CN212082742U - Sealing surface tightness detection jig for Dome ceramic part of semiconductor equipment WCVD device - Google Patents
Sealing surface tightness detection jig for Dome ceramic part of semiconductor equipment WCVD device Download PDFInfo
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- CN212082742U CN212082742U CN202020851409.5U CN202020851409U CN212082742U CN 212082742 U CN212082742 U CN 212082742U CN 202020851409 U CN202020851409 U CN 202020851409U CN 212082742 U CN212082742 U CN 212082742U
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Abstract
The utility model discloses a sealed face leakproofness detection tool of semiconductor equipment WCVD device Dome ceramic part, including detection case, O type circle groove and push-and-pull hand (hold), the top of detection case is installed through the bolt and is placed the panel, one side of detection case is provided with the vacuum pipeline, the one end of vacuum pipeline is provided with the gas injection mouth, the time-recorder is installed through positioning bolt to the one end of detection case, O type circle groove is installed through mounting bracket and bolt in the inside of detection case, the inner surface layer of detection case is provided with resistant dirty layer. This novel function is various, easy operation, and the multiple demand in the use has been satisfied in the production of being convenient for, is fit for extensively using widely.
Description
Technical Field
The utility model relates to a leakproofness detects technical field, in particular to sealed face leakproofness detection tool of semiconductor equipment WCVD device Dome ceramic part.
Background
The performance state of a finished product is monitored in real time in the process of cleaning, regenerating and recovering equipment in the semiconductor industry, but some special performances cannot be detected through naked eyes or simple equipment tools, the sealing surface of the Dome ceramic is very critical in the using process, the sealing performance of the Dome ceramic must be known in time in the cleaning and regenerating operation process, and the performance index of the Dome finished product cannot be monitored and mastered all the time because the sealing performance of the sealing surface is not detected by a good method in the previous operation. The existing detection effect is not obvious, and the accuracy is low, so that a tool for detecting the sealing surface tightness of a Dome ceramic component of a WCVD device of semiconductor equipment is provided.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a sealed face leakproofness detection tool of semiconductor equipment WCVD device Dome ceramic part can effectively solve the problem in the background art.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
the utility model provides a sealed face leakproofness detection tool of semiconductor equipment WCVD device Dome ceramic part, includes detection case, O type ring groove and push-and-pull hand (hold), the top of detection case is installed through the bolt and is placed the panel, one side of detection case is provided with the vacuum pipeline, the one end of vacuum pipeline is provided with the gas filling mouth, the time-recorder is installed through positioning bolt to the one end of detection case, O type ring groove is installed through mounting bracket and bolt in the inside of detection case, the internal surface layer of detection case is provided with resistant dirty layer.
Further, a control valve is mounted on the gas injection port through a screw.
Further, the stain resistant layer is a silicone coating.
Furthermore, push-and-pull handles are mounted at two ends of the detection box through screws, and hand placing grooves are formed in the inner sides of the push-and-pull handles.
Further, the gas injection port is communicated with a detection box, and the bottom of the detection box is provided with a universal wheel capable of being braked through a bolt.
Compared with the prior art, the utility model discloses following beneficial effect has:
1. a Dome ceramic part of a WCVD device to be detected is placed in an O-shaped ring groove in a detection box, a helium detector is used for vacuumizing a cavity of the Dome ceramic part through a vacuum pipeline, after the vacuum degree reaches a calibration value, the output end of a helium gun is connected with a gas injection port, a control valve is opened, helium is introduced around a sealing surface of the Dome ceramic part, the leakage condition of the sealing surface is judged through a display value on a panel of the helium detector, and the leakage position can be found.
2. The Dome ceramic is taken out by breaking the vacuum environment in the cavity after the detection, namely, the washing operation is completed, the timer is utilized to conveniently master the time value of the detection, the detection accuracy is improved, and the stain-resistant layer is an organic silicon coating, has the excellent characteristics of high and low temperature resistance, electrical insulation, oxidation resistance, weather resistance, flame retardancy, hydrophobicity, corrosion resistance, no toxicity, no odor, physiological inertia and the like, and plays a good role in protecting the detection box.
Drawings
Fig. 1 is a side view of the sealing surface tightness detection jig for Dome ceramic parts of the WCVD device of the semiconductor device of the present invention.
Fig. 2 is a sectional view of the sealing surface tightness detection jig for Dome ceramic parts of the WCVD device of the semiconductor device of the present invention.
Fig. 3 is a structural diagram of a stain-resistant layer of the sealing surface tightness detection jig for Dome ceramic parts of the WCVD device of the semiconductor device of the present invention.
In the figure: 1. placing a panel; 2. a vacuum line; 3. a gas injection port; 4. a control valve; 5. a stain resistant layer; 6. a detection box; 7. a timer; 8. pushing and pulling the handle; 9. a hand placing groove; 10. an O-shaped ring groove.
Detailed Description
In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the following embodiments.
As shown in fig. 1-3, a sealing surface tightness detection jig for Dome ceramic parts of a WCVD device of a semiconductor device includes a detection box 6, an O-shaped ring groove 10 and a push-pull handle 8, a placing panel 1 is installed on the top of the detection box 6 through bolts, a vacuum pipeline 2 is provided on one side of the detection box 6, a gas injection port 3 is provided at one end of the vacuum pipeline 2, a timer 7 is installed at one end of the detection box 6 through a positioning bolt, the O-shaped ring groove 10 is installed inside the detection box 6 through an installation frame and bolts, and a stain-resistant layer 5 is provided on the inner surface layer of the detection box 6.
Wherein, a control valve 4 is installed on the gas injection port 3 through a screw.
Wherein, the stain resistant layer 5 is an organic silicon coating.
In this embodiment, as shown in fig. 3, the stain-resistant layer 5 is an organic silicon coating, has excellent characteristics of high and low temperature resistance, electrical insulation, oxidation stability, weather resistance, flame retardancy, hydrophobicity, corrosion resistance, no toxicity, no odor, physiological inertia and the like, and plays a good role in protecting the detection box 6.
The two ends of the detection box 6 are provided with push-pull handles 8 through screws, and the inner sides of the push-pull handles 8 are provided with hand placing grooves 9.
In this embodiment, as shown in fig. 2, the worker holds the push-pull handle 8 to lift the detection box 6, so as to carry the detection box.
The gas injection port 3 is communicated with the detection box 6, and the bottom of the detection box 6 is provided with a universal wheel capable of being braked through a bolt.
In this embodiment, as shown in fig. 1 and 2, the device is moved by using a brakable universal wheel.
It should be noted that, the utility model relates to a sealing surface tightness detection jig for a Dome ceramic part of a WCVD device of a semiconductor device, during operation, the Dome ceramic part of the WCVD device to be detected is placed in an O-shaped ring groove 10 in a detection box 6, one end of a vacuum pipeline 2 is connected with the input end of the Dome ceramic part, a helium detector vacuumizes the cavity of the Dome ceramic part through the vacuum pipeline 2, the output end of a helium gun is connected with a gas injection port 3 and a control valve 4 is opened after the vacuum degree reaches a standard value, helium is introduced around the sealing surface of the Dome ceramic part, the leakage condition of the sealing surface is judged through the display value on a helium detector panel, the leakage position can also be found, the Dome ceramic is taken out after the vacuum environment in the cavity is broken after the detection, the flushing operation is finished, the time value convenient for the detection is mastered by a timer 7, the detection accuracy is improved, and a stain-resistant layer 5 is an, the flame-retardant and flame-retardant composite material has the excellent characteristics of high and low temperature resistance, electrical insulation, oxidation resistance, stability, weather resistance, flame retardancy, hydrophobicity, corrosion resistance, no toxicity, no odor, physiological inertia and the like, and plays a good role in protecting the detection box 6.
The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (5)
1. The utility model provides a sealed face leakproofness detection tool of semiconductor equipment WCVD device Dome ceramic part, includes detection case (6), O type circle groove (10) and push-and-pull hand (8), its characterized in that: the top of detection case (6) is installed through the bolt and is placed panel (1), one side of detection case (6) is provided with vacuum pipe (2), the one end of vacuum pipe (2) is provided with gas injection mouth (3), timer (7) are installed through positioning bolt to the one end of detection case (6), O type circle groove (10) are installed through mounting bracket and bolt to the inside of detection case (6), the internal layer of detection case (6) is provided with resistant dirty layer (5).
2. The tool for detecting the sealing performance of the sealing surface of the Dome ceramic component of the WCVD device of the semiconductor device as claimed in claim 1, wherein: and a control valve (4) is arranged on the gas injection port (3) through a screw.
3. The tool for detecting the sealing performance of the sealing surface of the Dome ceramic component of the WCVD device of the semiconductor device as claimed in claim 1, wherein: the stain resistant layer (5) is an organic silicon coating.
4. The tool for detecting the sealing performance of the sealing surface of the Dome ceramic component of the WCVD device of the semiconductor device as claimed in claim 1, wherein: push-and-pull handles (8) are mounted at two ends of the detection box (6) through screws, and hand placing grooves (9) are formed in the inner sides of the push-and-pull handles (8).
5. The tool for detecting the sealing performance of the sealing surface of the Dome ceramic component of the WCVD device of the semiconductor device as claimed in claim 1, wherein: the gas injection port (3) is communicated with the detection box (6), and the bottom of the detection box (6) is provided with a universal wheel capable of being braked through a bolt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020851409.5U CN212082742U (en) | 2020-05-20 | 2020-05-20 | Sealing surface tightness detection jig for Dome ceramic part of semiconductor equipment WCVD device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020851409.5U CN212082742U (en) | 2020-05-20 | 2020-05-20 | Sealing surface tightness detection jig for Dome ceramic part of semiconductor equipment WCVD device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212082742U true CN212082742U (en) | 2020-12-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020851409.5U Active CN212082742U (en) | 2020-05-20 | 2020-05-20 | Sealing surface tightness detection jig for Dome ceramic part of semiconductor equipment WCVD device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212082742U (en) |
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2020
- 2020-05-20 CN CN202020851409.5U patent/CN212082742U/en active Active
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