CN211906961U - Macro-micro dual-drive precise positioning platform - Google Patents
Macro-micro dual-drive precise positioning platform Download PDFInfo
- Publication number
- CN211906961U CN211906961U CN201821717666.9U CN201821717666U CN211906961U CN 211906961 U CN211906961 U CN 211906961U CN 201821717666 U CN201821717666 U CN 201821717666U CN 211906961 U CN211906961 U CN 211906961U
- Authority
- CN
- China
- Prior art keywords
- macro
- micro
- guide rail
- motion
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
The utility model discloses a grand little dual drive precision positioning platform belongs to precision positioning technical field, including base, guide rail, platform, fixing base, grand little driver and stop gear, the welding of base bottom has the support column, the guide rail passes through hexagon socket head cap screw fixed connection at the base up end, and guide rail sliding connection has the slider, the platform passes through hexagon socket head cap screw fixed connection at the slider up end, the macro-motion scale grating is installed to slider one side, the macro-motion grating reading head is installed to guide rail one side, the micro-motion scale grating is installed to the slider opposite side, the micro-motion grating reading head is installed to the guide rail opposite side, the grand little driver is installed on the intervalve of fixing base, stop gear installs in the fixing base curb hole. The utility model discloses a contradiction between macro-micro dual drive solution large stroke and the high accuracy adopts two grating detection schemes, can realize positioning platform's full cut-off ring control in order to reach precision positioning.
Description
Technical Field
The utility model relates to a precision positioning technical field, concretely relates to grand little dual drive precision positioning platform.
Background
With the rapid development of the high-end equipment manufacturing industry, the fields of large-scale integrated circuits, precision machinery, precision machining, bio-mechanical engineering, aerospace machinery and the like have more and more urgent needs for precision positioning platforms with large stroke, high precision and quick response. The macro and micro dual-drive precise positioning platform solves the contradiction between large stroke and high precision in the precise positioning technology, and the macro and micro dual-drive precise positioning platform is more and more widely applied in engineering application.
At present, the existing macro-micro dual-drive precision positioning platform has the following defects: firstly, a macro-micro double structure is usually installed in a series-overlapping mode, so that the overall structure of a positioning platform becomes more complex, and meanwhile, due to the existence of installation errors, the macro-micro double positioning precision is very low; secondly, errors can be generated in the macro-motion structure and the micro-motion structure when the micro-motion structure is driven, the motion of the macro-motion structure can not be accurately positioned in the working space (usually micron-scale or nanometer-scale) of the micro-motion structure, and meanwhile, the micro-motion structure is difficult to accurately position to an ideal position when the micro-motion structure moves.
Therefore, in order to solve the contradiction between large stroke and high precision, a macro-micro dual-drive precision positioning platform is developed, so that the positioning platform has the advantages of large stroke, high precision, quick response and the like.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a macroscopically little dual drive precision positioning platform to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the present invention provides the following technical solutions: the utility model provides a macroscopical two drive precision positioning platform that declines, includes base, guide rail, platform, fixing base, macroscopical little driver and stop gear, its characterized in that: the welding of base bottom has the support column, the guide rail passes through hexagon socket head cap screw fixed connection at the base up end, and guide rail sliding connection has the slider, the platform passes through hexagon socket head cap screw fixed connection at the slider up end, macro-motion scale grating is installed to slider one side, macro-motion grating reading head is installed to guide rail one side, micro-motion scale grating is installed to the slider opposite side, micro-motion grating reading head is installed to the guide rail opposite side, fixing base fixed mounting is in base one end, macro-micro drive ware is installed on the intermediate hole of fixing base, and macro-micro drive ware output and platform one side fixed connection, stop gear installs in the fixing base curb hole, the welding of base left end has the support, support top fixed mounting has the computer, the welding of base lower extreme has the power supply box, macro-micro drive ware, stop, The computer, the macro-motion grating reading head and the micro-motion grating reading head are electrically connected with the power box;
the macro and micro driver comprises a shell, a macro moving coil framework, an inner magnetic yoke cylinder, a micro moving coil framework, a GMM rod, an output rod and an end cover, wherein an annular magnet is fixedly arranged on the inner wall of the shell, the macro moving coil framework is arranged inside the annular magnet, a macro moving coil is wound on the periphery of the macro moving coil framework, a magnetic yoke sleeve is clamped at the top end of the macro moving coil framework, a magnetic isolation sleeve is fixedly arranged inside the magnetic yoke sleeve, the inner magnetic yoke cylinder is arranged inside the magnetic isolation sleeve, the micro moving coil framework is arranged inside the inner magnetic yoke cylinder, a micro moving coil is wound on the periphery of the micro moving coil framework, the GMM rod is arranged inside the micro moving coil framework, magnetic conduction blocks are arranged at two ends of the GMM rod, a magnetic conduction cylinder is arranged at the top end of the micro moving coil framework, the output rod is arranged at the top end of the magnetic conduction blocks, and the, the output rod penetrates through the end cover, and a disc spring is arranged between the end cover and the output rod;
stop gear includes a sliding cylinder, iron core, piston, push rod, the inside fixed mounting of a sliding cylinder has the iron core, and is provided with the gas leakage hole on the sliding cylinder, the peripheral round trip of iron core has magnetic coil, there is the screw thread lid sliding connection one side of the sliding cylinder through threaded connection, and sliding cylinder sliding connection has the piston, the inside fixed mounting of piston one side has the steel sheet, and the piston opposite side is connected with the push rod, the push rod runs through the screw thread lid and has welded the fixed plate, the fixed plate other end contacts with end cover, magnetism isolating sleeve and yoke sleeve.
Preferably, the bottom end of the supporting column is fixedly provided with a shock pad.
Preferably, one side of the power box is hinged with a box door, and one side of the box door is provided with a handle.
Preferably, the number of the limiting mechanisms is two.
Preferably, the guide rail is provided with two mechanical limiting devices.
Preferably, the central axis of the fixing seat is on the same straight line with the central axis of the long edge of the guide rail base, and the threaded hole in the guide rail base is arranged on the central axis of the long edge of the guide rail base.
Compared with the prior art, the beneficial effects of the utility model are as follows:
1. the utility model solves the contradiction between large stroke and high precision by integrating macro motion and micro motion; the macro motion is realized by electrifying the macro motion coil, and the micro motion is realized by electrifying the micro motion coil, so that the positioning platform has the advantages of simple structure, large stroke, high positioning precision and the like.
2. The utility model discloses be provided with stop gear, can make macro motion stop at once, guarantee that macro motion's motion can accurate positioning to in the workspace of fine motion structure.
3. The utility model discloses a two grating detection schemes, the macro-motion displacement signal of macro-motion grating feedback, the fine motion grating feedback fine motion displacement signal realizes the full cut-off loop control of the accurate positioning platform of macro-micro dual drive through the computer.
Drawings
Fig. 1 is a schematic three-dimensional structure of the present invention;
FIG. 2 is a front view of the present invention;
fig. 3 is a top view of the present invention;
fig. 4 is a left side view of the present invention;
fig. 5 is a schematic view of the sectional structure of the macro and micro actuator of the present invention;
fig. 6 is a schematic sectional structural view of the limiting mechanism of the present invention;
fig. 7 is a top view of the guide rail of the present invention.
In the figure: 1-a handle; 2-a base; 3-fixing the base; 4-a scaffold; 5-a computer; 6-macro and micro driver; 7-a limiting mechanism; 8-socket head cap screw; 9-a platform; 10-a slide block; 11-a guide rail; 12-a support column; 13-a shock pad; 14-macro-motion grating reading head; 15-macro scale grating; 16-a mechanical stop device; 17-fixing the plate; 18-a power box; 19-a box door; 20-micro scale grating; 21-micro-motion grating reading head; 22-a ring magnet; 23-a housing; 24-a macro-moving coil skeleton; 25-a magnetic conduction block; 26-GMM rod; 27-a micro-motion coil; 28-macro-moving coil; 29-a magnetic shield sleeve; 30-an output rod; 31-a yoke sleeve; 32-end caps; 33-disc spring; 34-a magnetic conduction cylinder; 35-micro coil framework; 36-inner yoke barrel; 37-a screw cap; 38-a sliding cylinder; 39-a piston; 40-a magnetic coil; 41-iron core 42-steel sheet; 43-a push rod; 44-leakage holes; 45-hexagon socket head cap screw.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-7, the present invention provides a technical solution: the utility model provides a two drive precision positioning platforms of macro and micro, includes base 2, guide rail 11, platform 9, fixing base 3, macro and micro driver 6 and stop gear 7, its characterized in that: the bottom of the base 2 is welded with a support column 12, the guide rail 11 is fixedly connected with the upper end face of the base 2 through an inner hexagon bolt 45, the guide rail 11 is connected with a slider 10 in a sliding way, the platform 9 is fixedly connected with the upper end face of the slider 10 through an inner hexagon screw 8, a macro-motion scale grating 15 is installed on one side of the slider 10, a macro-motion grating reading head 14 is installed on one side of the guide rail, a micro-motion scale grating 20 is installed on the other side of the slider 10, a micro-motion grating reading head 21 is installed on the other side of the guide rail, the fixing base 3 is fixedly installed at one end of the base 2, the macro-micro driver 6 is installed on an intermediate hole of the fixing base 3, the output end of the macro-micro driver 6 is fixedly connected with one side of the platform 9, the limiting mechanism 7 is installed, a power box 18 is welded at the lower end of the base 2, and the macro and micro driver 6, the limiting mechanism 7, the computer 5, the macro grating reading head 14 and the micro grating reading head 21 are electrically connected with the power box 18;
the macro and micro driver 6 comprises a shell 23, a macro coil framework 24, an inner yoke barrel 36, a micro coil framework 35, a GMM rod 26, an output rod 30 and an end cover 32, the inner wall of the shell 23 is fixedly provided with an annular magnet 22, the macro coil framework 24 is placed inside the annular magnet 22, the macro coil framework 24 is peripherally wound with a macro coil 28, the top end of the macro coil framework 24 is connected with a yoke sleeve 31 in a clamping manner, the inside of the yoke sleeve 31 is fixedly provided with a magnetism isolating sleeve 29, the inner yoke barrel 36 is installed inside the magnetism isolating sleeve 29, the micro coil framework 35 is arranged inside the inner yoke barrel 36, the periphery of the micro coil framework 35 is wound with a micro coil 27, the GMM rod 26 is placed inside the micro coil framework 35, both ends of the GMM rod 26 are provided with magnetic conduction blocks 25, the top end of the micro coil framework 35 is provided with the magnetic conduction barrel 34, the output rod 30 is arranged at the top end of the magnetic conduction blocks 25, the end cover 32 is connected with the top end of the magnetism isolating sleeve 29 through threads, the output rod 30 penetrates through the end cover 32, and a disc spring 33 is arranged between the end cover 32 and the output rod 30;
The shock pad 13 is fixedly installed at the bottom end of the supporting column 12, so that the positioning platform 9 is kept stable to play a shock absorption role, and the precise positioning of the platform 9 is guaranteed.
The two limiting mechanisms 7 are arranged, so that the movement of the macro-motion component can be better limited.
The guide rail 11 is provided with two mechanical limiting devices 16, so that the reading head is prevented from colliding with two ends of the scale grating when the platform 9 moves, and the grating scale is prevented from being damaged.
The central axis of the fixed seat 3 is on the same straight line with the central axis of the long edge of the base of the guide rail 11, and the threaded hole in the base of the guide rail 11 is arranged on the central axis of the long edge of the base of the guide rail 11, so that the output displacement direction of the macro-micro driver 6 and the sliding direction of the guide rail 11 are on the same straight line.
The working principle is as follows: an ideal displacement value is set on the computer 5 in advance according to the requirement of the positioning platform 9, ideal macro-motion displacement and ideal micro-motion displacement are calculated through a related algorithm in the computer 5, then a macro-motion current signal and a micro-motion current signal are calculated according to the ideal macro-motion displacement and the ideal micro-motion displacement, the power box 18 is controlled by the computer 5 to supply the macro-motion current signal to the macro-motion coil 28, the macro-motion coil 28 is subjected to ampere force under a magnetic field formed by the annular magnet 22 after being electrified, so that the macro-motion coil framework 24 and all parts in the macro-motion coil framework and the macro-motion coil 28 move together along the axial direction, the platform 9 is pushed to move on the guide rail 11, the push rod 43 and the piston 39 are driven to move through the fixing plate 17, the macro-motion grating reading head 14 detects the macro-motion displacement of the platform 9 and feeds back to the computer 5, and the, calculating a macro-motion correction current signal, correcting macro-motion displacement, judging whether the power box 18 sends a limit current signal, when the feedback macro-motion displacement reaches the ideal macro-motion displacement, controlling the power box 18 to supply a limit power signal to the magnetic coil 40 in the limit mechanism 7 by the computer 5, magnetizing the iron core 41 after the magnetic coil 40 is electrified to generate huge magnetic force to suck the steel sheet 42, driving the push rod 43 and the fixed plate 17 to generate thrust opposite to the direction of the macro-motion to the end cover 32, the magnetism isolating sleeve 29 and the magnetic yoke sleeve 31 by the piston 39 so as to stop the macro-motion, controlling the power box 18 to supply a micro-motion current signal to the micro-motion coil 27 by the computer 5, enabling the micro-motion coil 27 to form a solenoid to be electrified, generating a magnetic field along the axial direction in the micro-motion coil 27, under the action of the magnetic field, enabling the GMM rod 26 to be subjected to elongation deformation to push the output, the output rod 30 is enabled to generate output displacement, so that the platform 9 is pushed to slightly move on the guide rail 11, the micro-motion grating reading head 21 detects the micro-motion displacement of the platform 9 and feeds the micro-motion displacement back to the computer 5, a micro-motion correction current signal is calculated by comparing the feedback micro-motion displacement with an ideal micro-motion displacement, the micro-motion displacement is corrected, the full closed-loop control of the computer 5 on the precision positioning platform 9 is realized, and finally the large-stroke high-precision positioning of the positioning platform 9 can be realized.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a two drive precision positioning platforms of macro and micro, includes base (2), guide rail (11), platform (9), fixing base (3), macro and micro driver (6) and stop gear (7), its characterized in that: the welding of base (2) bottom has support column (12), guide rail (11) are through hexagon socket head cap screw (45) fixed connection at base (2) up end, and guide rail (11) sliding connection has slider (10), platform (9) are through hexagon socket head cap screw (8) fixed connection at slider (10) up end, macro-motion scale grating (15) are installed to slider (10) one side, macro-motion grating reading head (14) are installed to guide rail one side, micro-motion scale grating (20) are installed to slider (10) opposite side, micro-motion grating reading head (21) are installed to the guide rail opposite side, fixing base (3) fixed mounting is in base (2) one end, macro-micro driver (6) are installed on the well centre of fixing base (3), and macro-micro driver (6) output and platform (9) one side fixed connection, stop gear (7) are installed in fixing base (3) lateral hole, the left end of the base (2) is welded with a support (4), the top end of the support (4) is fixedly provided with a computer (5), the lower end of the base (2) is welded with a power box (18), and the macro and micro driver (6), the limiting mechanism (7), the computer (5), the macro and micro grating reading head (14) and the micro grating reading head (21) are electrically connected with the power box (18);
the macro and micro driver (6) comprises an outer shell (23), a macro moving coil framework (24), an inner yoke barrel (36), a micro moving coil framework (35), a GMM rod (26), an output rod (30) and an end cover (32), wherein an annular magnet (22) is fixedly mounted on the inner wall of the outer shell (23), the macro moving coil framework (24) is placed inside the annular magnet (22), a macro moving coil (28) is wound on the periphery of the macro moving coil framework (24), a yoke sleeve (31) is clamped on the top end of the macro moving coil framework (24), a magnetic isolation sleeve (29) is fixedly mounted inside the yoke sleeve (31), the inner yoke barrel (36) is mounted inside the magnetic isolation sleeve (29), the micro moving coil framework (35) is arranged inside the inner yoke barrel (36), a micro moving coil (27) is wound on the periphery of the yoke framework (35), the GMM rod (26) is placed inside the micro moving coil framework (35), magnetic conduction blocks (25) are arranged at two ends of the GMM rod (26), a magnetic conduction cylinder (34) is arranged at the top end of the micro-motion coil framework (35), the output rod (30) is arranged at the top end of the magnetic conduction blocks (25), the end cover (32) is connected with the top end of the magnetic isolation sleeve (29) through threads, the output rod (30) penetrates through the end cover (32), and a disc spring (33) is arranged between the end cover (32) and the output rod (30);
stop gear (7) are including sliding cylinder (38), iron core (41), piston (39), push rod 43, sliding cylinder (38) inside fixed mounting has iron core (41), and is provided with air leakage hole (44) on sliding cylinder (38), iron core (41) periphery round joint has magnetic coil (40), sliding cylinder (38) one side has screw cap (37) through threaded connection, and sliding cylinder (38) sliding connection has piston (39), the inside fixed mounting in piston (39) one side has steel sheet (42), and piston (39) opposite side is connected with push rod (43), push rod (43) run through screw cap (37) welding has fixed plate (17), the fixed plate (17) other end contacts with end cover (32), magnetism isolation sleeve (29) and yoke sleeve (31).
2. The macro and micro dual drive precision positioning platform according to claim 1, characterized in that: and a shock pad (13) is fixedly mounted at the bottom end of the supporting column (12).
3. The macro and micro dual drive precision positioning platform according to claim 1, characterized in that: one side of the power box (18) is hinged with a box door (19), and one side of the box door (19) is provided with a handle (1).
4. The macro and micro dual drive precision positioning platform according to claim 1, characterized in that: the number of the limiting mechanisms (7) is two.
5. The macro and micro dual drive precision positioning platform according to claim 1, characterized in that: the guide rail (11) is provided with two mechanical limiting devices (16), and the number of the mechanical limiting devices (16) is two.
6. The macro and micro dual drive precision positioning platform according to claim 1, characterized in that: the central axis of the fixed seat (3) and the central axis of the long edge of the base of the guide rail (11) are on the same straight line, and the threaded hole in the base of the guide rail (11) is arranged on the central axis of the long edge of the base of the guide rail (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821717666.9U CN211906961U (en) | 2018-10-23 | 2018-10-23 | Macro-micro dual-drive precise positioning platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821717666.9U CN211906961U (en) | 2018-10-23 | 2018-10-23 | Macro-micro dual-drive precise positioning platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211906961U true CN211906961U (en) | 2020-11-10 |
Family
ID=73282092
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821717666.9U Expired - Fee Related CN211906961U (en) | 2018-10-23 | 2018-10-23 | Macro-micro dual-drive precise positioning platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211906961U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109243520A (en) * | 2018-10-23 | 2019-01-18 | 安徽理工大学 | The macro micro- double drive precisely locating platform of one kind and its control method |
-
2018
- 2018-10-23 CN CN201821717666.9U patent/CN211906961U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109243520A (en) * | 2018-10-23 | 2019-01-18 | 安徽理工大学 | The macro micro- double drive precisely locating platform of one kind and its control method |
| CN109243520B (en) * | 2018-10-23 | 2024-04-12 | 安徽理工大学 | Macro-micro dual-drive precise positioning platform and control method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN204566126U (en) | A kind of high accuracy truss-like gantry manipulator | |
| CN211906961U (en) | Macro-micro dual-drive precise positioning platform | |
| CN202753152U (en) | Tri-shaft servo digital control mechanical arm | |
| CN204381672U (en) | A kind of Splicing welding machine centralising device | |
| CN202517290U (en) | Four-hole-drill accurate positioning device for flange head of drive axle housing | |
| CN109243520B (en) | Macro-micro dual-drive precise positioning platform and control method thereof | |
| CN203569552U (en) | Auxiliary adjusting device used for high-efficient mounting of rack of pinion and rack climbing type vertical ship lift | |
| CN110993125A (en) | Divertor supporting structure convenient for controlling surface forming precision and assembling method | |
| CN101717040B (en) | Method for connecting circular track with bearing-rail beam of polar crane | |
| CN100437869C (en) | Spring hydraulic operating mechanism for high voltage circuit breaker | |
| CN202278393U (en) | Hydraulic clamping device for gear ring of rotary worktable | |
| CN207229509U (en) | A kind of oil cylinder stroke control device | |
| CN104002114A (en) | Vertical gesture adjusting mechanism for vertical assembling of large-diameter thin-wall part cylinder | |
| CN102371487A (en) | Rotary workbench gear ring hydraulic clamping device | |
| CN203245393U (en) | Hydraulic chuck overturning device | |
| CN202518981U (en) | Pneumatic climbing mechanism for linear bearings | |
| CN209288675U (en) | Bearing press mounting equipment | |
| CN102856142B (en) | Assembling tool for grid-control electron gun and assembling method thereof | |
| CN204458153U (en) | Common-rail injector and drive unit thereof | |
| CN209326956U (en) | A kind of pressure decay test platform of tunnel protection door and pressure decay test device comprising it | |
| CN207700804U (en) | A kind of planar movement stereo garage machinery positioning seat | |
| CN203254163U (en) | Static pressure thick guiding rail clamping device | |
| CN106180317B8 (en) | A kind of positioning device for CNC tube bending machine | |
| CN202510934U (en) | Base plate structure | |
| CN113954051B (en) | Industrial robot moving platform in explosion-proof environment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20201110 Termination date: 20211023 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |