CN212068683U - Double-layer vertical quartz tube carrier - Google Patents
Double-layer vertical quartz tube carrier Download PDFInfo
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- CN212068683U CN212068683U CN201922315389.XU CN201922315389U CN212068683U CN 212068683 U CN212068683 U CN 212068683U CN 201922315389 U CN201922315389 U CN 201922315389U CN 212068683 U CN212068683 U CN 212068683U
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Abstract
The utility model discloses a double-deck vertical quartz capsule carrier, including inner tube, outer tube, first quartz tablet, second quartz tablet, flange, first even pipe, second even pipe, third even pipe, breather pipe, first small flange, second small flange, third small flange, the inner tube is inlayed in the outer tube, the inner tube passes through welding mode fixed connection with the outer tube and is in the same place, the space distance is 15mm between inner tube, the outer tube, first even pipe, second even pipe, third even pipe, the fixed welding of third even pipe are in on the inner tube wall, first small flange, second small flange, third small flange with the fixed welding of inner tube, breather pipe and the fixed welding of inner tube, and be located fixed welding backing sheet down.
Description
Technical Field
The utility model relates to a quartzy technical field especially relates to a double-deck vertical quartz capsule carrier.
Background
The current quartz carrier welding spare, the unable operation requirement that satisfies of double-deck pipe package assembly processing gap, ventilate, admit air, the whole influence temperature of exhaust duct design, original carrier structure intraductal side has 5 even pipes simultaneously, and wherein 3 ventilate, 2 temperature measurement, even pipe wall thickness are 2mm, and the wall is thin, and the body wall thickness is 6mm, during mutual welding, even pipe yielding leads to the unable installation of temperature measurement galvanic couple to use, the applicant has designed a neotype double-deck vertical quartz carrier according to the needs of current work specially.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a double-deck vertical quartz capsule carrier to solve the problem that proposes among the above-mentioned background art.
The utility model aims at realizing through the following technical scheme: the utility model provides a double-deck vertical quartz capsule carrier, includes inner tube, outer tube, first quartz tablet, second quartz tablet, flange, first even pipe, second even pipe, third even pipe, breather pipe, first small flange, second small flange, third small flange, the inner tube is inlayed in the outer tube, the inner tube passes through welding mode fixed connection with the outer tube and is in the same place, the space distance is 15mm between inner tube, the outer tube, the fixed welding of first even pipe, second even pipe, third even pipe is in on the inner tube inner wall, first small flange, second small flange, third small flange with the fixed welding of inner tube, breather pipe and inner tube fixed welding, and be located fixed welding backing sheet under the breather pipe.
Furthermore, a first quartz plate is fixedly welded at one end of the inner pipe, and the first quartz plate is arc-shaped;
the other end of the inner pipe is fixedly welded with a flange, and a step shaft is fixedly arranged on the flange.
Further, first small flange, the small flange of second structure are the same, first small flange, the small flange of second pass through connecting pipe and inner tube fixed welding, fixed welding has the backing sheet under first small flange, the small flange of second, the terminal fixed and flange welding of backing sheet, backing sheet upper end and first small flange, the small flange of second hookup location are fixed to be opened there is the arc notch.
Further, the third small flange is fixedly welded with a connecting pipe, the connecting pipe is fixedly welded with the inner pipe, the third small flange is fixedly welded with a supporting sheet, the tail end of the supporting sheet is fixedly welded with the flange, and the upper end of the supporting sheet is fixedly provided with an arc-shaped notch at the connecting position with the third small flange.
Furthermore, a second quartz plate is fixedly welded at one end of the outer pipe, and the second quartz plate is arc-shaped;
a first material is fixedly welded at the joint of the outer pipe and the inner pipe, the material is in an inclined shape, a second material is fixedly welded on a flange at the joint of the outer pipe and the inner pipe, and the second material is fixed on a step shaft of the flange;
the first material adding and the second material adding are mutually matched in vertical inclination angle, and the first material adding and the second material adding are welded into a whole through a welding rod.
Further, a fixedly welded connecting pipe on the third small flange extends between the inner pipe and the outer pipe.
Furthermore, the number of the third even pipes is 2, and the third even pipes extend to the outer part of the inner pipe by 30mm through the pore passages arranged on the inner pipe.
Further, first even pipe is fixed to be provided with 2, and first even pipe one end with first small flange fixed connection communicates with each other, the other end of first even pipe extends to under the first quartz plate of inner tube, and with first quartz plate distance 25 mm.
Furthermore, one end of the second even pipe is fixedly welded and connected with the second small flange and communicated with the second small flange, and the other end of the second even pipe extends to a position between the inner pipe and the outer pipe.
Compared with the prior art, the beneficial effects of the utility model are that: compared with a horizontal furnace, the vertical furnace saves more space, deposits chemical elements in a semiconductor process more uniformly, can process wafers with larger sizes, greatly reduces the cost of wafer processing in the semiconductor process, and improves the utilization rate of the wafers. The vent pipe is used for circulating various chemical gases, and oxidation diffusion is carried out on the wafer through gas heating. The coupling pipe is used for measuring the gas temperature, the temperature can be monitored according to the temperature measurement result, and the winding flange connection is used for connecting the equipment and the process pipe, so that the sealing effect is achieved.
Drawings
Fig. 1 is an overall schematic view of the present invention.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, rather than all embodiments, and all other embodiments obtained by a person of ordinary skill in the art without creative work belong to the protection scope of the present invention based on the embodiments of the present invention.
As shown in fig. 1, a double-layer vertical quartz tube carrier is characterized in that: including inner tube 1, outer tube 2, first quartz piece 3, second quartz piece 4, flange 5, first even pipe 6, second even pipe 7, third even pipe 8, breather pipe 10, first small flange 11, second small flange 12, third small flange 13, inner tube 1 is inlayed in outer tube 2, inner tube 1 is in the same place through welding mode fixed connection with outer tube 2, the space distance is 15mm between inner tube 1, the outer tube 2, first even pipe 6, second even pipe 7, third even pipe 8, fixed welding are in on the 1 inner wall of inner tube, first small flange 11, second small flange 12, third small flange 13 with 1 fixed welding of inner tube, breather pipe 10 and 1 fixed welding of inner tube just are located breather pipe 10 lower fixed welding backing sheet.
In this embodiment, a first quartz plate 3 is fixedly welded to one end of the inner tube 1, and the first quartz plate 3 is arc-shaped;
the other end of the inner pipe 1 is fixedly welded with a flange 5, and a step shaft is fixedly arranged on the flange 5.
In this embodiment, first small flange 11, the same structure of second small flange 12, first small flange 11, the fixed welding of second small flange 12 through connecting pipe and inner tube 1, fixed welding has the backing sheet under first small flange 11, the second small flange 12, the fixed welding and the flange 5 welding of backing sheet end, backing sheet upper end and first small flange 11, the fixed arc notch that has opened of second small flange 12 hookup location.
In this embodiment, fixed welding has the connecting pipe on the third small flange 13, the connecting pipe with 1 fixed welding of inner tube, fixed welding has the backing sheet under the third small flange 13, the terminal fixed and 5 welding of flange of backing sheet, backing sheet upper end and the fixed arc notch that opens in third small flange 13 hookup location.
In this embodiment, a second quartz plate 4 is fixedly welded to one end of the outer tube 2, and the second quartz plate 4 is arc-shaped;
a first material is fixedly welded at the joint of the outer pipe 2 and the inner pipe, the material is in an inclined shape, a second material is fixedly welded on a flange 5 at the joint of the outer pipe 2 and the inner pipe 1, and the second material is fixed on a step shaft of the flange 5;
the first material adding and the second material adding are mutually matched in vertical inclination angle, and the first material adding and the second material adding are welded into a whole through a welding rod.
In the present embodiment, the fixedly welded connection pipe on the third small flange 13 extends between the inner pipe 1 and the outer pipe 2.
In this embodiment, the number of the third even pipes 8 is 2, and the third even pipes 8 extend to 30mm outside the inner pipe 1 through the hole channels provided on the inner pipe 1.
In this embodiment, first even pipe 6 is fixed to be provided with 2, and first even pipe 6 one end with first small flange 11 fixed connection communicates with each other, the other end of first even pipe 6 extends to under the first quartz plate 3 of inner tube 1, and with first quartz plate 3 distance 25 mm.
In this embodiment, one end of the second even pipe 7 is fixedly welded and connected with and communicated with the second small flange 12, and the other end of the second even pipe 7 extends between the inner pipe 1 and the outer pipe 2.
The utility model discloses a theory of operation: oxyhydrogen enters the coupling pipe from the small flange, reaches the top from bottom to top under the action of pressure, deposits oxyhydrogen mixture on wafers on the quartz boat in the pipe like a cover from the top cover downwards, ensures the temperature to be above 1000 ℃ in a constant temperature area of the quartz furnace, deposits a thin oxide film on the surface of the wafers, and generates the oxide film on the silicon wafers on the whole quartz boat in a completely consistent way under the action of certain time. After the process is finished, the redundant gas in the tube body is led out of the quartz tube through another small flange by pressure, and the process of primary oxidation diffusion is finished.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (9)
1. The utility model provides a double-deck vertical quartz capsule carrier which characterized in that: comprises an inner tube (1), an outer tube (2), a first quartz plate (3), a second quartz plate (4), a flange (5), a first even tube (6), a second even tube (7), a third even tube (8), a vent pipe (10), a first small flange (11), a second small flange (12) and a third small flange (13), wherein the inner tube (1) is embedded in the outer tube (2), the inner tube (1) and the outer tube (2) are fixedly connected together in a welding mode, the gap distance between the inner tube (1) and the outer tube (2) is 15mm, the first even tube (6), the second even tube (7) and the third even tube (8) are fixedly welded on the inner wall of the inner tube (1), the first small flange (11), the second small flange (12) and the third small flange (13) are fixedly welded with the inner tube (1), the vent pipe (10) is fixedly welded with the inner tube (1), and a welding support sheet is fixedly arranged below the vent pipe (10).
2. The double-layer vertical quartz tube carrier of claim 1, wherein: a first quartz plate (3) is fixedly welded at one end of the inner pipe (1), and the first quartz plate (3) is arc-shaped;
the other end of the inner pipe (1) is fixedly welded with a flange (5), and a step shaft is fixedly arranged on the flange (5).
3. The double-layer vertical quartz tube carrier of claim 1, wherein: first small flange (11), second small flange (12) structure are the same, first small flange (11), second small flange (12) are through connecting pipe and inner tube (1) fixed welding, fixed welding has the backing sheet under first small flange (11), second small flange (12), the terminal fixed and flange (5) welding of backing sheet, the backing sheet upper end is fixed with first small flange (11), second small flange (12) hookup location and is opened there is the arc notch.
4. The double-layer vertical quartz tube carrier of claim 1, wherein: the fixed welding has the connecting pipe on third small flange (13), the connecting pipe with inner tube (1) fixed welding, fixed welding has the backing sheet under third small flange (13), the terminal fixed and flange (5) welding of backing sheet, backing sheet upper end and third small flange (13) hookup location are fixed to be opened there is the arc notch.
5. The double-layered vertical quartz tube carrier according to claim 1 or 2, wherein: a second quartz plate (4) is fixedly welded at one end of the outer pipe (2), and the second quartz plate (4) is arc-shaped;
a first material is fixedly welded at the joint of the outer pipe (2) and the inner pipe, the material is in an inclined shape, a second material is fixedly welded on a flange (5) at the joint of the outer pipe (2) and the inner pipe (1), and the second material is fixed on a step shaft of the flange (5);
the first material adding and the second material adding are mutually matched in vertical inclination angle, and the first material adding and the second material adding are welded into a whole through a welding rod.
6. The double-layer vertical quartz tube carrier of claim 1, wherein: and a connecting pipe fixedly welded on the third small flange (13) extends between the inner pipe (1) and the outer pipe (2).
7. The double-layer vertical quartz tube carrier of claim 1, wherein: the number of the third even pipes (8) is 2, and the third even pipes (8) extend to the outer 30mm of the inner pipe (1) through the pore passages formed in the inner pipe (1).
8. The double-layer vertical quartz tube carrier of claim 1, wherein: first even pipe (6) are fixed to be provided with 2, and first even pipe (6) one end with first small flange (11) fixed connection communicates with each other, the other end of first even pipe (6) extends to under first quartz plate (3) of inner tube (1), and apart from 25mm with first quartz plate (3).
9. The double-layer vertical quartz tube carrier of claim 1, wherein: one end of the second even pipe (7) is fixedly welded and connected with the second small flange (12) and communicated with the second small flange, and the other end of the second even pipe (7) extends to a position between the inner pipe (1) and the outer pipe (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922315389.XU CN212068683U (en) | 2019-12-21 | 2019-12-21 | Double-layer vertical quartz tube carrier |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922315389.XU CN212068683U (en) | 2019-12-21 | 2019-12-21 | Double-layer vertical quartz tube carrier |
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| Publication Number | Publication Date |
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| CN212068683U true CN212068683U (en) | 2020-12-04 |
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| CN201922315389.XU Active CN212068683U (en) | 2019-12-21 | 2019-12-21 | Double-layer vertical quartz tube carrier |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111013515A (en) * | 2019-12-21 | 2020-04-17 | 张忠恕 | Double-layer vertical quartz tube carrier and processing method thereof |
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2019
- 2019-12-21 CN CN201922315389.XU patent/CN212068683U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111013515A (en) * | 2019-12-21 | 2020-04-17 | 张忠恕 | Double-layer vertical quartz tube carrier and processing method thereof |
| CN111013515B (en) * | 2019-12-21 | 2023-10-31 | 北京凯德石英股份有限公司 | Double-layer vertical quartz tube carrier and processing method thereof |
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