CN212134528U - Semiconductor seed crystal orientation measuring tool - Google Patents
Semiconductor seed crystal orientation measuring tool Download PDFInfo
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- CN212134528U CN212134528U CN202020598940.6U CN202020598940U CN212134528U CN 212134528 U CN212134528 U CN 212134528U CN 202020598940 U CN202020598940 U CN 202020598940U CN 212134528 U CN212134528 U CN 212134528U
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- seed crystal
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Abstract
A semiconductor seed crystal orientation measuring tool comprises an upper cover body and a lower cover body, wherein the upper cover body is hinged with the lower cover body, an upper reference end surface is arranged at one end of the upper cover body, an upper seed crystal clamping groove is formed in the upper cover body, a lower reference end surface is arranged at one end of the lower cover body, the lower reference end surface and the upper reference end surface are positioned at the same side, and a lower seed crystal clamping groove is formed in the lower cover body at a position corresponding to the upper seed crystal clamping groove; the seed crystal clamping device fixes the seed crystal in the upper seed crystal clamping groove and the lower seed crystal clamping groove, so that the seed crystal can be fixed, the light source entering point is fixed when the seed crystal is irradiated by the light source, and the repeatability and stability are improved; the seed crystal is placed in the upper seed crystal clamping groove and the lower seed crystal clamping groove and is fixed and placed well, personnel can measure without contacting, and radiation damage to the personnel by rays can not be caused.
Description
Technical Field
The utility model relates to a semiconductor crystal orientation measures technical field, especially relates to a semiconductor seed crystal orientation measures frock.
Background
Before the silicon single crystal rod is pulled, seed crystals are needed to be seeded, the deviation of the crystal orientation of the seed crystals directly influences the deviation of the crystal orientation of a crystal rod, and the deviation of the crystal orientation of the crystal rod changes, so that more defects in post-processing, such as end surface pieces, splinters, excessive TTV (time to live) and excessive warp, can be caused. However, a general crystal pulling enterprise does not purchase special seed crystal processing equipment, so that special equipment for seed crystal orientation inspection does not exist, and in order to reduce the equipment cost, other types of X-ray equipment can be used for inspecting the crystal orientation deviation angle of the seed crystal; the existing equipment is non-special equipment, and has the following problems when in use: 1. the existing equipment has no reference surface for seed crystal measurement; 2. the light source incidence point of the seed crystal cannot be fixed, so that the measurement repeatability and reproducibility change are caused; 3. the amount of manual hand-held righting can cause injury to personnel.
Disclosure of Invention
In view of the above, it is necessary to provide a semiconductor seed crystal orientation measuring tool.
A semiconductor seed crystal orientation measuring tool comprises an upper cover body and a lower cover body, wherein the upper cover body is arranged above the lower cover body, the upper cover body is hinged with the lower cover body, one end of the upper cover body is provided with an upper reference end face, an upper seed crystal clamping groove is formed in the upper cover body, one end of the upper seed crystal clamping groove extends to one end, far away from the upper reference face, of the upper cover body along the upper reference end face, the seed crystal clamping groove on the upper part does not penetrate through the upper part cover body, one end of the lower part cover body is provided with a lower reference end face, the lower reference end face and the upper reference end face are positioned on the same side, and the lower reference end face coincides with the upper reference end face, a lower seed crystal clamping groove is formed in the position, corresponding to the upper seed crystal clamping groove, of the lower cover body, the lower seed crystal clamping groove extends towards one end, far away from the lower reference end face, of the lower cover body along the lower reference end face, and the lower seed crystal clamping groove does not penetrate through the lower cover body.
Preferably, the upper seed crystal clamping groove is arranged along the axial direction of the upper cover body, the lower seed crystal clamping groove is arranged along the axial direction of the lower cover body, and the upper seed crystal clamping groove is opposite to the lower seed crystal clamping groove.
Preferably, a sealing flange is fixedly arranged on the peripheral edge of the upper cover body.
Preferably, the peripheral edge of the lower cover body is provided with a concave platform, and the size of the concave platform is matched with that of the sealing convex edge, so that the upper cover body and the lower cover body are closed after the sealing convex edge clamps the concave platform.
Preferably, the upper cover body and the lower cover body are respectively provided with a material taking port, and the material taking ports are respectively and correspondingly intersected with the upper seed crystal clamping groove and the lower seed crystal clamping groove.
Preferably, a handle is fixedly arranged on the upper cover body.
Preferably, soft sponges are laid in the upper seed crystal clamping groove and the lower seed crystal clamping groove.
The utility model adopts the above technical scheme, its beneficial effect lies in: the utility model comprises an upper cover body and a lower cover body, wherein the upper cover body is arranged above the lower cover body, the upper cover body is hinged with the lower cover body, one end of the upper cover body is provided with an upper reference end surface, an upper seed crystal clamping groove is arranged inside the upper cover body, one end of the upper seed crystal clamping groove extends to one end of the upper cover body far away from the upper reference surface along the upper reference end surface, the seed crystal clamping groove on the upper part does not penetrate through the upper part cover body, one end of the lower part cover body is provided with a lower reference end face, the lower reference end face and the upper reference end face are positioned on the same side, the lower reference end face is superposed with the upper reference end face, a lower seed crystal clamping groove is formed in the lower cover body at a position corresponding to the upper seed crystal clamping groove, the lower seed crystal clamping groove extends towards one end, far away from the lower reference end face, of the lower cover body along the lower reference end face, and the lower seed crystal clamping groove does not penetrate through the lower cover body; the seed crystal clamping device fixes the seed crystal in the upper seed crystal clamping groove and the lower seed crystal clamping groove, and the reference surface of the tool is matched with the reference surface of the measuring equipment, so that the seed crystal can be fixed, the light source entering point is fixed when the seed crystal is irradiated by X rays, and the repeatability and stability are good; the seed crystal is placed in the upper seed crystal clamping groove and the lower seed crystal clamping groove and is fixed and placed well, personnel can measure without contacting, and radiation damage to the personnel by rays can not be caused.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic structural view of fig. 1 from another angle.
Fig. 3 is a schematic structural view of the present invention after the upper cover and the lower cover are closed.
In the figure: the upper cover body 01, the upper reference end surface 11, the upper seed crystal clamping groove 12, the sealing flange 13, the lower cover body 02, the lower reference end surface 21, the lower seed crystal clamping groove 22, the concave table 23, the material taking port 03 and the handle 04.
Detailed Description
Referring to fig. 1 to 3, an embodiment of the present invention provides a semiconductor seed crystal orientation measuring tool, including an upper cover 01 and a lower cover 02, where the upper cover 01 is disposed above the lower cover 02, the upper cover 01 is hinged to the lower cover 02, one end of the upper cover 01 is provided with an upper reference end surface 11, an upper seed crystal slot 12 is disposed inside the upper cover 01, one end of the upper seed crystal slot 12 extends along the upper reference end surface 11 toward one end of the upper cover 01 away from the upper reference end surface, the upper seed crystal slot 12 does not penetrate through the upper cover 01, one end of the lower cover 02 is provided with a lower reference end surface 21, the lower reference end surface 21 and the upper reference end surface 11 are located at the same side, the lower reference end surface 21 coincides with the upper reference end surface 11, a lower seed crystal slot 22 is disposed on the lower cover 02 at a position corresponding to the upper seed crystal slot 12, the lower seed crystal chuck groove 22 extends along the lower reference end surface 21 toward an end of the lower cover 02 away from the lower reference end surface 21, and the lower seed crystal chuck groove 22 does not penetrate through the lower cover 02. When detecting, place the seed crystal in lower part seed crystal draw-in groove 22, with upper portion lid 01 and lower part lid 02 closure, the seed crystal is fixed at upper portion seed crystal draw-in groove 12, lower part seed crystal draw-in groove 22, the one end of seed crystal is just in time in the one end of upper portion reference terminal surface 11 and lower part reference terminal surface 21 this moment, align upper portion reference terminal surface 11 and lower part reference terminal surface 21 with the ray detector laminating, guarantee that the incident point of light is fixed unchangeable, shine the terminal surface of seed crystal through the ray detector to can detect the seed crystal.
The upper seed crystal clamping groove 12 is arranged along the axial direction of the upper cover body 01, the lower seed crystal clamping groove 22 is arranged along the axial direction of the lower cover body 02, and the upper seed crystal clamping groove 12 is opposite to the lower seed crystal clamping groove 22.
The peripheral edge of the upper cover 01 is fixedly provided with a sealing flange 13. The peripheral edge of lower part lid 02 is provided with concave station 23, and the size of concave station 23 and the size phase-match of sealed chimb 13 can make sealed chimb 13 block concave station 23 after upper portion lid 01 and lower part lid 02 are closed.
All be provided with on upper portion lid 01, the lower part lid 02 and get material mouth 03, get material mouth 03 respectively correspond intersect with upper portion seed crystal draw-in groove 12, lower part seed crystal draw-in groove 22, when we lay and take the seed crystal, can make things convenient for the user to get the side seed crystal more, in addition, through getting material mouth 03 that sets up, we can adjust the direction of seed crystal at any time when detecting, make the seed crystal can just right with the light source of radiation detector.
The upper cover body 01 is fixedly provided with a handle 04 which is used for a user to open the upper cover body 01 when the user is convenient.
Upper portion seed crystal draw-in groove 12, the software sponge has been laid to lower part seed crystal draw-in groove 22's inside, upper portion lid 01 and the wearing and tearing of lower part lid 02 to the seed crystal in the security protection seed crystal can be reduced through the software sponge that sets up, play the effect of protection, and when fixing the seed crystal, more soft software sponge is owing to return production deformation when pressing, in upper portion lid 01 and lower part lid 02 closed, can be with the firm centre gripping of seed crystal at upper portion seed crystal draw-in groove 12, in lower part seed crystal draw-in groove 22, make the fixed more firm of seed crystal, be favorable to the orientation detection to the seed crystal more.
While the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention.
Claims (7)
1. The utility model provides a semiconductor seed crystal orientation measurement frock which characterized in that: including the upper portion lid, the lower part lid, the upper portion lid sets up the top at the lower part lid, the upper portion lid is articulated with the lower part lid, the one end of upper portion lid is provided with upper portion reference terminal surface, upper portion seed crystal draw-in groove has been seted up to the inside of upper portion lid, the one end of upper portion seed crystal draw-in groove extends to the one end that the upper portion lid kept away from the upper portion reference surface along the upper portion reference terminal surface, and the upper portion seed crystal draw-in groove does not run through the upper portion lid, the one end of lower part lid is provided with the lower part reference terminal surface, lower part reference terminal surface is in the homonymy with the upper portion reference terminal surface, and lower part reference terminal surface and upper portion reference terminal surface coincidence, lower part seed crystal draw-in groove has been seted up with.
2. The semiconductor seed crystal orientation measuring tool of claim 1, characterized in that: the upper seed crystal clamping groove is arranged along the axial direction of the upper cover body, the lower seed crystal clamping groove is arranged along the axial direction of the lower cover body, and the upper seed crystal clamping groove is opposite to the lower seed crystal clamping groove.
3. The semiconductor seed crystal orientation measuring tool of claim 1, characterized in that: and a sealing convex edge is fixedly arranged at the peripheral edge of the upper cover body.
4. The semiconductor seed crystal orientation measuring tool of claim 3, characterized in that: the periphery of the lower cover body is provided with concave platforms, and the size of the concave platforms is matched with that of the sealing convex edges, so that the upper cover body and the lower cover body are closed after the sealing convex edges clamp the concave platforms.
5. The semiconductor seed crystal orientation measuring tool of claim 1, characterized in that: and the upper cover body and the lower cover body are respectively provided with a material taking hole, and the material taking holes are respectively and correspondingly intersected with the upper seed crystal clamping groove and the lower seed crystal clamping groove.
6. The semiconductor seed crystal orientation measuring tool of claim 1, characterized in that: and a handle is fixedly arranged on the upper cover body.
7. The semiconductor seed crystal orientation measuring tool of claim 1, characterized in that: soft sponges are laid in the upper seed crystal clamping groove and the lower seed crystal clamping groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020598940.6U CN212134528U (en) | 2020-04-20 | 2020-04-20 | Semiconductor seed crystal orientation measuring tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020598940.6U CN212134528U (en) | 2020-04-20 | 2020-04-20 | Semiconductor seed crystal orientation measuring tool |
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| Publication Number | Publication Date |
|---|---|
| CN212134528U true CN212134528U (en) | 2020-12-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202020598940.6U Active CN212134528U (en) | 2020-04-20 | 2020-04-20 | Semiconductor seed crystal orientation measuring tool |
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| CN (1) | CN212134528U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113119331A (en) * | 2021-04-25 | 2021-07-16 | 宁夏中欣晶圆半导体科技有限公司 | Method for improving silicon wafer warp by improving crystal orientation deviation angle of <111> crystal bar |
-
2020
- 2020-04-20 CN CN202020598940.6U patent/CN212134528U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113119331A (en) * | 2021-04-25 | 2021-07-16 | 宁夏中欣晶圆半导体科技有限公司 | Method for improving silicon wafer warp by improving crystal orientation deviation angle of <111> crystal bar |
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