CN212109902U - Probe card detection device - Google Patents
Probe card detection device Download PDFInfo
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- CN212109902U CN212109902U CN202021001926.XU CN202021001926U CN212109902U CN 212109902 U CN212109902 U CN 212109902U CN 202021001926 U CN202021001926 U CN 202021001926U CN 212109902 U CN212109902 U CN 212109902U
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Abstract
A probe card detection device is provided with a measuring part arranged on a working platform, wherein the measuring part comprises a light source scanning unit, an image acquisition unit and a comparison unit, the light source scanning unit can measure the depth distance of a probe card to obtain 3D scanning information, the image acquisition unit is used for acquiring an image of the probe card to obtain 2D image information, the comparison unit is used for receiving the 3D scanning information and the 2D image information to identify whether the pin position of the probe card is correct, the measuring part is further provided with a marking unit used for marking the position of the wrong pin position of the probe card, a conveying part is arranged on the working platform, the conveying part is provided with a carrying platform used for carrying the probe card, and the position of the marked wrong pin position of the probe card can be conveyed to a correcting part.
Description
Technical Field
The present invention relates to a detecting device, and more particularly to a probe card detecting device capable of performing 3D scanning and 2D image detection on a probe card.
Background
The known probe card detection device is provided with a detection platform, a tool is arranged to fix a probe card to be detected on the platform, an observer is arranged on the platform and used for observing whether the positions of the pins of the probe card meet the standard or not, if the positions of some pins deviate from the standard positions, the probe card needs to be further moved to a correction device, and the defective products are corrected through the correction device, so that the deviated pins can return to the standard positions.
For example, the probe card inspection apparatus disclosed in taiwan patent No. I525327 of the present invention mainly utilizes an image capturing unit installed on an inspection platform for capturing a 2D image of a probe card, and compares the captured 2D image with a teaching file in an image comparing unit to identify whether the position of the pin of the probe card is deviated. However, the probe card detecting device disclosed in the above patent document only has the function of capturing and comparing 2D images, and actually, it is impossible to accurately measure 3D information such as depth (distance) of the probe card pins, so the detecting accuracy is not ideal, and different detecting requirements cannot be met at the same time.
Therefore, it is a main subject to be solved by the present invention to solve the above problems.
SUMMERY OF THE UTILITY MODEL
The main objective of the present invention is to provide a probe card detecting device, which can perform 3D scanning and 2D image detection on a probe card, and further mark off the foot position of the position deviation, and directly convey the marked foot position to a correction part for correction, thereby having the efficacy of effectively improving the detection accuracy and shortening the detection and correction time.
To achieve the aforesaid objective, the present invention provides a probe card detecting device, comprising:
a working platform;
a measuring part, which is arranged on the working platform and comprises a light source scanning unit, an image capturing unit and a comparison unit, wherein the light source scanning unit can carry out depth distance measurement on a probe card to obtain 3D scanning information, the image capturing unit can be used for capturing an image of the probe card to obtain 2D image information, the comparison unit is used for receiving the 3D scanning information and the 2D image information to identify the depth distance and the position of the pin of the probe card, and the measuring part further comprises a marking unit for marking the position of the wrong pin of the probe card;
the correcting part is arranged on the working platform and is provided with a working position for correcting the pin position of the probe card;
the conveying part is arranged on the working platform and is provided with a carrier for bearing the probe card, and the carrier can move relative to the working platform, so that the probe card can move between the measuring part and the correcting part and can directly convey the position of the probe card marked by the marking unit at the wrong pin position to the working position of the correcting part.
Preferably, the light source scanning unit includes a light source, an optical fiber coupler and an optical probe composed of multiple groups of optical lenses, and the light source, the optical fiber coupler and the optical probe are respectively connected in series through optical fibers to transmit light.
Preferably, the working platform is provided with a vertical column, a sliding seat capable of sliding up and down along the vertical column is slidably disposed on the vertical column, a fixed seat is fixedly connected to the sliding seat, and the light source scanning unit, the image capturing unit and the calibration part are sequentially and parallelly disposed on the fixed seat.
Preferably, the working platform is provided with an optical ruler for generating coordinates of the positions of the error pins marked by the marking unit, and the coordinates are used for enabling the conveying part to directly convey the positions of the probe card marked with the error pins to the working position of the correcting part.
The above objects and advantages of the present invention will be readily understood by the following detailed description of the selected embodiments and the accompanying drawings.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, a brief description will be given below of the drawings required to be used in the description of the embodiments or the prior art, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic perspective view of the present invention.
Fig. 2 is a block diagram of the present invention.
Fig. 3 is a schematic view of the structure of the light source scanning unit according to the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the drawings in the embodiments of the present invention are combined below to clearly and completely describe the technical solutions in the embodiments of the present invention, and obviously, the described embodiments are some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
First, please refer to fig. 1 to 3, which illustrate a probe card detecting apparatus provided by the present invention, which mainly comprises a working platform 11, a measuring portion 21, a correcting portion 31 and a conveying portion 41, wherein:
the working platform 11 is vertically provided with a column 12, and a sliding base 13 capable of sliding up and down along the column 12 is slidably provided on the column 12.
The measuring portion 21 includes a light source scanning unit 22, an image capturing unit 23 and a comparing unit 24. In the embodiment, the light source scanning unit 22 and the image capturing unit 23 are disposed side by side on the sliding base 13, the light source scanning unit 22 can measure a depth distance of a probe card 51 to obtain a 3D scanning information, the image capturing unit 23 can capture (i.e., shoot) an image of the probe card 51 to obtain a 2D image information, the comparing unit 24 is disposed in the measuring portion 21 and stores a teaching file of probe card feet, the teaching file includes depth distance and position information of each foot standard, and the comparing unit 24 compares the 3D scanning information and the 2D image information captured by the light source scanning unit 22 and the image capturing unit 23 with each other to the teaching file, so as to identify whether the feet of the probe card 51 have a deviation. That is, the comparison unit 24 is used to receive the 3D scanning information and the 2D image information, and compare them with the original excel data.
Wherein the light source scanning unit 22 includes a light source 221, a Fiber coupler (Fiber Optics)222 and an optical probe 223 composed of a plurality of sets of optical lenses, and the light source 221, the Fiber coupler 222 and the optical probe 223 are respectively connected in series through an optical Fiber 224 to transmit light, the light source scanning unit 22 can measure the depth distance of the probe card 51 by measuring the time difference of the emitted light reflected by the probe card 51, and the measured 3D information is transmitted to the comparison unit 24 to be compared with the teaching file, so as to obtain whether the depth distance of each pin of the probe card 51 is deviated, and the position of each pin can be obtained by whether the position of each pin in the 2D image information captured by the image capturing unit 23 is deviated from the position in the teaching file, and thereby the depth distance and the position of each pin of the probe card 51 are obtained, it can be identified whether the pin of the probe card 51 is faulty or not by comparing with the teaching file.
In addition, the measuring portion 21 further includes a marking unit 25 for marking the position of the error pin of the probe card 51. In the present invention, the marking unit 25 is also disposed in the measuring portion 21 and is used for marking the position identified as the error pin by the comparing unit 24. In the present embodiment, the working platform 11 is provided with an optical ruler 111 for generating coordinates of the positions of the error pins marked by the marking unit 25. Wherein the working platform 11 is provided with two optical scales 111 extending along mutually perpendicular and defined as X-axis and Y-axis, thereby generating the coordinate information of the two axes respectively. The coordinates of the position of the error pin are recorded by the marking unit 25 to facilitate the subsequent calibration operation.
The correcting part 31 is disposed on the upright 12 of the working platform 11 and beside the measuring part 21. In this embodiment, a fixing base 131 extending in the transverse direction is fixedly connected to the slide base 13, and the light source scanning unit 22, the image capturing unit 23 and the calibration portion 31 are sequentially and side-by-side mounted on the fixing base 131, and the position of the calibration portion 31 is further defined as a working position, which can be used to calibrate the error pin position of the probe card 51 back to a standard position.
The conveying part 41 is provided with a carrier 42 for carrying the probe card 51, and the conveying part 41 can drive the carrier 42 to move on the working platform 11 along two-dimensional directions of an X axis and a Y axis, so as to drive the probe card 51 on the carrier 42 to move between the measuring part 21 and the correcting part 31. In this embodiment, after the marking unit 25 marks the position of the error pin on the probe card 51 and records the coordinates thereof, the conveying unit 41 directly conveys the marked position of the probe card 51 to the working position of the calibration unit 31 by using the coordinates, so that the calibration unit 31 can immediately calibrate the error pin.
In practical applications, the probe card detecting apparatus of the present invention first places the probe card 51 on the carrier 42 and moves to the measuring portion 21, then selects the light source scanning unit 22 and the image capturing unit 23 to perform corresponding measurement on the probe card 51 at the same time or alternatively according to requirements, and then identifies and compares the depth distance and the position information of the pins of the probe card 51 through the comparing unit 24, and after marking the pins deviated from the standard positions by the marking unit 25, the position of the probe card 51 marked by the marking unit 25 and the wrong pins can be directly conveyed to the working position of the correcting portion 31 through the conveying portion 41 for performing the correction.
Therefore, the probe card detecting device provided by the present invention can not only ensure that the probe card 51 is not required to be disassembled and assembled during the detection process, but also have the advantages of saving time and ensuring the detection accuracy, the probe card detecting device of the present invention further comprises the light source scanning unit 22 and the image capturing unit 23, and can precisely measure the 2D image of the probe card 51 and the 3D information of the depth distance, so as to greatly improve the detection accuracy, and the light source scanning unit 22 can be used to detect the assembly yield of the peripheral components of the probe card 51, such as: if the locking process is not complete, the height of the screw is higher, so that only the standard information of the locking position and the locking height of the screw is established in the teaching file of the comparison unit 24, and the light source scanning unit 22 can detect whether the locking meets the standard; furthermore, the probe card detecting device provided by the present invention can also select the light source scanning unit 22 and the image capturing unit 23 to perform corresponding measurement work on the probe card at the same time or alternatively according to actual requirements, thereby having the function of satisfying different detection requirements at the same time.
Furthermore, the probe card detecting device provided by the present invention further integrates and mounts the light source scanning unit 22, the image capturing unit 23 and the calibration unit 31 on the fixing base 131 of the sliding base 13, which can effectively reduce the overall size thereof, and further shorten the detection range thereof to reduce the time required for detection, and also has the efficacy of considering the correctness of the detection result thereof.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention.
Claims (4)
1. A probe card inspection apparatus, comprising:
a working platform;
a measuring part, which is arranged on the working platform and comprises a light source scanning unit, an image capturing unit and a comparison unit, wherein the light source scanning unit can carry out depth distance measurement on a probe card to obtain 3D scanning information, the image capturing unit can be used for capturing an image of the probe card to obtain 2D image information, the comparison unit is used for receiving the 3D scanning information and the 2D image information to identify the depth distance and the position of the pin of the probe card, and the measuring part further comprises a marking unit for marking the position of the wrong pin of the probe card;
the correcting part is arranged on the working platform and is provided with a working position for correcting the pin position of the probe card;
the conveying part is arranged on the working platform and is provided with a carrier for bearing the probe card, and the carrier can move relative to the working platform, so that the probe card can move between the measuring part and the correcting part and can directly convey the position of the probe card marked by the marking unit at the wrong pin position to the working position of the correcting part.
2. The probe card inspection apparatus of claim 1, wherein: the light source scanning unit comprises a light source, an optical fiber coupler and an optical probe composed of a plurality of groups of optical lenses, and the light source, the optical fiber coupler and the optical probe are respectively connected in series through optical fibers to transmit light.
3. The probe card inspection apparatus of claim 1, wherein: the working platform is vertically provided with an upright post, a sliding seat capable of sliding up and down along the upright post is arranged on the upright post in a sliding way, a fixed seat is fixedly connected on the sliding seat, and the light source scanning unit, the image capturing unit and the correcting part are sequentially arranged on the fixed seat side by side.
4. The probe card inspection apparatus of claim 1, wherein: the working platform is provided with an optical ruler for generating a coordinate of the position of the error pin marked by the marking unit and enabling the conveying part to directly convey the position of the marked error pin of the probe card to the working position of the correcting part by utilizing the coordinate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021001926.XU CN212109902U (en) | 2020-06-04 | 2020-06-04 | Probe card detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021001926.XU CN212109902U (en) | 2020-06-04 | 2020-06-04 | Probe card detection device |
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| CN212109902U true CN212109902U (en) | 2020-12-08 |
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| CN202021001926.XU Active CN212109902U (en) | 2020-06-04 | 2020-06-04 | Probe card detection device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113866598A (en) * | 2021-09-22 | 2021-12-31 | 长江存储科技有限责任公司 | Wafer test probe card and wafer test system thereof |
-
2020
- 2020-06-04 CN CN202021001926.XU patent/CN212109902U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113866598A (en) * | 2021-09-22 | 2021-12-31 | 长江存储科技有限责任公司 | Wafer test probe card and wafer test system thereof |
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