CN211820620U - Piezoelectric driving device and equipment - Google Patents
Piezoelectric driving device and equipment Download PDFInfo
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- CN211820620U CN211820620U CN201921461934.XU CN201921461934U CN211820620U CN 211820620 U CN211820620 U CN 211820620U CN 201921461934 U CN201921461934 U CN 201921461934U CN 211820620 U CN211820620 U CN 211820620U
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Abstract
The utility model provides a piezoelectric drive device and equipment. Wherein, piezoelectric drive device includes: the piezoelectric actuator comprises a liquid loop unit, a piezoelectric actuating unit, a valve unit and an output unit; a liquid circuit unit for forming a liquid circuit, the liquid circuit unit including a circuit passage and a chamber which are communicated; wherein the chamber contains a piezoelectric actuation unit; and the chamber comprises an inlet and an outlet; a piezoelectric actuation unit for generating a volume change based on an inverse piezoelectric effect; the valve unit is arranged at the inlet and/or the outlet, so that the driving liquid generates preset kinetic energy along with the volume change; the output unit is positioned on the liquid loop unit and used for outputting kinetic energy. Adopt the technical scheme of the utility model, through with the setting of piezoelectricity drive unit in hydraulic pressure chamber, improved drive arrangement's frequency and drive power.
Description
Technical Field
The utility model relates to a piezoelectricity drive technical field, concretely relates to piezoelectricity drive arrangement and equipment.
Background
In recent years, piezoelectric driving has been widely noticed as a new development in the field of driving technology because of its advantages of fast response, high precision, anti-interference, simple structure, etc.
As shown in fig. 12, in the embodiment of the prior art, the piezoelectric portion 22 is disposed on an elastic sheet L, and when the piezoelectric portion 22 'is not deformed when no voltage is applied, the elastic sheet L' is not deformed; when the piezoelectric portion 22 is electrified to expand and deform, the driving spring plate L deforms to drive the liquid. The existing piezoelectric driving device has the defects that certain energy consumption loss often exists in the process of energy transmission and conversion, so that the generated kinetic energy cannot be completely utilized and the frequency is low; in addition, the elastic sheet is easy to damage in the reciprocating motion process, so that the reliability of the driving device is low; furthermore, the piezoelectric driving force is often small due to the limitation of the deformation of the elastic sheet, thereby limiting the application of the piezoelectric driving device.
SUMMERY OF THE UTILITY MODEL
In view of this, the embodiment of the present invention provides a piezoelectric driving device and an apparatus.
The utility model provides a piezoelectric drive device, piezoelectric drive device includes: the piezoelectric actuator comprises a liquid loop unit, a piezoelectric actuating unit, a valve unit and an output unit;
the liquid loop unit is used for forming a liquid loop and comprises a loop channel and a cavity which are communicated; wherein the content of the first and second substances,
the piezoelectric actuating unit is accommodated in the cavity; and the chamber comprises an inlet and an outlet;
the piezoelectric actuating unit is used for generating volume change based on the inverse piezoelectric effect;
the valve unit is arranged at the inlet and/or the outlet so that the liquid is driven to generate a preset kinetic energy as the volume changes;
the output unit is located on the liquid loop unit and used for outputting the kinetic energy.
Further, the valve unit includes a check valve unit to limit the liquid to generate kinetic energy in a preset direction.
Further, the output units are respectively located on the loop channels communicated with the inlet and the outlet of the chamber and used for respectively outputting the opposite kinetic energy.
Further, the piezoelectric actuation unit includes a piezoelectric portion and a control circuit.
Further, the piezoelectric actuation unit further includes: a limiting part;
the limiting portion is arranged in a preset limiting direction of the piezoelectric portion and used for limiting deformation of the piezoelectric actuating unit along the preset limiting direction.
Further, the limiting part is a rigid frame fixedly arranged at least along the limiting direction, and the limiting part is fixedly connected with the piezoelectric part through an elastic structure or an elastic material.
Further, the check valve unit includes an inlet valve and an outlet valve; the inlet valve is disposed at the inlet, and the outlet valve is disposed at the outlet; or
The one-way valve unit includes an inlet valve; the inlet valve is disposed at the inlet; or
The one-way valve unit includes an outlet valve; the outlet valve is disposed at the outlet.
Further, the valve unit also comprises a pressure valve unit and/or a flow valve unit.
Further, the piezoelectric portion includes a single piezoelectric sheet, a piezoelectric block, a laminated structure of piezoelectric sheets of the same polarity, and/or a laminated structure of piezoelectric sheets of opposite polarities.
Further, the output unit is of an impeller structure, a gear structure and/or a plunger structure.
Further, the liquid circuit unit is a sealed liquid circuit unit.
Further, the output unit is located on the loop channel.
The utility model provides an equipment, equipment includes above arbitrary piezoelectric drive arrangement.
Through adopting this piezoelectricity drive arrangement, through setting up the piezoelectricity drive unit in hydraulic pressure chamber, directly act on the deformation that the piezoelectricity actuating unit took place on liquid, reduced the loss in the energy transfer process, improved the utilization ratio in the energy transfer process, consequently improved drive arrangement's frequency and drive power.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments and the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic view of a first overall structure of a piezoelectric driving device according to an embodiment of the present invention;
fig. 2 is a schematic view of a second overall structure of a piezoelectric driving device according to an embodiment of the present invention;
fig. 3 is a schematic view of a third overall structure of a piezoelectric driving device according to an embodiment of the present invention;
fig. 4 is a fourth schematic overall structure diagram of a piezoelectric driving device according to an embodiment of the present invention;
fig. 5 is a schematic diagram of a fifth overall structure of a piezoelectric driving device according to an embodiment of the present invention;
fig. 6 is a schematic diagram of a sixth overall structure of a piezoelectric driving device according to an embodiment of the present invention;
fig. 7 is a schematic structural view of the working principle of the check valve unit provided in the embodiment of the present invention;
fig. 8A is a schematic view of a first structure of a check valve unit according to an embodiment of the present invention; fig. 8B is a second schematic structural diagram of the check valve unit according to the embodiment of the present invention; fig. 8C is a schematic diagram of a third structure of the check valve unit according to the embodiment of the present invention;
fig. 9A is a schematic view of a first structure of a piezoelectric portion according to an embodiment of the present invention; fig. 9B is a second schematic structural diagram of the piezoelectric portion according to the embodiment of the present invention; fig. 9C is a schematic diagram of a third structure of the piezoelectric portion according to the embodiment of the present invention; fig. 9D is a fourth schematic structural diagram of the piezoelectric portion according to the embodiment of the present invention;
fig. 10 is a fifth schematic structural diagram of the piezoelectric portion according to the embodiment of the present invention;
fig. 11A is a first enlarged partial cross-sectional view of the piezoelectric portion taken along a-a of the piezoelectric portion according to the embodiment of fig. 8; fig. 11B is a second enlarged partial view of the piezoelectric portion taken along the line a-a according to the embodiment of fig. 9;
fig. 12 is a schematic partial structural diagram of a conventional piezoelectric driving device according to an embodiment of the present invention.
Description of the symbols of the drawings: the piezoelectric actuator comprises a 10 piezoelectric driving device, a 11 liquid loop, a 12 piezoelectric actuating unit, a 13 one-way valve unit, a 14 output unit, a 111 loop channel, a 121 piezoelectric part, a 122 limiting part, 123 viscose glue, a 112 chamber, a 1121 inlet, an 1122 outlet, a F preset direction, an X width direction, a Y height direction and a Z thickness direction.
Detailed Description
In order to make the technical solution of the present invention better understood, the technical solution of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only embodiments divided by one unit of the present invention, not embodiments of a whole unit. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
As shown in fig. 1-6, embodiments of the present invention provide a piezoelectric driver 10. Specifically, the piezoelectric driving device can be used for realizing rotary driving and can also be used for realizing linear driving.
The piezoelectric driving device 10 includes: a liquid circuit unit 11, a piezoelectric actuation unit 12, a valve unit 13 and an output unit 14.
A liquid circuit unit 11 for forming a liquid circuit, the liquid circuit unit 11 including a circuit passage 111 and a chamber 112 communicating with each other.
In particular, the liquid circuit may be any structure capable of forming a liquid circuit, such as: forming a sealed chamber circuit (as shown in fig. 1-5), or forming a non-sealed chamber circuit (as shown in fig. 6). Preferably forming a sealed liquid circuit of a sealed chamber.
Specifically, the liquid circuit may be a single liquid circuit (as shown in fig. 1 to 6), or may be a plurality of liquid circuits (the drawings are omitted).
The liquid may be various types of liquids, such as: oil, water, and the like.
Wherein the chamber 112 houses the piezoelectric actuation unit 12; and the chamber 112 includes an inlet 1121 and an outlet 1122, the inlet 1121 and the outlet 1122 being in communication with the outlet and the inlet of the circuit channel 111, respectively.
Specifically, the piezoelectric actuating unit is accommodated in the cavity, the liquid is driven to generate kinetic energy through the volume change of the piezoelectric actuating unit, and the piezoelectric actuating unit is arranged in the cavity except for the liquid, so that the deformation generated by the piezoelectric actuating unit can be directly acted on the liquid, the loss in the energy transfer process is reduced, and the utilization rate in the energy transfer process is improved.
As described in the above embodiments, the liquid circuit may be one or more, and thus the chamber may be one or more, the circuit channel may be one or more, and the inlet and outlet of the corresponding chamber and circuit channel may be one or more. As shown in fig. 1-6, for ease of understanding, the present embodiment is further detailed by taking as an example a chamber, a circuit path, and the inlet and outlet of the chamber and circuit path.
A piezoelectric actuation unit 12 for changing a volume based on an inverse piezoelectric effect; the piezoelectric actuator unit 12 includes a piezoelectric portion 121 and a control circuit (omitted from the drawing) for the piezoelectric portion.
Specifically, the piezoelectric portion 121 may be designed into any shape as needed, and for convenience of understanding, the rectangular piezoelectric portion is taken as an example in the present embodiment for further detailed description.
Specifically, the material of the piezoelectric portion may be, but is not limited to, a piezoelectric single crystal such as: PMNT, rare earth hybrid PMNT; textured piezoelectric ceramics, such as: texturing PMNT; piezoelectric ceramics, such as: PZT, PMNT, rare earth hybrid PMNT, and other various piezoelectric materials now in existence or developed in the future.
The piezoelectric material has a piezoelectric effect, and an electric effect generated by the piezoelectric material due to deformation under stress is called a positive piezoelectric effect. The piezoelectric material is subjected to a deformation effect by applying a voltage, which is called an inverse piezoelectric effect. The driving device utilizes the inverse piezoelectric effect, when a voltage is applied to the piezoelectric part, the volume of the piezoelectric part is increased, and when the voltage is removed or the voltage in the opposite direction is applied, the volume of the piezoelectric part is restored or reduced, so that the volume change of the piezoelectric part can be utilized to drive liquid, and electric energy is converted into kinetic energy.
The piezoelectric portion 121 may take any form of construction now known or later developed. Specifically, it may include but is not limited to: a single piezoelectric patch 121 (as shown in fig. 9A), a piezoelectric block 121 (as shown in fig. 9B); a laminated structure of piezoelectric sheets of the same polarity (as shown in fig. 9C); and/or a stacked structure of opposite polarity piezoelectric sheets.
The laminated structure of the piezoelectric sheets with the same polarity includes a plurality of piezoelectric sheets 121 with the same polarity. In one embodiment, the stacked piezoelectric sheets may be adhered to each other by glue, and the number of layers of the piezoelectric sheets may be determined according to the working requirement.
The stacked structure of the opposite-polarity piezoelectric sheets includes opposite- polarity piezoelectric sheets 121A and 121B, and an elastic metal sheet 121C is disposed between the opposite- polarity piezoelectric sheets 121A and 121B, so that when a voltage is applied to the opposite- polarity piezoelectric sheets 121A and 121B, the opposite-polarity piezoelectric sheets are overlapped (for example, one piezoelectric sheet 121A is stretched in the width direction and one piezoelectric sheet 121B is compressed in the width direction), so as to increase the amount of deformation (as shown in fig. 9D).
For convenience of understanding, as shown in fig. 1 to 6, the present embodiment will be further described in detail by taking a stacked structure in which piezoelectric portions are piezoelectric sheets having the same polarity as each other as an example. In one embodiment, when the piezoelectric material is energized, multi-directional deformation may occur, such as: stretching in the length direction Y and compression in the width direction X and/or thickness direction Z; in some cases, it may be necessary that the piezoelectric portion deforms only in one predetermined direction, and therefore, a limiting portion 122 may be disposed in the piezoelectric portion 121 in the limiting direction to limit the deformation of the piezoelectric portion 121 along the predetermined direction, for example, as shown in fig. 10, in order to limit the deformation of the piezoelectric portion only in the height direction Y and not in the width direction X and/or the thickness direction Z, the limiting portion 122 may be disposed in the width direction X and/or the thickness direction Z of the piezoelectric portion, so that the entire piezoelectric unit does not deform in the width direction X and the thickness direction Z regardless of how the piezoelectric portion 121 deforms in the length direction.
As shown in fig. 11A or 11B, further, in an embodiment, the position-limiting portion 122 is a rigid position-limiting frame 122 fixedly disposed at least along the position-limiting direction (e.g., fixed on the inner wall of the hydraulic chamber 111), such as: the outer walls of the piezoelectric part along the width direction X and/or the thickness direction Z are respectively fixedly connected to the corresponding inner walls of the limiting frame 122 through elastic structures (e.g., springs) or elastic materials (e.g., adhesive 123), and taking the adhesive as an example, since the adhesive 123 has a certain elastic deformation, the deformation of the piezoelectric part 121 along the width direction X and/or the thickness direction Z can be counteracted. Specifically, as shown in fig. 11A, when the piezoelectric portion is compressively deformed in the width direction X; and as shown in fig. 11B, when the piezoelectric portion is subjected to tensile deformation in the width direction X, since the adhesive 123 has a certain amount of elastic deformation, the deformation in the width direction Z and/or the thickness direction is cancelled, so that the piezoelectric driving unit 12 is deformed only in the length direction Y.
And a valve unit 13 disposed at the inlet 1121 and/or the outlet 1122 so that the liquid generates a predetermined kinetic energy as the volume of the piezoelectric unit is changed.
In particular, the valve unit need not be located exactly at the outlet and/or inlet of the chamber, but may be located somewhere in the vicinity of the inlet and/or outlet.
Specifically, the valve unit 13 includes: the check valve unit is used for controlling the liquid to form kinetic energy in a preset direction F; the check valve unit 13 is a valve unit that controls one-way flow of fluid.
In particular, the check valve unit 13 may be a check valve unit that fixes a certain flow direction and/or a reversible check valve unit.
Besides, in one embodiment, the valve unit may further include:
a pressure valve unit for controlling the kinetic energy of the liquid to a preset pressure, such as: relief and/or pressure relief valves; and/or
Flow valve units that control a preset flow of liquid, such as: a throttle valve and/or a speed valve.
As shown in fig. 1 or 2, in one embodiment, the check valve unit 13 includes an inlet valve 131 and an outlet valve 132; the inlet valve 131 is provided at the inlet 1221, and the outlet valve 132 is provided at the outlet 1222; or the like, or, alternatively,
as shown in fig. 3, in one embodiment, the one-way valve unit, 13, includes an inlet valve 131, the inlet valve 131 being disposed at an inlet 1221; or the like, or, alternatively,
as shown in fig. 4, in one embodiment, the check valve unit 13 includes an outlet valve 132; the outlet valve 132 is provided at the outlet 1222.
Continuing with fig. 1 or 2, it is preferred that the one-way valve unit 13 includes an inlet valve 131 and an outlet valve 132, which, by the superposition of two one-way controls, can increase the kinetic energy generated by the liquid.
Specifically, the check valve unit may include, but is not limited to: as shown in fig. 8A, a Tesla valve (Tesla valve), that is, a structural design of a valve causes that an inlet of the check valve flows out less liquid than an outlet of the check valve, so that the liquid flows out from the outlet, and the inlet flows in more liquid than the outlet, so that the liquid flows in from the inlet, a non-diffuser valve (as shown in fig. 8B), and a senlin valve (as shown in fig. 8C), wherein the operation of each valve is based on the unidirectional control of the liquid flow realized after the piezoelectric part deforms to drive the liquid to generate kinetic energy, so that the operating frequencies of the valve and the piezoelectric part are coordinated, and the control accuracy of the driving device is improved; and/or certain valves that can only be shut off by one-way flow, and other one-way valves now available or developed in the future.
And an output unit 14, located on the fluid circuit unit, for converting hydraulic kinetic energy into driving force or directly transmitting the hydraulic kinetic energy to an external member to be driven (omitted from the drawing).
In a preferred embodiment, the output unit 14 is located on the loop channel 111.
Specifically, the output unit may include, but is not limited to: gear structures, impeller structures and/or plunger structures, and other various hydraulic output units now known or later developed.
The gear structure and the impeller structure are used for converting the hydraulic kinetic energy into a rotary driving force; and a plunger structure for converting the hydraulic kinetic energy into a linear driving force.
Taking the impeller structure as an example, liquid flow enters from the inlet of the impeller and flows out from the outlet, and kinetic energy generated by the liquid flow pushes the impeller to rotate, so that hydraulic kinetic energy is converted into rotary driving force.
As shown in fig. 1 to 6, when the piezoelectric plate is deformed due to volume increase, the liquid can only flow out from the outlet 1122 of the chamber through the one-way valve unit, so as to form kinetic energy in the preset direction F; when the volume of the piezoelectric actuating unit is restored or reduced, the liquid can only flow into the chamber from the inlet 1121 through the one-way valve unit, and then the kinetic energy in the preset direction F is still formed.
Specifically, the number of the output units 14 may be one (as shown in fig. 2 or 4) or multiple (as shown in fig. 1, 3, 5, or 6), and in a preferred embodiment, the number of the output units 14 is multiple, and the output units are respectively located on the loop channel 111 communicating with the inlet 1121 and the outlet 1122 of the chamber 112, and can respectively output opposite kinetic energies due to the opposite directions of the kinetic energies at the two locations. The bidirectional driving is realized through the same driving device, the loss of kinetic energy generated in the piezoelectric hydraulic driving process is reduced, and the utilization rate of the kinetic energy is improved.
Through adopting this piezoelectricity drive arrangement, with the holding of piezoelectricity actuating unit in the cavity, directly act on the deformation that piezoelectricity actuating unit took place on liquid, reduced the loss in the energy transfer process, improved the utilization ratio in the energy transfer process to the frequency and the hydraulic drive power of piezoelectricity drive arrangement have been improved.
In addition, since the transmission structure of the kinetic energy is reduced, the reliability of the driving device can be improved.
Embodiments of the present invention also provide an apparatus (omitting drawings) comprising at least one piezoelectric actuator as described in any one of the above.
In some preferred embodiments, the device may be an automated device or a semi-automated device.
It should be noted that the automated or semi-automated device may be applied to various fields, such as: industrial, educational, nursing, entertainment, or medical, among others.
In some preferred embodiments, robots (e.g., four-axis or six-axis manipulators, humanoid robots) can be considered advanced automation devices.
For the description of the piezoelectric actuator, reference is made to the above embodiments, and the description is not repeated here.
When an element is referred to as being "disposed on" or "contained within" another element, it can be fixed to the other element or movably coupled to the other element. When an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may be present. The terms "longitudinal," "lateral," "left," "right," "inner," "outer," and the like as used herein are for descriptive purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.
The term "and/or" herein is merely an association relationship describing an associated object, and means that three relationships may exist, for example: a and/or B may mean that A is present alone, A and B are present simultaneously, and B is present alone. In addition, the character "/" herein generally indicates that the former and latter related objects are in an "or" relationship.
The terms "first," "second," "third," and the like in the claims, in the description and in the drawings, if any, are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It will be appreciated that the data so used may be interchanged under appropriate circumstances such that the embodiments described herein may be practiced otherwise than as specifically illustrated or described herein. Furthermore, the terms "comprises," "comprising," and any variations thereof, are intended to cover non-exclusive inclusions. For example: a product or device that comprises a list of structures or modules, etc., is not necessarily limited to those structures or modules explicitly listed, but may include other structures or modules not explicitly listed or inherent to such product or device.
In the above embodiments, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to the related descriptions of other embodiments.
It should be noted that, as those skilled in the art should also appreciate, the embodiments described in the specification are preferred embodiments, and the structures and modules involved are not necessarily essential to the invention.
The above has described the piezoelectric driving device and the apparatus provided by the embodiments of the present invention in detail, but the description of the above embodiments is only used to help understand the method and the core idea of the present invention, and should not be understood as a limitation to the present invention. The technical scope of the present invention is to cover the changes or substitutions easily conceivable by those skilled in the art according to the idea of the present invention.
Claims (13)
1. A piezoelectric driving device, characterized by comprising: the piezoelectric actuator comprises a liquid loop unit, a piezoelectric actuating unit, a valve unit and an output unit;
the liquid loop unit is used for forming a liquid loop and comprises a loop channel and a cavity which are communicated; wherein the content of the first and second substances,
the piezoelectric actuating unit is accommodated in the cavity; and the chamber comprises an inlet and an outlet;
the piezoelectric actuating unit is used for generating volume change based on the inverse piezoelectric effect;
the valve unit is arranged at the inlet and/or the outlet so that the liquid is driven to generate a preset kinetic energy as the volume changes;
the output unit is located on the liquid loop unit and used for outputting the kinetic energy.
2. The piezoelectric driving apparatus according to claim 1, wherein the valve unit includes a one-way valve unit to restrict the liquid to generate a kinetic energy in a preset direction.
3. The piezoelectric driving apparatus according to claim 1 or 2, wherein the output unit is plural, respectively located on the circuit channels communicating with the inlet and the outlet of the chamber, for respectively outputting the kinetic energy in opposite directions.
4. The piezoelectric driving apparatus according to claim 1 or 2, wherein the piezoelectric actuation unit includes a piezoelectric portion and a control circuit.
5. The piezoelectric driving apparatus according to claim 4, wherein the piezoelectric actuation unit further comprises: a limiting part;
the limiting portion is arranged in a preset limiting direction of the piezoelectric portion and used for limiting deformation of the piezoelectric actuating unit along the preset limiting direction.
6. The piezoelectric driving apparatus according to claim 5, wherein the position-limiting portion is a rigid frame fixedly disposed at least along the position-limiting direction, and the position-limiting portion is fixedly connected to the piezoelectric portion through an elastic structure or an elastic material.
7. The piezoelectric driving apparatus according to claim 2, wherein the check valve unit includes an inlet valve and an outlet valve; the inlet valve is disposed at the inlet, and the outlet valve is disposed at the outlet; or
The one-way valve unit includes an inlet valve; the inlet valve is disposed at the inlet; or
The one-way valve unit includes an outlet valve; the outlet valve is disposed at the outlet.
8. The piezo-electric drive according to claim 2, characterized in that the valve unit further comprises a pressure valve unit and/or a flow valve unit.
9. The piezoelectric driving apparatus according to claim 4, wherein the piezoelectric portion includes a single piezoelectric sheet, a piezoelectric block, a laminated structure of same-polarity piezoelectric sheets, and/or a laminated structure of opposite-polarity piezoelectric sheets.
10. The piezoelectric drive according to claim 1 or 2, wherein the output unit is an impeller structure, a gear structure and/or a plunger structure.
11. A piezoelectric driving apparatus according to claim 1 or 2, wherein the liquid circuit unit is a sealed liquid circuit unit.
12. The piezoelectric driving apparatus according to claim 1 or 2, wherein the output unit is located on the return channel.
13. A device, characterized in that it comprises a piezoelectric drive according to any one of claims 1 to 12.
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| CN201921461934.XU CN211820620U (en) | 2019-09-04 | 2019-09-04 | Piezoelectric driving device and equipment |
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| CN110792746A (en) * | 2019-09-04 | 2020-02-14 | 南方电机科技有限公司 | Piezoelectric driving device and equipment |
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| CN110792746A (en) * | 2019-09-04 | 2020-02-14 | 南方电机科技有限公司 | Piezoelectric driving device and equipment |
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Effective date of registration: 20201124 Address after: 5F, building a, No. 28, Qinfu Road, Liuyue Jintang Industrial Zone, Henggang street, Longgang District, Shenzhen City, Guangdong Province Patentee after: ROBOTICS ROBOTICS (SHENZHEN) Ltd. Address before: 8 / F, Chih Shing Industrial Building, 16 hung to road, Kwun Tong, Kowloon Patentee before: Southern Motor Technology Co.,Ltd. |