CN211989971U - Cleaning equipment for polycrystalline silicon wafers - Google Patents

Abstract

The utility model provides a cleaning equipment of polycrystalline silicon piece belongs to mechanical technical field. The technical problem that an existing silicon wafer cleaning system is low in cleaning efficiency is solved. This cleaning equipment of polycrystal silicon chip, including the base, be provided with material loading conveyer belt and unloading conveyer belt on the base, its characterized in that, be provided with material loading seat, washing tank one and washing tank two between material loading conveyer belt and the unloading conveyer belt, material loading seat, washing tank one and washing tank two are fixed on the base in proper order, can place the blowing basket that is used for depositing the silicon chip on the material loading seat, still be fixed with the baffle that is used for fixing a position the blowing basket on the material loading seat, still be provided with the transportation structure that is used for transporting the blowing basket on the base. The utility model has the advantages of high work efficiency.

Description

Cleaning equipment for polycrystalline silicon wafers

Technical Field

The utility model belongs to the technical field of machinery, a cleaning equipment, especially a cleaning equipment of polycrystal silicon chip is related to.

Background

The silicon wafer cleaning aims at removing surface pollution impurities including organic matters and inorganic matters. Some of these impurities exist in an atomic state or an ionic state, and some exist in a thin film form or a particle form on the surface of the silicon wafer.

Through retrieval, as disclosed in chinese patent literature, a silicon wafer cleaning system [ application number: 201720890081.6, respectively; publication No.: CN207170343U ]. The silicon wafer cleaning system comprises a slow pulling groove and a clean water groove arranged in front of the slow pulling groove, wherein the slow pulling groove is provided with an online water adding device, and the silicon wafer cleaning system is characterized in that the clean water groove is also provided with an online spraying device, and the online spraying device comprises: reservoir, water pump, spray assembly, setting are in sensor in the clear water groove, wherein the reservoir passes through overflow pipe intercommunication with the groove of pulling slowly, reservoir and water pump intercommunication, spray assembly and water pump intercommunication, the sensor is connected with ac contactor electricity, ac contactor is connected with the automatically controlled ware electricity of water pump, the sensor detects make behind the clear water inslot have the silicon chip ac contactor's magnetic core and contact actuation are so that the water pump starts.

Although the silicon wafer cleaning system disclosed in the patent can clean silicon wafers, the cleaning efficiency of the silicon wafer cleaning system is low, and therefore, it is necessary to design a cleaning device for polycrystalline silicon wafers.

SUMMERY OF THE UTILITY MODEL

The utility model aims at having the above-mentioned problem to current technique, provided a cleaning equipment of polycrystalline silicon piece, had the characteristics that work efficiency is high.

The purpose of the utility model can be realized by the following technical proposal: a cleaning device for polycrystalline silicon wafers comprises a base, wherein a feeding conveyer belt and a discharging conveyer belt are arranged on the base, and is characterized in that a feeding seat, a first cleaning tank and a second cleaning tank are arranged between the feeding conveyer belt and the discharging conveyer belt, the feeding seat, the first cleaning tank and the second cleaning tank are sequentially fixed on the base, a feeding basket for storing silicon wafers can be placed on the feeding seat, a baffle plate for positioning the feeding basket is further fixed on the feeding seat, a conveying structure for conveying the feeding basket is further arranged on the base, the conveying structure comprises a fixed seat, a lead screw, a guide rod, a stepping motor, a movable seat, a push rod motor and two hanging frames, the fixed seat is fixed on the base, the guide rod is fixed on the fixed seat, the stepping motor is fixed on the fixed seat, an output shaft of the stepping motor is horizontally arranged, one end of the lead screw is connected with an output shaft of the stepping motor, and the other, the moving seat is sleeved on the guide rod, the moving seat is connected with the lead screw in a matched mode through the nut, the push rod motor is fixed to the moving seat, a piston rod of the push rod motor is vertically arranged downwards, the hanging bracket is fixed to the piston rod of the push rod motor, and a plurality of hanging hooks are fixed to the hanging bracket.

Structure more than adopting, the blowing basket is transported to the material loading seat through the material loading conveyer belt, the transport structure transports this blowing basket to in cleaning tank one and cleaning tank two in proper order, and place the blowing basket in cleaning tank one and cleaning tank two, transport to the unloading conveyer belt again after twice washs on, the characteristics that work efficiency is high have, transport mechanism drives the lead screw through control step motor, the removal that the seat realized the horizontal direction is moved under the cooperation of guide arm and nut, the piston rod of push rod motor promotes the gallows downstream to the particular position after, it removes the seat once more to remove, cooperate until lifting hook and lug, the piston rod of push rod motor resets, drive gallows rebound, two blowing baskets are hoisted simultaneously to two gallows, high transport efficiency.

The cleaning device is characterized in that a placing block for placing the material basket is fixed in each of the first cleaning groove and the second cleaning groove, a fixing block capable of being matched with the placing block is fixed on the material basket, and lifting lugs matched with lifting hooks are fixed on two sides of the material basket.

By adopting the structure, the hanging bracket can lift the discharge basket through the matching of the lifting hook and the lifting lug.

And the material placing basket is also provided with a plurality of through holes.

The feeding seat is also rotatably provided with a plurality of rollers which are convenient for the discharge basket to move.

By adopting the structure, the friction force when the discharge basket moves is reduced.

Heating members are further arranged on the first cleaning groove and the second cleaning groove.

The working principle of the utility model is as follows: the screw rod is driven by controlling the stepping motor, the moving seat is moved in the horizontal direction under the matching of the guide rod and the nut, the piston rod of the push rod motor pushes the hanging frame to move downwards to a specific position, the moving seat moves again until the hanging hook is matched with the lifting lug, the piston rod of the push rod motor resets, the hanging frame is driven to move upwards, the hanging frame lifts the material placing basket on the material loading seat and the material placing basket in the first cleaning groove, the material placing basket is driven to move through the work of the stepping motor, one material placing basket is placed in the first cleaning groove through the matching of the stepping motor and the push rod motor, the other material placing basket is placed in the second cleaning groove, after the cleaning is completed, the material placing basket is placed in the second cleaning groove through the matching of the stepping motor and the push rod motor, the other material placing basket is placed on the material discharging conveying belt, discharging is achieved.

Compared with the prior art, the utility model has the advantages of it is following:

1. the feeding basket is conveyed to the feeding seat through the feeding conveying belt, the conveying structure conveys the feeding basket to the first cleaning groove and the second cleaning groove in sequence, and the feeding basket is conveyed to the discharging conveying belt after being cleaned twice, so that the feeding basket has the advantage of high working efficiency.

2. Through controlling step motor to drive the lead screw, the removal of horizontal direction is realized to the seat that moves under the cooperation of guide arm and nut, and the piston rod of push rod motor promotes the gallows downstream to specific position after, moves the seat and removes once more, and until lifting hook and lug cooperate, the piston rod of push rod motor resets, drives the gallows rebound, and two discharge baskets are hoisted simultaneously to two gallows, and the conveying efficiency is high.

Drawings

Fig. 1 is a schematic plan view of the present invention.

Fig. 2 is a schematic plan view of the present invention with a part of the structure removed.

In the figure, 1, a base; 2. a feeding conveyer belt; 3. blanking a conveying belt; 4. a feeding seat; 5. a first cleaning tank; 6. a second cleaning tank; 7. a discharge basket; 7a, a through hole; 8. a baffle plate; 9. a fixed seat; 10. a screw rod; 11. a guide bar; 12. a stepping motor; 13. a movable seat; 14. a push rod motor; 15. a hanger; 16. a nut; 17. a hook; 18. placing the blocks; 19. a fixed block; 20. lifting lugs; 21. and a roller.

Detailed Description

The following are specific embodiments of the present invention and the accompanying drawings are used to further describe the technical solution of the present invention, but the present invention is not limited to these embodiments.

As shown in fig. 1-2, the cleaning device for the polycrystalline silicon wafer comprises a base 1, a feeding conveyer belt 2 and a discharging conveyer belt 3 are arranged on the base 1, in the embodiment, a feeding seat 4, a first cleaning tank 5 and a second cleaning tank 6 are arranged between the feeding conveyer belt 2 and the discharging conveyer belt 3, the feeding seat 4, the first cleaning tank 5 and the second cleaning tank 6 are sequentially fixed on the base 1, in the embodiment, the first cleaning tank and the second cleaning tank are commercially available products, a discharging basket 7 for storing the silicon wafer can be placed on the feeding seat 4, a baffle 8 for positioning the discharging basket 7 is further fixed on the feeding seat 4, a transportation structure for transporting the discharging basket 7 is further arranged on the base 1, the transportation structure comprises a fixed seat 9, a screw rod 10, a guide rod 11, a stepping motor 12, a movable seat 13, a push rod motor 14 and two hanging brackets 15, the fixed seat 9 is fixed on the base 1, guide rod 11 is fixed on fixing base 9, step motor 12's output shaft level sets up, the one end of lead screw 10 is connected with step motor 12's output shaft, the other end of lead screw 10 rotates the setting on fixing base 9, it establishes on guide rod 11 to remove seat 13 cover, and it connects to remove seat 13 through nut 16 and lead screw 10 cooperation, push rod motor 14 fixes on removing seat 13, push rod motor 14's piston rod vertical downward setting, gallows 15 fixes on push rod motor 14's piston rod, be fixed with a plurality of lifting hooks 17 on gallows 15, in this embodiment, the quantity of lifting hook 17 is four.

By adopting the structure, the discharging basket 7 is conveyed to the charging seat 4 through the charging conveyer belt 2, the conveying structure conveys the discharging basket 7 to the first cleaning groove 5 and the second cleaning groove 6 in sequence, the discharging basket 7 is placed in the first cleaning groove 5 and the second cleaning groove 6, and is conveyed to the discharging conveyer belt 3 after being cleaned twice, the conveying mechanism has the characteristic of high working efficiency, the conveying mechanism drives the screw rod 10 through controlling the stepping motor 12, the moving seat 13 realizes the movement in the horizontal direction under the matching of the guide rod 11 and the nut 16, the moving seat 13 moves again after the piston rod of the push rod motor 14 pushes the hanging bracket 15 to move downwards to a specific position until the hanging hook 17 is matched with the hanging lug 20, the piston rod of the push rod motor 14 resets to drive the hanging bracket 15 to move upwards, the two hanging brackets 15 hang up the two discharging baskets 7 simultaneously, and the conveying efficiency is high.

Both the first cleaning groove 5 and the second cleaning groove 6 are fixed with a placing block 18 for placing the charging basket 7, the charging basket 7 is fixed with a fixing block 19 which can be matched with the placing block 18, and two sides of the charging basket 7 are fixed with lifting lugs 20 which are matched with the lifting hooks 17.

With the above structure, the hanging bracket 15 can lift the discharging basket 7 through the matching of the hanging hook 17 and the lifting lug 20.

A plurality of through holes 7a are further formed in the charging basket 7, and in the embodiment, the number of the through holes 7a is one hundred sixty eight.

The feeding seat 4 is further rotatably provided with a plurality of rollers 21 for facilitating the movement of the discharging basket 7, and in the embodiment, the number of the rollers 21 is four.

With the above structure, the friction force when the discharge basket 7 moves is reduced.

Heating members are further arranged on the first cleaning groove 5 and the second cleaning groove 6, and in the embodiment, the heating members are commercially available existing products.

The working principle of the utility model is as follows: the screw rod 10 is driven by controlling the stepping motor 12, the moving seat 13 moves horizontally under the matching of the guide rod 11 and the nut 16, the piston rod of the push rod motor 14 pushes the hanger 15 to move downwards to a specific position, the moving seat 13 moves again until the lifting hook 17 is matched with the lifting lug 20, the piston rod of the push rod motor 14 is reset to drive the hanger 15 to move upwards, the hanger 15 lifts the discharging basket 7 on the feeding seat 4 and the discharging basket 7 in the first cleaning groove 5, the discharging basket 7 is driven to move through the work of the stepping motor 12, one discharging basket 7 is placed in the first cleaning groove 5 through the matching of the stepping motor 12 and the push rod motor 14, the other discharging basket 7 is placed in the second cleaning groove 6 through the matching of the stepping motor 12 and the push rod motor 14 after the cleaning is finished, the other discharging basket 7 is placed on the discharging conveyer belt 3, realize the blanking and the circular reciprocating work.

The specific embodiments described herein are merely illustrative of the spirit of the invention. Various modifications, additions and substitutions for the specific embodiments described herein may be made by those skilled in the art without departing from the spirit of the invention or exceeding the scope of the invention as defined in the accompanying claims.

Claims (5)

1. A cleaning device for polycrystalline silicon wafers comprises a base, wherein a feeding conveyer belt and a discharging conveyer belt are arranged on the base, and is characterized in that a feeding seat, a first cleaning tank and a second cleaning tank are arranged between the feeding conveyer belt and the discharging conveyer belt, the feeding seat, the first cleaning tank and the second cleaning tank are sequentially fixed on the base, a discharge basket for storing silicon wafers can be placed on the feeding seat, a baffle plate for positioning the discharge basket is further fixed on the feeding seat, a conveying structure for conveying the discharge basket is further arranged on the base, the conveying structure comprises a fixed seat, a lead screw, a guide rod, a stepping motor, a movable seat, a push rod motor and two hanging frames, the fixed seat is fixed on the base, the guide rod is fixed on the fixed seat, the stepping motor is fixed on the fixed seat, an output shaft of the stepping motor is horizontally arranged, one end of the lead screw is connected with an output, the other end of lead screw rotates and sets up on the fixing base, removes the seat cover and establishes on the guide arm, and removes the seat and match through nut and lead screw and connect, and the push rod motor is fixed on removing the seat, and the piston rod of push rod motor is vertical to be set up downwards, and the gallows is fixed on the piston rod of push rod motor, is fixed with a plurality of lifting hooks on the gallows.

2. The cleaning equipment for the polycrystalline silicon wafers as set forth in claim 1, wherein a placing block for placing the material basket is fixed in each of the first cleaning tank and the second cleaning tank, a fixing block capable of being matched with the placing block is fixed on the material basket, and lifting lugs matched with the lifting hooks are fixed on two sides of the material basket.

3. The cleaning equipment for the polycrystalline silicon wafers as set forth in claim 2, wherein the charging basket is further provided with a plurality of through holes.

4. The cleaning equipment for the polycrystalline silicon wafers as set forth in claim 1, wherein the charging base is further rotatably provided with a plurality of rollers for facilitating movement of the charging basket.

5. The cleaning apparatus for the polycrystalline silicon wafer according to claim 1, wherein the first cleaning tank and the second cleaning tank are further provided with heating members.

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