CN211924623U - Protection device, driving equipment, scanning equipment and semiconductor machine - Google Patents

Abstract

The utility model relates to a protective device, a driving device, a scanning device and a semiconductor machine platform; the semiconductor machine comprises a loader and scanning equipment, wherein the scanning equipment is arranged on one side of the loader; the scanning equipment comprises driving equipment, a connecting plate and a sensor, wherein the sensor is arranged on the connecting plate; the driving device comprises a cylinder and a protection device; the cover of the protective device is detachably connected with the cylinder barrel of the air cylinder, and the opening of the inner cavity of the cover faces the cylinder barrel so as to block impurities generated by air leakage at the connecting part of the piston rod and the cylinder barrel; the piston rod of the cylinder extends out of the cylinder barrel and further passes through the cover to be fixedly connected with the connecting plate so as to drive the connecting plate to be close to or far away from the loader, and the sensor can detect the semiconductor substrate on the loader when the connecting plate is close to the loader. The utility model has the advantages that, when the cylinder leaks gas, block the impurity that gas leakage produced through protector to protection product quality and product safety especially avoid the influence to the wafer after wasing.

Description

Protection device, driving equipment, scanning equipment and semiconductor machine

Technical Field

The utility model relates to the field of semiconductor technology, concretely relates to protector, drive arrangement, scanning equipment and semiconductor board.

Background

During storage, loading and unloading of wafers, and after each processing step, contaminants, such as particles, metal ions, organics, etc., are typically left on the wafers. Therefore, the cleaning process is very important for the processing of the wafer. Wet cleaning has become a critical process in wafer production. The most common wet cleaning equipment is a DNS machine table, which can realize batch cleaning and has high cleaning efficiency.

The existing DNS machine is provided with a receiving end, which includes a carrier, and can place wafers, and the number of wafers on the carrier can be scanned by a wafer number scanning device, and the scanning process is performed before and after cleaning. The existing wafer quantity scanning device comprises an air cylinder and a detection arm, wherein the air cylinder drives the detection arm to do linear reciprocating motion, and the quantity of wafers mounted on a loader is detected through detection of laser beams. However, in the actual use process, the air cylinder is prone to air leakage, which causes particles to be blown to the surface of the wafer, which results in the wafer being discarded, especially the cleaned wafer.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problem, an object of the utility model is to provide a protector, drive arrangement, scanning equipment and semiconductor board, if the cylinder leaks gas, can block through protector that the impurity that gas leakage produced blows to the target object to protection product quality and product safety.

In order to achieve the above object, the utility model provides a protector is used for setting up the one end at the cylinder of cylinder to block the impurity that the position gas leakage that piston rod and cylinder are connected produced, and protector including be used for with the connection can be dismantled to the cylinder lid, the lid has one end open-ended inner chamber, the bottom of inner chamber is provided with the permission the centre bore that the piston rod passes through.

Optionally, the guard further comprises a sealing ring for sealing the piston rod at the central bore.

Optionally, the protection device further includes a pressing block detachably connected to the cover, the pressing block has a through hole allowing the piston rod to pass through, and the sealing ring is disposed between the pressing block and the cover.

Optionally, the protection device further comprises a screw, the pressing block and the cover are both provided with a connecting hole, and the screw sequentially penetrates through the connecting hole of the pressing block and the connecting hole of the cover and then is connected with a reserved threaded hole on the cylinder barrel.

Optionally, the protection device includes two screws, the pressing block and the cover both have two connecting holes, the two connecting holes of the pressing block are symmetrically arranged on two sides of the through hole, and the two connecting holes of the cover are symmetrically arranged on two sides of the central hole.

Optionally, the protection device further comprises an air exhaust pipe for exhausting air from a position where the piston rod is connected with the cylinder.

In order to achieve the above object, the present invention provides a driving device, which includes a cylinder and any one of the protection devices; the cylinder comprises a cylinder barrel, a piston in sliding fit with the inner wall of the cylinder barrel and a piston rod with one end extending into the cylinder barrel and connected with the piston; the cover of the protection device is arranged at one end of the cylinder barrel, the other end of the piston rod extends out of the cylinder barrel and further penetrates through the cover, and the inner cavity of the cover faces towards the cylinder barrel.

Optionally, a groove is formed in the side wall of the cylinder barrel, and the groove is communicated with the inner cavity of the cover.

In order to achieve the above object, the utility model provides a scanning device, including any drive arrangement, scanning device still includes connecting plate and sensor, the connecting plate stretches out the part fixed connection of cylinder with the piston rod, the sensor sets up on the connecting plate.

Optionally, the sensor is configured to detect a wafer on a carrier.

In order to achieve the above object, the present invention provides a semiconductor machine, including any one of the above scanning devices, the semiconductor machine further includes a carrier for carrying a semiconductor substrate; the scanning device is arranged on one side of the loader and drives the connecting plate to be close to or far away from the loader through the driving device; the sensor is used for detecting the semiconductor substrate when the connecting plate is close to the loader.

Optionally, the semiconductor machine is a cleaning machine.

The utility model provides a protector has at least one in the following advantage:

firstly, the cover in the protection device can block impurities generated by air leakage of the cylinder barrel, so that the safety of products and the processing quality of the products are protected;

secondly, the protection device also comprises a sealing ring, so that the part where the piston rod is connected with the cover can be further sealed, and the blocking effect is better;

thirdly, the protection device also comprises a pressing block, so that the sealing ring can be conveniently and firmly pressed between the pressing block and the cover to prevent the sealing ring from moving;

fourthly, the protective device can fix the cover and the pressing block through the threaded hole reserved on the cylinder barrel, the cylinder barrel does not need to be changed, the use cost can be reduced, the structure is simple, and the disassembly and the assembly are convenient;

fifthly, the protection device can further comprise an exhaust tube, the part where the piston rod is connected with the cylinder barrel is exhausted, impurities generated by air leakage can be further prevented from blowing to the front of the cylinder, and the protection effect is better.

Further, the utility model provides a semiconductor board passes through protector and can avoid the wafer surface to produce the defect to reduce the disability rate of wafer, especially the disability rate of the wafer after wasing, thereby reduction in production cost.

Drawings

The accompanying drawings are included to provide a further understanding of the invention, and are not intended to be unduly limiting of the invention. Wherein:

fig. 1 is an exploded schematic view of a driving apparatus according to a preferred embodiment of the present invention;

fig. 2 is an assembly schematic view of the drive apparatus of the preferred embodiment of the present invention;

fig. 3 is a schematic structural view of a cover according to a preferred embodiment of the present invention;

FIG. 4 is a schematic structural diagram of a briquette according to a preferred embodiment of the present invention;

fig. 5 is a schematic structural diagram of a scanning device according to a preferred embodiment of the present invention;

fig. 6 is a schematic structural diagram of a semiconductor device according to a preferred embodiment of the present invention.

The reference numerals are explained below:

100-a drive device; 110-cylinder; 120-a guard; 111-a cylinder barrel; 112-a piston rod; 113-a trench; 121-a lid; 122-a central hole; 123. 128-connection hole; 124-screw; 125-sealing ring; 126-briquetting; 127-a through hole; 129-an air extraction pipe; 200-a scanning device; 210-a connecting plate; 220-a sensor; 230-a nut; 300-a semiconductor machine; 310-carrier.

The same or similar reference numbers in the drawings identify the same or similar elements.

Detailed Description

In the description of the present invention, it is to be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.

In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise. In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

Fig. 1 is an exploded schematic view of a driving apparatus according to a preferred embodiment of the present invention, and fig. 2 is an assembled schematic view of the driving apparatus according to the preferred embodiment of the present invention. As shown in fig. 1 to 2, the present embodiment provides a driving apparatus 100 for driving an object to perform a reciprocating linear motion. The drive device 100 comprises in particular a cylinder 110 and a guard 120. The cylinder 110 includes: a cylinder 111; a piston (not shown) slidably fitted to an inner wall of the cylinder 111; and one end of the piston rod 112 extends into the cylinder 111 and is connected with the piston, and the other end of the piston rod 112 extends out of the cylinder 111.

In the prior art, the portion of the piston rod 112 engaged with the cylinder 111 is prone to air leakage, which causes particles to blow toward the wafer at the receiving end of the DNS machine after air leakage, resulting in wafer scrap. For this reason, the inventor provides the guard device 120 outside the front end of the cylinder 111, and if the cylinder 111 leaks air, the guard device 120 can block particles generated by the air leakage from blowing toward the wafer or other important products. It should be understood that the driving apparatus 100 of the present embodiment is not limited to be used on a semiconductor cleaning machine, such as a DNS machine, and other semiconductor machines that need to realize the linear reciprocating motion of an object can be used. The front end of the cylinder 111 is an end through which the piston rod 112 passes.

The guard 120 includes a cover 121 removably connected to the cylinder 111. The cover 121 has an inner cavity having an open end, and the inner cavity is open toward the cylinder 111 to block impurities (e.g., particles) generated by the air leakage of the cylinder 111, thereby preventing the impurities from being blown to the front of the cylinder 110, thereby preventing the impurities from affecting products in front of the cylinder. And because lid 121 has the inner chamber, can also cushion the gas that leaks, ensure safety and the reliability of using. The detachable connection of the cover 121 to the cylinder 111 is not limited. Preferably, the cover 121 is in threaded connection with the cylinder 111, so that the structure is simple and the operation is convenient. More preferably, the screw connection of the cap 121 to the cylinder 111 is achieved by means of one or more threaded holes reserved on the front end of the cylinder 111.

The present invention does not limit the size of the lid 121, as long as the gas leaking from the front end of the cylinder 111 can be effectively blocked. The utility model discloses do not do the restriction to the shape of lid 121 yet, preferred, the cross sectional shape of lid 121 is the rectangle, simple structure, and processing is convenient. Further to save material and reduce cost, the cross-sectional dimension of the cover 121 is equal to the cross-sectional dimension of the cylinder 111 or slightly larger than the cross-sectional dimension of the cylinder 111. Specifically, the cross-sectional dimension of the cylinder 111 is defined by its width and height, and the cross-sectional dimension of the cover 121 is defined by its length and width, wherein the length of the cover 121 may be equal to the height of the cylinder 111 and the width of the cover 121 may be equal to the width of the cylinder 111.

The side wall of the cylinder 111 is generally provided with a groove 113, and the groove 113 extends along the length direction of the cylinder 111 and extends from the front end to the rear end of the cylinder 111. In this embodiment, the interior cavity of the cap 121 is preferably in communication with the channel 113 so that leaking gas can escape through the channel 113. As shown in fig. 1, under the blockage of the lid 121, the leaked gas may enter the groove 113 in the directions shown by the arrows, thereby achieving the directional discharge of the gas. In this embodiment, two grooves 113 are respectively disposed on two opposite sidewalls of the cylinder 111, and in a projection perpendicular to the axial direction of the cylinder 111, each groove 113 partially overlaps with the inner cavity of the cover 121, so that the gas entering the inner cavity is directly discharged through the groove 113.

Fig. 3 is a schematic structural diagram of a cover according to a preferred embodiment of the present invention. As shown in fig. 3, the cap 121 is a hollow housing and has a central hole 122 for allowing the piston rod 121 to pass through, and the central hole 122 is movably engaged with the piston rod 121. Two connecting holes 123 are preferably formed at both sides of the central hole 122, and the two connecting holes 123 may be symmetrically formed. In actual assembly, as long as two screws 124 (see fig. 1 and 2) are sequentially inserted into the connecting hole 123 on the cover 121 and the threaded hole reserved on the cylinder 111, the cover 121 and the cylinder 111 can be locked, the assembly is very convenient, the structure of the cylinder 111 does not need to be modified, and the use cost is reduced. The utility model discloses do not do the restriction to the quantity of attached screw, including not limiting to two, can also be more than two or one, specifically look available screw hole on the cylinder and set up.

The protecting device 120 preferably further includes a sealing ring 125 and a pressing block 126, the pressing block 126 is disposed on the piston rod 121 and is disposed on a side of the cover 121 away from the cylinder 111, and the sealing ring 125 is also disposed on the piston rod 121 and is located between the cover 121 and the pressing block 126. The sealing ring 125 may further seal the piston rod 112 at the central hole 122 of the cap 121 to prevent further gas leakage. The pressing block 126 is used for pressing the sealing ring 125, preventing the sealing ring 125 from shifting, and ensuring the effectiveness and reliability of sealing. In some embodiments, the pressure piece 126 may be removably coupled to the cap 121, and the cap 121 may be removably coupled to the cylinder 111. In an alternative embodiment, the pressure piece 126, the cover 121 and the cylinder 111 are all detachably connected together. For example, as shown in fig. 4, the pressing piece 126 may be a plate member provided with a through hole 127 for allowing the piston rod 121 to pass therethrough, and the through hole 127 is movably engaged with the piston rod 121. Two connecting holes 128 are preferably formed at both sides of the through hole 127, and the two connecting holes 128 are also symmetrically formed. In actual assembly, two screws 124 are inserted into the connecting hole 128 of the pressing block 126, the connecting hole 123 of the cover 121 and the threaded hole reserved on the cylinder 111 in sequence, so that the pressing block 126, the cover 121 and the cylinder 111 can be locked at the same time, and the sealing ring 125 is pressed between the pressing block 126 and the cover 121. In other embodiments, the press piece 126 may be eliminated and the seal 125 may be secured by known techniques to prevent displacement of the seal 125, such as by being secured to the cap 121 in a male-female fit and sealing the piston rod 112 at the central bore 122.

The cover 121 and the pressing block 126 are made of metal, preferably aluminum alloy, and are convenient to process. The shape and size of the compact 126 are not limited. Further to save cost, the press block 126 is a rectangular flat plate member. Further preferably, the protection device 120 further includes an air exhaust pipe 129 (see fig. 2) for exhausting air from a portion where the piston rod 112 is connected to the cylinder 111 (i.e., the portion where the cylinder leaks air), so as to further prevent impurities generated by the air leakage from blowing to the front of the cylinder, and the protection effect is better. As shown in fig. 2, the suction pipe 129 is aligned with a portion where the cover 121 is coupled to the cylinder 111 to suck air at the portion. Further, the suction pipe 129 is connected to a suction pump (not shown), which may be a vacuum pump. The suction pipe 129 may be one, and if the available space permits, the suction pipe 129 may be provided in plural. The plurality of air exhaust pipes 129 can be aligned to the air leakage position in different directions to perform air exhaust in all directions at 360 degrees. Typically, the factory will have a plant end, and the pump-out line 129 is preferably connected to the plant end to facilitate the recovery of the leaked gas.

Further, the present embodiment also provides a scanning apparatus 200, as shown in fig. 5. The scanning apparatus 200 includes the driving apparatus 100 of the present embodiment, and the scanning apparatus 200 further includes a connection plate 210. The connecting plate 210 is fixedly connected with the portion of the piston rod 112 extending out of the cylinder 111, so that the piston rod 112 drives the connecting plate 210 to perform reciprocating linear motion. Wherein the scanning device 200 further comprises a sensor 220 arranged on the connection board 210. The utility model discloses do not limit to the effect of sensor 220, this scanning device 200 can be used in the occasion that has the concertina movement requirement. In a non-limiting embodiment, the sensor 200 may be an optical sensor, and detects the condition of the target object in front of the sensor 200 through the detection of the light beam, such as the number of detected target objects, the horizontal placement state of the target object, the breakage of the object, and the like. Therefore, the scanning device 200 can scan the number of wafers, scan the defects of the wafers, and detect the flat or inclined state of the wafers at a certain position

In practical application, when the connecting plate 210 is driven by the cylinder 110 to approach a target object, the sensor 220 is used for detecting the target object; when the connection plate 210 is driven by the cylinder 110 to be away from the target object, the sensor 220 does not operate, and the distance of the connection plate 210 does not cause interference with other devices.

The connection manner of the connection plate 210 and the piston 112 is not particularly limited. Optionally, the connecting plate 210 is sleeved on the piston rod 112, and both sides of the connecting plate are locked with the piston rod 112 through nuts 230. Accordingly, the surface of the piston rod 112 is formed with an external thread to facilitate the threaded connection with the nut 230. The shape of the web 210 is not required and includes, but is not limited to, the L-shape shown in fig. 5. In this embodiment, when the connecting plate 210 is an L-shaped member, the horizontal portion is fixedly connected to the piston rod 112, the vertical portion is disposed in parallel with the cylinder 111, and the sensor 220 is disposed on the vertical portion.

Further, the present embodiment also provides a semiconductor apparatus 300, as shown in fig. 6. The semiconductor tool 300 may be a cleaning tool for cleaning wafers or other semiconductor substrates. In this embodiment, the semiconductor apparatus 300 includes the scanning device 200 of this embodiment, and further includes a carrier 310 for carrying a semiconductor substrate, such as a wafer. The scanning apparatus 200 is disposed at one side of the carrier 310, the connection plate 210 is driven by the air cylinder 110 to move away from or close to the carrier 310, and the sensor 220 detects the semiconductor substrate on the carrier 310 when the connection plate 210 is close to the carrier 310.

The above description is only for the preferred embodiment of the present invention, and not for any limitation of the scope of the present invention, and any modification and modification made by those skilled in the art according to the above disclosure all belong to the protection scope of the present invention.

Claims (12)

1. A protection device is arranged at one end of a cylinder barrel of an air cylinder to block impurities generated by air leakage at a part where a piston rod is connected with the cylinder barrel.

2. The shield apparatus of claim 1, further comprising a seal for sealing the piston rod at the central bore.

3. The shield apparatus of claim 2, further comprising a press block for removable connection with the cover, the press block having a through hole for allowing passage of the piston rod, and the seal ring for being disposed between the press block and the cover.

4. The protection device according to claim 3, further comprising a screw, wherein the pressing block and the cover are provided with connecting holes, and the screw is connected with a threaded hole reserved on the cylinder barrel after sequentially passing through the connecting hole of the pressing block and the connecting hole of the cover.

5. The protective device according to claim 4, wherein the protective device comprises two screws, the pressing block and the cover are provided with two connecting holes, the two connecting holes of the pressing block are symmetrically arranged on two sides of the through hole, and the two connecting holes of the cover are symmetrically arranged on two sides of the central hole.

6. The shielding device according to any one of claims 1 to 5, further comprising an air suction pipe for sucking air from a portion where the piston rod is connected to the cylinder.

7. A drive apparatus comprising a cylinder and a guard as claimed in any one of claims 1 to 6; the cylinder comprises a cylinder barrel, a piston in sliding fit with the inner wall of the cylinder barrel and a piston rod with one end extending into the cylinder barrel and connected with the piston; the cover of the protection device is arranged at one end of the cylinder barrel, the other end of the piston rod extends out of the cylinder barrel and further penetrates through the cover, and the inner cavity of the cover faces towards the cylinder barrel.

8. The drive apparatus as claimed in claim 7, characterized in that a groove is provided on the side wall of the cylinder, said groove communicating with the inner cavity of the cover.

9. A scanning device comprising a drive device as claimed in claim 7 or 8, the scanning device further comprising a connection plate fixedly connected to the part of the piston rod extending out of the cylinder, and a sensor arranged on the connection plate.

10. The scanning apparatus of claim 9, wherein the sensor is configured to detect a wafer on a carrier.

11. A semiconductor tool comprising the scanning apparatus as claimed in claim 9 or 10, the semiconductor tool further comprising a carrier for carrying a semiconductor substrate; the scanning device is arranged on one side of the loader and drives the connecting plate to be close to or far away from the loader through the driving device; the sensor is used for detecting the semiconductor substrate when the connecting plate is close to the loader.

12. The semiconductor machine of claim 11, wherein the semiconductor machine is a cleaning machine.

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