CN212167471U

CN212167471U - Grating waveguide microfluid chip

Info

Publication number: CN212167471U
Application number: CN202020115577.8U
Authority: CN
Inventors: 陈昌; 刘博�; 王靖
Original assignee: Shanghai Industrial Utechnology Research Institute
Current assignee: Shanghai Jinguan Technology Co ltd
Priority date: 2020-01-17
Filing date: 2020-01-17
Publication date: 2020-12-18
Anticipated expiration: 2030-01-17

Abstract

The utility model provides a grating waveguide microfluid chip, including grating waveguide and miniflow channel, the grating waveguide includes the exit grating, and the exit grating is located miniflow channel below and is used for upwards leading-in miniflow channel along the vertical direction with light in, still includes: the lower cladding, the waveguide layer, the protective layer and the upper cladding are arranged from bottom to top; the protective layer is used for covering the grating waveguide and protecting the emergent grating; the micro-channel penetrates through the upper cladding to expose the protective layer; the lower cladding and the upper cladding are both made of high polymer materials with the thickness of 15-30 mu m. Has the advantages that: the method comprises the steps of depositing a silicon nitride film with adjustable optical performance on a flexible substrate, expanding the application range and form of SiN optical device materials, realizing the traditional optical system through integrated optics or an on-chip optical device, reducing the size of the traditional table-type large-scale optical system to the size of a chip, ensuring excellent analysis performance, realizing a high-throughput chip-level optical detection and analysis integrated system of a biological sample under the micro-nano scale, and greatly reducing the system cost.

Description

Grating waveguide microfluid chip

Technical Field

The utility model relates to a grating waveguide microfluid chip especially relates to a grating waveguide microfluid biological detection chip.

Background

In modern biochemical analysis procedures, high-throughput detection devices have been widely used. Most of these devices use biochips based on microfluidic technology or microwell arrays, loaded in high performance optical systems, to perform analysis of biological samples of different sizes, such as nucleic acids, proteins, viruses, bacteria, cells, etc. The design of these optical systems is usually based on complex geometric optics, which is bulky, costly, requires optical alignment, and is costly to maintain.

In the precise medical age, miniaturized, high-performance, low-cost and mobile integrated analysis systems are of great concern. In particular, the lab on chip concept has advanced a lot of progress in manipulating a biological sample based on a microfluidic technology after decades of development, but a real lab on chip system still lacks an integrated system for chip-level on-chip optical detection and analysis of a high-throughput biological sample on a micro-nano scale.

Meanwhile, materials such as optical silicon nitride films and the like are deposited on the high polymer film, the integrated optical device taking SiN as the waveguide is separated from the silicon or glass substrate, and the polymer has certain ductility, so that the application range of the integrated optical device taking SiN and the like as the waveguide is greatly enlarged.

The lower the deposition temperature is, the better the deposition temperature is, in order to not destroy the molecular structure of the polymer, when the film is deposited on the high molecular polymer, the growth temperature of the SiN film which is the mainstream at present is about 400 ℃, and is still too high.

SUMMERY OF THE UTILITY MODEL

The device aims to solve a series of new requirements of miniaturization, mobility, integration and the like of the modern biochemical analysis instrument which is large in size and high in cost and meets the requirements of the precise medical era. The utility model discloses an integrated circuit volume production technology produces this kind of chip level optical detection and analytic system, and the function with traditional optical system is realized through integrated optics or on-chip optical device, not only can narrow down traditional desk-top even large-scale optical system to the chip size, but also guarantees equal more outstanding analytical performance even, realizes receiving the biological sample's under the yardstick high flux chip level optical detection and analysis integrated system a little, reduces system's cost by a wide margin.

The utility model provides a grating waveguide microfluid chip, include: the grating waveguide and the micro-channel are characterized in that the grating waveguide comprises an emergent grating which is positioned below the micro-channel and is used for guiding light into the micro-channel upwards along the vertical direction,

further comprising: the lower cladding, the waveguide layer, the protective layer and the upper cladding are arranged from bottom to top in sequence; the waveguide layer is made of silicon nitride material and is used for forming the grating waveguide; the protective layer is made of silicon dioxide materials and is used for covering the grating waveguide and protecting the emergent grating;

the micro-channel penetrates through the upper cladding to expose the protective layer;

the lower cladding is made of a high polymer material with the thickness of 15-30 mu m, the upper cladding is made of a high polymer material with the thickness of 15-30 mu m, and the width of the micro-channel is 10-100 mu m.

Preferably, several of the grating waveguides are parallel to each other to guide light into the microchannel, and the width of the grating waveguides is 300-600 nm.

Preferably, the refractive index of the waveguide layer is 1.75-2.2.

Preferably, the waveguide layer has a thickness of 150nm to 1000 nm.

Preferably, the micro-channel optical waveguide further comprises an incident grating made of silicon nitride material to form a coupling grating waveguide with the grating waveguide, and the light above the upper cladding layer is guided into the grating waveguide until being guided into the micro-channel upwards along the vertical direction; the protective layer covers and protects the incident grating.

Preferably, a plurality of said coupling grating waveguides are included, parallel to each other.

Preferably, the thickness of the waveguide layer is 150nm-1000nm, and the width of the coupling grating waveguide is 300-600 nm.

Preferably, the optical fiber is optically connected with the grating waveguide.

Preferably, the high molecular polymer material is SU-8 resin, polyimide, polydimethylsilane, polyethylene or benzocyclobutene.

The utility model provides a grating waveguide microfluid chip has beneficial effect: the silicon nitride film with adjustable optical performance is deposited on the flexible substrate at low temperature, the application range and the form of the SiN optical device material are expanded, the functions of a traditional optical system are realized by integrating optical devices or on-chip optical devices, the traditional desktop or even large-scale optical system is reduced to the chip size, the equal or even more excellent analysis performance is ensured, the high-throughput chip-level optical detection and analysis integrated system of a biological sample under the micro-nano scale is realized, and the system cost is greatly reduced.

Drawings

FIGS. 1 a-e show the manufacturing process of the grating waveguide microfluid chip of the present invention;

FIGS. 2 a-e show the manufacturing process of the coupled grating waveguide microfluidic chip of the present invention;

fig. 3 is a top view of fig. 1e or 2 e.

Detailed Description

The following detailed description of the embodiments of the present invention will be made with reference to the accompanying drawings.

In the drawings, the dimensional ratios of layers and regions are not actual ratios for the convenience of description. When a layer (or film) is referred to as being "on" another layer or substrate, it can be directly on the other layer or substrate, or intervening layers may also be present. In addition, when a layer is referred to as being "under" another layer, it can be directly under, and one or more intervening layers may also be present. In addition, when a layer is referred to as being between two layers, it can be the only layer between the two layers, or one or more intervening layers may also be present. Like reference numerals refer to like elements throughout. In addition, when two components are referred to as being "connected," they include physical connections, including, but not limited to, electrical connections, contact connections, and wireless signal connections, unless the specification expressly dictates otherwise.

The patent of the utility model provides a vertical grating waveguide and microfluid passageway integration module scheme, construct the piece on-chip optical detection chip of the chip level of the high flux biological sample under the micro-nano yardstick fast. The vertical grating waveguide is a grating waveguide for guiding light upward into the microchannel in a vertical direction.

The utility model provides a grating waveguide microfluid chip, as shown in figure 1a ~ 3, include: grating waveguides 1311, 1312 … 131n and microchannel 2, grating waveguide 1311, 1312 … 131n include emergent grating 1310, emergent grating 1310 is located microchannel 2 below is used for upwards leading into light along the vertical direction in microchannel 2, for different complicated integrated structure provide new design and thinking, can design the emergent grating of different emergent directions, increased the flexibility of detection means, it should be noted that, above "upwards light along the vertical direction" can be strictly vertical upwards, also can be the slant upwards, the utility model discloses do not do the restriction here.

Further comprising: the grating waveguide 1311 comprises a lower cladding 141, a waveguide layer 13, a protective layer 12 and an upper cladding 142 which are arranged from bottom to top in sequence, wherein the waveguide layer 13 is made of silicon nitride materials, and the waveguide layer 13 is used for forming the grating waveguide 1311; the protective layer 12 is made of silicon dioxide, has optical transparency, and is used for covering the grating waveguide 1311 and protecting the exit grating 1310;

the micro flow channel 2 penetrates through the upper cladding 142 to expose the protective layer 12;

the lower cladding is a high polymer material with the thickness of 15-30 mu m, the upper cladding is a high polymer material with the thickness of 15-30 mu m, and the width of the micro-channel 2 is 10-100 mu m; the traditional desktop or even large-scale optical system is reduced to the size of a chip, the equal or even more excellent analysis performance is ensured, the high-flux chip for detecting the biological sample under the micro-nano scale is realized, and the system cost is greatly reduced.

Wherein the light source direction is different according to the introduced grating waveguide set 131, such as: fig. 1e illustrates the introduction of the light source from an optical fiber (not shown) at the left end of the grating waveguide set 131, and fig. 2e illustrates the introduction of the light source from above the upper cladding 142, respectively.

Fig. 1e, the present grating waveguide microfluidic chip with light source introduced from the optical fiber (not shown) at the left end of the grating waveguide set 131, is described as follows:

as shown in fig. 1e and 3, the grating waveguide set 131 on one microfluid includes several, e.g. n, grating waveguides 1311, 1312 … 131n parallel to each other to guide light vertically upwards into the microchannel 2, in the actual detection, for biomolecules with different labels in the microchannel 2, the grating waveguides 1311, 1312 … 131n can guide light with wavelengths λ 1, λ 2 … λ n vertically upwards into the microchannel 2, respectively, and the labeled biomolecules 21 with different labels excited by light with different wavelengths can simultaneously identify these biomolecules, while the non-excited biomolecules 20 in the excitation light field guided by the grating waveguides 1311, 1312 … 131n will not be identified, and the non-excited biomolecules 20 are normal biomolecules without labels or biomolecules that are labeled but outside the light field but not excited; wherein, as shown in FIG. 3, the width of the grating waveguides 1311, 1312 … 131n is 300-600 nm.

As shown in fig. 3, the waveguide layer 13 has a thickness of 150nm-1000nm, i.e. the thickness of the horizontal portion of the grating waveguide 1311, 1312 … 131n in fig. 1e, 3 is 150nm-1000 nm.

The optical fiber is optically connected with the grating waveguide set 131, and further optically connected with the grating waveguides 1311, 1312 … 131n in the grating waveguide set 131.

Fig. 2e, the present grating waveguide microfluidic chip with light source introduced from above the upper cladding 142, is described as follows:

as shown in fig. 2e, an incident grating 1310' of silicon nitride material is further included to form a coupling grating waveguide with the grating waveguides 1311, 1312 … 131n, and the light above the upper cladding 142 is guided into the grating waveguides 1311, 1312 … 131n until being guided upward in the vertical direction into the micro channel 2, wherein the upper cladding 142 is a light-transmissive layer; the protective layer 12 covers and protects the incident grating 1310'.

As shown in fig. 2e and fig. 3, the grating waveguide set 131 on one microfluidic includes several, e.g. n, coupling grating waveguides (including grating waveguides 1311, 1312 … 131n) parallel to each other to guide light into the microchannel 2 in the vertical direction, in the actual detection, for biomolecules with different labels in the microchannel 2, the coupling grating waveguides can guide light with wavelengths λ 1, λ 2 … λ n into the microchannel 2 in the vertical direction, and the excitation of labeled biomolecules 21 with different wavelengths can simultaneously identify these biomolecules, while the non-excited biomolecules 20 in the excitation light field guided by the coupling grating waveguides will not be identified, and the non-excited biomolecules 20 are normal biomolecules without labels or biomolecules that are labeled but outside the light field but not excited; wherein the width of the coupled grating waveguide (including grating waveguides 1311, 1312 … 131n) is 300-600nm as shown in fig. 3, wherein the thickness of the waveguide layer 13 is 150-1000 nm as shown in fig. 2e, i.e. the thickness of the horizontal part of the grating waveguides 1311, 1312 … 131n in fig. 2e, 3 is 150-1000 nm.

In the present invention, the polymer material is SU-8 resin, polyimide, polydimethylsilane, polyethylene or benzocyclobutene; preferably, the upper cladding layer 142 and the lower cladding layer 141 are both flexible substrate films.

In the present invention, the silicon nitride waveguide layer 13 is a silicon nitride thin film layer having a thickness of 150nm to 1000nm formed at a low deposition temperature of 25 to 150 ℃; the refractive index of the silicon nitride film is 1.75-2.2. The silicon nitride film may be a film having a uniform refractive index, or may be a film having a non-uniform refractive index, such as a silicon nitride film having a layered refractive index structure.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.

Claims

1. A grating waveguide microfluidic chip comprising: the grating waveguide and the micro-channel are characterized in that the grating waveguide comprises an emergent grating which is positioned below the micro-channel and is used for guiding light into the micro-channel upwards along the vertical direction,

2. The chip of claim 1, wherein a number of the grating waveguides are parallel to each other to guide light into the microchannel, and the width of the grating waveguides is 300-600 nm.

3. The chip of claim 1, wherein the index of refraction of the waveguide layer is 1.75-2.2.

4. The chip of any one of claims 1 to 3, wherein the waveguide layer has a thickness of 150nm to 1000 nm.

5. The chip of claim 1, further comprising an incident grating of silicon nitride material to form a coupled grating waveguide with the grating waveguide, guiding light above the upper cladding layer into the grating waveguide until it is directed upward in a vertical direction into the microchannel; the protective layer covers and protects the incident grating.

6. The chip of claim 5, comprising a plurality of said coupling grating waveguides parallel to each other.

7. The chip of claim 5, wherein the waveguide layer has a thickness of 150nm to 1000nm and the width of the coupled grating waveguide is 300 to 600 nm.

8. The chip of claim 1, further comprising an optical fiber optically connected to the grating waveguide.

9. The chip of claim 1, wherein the polymeric material is SU-8 resin, polyimide, polydimethylsilane, polyethylene, or benzocyclobutene.