CN212054414U - Plasma elastic sealing door - Google Patents
Plasma elastic sealing door Download PDFInfo
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- CN212054414U CN212054414U CN202020019279.9U CN202020019279U CN212054414U CN 212054414 U CN212054414 U CN 212054414U CN 202020019279 U CN202020019279 U CN 202020019279U CN 212054414 U CN212054414 U CN 212054414U
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- door frame
- frame body
- sealing plate
- sealing
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Abstract
The utility model relates to the technical field of vacuum devices, in particular to a plasma elastic sealing door; the door frame comprises a door frame body, wherein a sealing plate is arranged in the door frame body and movably embedded in the door frame body; the door frame body is internally provided with a guide mechanism which is connected with the sealing plate so as to lead the sealing plate to reciprocate along the direction vertical to the panel of the door frame body; the utility model has reasonable structure, the sealing plate and the door frame body are integrally arranged on the bin mouth of the sealed cabin, the sealing plate can retract when contacting with the sealing rubber strip, when the sealed cabin is vacuumized, the sealing plate rebounds and compresses the sealing rubber strip to keep close contact with the sealing rubber strip, thereby ensuring the sealing performance; the whole structure is compact, the structural clearance can be eliminated, and the air tightness stability of the sealed cabin is ensured.
Description
Technical Field
The utility model relates to a vacuum apparatus technical field specifically indicates a plasma elasticity sealing door.
Background
Plasma technology refers to a gaseous substance in an ionized state, where the number of negatively charged particles (electrons, negative ions) is equal to the number of positively charged particles (positive ions). By means of gas discharge or heating, enough energy is obtained from the outside to change the electrons bound by the orbits in the gas molecules or atoms into free electrons, so that plasma can be formed. The plasma itself is a good conductor, so the magnetic field can be used to control the distribution of the plasma and its movement, which is beneficial to the control of the chemical process.
The premise of the application of the plasma technology is that the plasma processing equipment is required to be provided with a vacuum-pumping cavity under a vacuum-pumping environment, and the vacuum-pumping cavity is required to ensure the sealing property of the interior of the vacuum-pumping cavity by using a sealing door. The plasma processing device generally comprises a vacuum-pumping cavity and a sealing door, wherein the vacuum-pumping cavity and the sealing door form a closed structure through structural matching, and the joint part between the vacuum-pumping cavity and the sealing door ensures air tightness through a sealing rubber strip. The existing plasma vacuumizing equipment has the defects of complex structure, high cost, more occupied space and poor stability.
Therefore, there is a need for improvements and developments in the art.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a compact structure, convenient assembling's plasma elasticity sealing door to prior art's defect and not enough.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
the utility model relates to a plasma elastic sealing door, which comprises a door frame body, wherein a sealing plate is arranged in the door frame body, and the sealing plate is movably embedded in the door frame body; the door frame body is internally provided with a guide mechanism which is connected with the sealing plate so as to lead the sealing plate to reciprocate along the direction vertical to the panel of the door frame body.
According to the scheme, the guide mechanism comprises a plurality of guide blocks, the guide blocks are symmetrically arranged on the inner sides of the two side wall plates of the door frame body, and guide grooves are formed in the guide blocks; and a plurality of guide rods are arranged on two side edges of the sealing plate and respectively penetrate through the corresponding guide grooves.
According to the above aspect, the guide groove is formed in the guide block so as to form a U-shaped opening structure, and an opening end of the guide groove is close to the panel of the door frame body.
According to the scheme, a plurality of fixing holes are formed in two side wall plates of the door frame body, and the guide block is fixedly connected to the wall plate of the door frame body through the fixing holes and the bolts.
According to the scheme, a plurality of retraction springs are arranged between the door frame body and the sealing plate, the retraction springs are distributed at equal intervals, one ends of the retraction springs are fixedly connected with the panel of the door frame body, and the other ends of the retraction springs are connected with the sealing plate in an abutting mode.
According to the scheme, swing arm terminals are arranged on the outer sides of the two side wall plates of the door frame body.
The utility model discloses beneficial effect does: the utility model has reasonable structure, the sealing plate and the door frame body are integrally arranged on the bin mouth of the sealed cabin, the sealing plate can retract when contacting with the sealing rubber strip, when the sealed cabin is vacuumized, the sealing plate rebounds and compresses the sealing rubber strip to keep close contact with the sealing rubber strip, thereby ensuring the sealing performance; the whole structure is compact, the structural clearance can be eliminated, and the air tightness stability of the sealed cabin is ensured.
Drawings
FIG. 1 is a schematic view of the overall exploded structure of the present invention;
fig. 2 is an enlarged schematic view of a portion a of fig. 1.
In the figure:
1. a door frame body; 2. a sealing plate; 3. a guide block; 11. a fixing hole; 12. a retraction spring; 13. a swing arm terminal; 21. a guide bar; 31. a guide groove.
Detailed Description
The technical solution of the present invention will be described below with reference to the accompanying drawings and examples.
As shown in fig. 1, the plasma elastic sealing door of the present invention comprises a door frame body 1, wherein a sealing plate 2 is arranged in the door frame body 1, and the sealing plate 2 is movably embedded in the door frame body 1; a guide mechanism is arranged in the door frame body 1 and is connected with the sealing plate 2, so that the sealing plate 2 can reciprocate along the direction vertical to the panel of the door frame body 1; after the door frame body 1 is butted with the sealed cabin, the sealing plate 2 is abutted against the sealing rubber strip on the cabin opening of the sealed cabin, the sealing plate 2 retracts through the guide mechanism to enable the sealing plate to be in stable contact with the sealing rubber strip, and when the sealed cabin is vacuumized, the sealing plate 2 rebounds through the guide mechanism and compresses the sealing rubber strip to keep in close contact with the sealing rubber strip, so that the air tightness of the sealed cabin is guaranteed.
The guide mechanism comprises a plurality of guide blocks 3, the guide blocks 3 are symmetrically arranged on the inner sides of the side wall plates on two sides of the door frame body 1, and guide grooves 31 are formed in the guide blocks 3; a plurality of guide rods 21 are arranged on two side edges of the sealing plate 2, and the guide rods 21 are respectively arranged in the corresponding guide grooves 31 in a penetrating manner; the cooperation of the guide rod 21 and the guide groove 31 is used for controlling the action stroke of the sealing plate 2, wherein the cooperation of the guide rod 21 and the guide block 3 movably installs the sealing plate 2 in the door frame 1.
The guide groove 31 forms a U-shaped opening structure on the guide block 3, and the opening end of the guide groove 31 is close to the panel of the door frame body 1; the guide block 3 controls the stroke limit of the sealing plate 2 through the guide groove 31, and prevents the sealing plate 2 from being separated from the door frame 1.
A plurality of fixing holes 11 are formed in two side wall plates of the door frame body 1, and the guide block 3 is fixedly connected to the wall plate of the door frame body 1 through the fixing holes 11 and bolts; the sealing plate 2 adopts an embedded installation mode, so that in order to improve the efficiency during assembly, the guide block 3 belongs to a rear-mounted component, and the guide block 3 passes through the fixing hole 11 through a bolt on the outer side of the door frame body 1 and then is fixedly connected; the assembly mode of the sealing plate 2 enables the whole structure of the sealing door to be more compact and occupies less space.
A plurality of retraction springs 12 are arranged between the door frame body 1 and the sealing plate 2, the retraction springs 12 are distributed at equal intervals, one ends of the retraction springs 12 are fixedly connected with the panel of the door frame body 1, and the other ends of the retraction springs 12 are connected with the sealing plate 2 in an abutting mode; thereby closing plate 2 can receive the oppression and slide along guide way 31 when conflicting joint strip, and the spring 12 that contracts supports closing plate 2 and makes it and joint strip contact all the time to be convenient for subsequent evacuation procedure no longer need the door frame body 1 and the position between the sealed cabin have sufficient accuracy, make evacuation cabin overall structure's fault-tolerance obtain the reinforcing.
The above is only the preferred embodiment of the present invention, so all the equivalent changes or modifications made by the structure, features and principles in accordance with the claims of the present invention are included in the claims of the present invention.
Claims (6)
1. The utility model provides a plasma elasticity sealing door, includes door frame body (1), its characterized in that: a sealing plate (2) is arranged in the door frame body (1), and the sealing plate (2) is movably embedded in the door frame body (1); the door frame body (1) is internally provided with a guide mechanism, and the guide mechanism is connected with the sealing plate (2) so as to enable the sealing plate (2) to reciprocate along the direction vertical to the panel of the door frame body (1).
2. The plasma elastic sealing door of claim 1, wherein: the guide mechanism comprises a plurality of guide blocks (3), the guide blocks (3) are symmetrically arranged on the inner sides of the side wall plates on the two sides of the door frame body (1), and guide grooves (31) are formed in the guide blocks (3); the two side edges of the sealing plate (2) are provided with a plurality of guide rods (21), and the guide rods (21) are respectively arranged in the corresponding guide grooves (31) in a penetrating manner.
3. The plasma elastic sealing door of claim 2, wherein: the guide groove (31) is formed in the guide block (3) to form a U-shaped opening structure, and the opening end of the guide groove (31) is close to the panel of the door frame body (1).
4. The plasma elastic sealing door of claim 3, wherein: the door frame is characterized in that a plurality of fixing holes (11) are formed in two side wall plates of the door frame body (1), and the guide block (3) is fixedly connected to a wall plate of the door frame body (1) through the fixing holes (11) and bolts.
5. The plasma elastic sealing door of claim 1, wherein: a plurality of retraction springs (12) are arranged between the door frame body (1) and the sealing plate (2), the plurality of retraction springs (12) are distributed at equal intervals, one ends of the retraction springs (12) are fixedly connected with a panel of the door frame body (1), and the other ends of the retraction springs (12) are abutted against the sealing plate (2) and are connected.
6. The plasma elastic sealing door of claim 1, wherein: swing arm terminals (13) are arranged on the outer sides of the two side wall plates of the door frame body (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020019279.9U CN212054414U (en) | 2020-01-06 | 2020-01-06 | Plasma elastic sealing door |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020019279.9U CN212054414U (en) | 2020-01-06 | 2020-01-06 | Plasma elastic sealing door |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212054414U true CN212054414U (en) | 2020-12-01 |
Family
ID=73535571
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020019279.9U Active CN212054414U (en) | 2020-01-06 | 2020-01-06 | Plasma elastic sealing door |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212054414U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114184329A (en) * | 2021-10-18 | 2022-03-15 | 上海贤日测控科技有限公司 | Leak detection mechanism |
| CN114575711A (en) * | 2022-02-11 | 2022-06-03 | 湖南卓誉科技有限公司 | Sliding type sealing door and sealing cabin |
-
2020
- 2020-01-06 CN CN202020019279.9U patent/CN212054414U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114184329A (en) * | 2021-10-18 | 2022-03-15 | 上海贤日测控科技有限公司 | Leak detection mechanism |
| CN114575711A (en) * | 2022-02-11 | 2022-06-03 | 湖南卓誉科技有限公司 | Sliding type sealing door and sealing cabin |
| CN114575711B (en) * | 2022-02-11 | 2023-12-26 | 湖南卓誉科技有限公司 | Sliding type sealing door and sealing cabin |
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