CN211946285U - Quartz boat with suspended and inserted graphene - Google Patents
Quartz boat with suspended and inserted graphene Download PDFInfo
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- CN211946285U CN211946285U CN201922355045.1U CN201922355045U CN211946285U CN 211946285 U CN211946285 U CN 211946285U CN 201922355045 U CN201922355045 U CN 201922355045U CN 211946285 U CN211946285 U CN 211946285U
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Abstract
The utility model discloses a growing graphene suspension and insertion sheet type quartz boat, which comprises a boat seat and a boat frame, wherein the boat frame comprises an upper cross frame and/or a lower cross frame; the upper transverse frame comprises at least one first transverse rod parallel to the length direction of the boat seat and/or only one second transverse rod vertical to the length direction of the boat seat; the lower cross frame comprises at least two third cross rods parallel to the length direction of the boat seat and/or at least two fourth cross rods vertical to the length direction of the boat seat; at least one slot is formed in two third cross rods in the pair of third cross rods; at least one slot is formed in two of the paired fourth cross rods; the utility model has the advantages that the quartz boat is just matched with the quartz tube for growing the graphene, thereby ensuring that the position of the sample is not changed; the quartz boat can simultaneously realize vertical airflow suspension, vertical airflow insertion type and airflow insertion type growth of single-layer graphene, and can also independently perform growth of graphene in four different modes.
Description
Technical Field
The utility model relates to a graphite alkene growth device field, especially a hang and insert piece formula quartz boat of growth graphite alkene.
Background
Graphene is a two-dimensional carbon nanomaterial consisting of carbon atoms in SP2 hybrid tracks, and the unique two-dimensional crystal structure endows graphene with good physical, chemical, electrical and mechanical properties, and transparent electrodes made of graphene have stronger light transmittance, higher photoelectric conversion rate and better thermal conductivity compared with common electrodes, so that graphene has wide application prospects in various fields such as new energy, new materials and novel devices.
The chemical vapor deposition method for preparing graphene needs to use a metal foil as a growth substrate, and in the technology of preparing the quartz boat for preparing graphene, the defect is that a relatively thin copper foil substrate (such as a conventional thickness of 25 micrometers) is easily adhered to a quartz stage in the high-temperature graphene growth process, and the phenomenon of tearing or wrinkling of graphene can occur when sampling is performed after the graphene growth is completed.
SUMMERY OF THE UTILITY MODEL
The invention of the utility model aims to: in view of the problems, the invention provides a
A suspension and insertion sheet type quartz boat for growing graphene is used for being placed in a CVD system quartz tube and comprises a boat seat and a boat frame, wherein the boat frame is arranged above the boat seat and comprises an upper transverse frame and/or a lower transverse frame; the upper cross frame comprises: the device comprises at least one first cross rod parallel to the length direction of a boat seat, and/or only one second cross rod vertical to the length direction of the boat seat, and a supporting rod for supporting the first cross rod and/or the second cross rod; the lower cross frame includes: at least two third cross rods parallel to the length direction of the boat seat and/or at least two fourth cross rods perpendicular to the length direction of the boat seat; at least one slot is formed in each of the two paired third cross rods, and the slots on the two third cross rods correspond to each other; and at least one slot is formed in each of the two paired fourth cross rods, and the slots on the two fourth cross rods correspond to each other.
Traditional adoption grows graphite alkene's quartz boat, when high temperature growth, paste with quartzy objective table easily, cause the film of the graphite alkene of growing to tear the phenomenon production of perhaps fold in the sample. The utility model provides a growth method of hanging in inserted sheet formula quartz boat and with this kind of quartz boat of growth graphite alkene has solved the adhesion problem of graphite alkene growth process metal substrate and quartz objective table large tracts of land contact.
Furthermore, the width of the slot is at least 1mm, and the depth is at least 2 mm.
And the third cross rod and the fourth cross rod are provided with slots, so that the insertion type graphene growth is facilitated.
Furthermore, the boat seat is an arc-shaped boat seat, and a first quartz rod, a second quartz rod and a third quartz rod are arranged below the boat seat; the first quartz rod is arranged at the bottom of the section of the boat seat; the second quartz rod and the third quartz rod are respectively arranged on two sides of the first quartz rod.
The quartz rod is arranged to be matched with the quartz tube, so that the quartz boat can move conveniently.
Furthermore, the included angle between the second quartz rod and the third quartz rod by taking the center of the circle of the cross section of the boat seat as the center is 60-120 ℃.
Further, the length of the quartz boat seat is 10 cm.
The length of the quartz boat seat is set to be 10cm, so that the quartz boat can better meet the temperature control condition in the growth area of the chemical vapor deposition system.
Furthermore, the side surface of the boat seat is provided with a pull ring.
The pull ring is arranged on the quartz boat seat, which is helpful for taking and placing the quartz boat.
Furthermore, the pull ring is a semicircular ring.
To sum up, owing to adopted above-mentioned technical scheme, the beneficial effects of the utility model are that:
1. the utility model discloses a growth graphite alkene suspension type and inserted sheet formula quartz boat, three quartz cylinder of the convex design welding of quartz boat seat are as the strut, coincide just with the quartz capsule of growth graphite alkene, can not take place the slope at the in-process of the quartz boat of push-and-pull to guarantee that the sample position can not change.
2. The utility model discloses a growth graphite alkene suspension type and inserted sheet formula quartz boat, this quartz boat can be used for perpendicular air current suspension type simultaneously, along with the air current suspension type, perpendicular air current inserted sheet formula is grown large tracts of land, large batch monolayer graphite alkene along the air current inserted sheet formula, also can grow the graphite alkene growth method of four kinds of different modes alone.
Drawings
FIG. 1 is a left side view of a suspended and inserted quartz boat structure
FIG. 2 is a front view of the structure of the suspended and inserted quartz boat
FIG. 3 is a top view of the suspended and inserted quartz boat structure
FIG. 4 is a cross-sectional view of a quartz boat with a suspension and insert plate structure
The labels in the figure are: 1. a support bar; 2. a fourth cross bar; 3. a third cross bar; 4. a second cross bar; 5. a boat seat; 6. a pull ring; 7. a second quartz rod; 8. a first quartz rod; 9. a third quartz rod; 10. a first cross bar; 11. and (4) a slot.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings.
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Implementation scheme one
The embodiment discloses a suspension and insertion sheet type quartz boat for growing graphene, which is used for being placed in a quartz tube of a CVD system for use and comprises a boat seat 5 and a boat frame, wherein the boat frame is arranged above the boat seat 5 and comprises an upper transverse frame and/or a lower transverse frame; the method is characterized in that: the upper cross frame comprises: the device comprises at least one first cross rod 10 parallel to the length direction of a boat seat 5, at least one second cross rod 4 perpendicular to the length direction of the boat seat 5 and a supporting rod 1 for supporting the first cross rod 10 and/or the second cross rod 4, wherein the number of the second cross rods 4 is multiple, so that vertical airflow suspension type growth of graphene can be facilitated, meanwhile, the firmness degree of a quartz boat frame can be increased, and the first cross rod 10 is arranged for paracurrent suspension type growth of graphene; the lower cross frame includes: at least two third cross rods 3 parallel to the length direction of the boat seat 5 and/or at least two fourth cross rods 2 vertical to the length direction of the boat seat 5; at least one slot 11 is formed in each of the two third cross rods 3 in the pair of third cross rods 3, and the slots 11 on the two third cross rods 3 correspond to each other; pairwise a slot 11 has all been seted up to two fourth horizontal poles 2 in the fourth horizontal pole 2 at least, and the slot 11 on two fourth horizontal poles 2 corresponds each other, sets up slot 11 on third horizontal pole 3, is for carrying out vertical air current inserted sheet formula growth graphite alkene, sets up slot 11 on fourth horizontal pole 2, is for carrying out the air current inserted sheet formula growth graphite alkene.
Example II
The embodiment is based on the first embodiment, and discloses a suspension and insertion type quartz boat for growing graphene, wherein the length of the quartz boat seat 5 is 10 cm. The length of the quartz boat seat 5 is set to be 10cm, so that the quartz boat can better meet the temperature control condition in the growth area of the chemical vapor deposition system. The width of the slot 11 is at least 1mm, and the depth is at least 2 mm; the boat seat 5 is an arc-shaped boat seat 5, and a first quartz rod 8, a second quartz rod 7 and a third quartz rod 9 are arranged below the boat seat 5; the boat seat 5 is arranged to be arc-shaped and is matched with the arc-shaped quartz tube, so that the quartz boat can be better and stably placed in the quartz tube; the first quartz rod 8 is arranged at the bottom of the section of the boat seat 5; the second quartz rod 7 and the third quartz rod 9 are respectively arranged at two sides of the first quartz rod 8; the included angle between the second quartz rod 7 and the third quartz rod 9 by taking the center of the circle of the cross section of the boat seat 5 as the center is 60-120 ℃; a pull ring 6 is arranged on the side surface of the boat seat 5; the pull ring 6 is a semicircular ring, and the pull ring 6 is arranged mainly for conveniently taking and placing the quartz boat.
To sum up, the utility model discloses a hang and inserted sheet formula quartz boat of growth graphite alkene, when making use metal substrate growth graphite alkene, the large tracts of land contact of the metal forming on the quartz boat and quartz boat has been avoided, make the graphite alkene structure of growing out more complete, thereby it is more complete to grow, high quality and large tracts of land single-layer graphite alkene, use this kind of quartz boat growth graphite alkene simultaneously, both can adopt suspension type metal forming to grow feldspar graphite alkene, can adopt inserted sheet formula metal forming to grow graphite alkene again, can also both use simultaneously, carry out the growth of big batch graphite alkene, and this kind of quartz boat is applicable to in the middle of different kinds of chemical vapor deposition systems, including low pressure system, the application in the middle of various systems such as ordinary pressure system and plasma reinforcing system.
The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.
Claims (6)
1. A suspension and insertion sheet type quartz boat for growing graphene is used for being placed in a quartz tube of a CVD system and comprises a boat seat and a boat frame, wherein the boat frame is arranged above the boat seat and comprises an upper transverse frame and/or a lower transverse frame; the method is characterized in that: the upper cross frame comprises: the device comprises at least one first cross rod parallel to the length direction of a boat seat, and/or one second cross rod perpendicular to the length direction of the boat seat, and a supporting rod for supporting the first cross rod and/or the second cross rod; the lower cross frame includes: at least two third cross rods parallel to the length direction of the boat seat and/or at least two fourth cross rods perpendicular to the length direction of the boat seat; at least one slot is formed in each of the two paired third cross rods, and the slots on the two third cross rods correspond to each other; at least one slot is formed in each of the two paired fourth cross rods, and the slots on the two fourth cross rods correspond to each other; the boat seat is an arc-shaped boat seat, and a first quartz rod, a second quartz rod and a third quartz rod are arranged below the boat seat; the first quartz rod is arranged at the bottom of the section of the boat seat; the second quartz rod and the third quartz rod are respectively arranged on two sides of the first quartz rod.
2. The graphene hanging and inserting quartz boat as claimed in claim 1, wherein: the width of the slot is at least 1mm, and the depth is at least 2 mm.
3. The graphene hanging and inserting quartz boat as claimed in claim 1, wherein: the included angle between the second quartz rod and the third quartz rod is 60-120 ℃ by taking the circle center of the cross section of the boat seat as the center.
4. The graphene hanging and inserting quartz boat as claimed in any one of claims 1, 2 and 3, wherein: the length of the quartz boat seat is 10 cm.
5. The graphene hanging and inserting quartz boat as claimed in any one of claims 1, 2 and 3, wherein: and a pull ring is arranged on the side surface of the boat seat.
6. The graphene hanging and inserting quartz boat as claimed in claim 5, wherein: the pull ring is a semicircular ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922355045.1U CN211946285U (en) | 2019-12-24 | 2019-12-24 | Quartz boat with suspended and inserted graphene |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922355045.1U CN211946285U (en) | 2019-12-24 | 2019-12-24 | Quartz boat with suspended and inserted graphene |
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| Publication Number | Publication Date |
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| CN211946285U true CN211946285U (en) | 2020-11-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201922355045.1U Expired - Fee Related CN211946285U (en) | 2019-12-24 | 2019-12-24 | Quartz boat with suspended and inserted graphene |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110937594A (en) * | 2019-12-24 | 2020-03-31 | 云南大学 | Hanging and inserting sheet type quartz boat and method for growing graphene |
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2019
- 2019-12-24 CN CN201922355045.1U patent/CN211946285U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110937594A (en) * | 2019-12-24 | 2020-03-31 | 云南大学 | Hanging and inserting sheet type quartz boat and method for growing graphene |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20201117 Termination date: 20211224 |