embodiment 4, the cross section of the gap 102 is trapezoidal, and the trapezoidal gap 102 is convenient to process.

Example 6:

as shown in fig. 9, in the embodiment 4, the cross-sectional shape of the notch 102 is an inverted T shape, and when the injection molding material is injected into the groove of the inverted T-shaped notch 102, the strength of the connection between the metal ring 1 and the plastic ring 2 can be further improved.

Example 7:

as shown in fig. 10 to 12, on the basis of the above embodiment 4, the bottom of the groove 101 is opened with a concave structure 103, and the concave structure 103 is a threaded hole or a smooth hole.

The area of the screw hole or the smooth hole pithead can be larger than, equal to or smaller than the area of the pithead bottom, the injection molding material can also enter the screw hole or the smooth hole 103 during injection molding, and the injection molding material is directly integrated with the metal ring 1 in the screw hole or the smooth hole 103 after cooling, so that the connection strength between the metal ring 1 and the plastic ring 2 can be further increased.

Example 8:

as shown in fig. 13 to 14, on the basis of the above embodiment 1, the number of the grooves 101 is one, and the recessed structure 103 is formed at the bottom of the groove 101, and the recessed structure 103 is a threaded hole or a smooth hole.

The groove 101 is preferably formed concentrically with the outer edge of the metal ring 1, so that the groove 101 can be easily formed, and the length of the groove 101 can be increased to facilitate the combination of the metal ring 1 and the plastic ring 2. Meanwhile, under the condition of reducing the number of the grooves 101, the bottom of the groove 101 is provided with a threaded hole or a smooth hole, and the injection molding material can fill the grooves 101 and the concave structures 103, so that the bonding strength of the metal ring 1 and the plastic 2 can not be influenced under the condition of reducing the processing difficulty.

The embodiment of the present invention is the above. The specific parameters in the above embodiments and examples are only for the purpose of clearly showing the verification process of the present invention, and are not used to limit the protection scope of the present invention, which is still subject to the claims, and all the equivalent structural changes made by using the contents of the specification and drawings of the present invention should be included in the protection scope of the present invention.

Claims

1. Chemical mechanical polishing retaining ring, including metal ring (1) and plastics ring (2), its characterized in that: the metal ring (1) comprises a mounting surface and a bonding surface, a groove (101) is formed in the bonding surface, and a flange (201) which is clamped with the groove (101) through injection molding is arranged on the plastic ring (2).

2. The chemical mechanical polishing retaining ring of claim 1, wherein: the number of the grooves (101) is at least one.

3. The chemical mechanical polishing retaining ring of claim 2, wherein: a groove wall (104) is formed between every two adjacent grooves (101), and a notch (102) is formed in each groove wall (104).

4. The chemical mechanical polishing retaining ring of claim 3, wherein: the gap (102) is communicated with two adjacent grooves (101).

5. The chemical mechanical polishing retaining ring of claim 4, wherein: the cross section of the gap (102) is square or rectangular or trapezoidal or inverted T-shaped.

6. The chemical mechanical polishing retaining ring of any one of claims 2-4, wherein: and a concave structure (103) is arranged in the groove (101).

7. The chemical mechanical polishing retaining ring of claim 6, wherein: the concave structure (103) is a threaded hole or a smooth hole.

8. The chemical mechanical polishing retaining ring of claim 2, wherein: the cross section of the groove (101) is trapezoidal or inverted T-shaped.