CN212051633U

CN212051633U - Clamping device for substrate in vacuum cavity

Info

Publication number: CN212051633U
Application number: CN202020382067.7U
Authority: CN
Inventors: 赵俊亮
Original assignee: Suzhou Hangyu Jiutian Power Technology Co ltd
Current assignee: Suzhou Hangyu Jiutian Power Technology Co ltd
Priority date: 2020-03-24
Filing date: 2020-03-24
Publication date: 2020-12-01
Anticipated expiration: 2030-03-24

Abstract

The utility model discloses a clamping device for a substrate in a vacuum cavity, which comprises a bottom plate, wherein a vertical rod, a U-shaped frame and a vacuum rotating motor are fixedly connected on the bottom plate from left to right in sequence, and the vertical rod is connected with the U-shaped frame through a slide rail; the output that the motor was rotated in the vacuum has the lead screw through the coupling joint, and the lead screw is kept away from the one end that the motor was rotated in the vacuum and is connected with vertical pole rotation, two feed screw nut of horizontal motion are cup jointed to lead screw lateral wall screw thread, two feed screw nut's both ends all are connected with same connecting block through the dead lever, set up the spout that matches with the slide rail on the connecting block, and the spout is used for connecting block horizontal slip. The utility model discloses a connecting block horizontal movement drive backup pad's up-and-down motion, and then realize the centre gripping effect to the base plate through V type clamping jaw, this mode is compared prior art and can be saved the clamping jaw and directly reserve length from top to bottom that exists when adopting the drives such as push rod, saves the upper and lower space of vacuum chamber.

Description

Clamping device for substrate in vacuum cavity

Technical Field

The utility model relates to a clamping device technical field especially relates to a clamping device of vacuum cavity inner base plate.

Background

At present, when various products of TFT-LCD are produced by adopting a deposited film, a vacuum chamber is required to be used, an upper clamping device and a lower clamping device are arranged in the vacuum chamber, the substrate placed in the vacuum chamber is clamped stably from top to bottom, at present, the upper clamping device and the lower clamping device adopt an electric push rod and the like, the upper space and the lower space before the use of the electric push rod cannot be fully utilized, and the upper space and the lower space of the reserved length cannot be fully utilized due to the reserved length existing under the initial state of the electric push rod.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the problem that the upper and lower clamping device arranged in the vacuum chamber in the prior art has the space which can not be utilized, and providing a clamping device for a substrate in the vacuum chamber.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a clamping device for a substrate in a vacuum cavity comprises a bottom plate, wherein a vertical rod, a U-shaped frame and a vacuum rotating motor are fixedly connected to the bottom plate from left to right in sequence, and the vertical rod is connected with the U-shaped frame through a sliding rail; the output end of the vacuum rotating motor is connected with a lead screw through a coupler, one end of the lead screw, far away from the vacuum rotating motor, is rotatably connected with a vertical rod, two lead screw nuts which move horizontally are sleeved on the outer side wall of the lead screw in a threaded manner, two ends of the two lead screw nuts are both connected with the same connecting block through fixed rods, a sliding groove matched with a sliding rail is formed in the connecting block, and the sliding groove is used for the horizontal sliding of the connecting block; the connecting block is connected with a supporting plate which moves vertically through a driving device, a V-shaped clamping jaw which is used for clamping is fixedly connected to the supporting plate, and four corners of the supporting plate are connected with the bottom plate through guide rods.

Preferably, all threaded connection has the set screw that is used for the bottom plate to stabilize in the four corners of bottom plate.

Preferably, the driving device comprises a connecting rod which is rotatably connected to the connecting block, and one end of the connecting rod, which is far away from the connecting block, is rotatably connected with the supporting plate; the equal fixedly connected with in both ends both sides of connecting rod is used for the pivoted fixed axle, equal fixedly connected with is used for connecting rod tip fixed axle pivoted U type seat in connecting block and the backup pad, and the fixed axle rotates with the inside wall of U type seat to be connected.

Preferably, the driving device comprises an inclined guide rail fixedly connected to the connecting block, and a guide rail groove is formed in the inclined guide rail; the supporting plate is fixedly connected with a supporting rod, the bottom of the supporting rod is rotatably connected with a sliding block, and the sliding block is connected with the inner side wall of the guide rail groove in a sliding mode.

Preferably, a rubber pad is bonded to the side wall of the concave clamping position of the V-shaped clamping jaw.

Compared with the prior art, the utility model has the following advantage:

1. the device adopts the horizontal movement of the connecting block to drive the support plate to move up and down, so as to realize the clamping effect on the substrate through the V-shaped clamping jaw, compared with the prior art, the device can save the upper and lower reserved length of the clamping jaw when the clamping jaw is directly driven by a push rod and the like, and save the upper and lower space of a vacuum cavity;

2. the bottom plate in the device is convenient to detach and mount by adopting a screw connection mode, so that the device is convenient to integrally replace and maintain;

3. the device adopts the V-shaped clamping jaws to move relatively and oppositely, so that the substrate can be clamped and mounted quickly.

Drawings

Fig. 1 is a schematic structural view of a clamping device for a substrate in a vacuum chamber according to the present invention;

fig. 2 is a schematic structural diagram of a support plate in the clamping device for the substrate in the vacuum chamber according to the present invention;

fig. 3 is a schematic structural view of a second embodiment of a clamping device for a substrate in a vacuum chamber according to the present invention;

fig. 4 is a schematic structural view of an inclined guide rail in the clamping device for the substrate in the vacuum chamber according to the present invention.

In the figure: the device comprises a base plate 1, a vertical rod 2, a 3U-shaped frame, a 4 vacuum rotating motor, a 5 sliding rail, a 6 screw rod, a 7 coupler, an 8 screw rod nut, a 9 fixed rod, a 10 connecting block, a 11 connecting rod, a 12 supporting plate, a 13V-shaped clamping jaw, a 14 guide rod, a 15 fixed screw, a 16 sliding groove, a 17U-shaped seat, an 18 rubber pad, a 19 inclined guide rail, a 20 supporting rod, a 21 sliding block and a 22 guide rail groove.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

Example one

Referring to fig. 1-2, a clamping device for a substrate in a vacuum chamber comprises a bottom plate 1, wherein a vertical rod 2, a U-shaped frame 3 and a vacuum rotating motor 4 are fixedly connected to the bottom plate 1 from left to right in sequence, and the vertical rod 2 is connected with the U-shaped frame 3 through a sliding rail 5;

further, the four corners of the bottom plate 1 are connected with fixing screws 15 for stabilizing the bottom plate 1 through threads, the bottom plate 1 can be connected with the inner side wall of the vacuum chamber through the fixing screws 15, and the installation of the bottom plate 1 through the fixing screws 15 is only one of the installation embodiments of the bottom plate 1.

Wherein, the output that motor 4 was rotated in the vacuum is connected with lead screw 6 through shaft coupling 7, the setting of shaft coupling 7 is convenient for lead screw 6 and vacuum to rotate being connected of motor 4, and lead screw 6 keeps away from the vacuum and rotates the one end of motor 4 and rotate with vertical pole 2 and be connected, 6 lateral wall screw sockets of lead screw have two lead screw nuts 8 of horizontal motion, the both ends of two lead screw nuts 8 all are connected with same connecting block 10 through dead lever 9, set up the spout 16 that matches with slide rail 5 on the connecting block 10, and spout 16 is used for the horizontal slip of connecting block 10, can guarantee the stable horizontal motion of connecting block 10 through the cooperation of spout 16 with slide rail 5.

The connecting block 10 is connected with a supporting plate 12 which moves vertically through a driving device, a V-shaped clamping jaw 13 for clamping is fixedly connected to the supporting plate 12, four corners of the supporting plate 12 are connected with the bottom plate 1 through guide rods 14, and the supporting plate 12 is guaranteed to move up and down stably through the guide rods 14;

further, the driving device comprises a connecting rod 11 which is rotatably connected to the connecting block 10, and one end of the connecting rod 11, which is far away from the connecting block 10, is rotatably connected with the supporting plate 12; both sides of both ends of the connecting rod 11 are fixedly connected with a fixed shaft for rotation, the connecting block 10 and the supporting plate 12 are fixedly connected with a U-shaped seat 17 for the fixed shaft at the end part of the connecting rod 11 to rotate, the fixed shaft is rotatably connected with the inner side wall of the U-shaped seat 17, the connecting block 10 can horizontally move to drive the supporting plate 12 to vertically move up and down by the arrangement of the connecting rod 11, the U-shaped seat 17 and the fixed shaft are arranged to realize the rotation connection between the end part of the connecting rod 11 and the connecting block 10 and the supporting plate 12 respectively, and the U-shaped seat 17 and the fixed shaft are only one of the embodiments in which the end;

still further, rubber pads 18 are bonded on the side walls of the concave clamping positions of the V-shaped clamping jaws 13, wherein the rubber pads 18 can achieve a buffering effect on a substrate clamped between the two V-shaped clamping jaws 13, damage to the substrate in the clamping process is avoided, and the rubber pads 18 are only one of buffering effects and are not limited to the rubber pads 18;

it should be added that: guide rod 14 is conventional, i.e., a solid rod and a hollow rod, wherein the hollow rod is slidably disposed over the solid rod.

The utility model discloses specific theory of operation as follows:

during the use, realize through fixed screw 15 that bottom plate 1 fixes on the indoor lateral wall of vacuum chamber, the mode that adopts the screw installation can be convenient for quick dismantlement and the installation of bottom plate 1, then when this device appears damaging, compares prior art's electric putter etc. and operating personnel can take off maintenance and change fast.

When in use, the vacuum rotating motor 4 is driven to drive the screw rod 6 to rotate, because the screw rod 6 is in threaded connection with the screw rod nut 8, and the screw rod nut 8 is fixedly connected with the connecting block 10 through the fixed rod 9, the connecting block 10 and the screw nut 8 are ensured to horizontally move back and forth through the matching effect of the sliding chute 16 and the sliding rail 5, when the connecting block 10 moves back and forth horizontally, the connecting rod 11 drives the supporting plate 12 to move up and down, thereby changing the distance between the two V-shaped clamping jaws 13 and realizing the clamping effect, the device adopts the mode that the connecting block 10 moves horizontally to drive the supporting plate 12 to move up and down, the up-and-down space in the vacuum chamber can be saved, because the adoption of the mode does not need to reserve the installation height in the initial state of the electric push rod and the like, the space above and below the vacuum chamber can be greatly saved, and the device is convenient for fast clamping and mounting of the substrate through the movement of the upper V-shaped clamping jaw 13 and the lower V-shaped clamping jaw 13 during clamping.

Example two

Referring to fig. 3-4, the difference between the first embodiment and the second embodiment is that the driving device includes an inclined guide rail 19 fixedly connected to the connecting block 10, a guide rail groove 22 is formed in the inclined guide rail 19, and the guide rail groove 22 is configured to ensure stable sliding between the slider 21 and the inclined guide rail 19; the supporting plate 12 is fixedly connected with a supporting rod 20, the bottom of the supporting rod 20 is rotatably connected with a slide block 21, and the slide block 21 is slidably connected with the inner side wall of the guide rail groove 22. The horizontal movement of the connecting block 10 drives the horizontal movement of the inclined guide rail 19, so that the vertical up-and-down movement of the supporting plate 12 is realized through the supporting rod 20 under the reaction force of the inclined guide rail 19 to the sliding block 21, and the effect of clamping and mounting is realized through the movement of the V-shaped clamping jaw 13.

The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims

1. A clamping device for a substrate in a vacuum cavity comprises a bottom plate (1), and is characterized in that a vertical rod (2), a U-shaped frame (3) and a vacuum rotating motor (4) are fixedly connected to the bottom plate (1) from left to right in sequence, and the vertical rod (2) is connected with the U-shaped frame (3) through a sliding rail (5);

the output end of the vacuum rotating motor (4) is connected with a lead screw (6) through a coupler (7), one end, far away from the vacuum rotating motor (4), of the lead screw (6) is rotatably connected with the vertical rod (2), two lead screw nuts (8) which move horizontally are sleeved on the outer side wall of the lead screw (6) in a threaded manner, two ends of the two lead screw nuts (8) are connected with the same connecting block (10) through fixing rods (9), a sliding groove (16) matched with the sliding rail (5) is formed in the connecting block (10), and the sliding groove (16) is used for the horizontal sliding of the connecting block (10);

the connecting block (10) is connected with a supporting plate (12) which moves vertically through a driving device, a V-shaped clamping jaw (13) which is used for clamping is fixedly connected to the supporting plate (12), and four corners of the supporting plate (12) are connected with the bottom plate (1) through guide rods (14).

2. A clamping device for a substrate in a vacuum chamber as claimed in claim 1, wherein the bottom plate (1) is screwed with fixing screws (15) at four corners for stabilizing the bottom plate (1).

3. A clamping device for a substrate in a vacuum chamber according to claim 1, wherein the driving device comprises a connecting rod (11) rotatably connected to the connecting block (10), and one end of the connecting rod (11) far away from the connecting block (10) is rotatably connected to the supporting plate (12);

the equal fixedly connected with in both ends both sides of connecting rod (11) is used for the pivoted fixed axle, equal fixedly connected with is used for connecting rod (11) tip fixed axle pivoted U type seat (17) on connecting block (10) and backup pad (12), and the fixed axle rotates with the inside wall of U type seat (17) to be connected.

4. The clamping device for the substrate in the vacuum chamber as claimed in claim 1, wherein the driving device comprises an inclined guide rail (19) fixedly connected to the connecting block (10), and a guide rail groove (22) is formed on the inclined guide rail (19);

backup pad (12) fixedly connected with bracing piece (20), the bottom of bracing piece (20) is rotated and is connected with slider (21), slider (21) and guide rail groove (22) inside wall sliding connection.

5. A clamping device for substrates in a vacuum chamber as claimed in claim 1, wherein the side wall of the concave clamping position of the V-shaped clamping jaw (13) is adhered with a rubber pad (18).