CN211929456U - Wafer box transmission mechanism - Google Patents
Wafer box transmission mechanism Download PDFInfo
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- CN211929456U CN211929456U CN202021007239.9U CN202021007239U CN211929456U CN 211929456 U CN211929456 U CN 211929456U CN 202021007239 U CN202021007239 U CN 202021007239U CN 211929456 U CN211929456 U CN 211929456U
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Abstract
The utility model relates to a wafer box transmission device, the frame that snatchs of mated rectangle frame construction can rotate to opposite direction under the rotation of rotary driving piece, and can support and lean on the side flange of living wafer box, it snatchs the pole by fixing the U-shaped of stretching into in the support frame of U-shaped on the support frame through fastening nut and constitutes to snatch the frame, the U-shaped snatchs the pole and can change the U-shaped according to the condition of the washing liquid that actual need used and snatch the pole, thereby make the U-shaped snatch the pole and can form the cooperation relation with the washing liquid, make the U-shaped snatch the pole and can use the washing liquid of different.
Description
Technical Field
The application belongs to the technical field of wafer cleaning equipment, and particularly relates to a wafer box transmission mechanism.
Background
The wafer cassette transfer mechanism, as the name implies, is a device for transferring wafer cassettes, where wafers are usually stored in a certain number in the wafer cassettes, and then the wafer cassettes are transferred to various cleaning devices by the wafer cassette transfer mechanism.
Chinese patent document CN 208014665U discloses a wafer conveying device, which comprises a support, a first conveying unit, a second conveying unit and a clamping unit, wherein the first conveying unit is disposed on the support and comprises a first driver, the second conveying unit is disposed on the first conveying unit and comprises a second driver, the clamping unit is disposed on the second conveying unit and comprises a lifter and two grabbing arms, the wafer conveying device is driven by the first driver and the second driver to move radially, the lifter performs the lifting and placing actions, the two grabbing arms grab the wafer cassette in a sliding manner, the maintenance and repair are facilitated by a simple structure, and the lifter lifts, picks and places the wafer cassette. However, when the wafer transport apparatus transports the wafer cassette into the cleaning device, the grabbing arm may be partially immersed in the cleaning solution of the cleaning device, and some cleaning solutions are corrosive.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is: in order to solve the defects in the prior art, the wafer box transmission mechanism is provided.
The utility model provides a technical scheme that its technical problem adopted is:
a wafer cassette transport mechanism comprising:
the horizontal mounting rack is provided with a horizontal sliding rail;
the manipulator assembly comprises a horizontal sliding seat arranged on a horizontal sliding rail, wherein a vertical sliding rail is arranged on the horizontal sliding seat, and a vertical sliding seat is arranged on the vertical sliding rail;
the vertical sliding seat is provided with two parallel rotating shafts which are horizontally arranged, the rotating shafts are respectively provided with a grabbing frame, each grabbing frame comprises a U-shaped supporting frame, a U-shaped grabbing rod which is fixed on the supporting frame through a fastening nut and extends into the U-shaped supporting frame is fixed on the supporting frame, and the grabbing rod and the supporting frame form a rectangular frame structure;
the horizontal driving piece drives the horizontal sliding seat to move on the horizontal sliding rail;
the lifting driving piece drives the vertical sliding seat to move on the vertical sliding rail;
the rotary drive drives two parallel, horizontally arranged rotary shafts in opposite directions.
Preferably, the wafer box transmission mechanism of the utility model,
two side rods of the U-shaped grabbing rod extend into the side rods of the hollow U-shaped supporting frame, and the exposed length of the U-shaped grabbing rod 262 can be adjusted by adjusting the extending amount.
Preferably, the utility model discloses a wafer box transmission device, the axis of rotation of two parallel horizontal arrangements passes through spring coupling, and the spring is applyed the pulling force that resumes initial condition to the axis of rotation.
Preferably, the utility model discloses a wafer box transmission device, manipulator subassembly are a plurality of, set up on horizontal installation frame side by side.
Preferably, the utility model discloses a wafer box transmission device, manipulator subassembly have arranged taut acting as go-between all around, and the one end of acting as go-between is fixed, and the other end is connected with force transducer.
Preferably, the wafer box transmission mechanism of the utility model,
the horizontal mounting rack and the horizontal slide rail are divided into a plurality of sections, and each section of horizontal slide rail is provided with a manipulator assembly.
Preferably, the utility model discloses a wafer box transmission device, U-shaped snatch the pole and be stainless steel.
The utility model has the advantages that:
the utility model discloses a wafer box transmission device, the frame that snatchs of mated rectangle frame construction can rotate to opposite direction under rotary driving piece's rotation, and can support the side flange that leans on the wafer box, snatch the frame and snatch the pole by fixing the U-shaped of stretching into in the support frame of U-shaped on the support frame through fastening nut and constitute, the U-shaped snatchs the pole and can change the U-shaped according to the condition of the washing liquid that actual need used and snatch the pole, thereby make the U-shaped snatch the pole and can form the cooperation relation with the washing liquid, make the U-shaped snatch the pole and can use the washing liquid of different pH values.
Drawings
The technical solution of the present application is further explained below with reference to the drawings and the embodiments.
Fig. 1 is a schematic structural diagram of a wafer cassette transfer mechanism according to an embodiment of the present application;
FIG. 2 is a schematic diagram of a robot assembly according to an embodiment of the present application;
FIG. 3 is a schematic structural diagram of a gripper frame according to an embodiment of the present disclosure;
fig. 4 is a schematic structural diagram of a rotary drive member according to an embodiment of the present application.
The reference numbers in the figures are:
1-horizontal mounting rack;
11-a horizontal sliding rail;
12-a horizontal drive;
2-a robot assembly;
21-horizontal sliding seat;
22-vertical slide rail;
23-a lifting drive;
24-a vertical sliding seat;
25-a rotating shaft;
26-a grabbing frame;
27-a rotary drive;
28-spring.
Detailed Description
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.
In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientation or positional relationship indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated in a particular manner, and are not to be considered limiting of the scope of the present application. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the invention, unless otherwise specified, "a plurality" means two or more.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art through specific situations.
The technical solutions of the present application will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
Examples
The present embodiment provides a wafer cassette conveying mechanism, as shown in fig. 1, including:
the horizontal mounting rack 1 is provided with a horizontal sliding rail 11;
the manipulator assembly 2 comprises a horizontal sliding seat 21 arranged on a horizontal sliding rail 11, wherein a vertical sliding rail 22 is arranged on the horizontal sliding seat 21, and a vertical sliding seat 24 is arranged on the vertical sliding rail 22;
the vertical sliding seat 24 is provided with two parallel rotating shafts 25 which are horizontally arranged (the rotating shafts 25 are mounted at the top position of the vertical sliding seat 24 through bearings), the rotating shafts 25 are respectively provided with a grabbing frame 26, each grabbing frame 26 comprises a U-shaped supporting frame 261, a U-shaped grabbing rod 262 which is fixed on the supporting frame 261 through a fastening nut 263 and extends into the U-shaped supporting frame 261 (two side rods of the U-shaped grabbing rod 262 extend into the side rods of the hollow U-shaped supporting frame 261), and the grabbing rod 262 and the supporting frame 261 form a rectangular frame structure;
the horizontal driving part 12 drives the horizontal sliding seat 21 to move on the horizontal sliding rail 11;
the lifting driving piece 23 drives the vertical sliding seat 24 to move on the vertical sliding rail 22;
the rotary drive 27 drives two parallel, horizontally arranged rotary shafts 25 in opposite directions.
As shown in fig. 4, two parallel horizontally arranged turning shafts 25 are connected by a spring 28, and the spring 28 applies a pulling force to the turning shafts 25 to restore the original state.
The wafer box transmission device of this embodiment, the frame 26 that snatchs of mated rectangle frame construction can rotate to opposite direction under the rotation of rotary driving piece 27, and can support and lean on the side flange of wafer box, it snatchs the pole 262 by the U-shaped of fixing on support frame 261 that stretches into in the U-shaped support frame 261 through fastening nut 263 and constitutes to snatch the frame 26, the U-shaped pole 262 of snatching is changed according to the condition of the washing liquid that actual need used to the pole 262 and is snatched the pole 262 and can be grasped with the washing liquid and form the cooperation relation, make the U-shaped pole 262 of snatching can use the washing liquid of different acid-base.
The rotary driving member 27 may drive the rotary shaft 25 to rotate for several minutes, and may drive the rotary wheel on the rotary shaft 25 to rotate through gear transmission or through driving an inclined block having an inclined surface, thereby driving the rotary shaft 25 to rotate.
As shown in fig. 2, the grabbing frame 26 is vertically downward, which is an initial state, when the rotating driving member 27 drives the rotating shaft 25 to rotate the two grabbing frames 26 in opposite directions, the two grabbing frames 26 are away from each other below, the wafer cassette can be placed between the two grabbing frames 26, the lifting driving member 23 drives the vertical sliding seat 24 to lift and further drive the wafer cassette to ascend or descend, the wafer cassette is sent into different cleaning tanks to be used for transporting the wafer cassette, and the horizontal driving member 12 drives the horizontal sliding seat 21 to move on the horizontal sliding rail 11 to realize horizontal transportation of the wafer cassette.
The number of the manipulator assemblies 2 is 3, and the manipulator assemblies are arranged on the horizontal mounting frame 1 side by side as shown in fig. 1.
In order to prevent other parts from colliding with the mechanical arm assembly 2, the tension pull wire 3 is arranged around the mechanical arm assembly 2, one end of the pull wire 3 is fixed, the other end of the pull wire 3 is connected with the tension sensor, once a part collides with the pull wire 3, the tension sensor senses tension increase after the pull wire 3 deforms, and the horizontal driving part 12 and the lifting driving part 23 are controlled to be powered off, so that the action mechanism is prevented from further action. The wire 3 is guided by a guide pulley to restrict the position of the wire 3.
Preferably, the horizontal mounting rack 1 and the horizontal sliding rail 11 are divided into a plurality of sections, and each section of the horizontal sliding rail 11 is provided with a manipulator assembly 2.
As shown in fig. 1, there are 3 segments, each segment corresponds to a cleaning device, and the robot assembly 2 is used for conveying the wafer basket from both ends of each segment of the horizontal slide rail 11.
The U-shaped grabbing rod 262 can be made of stainless steel, and different materials can be selected for the U-shaped grabbing rod 262 according to different cleaning liquids.
The cassettes described in this application may be cassettes as shown in US05378686 or TW084105930, but may of course be cassettes of other shapes, requiring side flanges which can engage with the gripping frame of the rectangular frame structure.
In light of the foregoing description of the preferred embodiments according to the present application, it is to be understood that various changes and modifications may be made without departing from the spirit and scope of the invention. The technical scope of the present application is not limited to the contents of the specification, and must be determined according to the scope of the claims.
Claims (7)
1. A wafer cassette transport mechanism, comprising:
the horizontal mounting rack (1) is provided with a horizontal sliding rail (11);
the manipulator assembly (2) comprises a horizontal sliding seat (21) arranged on a horizontal sliding rail (11), a vertical sliding rail (22) is arranged on the horizontal sliding seat (21), and a vertical sliding seat (24) is arranged on the vertical sliding rail (22);
the vertical sliding seat (24) is provided with two parallel rotating shafts (25) which are horizontally arranged, the rotating shafts (25) are respectively provided with a grabbing frame (26), each grabbing frame (26) comprises a U-shaped supporting frame (261), a U-shaped grabbing rod (262) which is fixed on the supporting frame (261) through a fastening nut (263) and extends into the U-shaped supporting frame (261) is fixed on the supporting frame (261), and the grabbing rod (262) and the supporting frame (261) form a rectangular frame structure;
the horizontal driving piece (12) drives the horizontal sliding seat (21) to move on the horizontal sliding rail (11);
the lifting driving piece (23) drives the vertical sliding seat (24) to move on the vertical sliding rail (22);
the rotary drive (27) drives two parallel, horizontally arranged rotary shafts (25) in opposite directions.
2. The wafer cassette transport mechanism of claim 1,
two side rods of the U-shaped grabbing rod (262) extend into side rods of the hollow U-shaped supporting frame (261), and the exposed length of the U-shaped grabbing rod (262) can be adjusted by adjusting the extending amount.
3. The cassette transfer mechanism according to claim 1, wherein two parallel horizontally arranged rotary shafts (25) are connected by a spring (28), the spring (28) applying a pulling force to the rotary shafts (25) to restore the original state.
4. The wafer cassette transfer mechanism according to claim 1, wherein the robot assembly (2) is provided in a plurality of numbers, side by side, on the horizontal mounting frame (1).
5. The wafer cassette transfer mechanism according to claim 1, wherein a tension wire (3) is disposed around the robot assembly (2), one end of the tension wire (3) is fixed, and the other end is connected to a tension sensor.
6. The wafer cassette transport mechanism of claim 1,
horizontal mounting bracket (1) and horizontal slide rail (11) divide into a plurality of sections, all are provided with a manipulator subassembly (2) on every section horizontal slide rail (11).
7. The pod transfer mechanism of claim 1, wherein the U-shaped gripper bar (262) is stainless steel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021007239.9U CN211929456U (en) | 2020-06-04 | 2020-06-04 | Wafer box transmission mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021007239.9U CN211929456U (en) | 2020-06-04 | 2020-06-04 | Wafer box transmission mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211929456U true CN211929456U (en) | 2020-11-13 |
Family
ID=73320406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021007239.9U Active CN211929456U (en) | 2020-06-04 | 2020-06-04 | Wafer box transmission mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211929456U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112885758A (en) * | 2020-12-31 | 2021-06-01 | 至微半导体(上海)有限公司 | Push-pull type wafer box conveying method of wafer cleaning equipment |
| CN114267610A (en) * | 2021-12-01 | 2022-04-01 | 智程半导体设备科技(昆山)有限公司 | Wafer basket clamping anti-drop manipulator with alarm function |
-
2020
- 2020-06-04 CN CN202021007239.9U patent/CN211929456U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112885758A (en) * | 2020-12-31 | 2021-06-01 | 至微半导体(上海)有限公司 | Push-pull type wafer box conveying method of wafer cleaning equipment |
| CN112885758B (en) * | 2020-12-31 | 2022-11-18 | 至微半导体(上海)有限公司 | Push-pull type wafer box conveying method of wafer cleaning equipment |
| CN114267610A (en) * | 2021-12-01 | 2022-04-01 | 智程半导体设备科技(昆山)有限公司 | Wafer basket clamping anti-drop manipulator with alarm function |
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