CN211799894U - Local water washing type gas washing tower and wastewater recycling system thereof - Google Patents
Local water washing type gas washing tower and wastewater recycling system thereof Download PDFInfo
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- CN211799894U CN211799894U CN202020432646.8U CN202020432646U CN211799894U CN 211799894 U CN211799894 U CN 211799894U CN 202020432646 U CN202020432646 U CN 202020432646U CN 211799894 U CN211799894 U CN 211799894U
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Abstract
The utility model discloses a local washing formula gas washing tower and waste water recovery processing system thereof, waste water recovery processing system includes: a multi-media filter having a water inlet and a water outlet; the water inlet of the activated carbon filter is communicated with the water outlet of the multi-medium filter; an ion exchanger into which water discharged from the activated carbon filter enters. The multi-medium filter can remove the particulate matters which are not precipitated and are in a suspension state in the wastewater. The activated carbon filter can remove impurities such as colloid, suspended matters and the like contained in the wastewater. The ion exchanger can further remove various pollutant ions in the water, and meets the water quality standard of reuse water. The water treated by the wastewater recovery treatment system meets the quality standard of reuse water, can be recovered to a local water washing type gas washing tower for cyclic utilization, and achieves the purposes of energy conservation and emission reduction.
Description
Technical Field
The utility model relates to a water treatment technical field, more specifically say, relate to a local washing formula gas washing tower and waste water recovery processing system thereof.
Background
The local gas washing tower is an auxiliary machine used for processing waste gas nearby in the production equipment end of a semiconductor processing area for thin film, diffusion, etching and the like in a semiconductor manufacturing factory. The local gas scrubber is an important component of a waste gas treatment system in the semiconductor industry, and mainly plays a role in treating waste gas, steam and suspended particulate matters.
A Local water scrubbing tower (Wet Local Scrubber) is one of the Local gas scrubbing towers, and is mainly used for treating corrosive gas soluble in water. The local water washing type gas washing tower mainly washes by-products generated during the operation of the processing equipment and unreacted reaction gas by water supplied by a circulating pump, and then removes water-soluble gas or suspended particles. The discharge of the wash water of the local water wash gas scrubber is referred to as gas scrubber waste water.
The water consumption of the local water washing type gas washing tower accounts for about 20% of the production water consumption of a semiconductor factory, and waste water generated by the local water washing type gas washing tower is directly discharged after being simply treated in the prior art, so that not only is water resources wasted, but also the pipeline can be corroded by the waste water generated by the local water washing type gas washing tower.
In summary, how to effectively reduce the waste of water resources is a problem that needs to be solved urgently by those skilled in the art.
SUMMERY OF THE UTILITY MODEL
In view of this, the first objective of the present invention is to provide a wastewater recycling system, the structural design of which can effectively reduce the waste of water resources, and the second objective of the present invention is to provide a local water washing type gas washing tower comprising the above wastewater recycling system.
In order to achieve the first object, the present invention provides the following technical solutions:
a wastewater reclamation treatment system comprising:
a multi-media filter having a water inlet and a water outlet;
the water inlet of the activated carbon filter is communicated with the water outlet of the multi-medium filter;
an ion exchanger into which water discharged from the activated carbon filter enters.
Preferably, in the above wastewater recovery treatment system, the ion exchanger is a cation exchanger or an anion exchanger.
Preferably, in the above wastewater recycling system, the ion exchanger includes a cation exchanger and an anion exchanger, and a water outlet of the cation exchanger is communicated with a water inlet of the anion exchanger.
Preferably, the wastewater recovery and treatment system further comprises a relay water tank connected in series between the activated carbon filter and the ion exchanger, wherein a water outlet of the activated carbon filter is communicated with a water inlet of the relay water tank, and a water outlet of the relay water tank is communicated with a water inlet of the ion exchanger.
Preferably, the wastewater recovery processing system further comprises a first backwashing pipeline, a water inlet of the first backwashing pipeline is communicated with a backwashing water outlet of the relay water tank, and a water outlet of the first backwashing pipeline is communicated with a backwashing water inlet of the multimedia filter and/or a backwashing water inlet of the activated carbon filter.
Preferably, the wastewater recovery processing system further comprises a heat exchanger arranged at the upstream of the multi-media filter, wherein a cold water channel and a wastewater channel are arranged in the heat exchanger, and the heat exchanger is used for cooling wastewater before entering the multi-media filter.
Preferably, the above wastewater recycling system further includes a temperature detector for detecting a temperature of wastewater at an outlet of the wastewater channel of the heat exchanger, and a regulating valve for regulating a flow rate in the cold water channel.
Preferably, the wastewater recycling system further comprises a neutralization device arranged upstream of the heat exchanger, and an aeration component is arranged in the neutralization device.
Preferably, the wastewater recovery and treatment system further comprises a produced water storage device disposed downstream of the ion exchanger;
the water inlet of the second backwashing pipeline is communicated with a backwashing water outlet of the water production storage device, and a water outlet of the second backwashing pipeline is communicated with a backwashing water inlet of the ion exchanger.
A local water wash gas scrubber comprising a wastewater recovery treatment system as claimed in any one of the preceding claims.
When the wastewater recovery treatment system provided by the embodiment is applied, wastewater generated by the gas washing tower is sequentially treated by the multi-media filter, the activated carbon filter and the ion exchanger. The multi-medium filter can remove the particulate matters which are not precipitated and are in a suspension state in the wastewater. The activated carbon filter can remove impurities such as colloid, suspended matters and the like contained in the wastewater. The ion exchanger can further remove various pollutant ions in the water, and meets the water quality standard of reuse water.
The water treated by the wastewater recovery treatment system meets the quality standard of reuse water, can be recovered to a local water washing type gas washing tower for cyclic utilization, greatly reduces the waste of water resources, and realizes the purposes of energy conservation and emission reduction. The wastewater recovery treatment system is assembled at the use end of the local water washing type gas washing tower, so that the gas or suspended particle adsorption capacity of the gas washing tower can be improved, and the equipment efficiency is improved; the pollution degree of return water is greatly reduced at the recycling end, and the recycling value and the treatment cost are more beneficial; especially, the concentration of chloride ions is very low, the harm to metal corrosion is greatly reduced, and the service life of the existing pipeline is effectively protected.
Additionally, the utility model provides a waste water recovery processing system compact structure, area is little, and automatic operation goes out water stable in quality of water, all has obvious advantage on technical and economic nature index.
In order to achieve the second object, the present invention further provides a local water washing type gas scrubber comprising any one of the above wastewater recycling systems. Since the above wastewater recycling system has the above technical effects, the local water washing type gas scrubber with the wastewater recycling system should also have corresponding technical effects.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic view of a wastewater recycling system provided by an embodiment of the present invention.
In fig. 1:
1-neutralization device, 2-heat exchanger, 3-multi-medium filter, 4-activated carbon filter, 5-relay water pool, 6-cation exchanger, 7-anion exchanger and 8-produced water storage device.
Detailed Description
The utility model discloses a first aim at provides a waste water recovery processing system, this waste water recovery processing system's structural design can reduce the waste of water resource effectively, the utility model discloses a second aim at provides a local washing formula gas washing tower including above-mentioned waste water recovery processing system.
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left" and "right" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the indicated position or element must have a specific orientation, be constituted in a specific orientation, and be operated, and thus, are not to be construed as limitations of the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Referring to fig. 1, the wastewater recycling system provided by the present invention is mainly used for processing wastewater generated by a gas scrubber. The wastewater recovery treatment system comprises a multi-media filter 3, an activated carbon filter 4 and an ion exchanger. The multi-medium filter 3 is provided with a water inlet and a water outlet, and the wastewater enters and exits the multi-medium filter 3 through the inlet and the outlet of the multi-medium filter 3. The activated carbon filter 4 also has a water inlet and a water outlet, and the wastewater enters and exits the activated carbon filter 4 through the inlet and the outlet of the activated carbon filter 4. The water inlet of the activated carbon filter 4 is communicated with the water outlet of the multi-media filter 3, the wastewater treated by the multi-media filter 3 enters the activated carbon filter 4, and the activated carbon filter 4 is positioned at the downstream of the multi-media filter 3.
The ion exchanger is also provided with a water inlet and a water outlet, and the waste water enters and exits the ion exchanger through the inlet and the outlet of the ion exchanger. The water discharged from the activated carbon filter 4 enters an ion exchanger. Namely, the wastewater treated by the activated carbon filter 4 enters an ion exchanger, and the ion exchanger is positioned at the downstream of the activated carbon filter 4.
When the wastewater recovery treatment system provided by the embodiment is applied, wastewater generated by the gas washing tower is treated by the multi-media filter 3, the activated carbon filter 4 and the ion exchanger in sequence. The multimedia filter 3 can remove particulate matters which are not precipitated and are in a suspension state in the wastewater. The activated carbon filter 4 can remove impurities such as colloids and suspended matters contained in the wastewater. The ion exchanger can further remove various pollutant ions in the water, and meets the water quality standard of reuse water.
The water treated by the wastewater recovery treatment system meets the quality standard of reuse water, can be recovered to a local water washing type gas washing tower for cyclic utilization, greatly reduces the waste of water resources, and realizes the purposes of energy conservation and emission reduction. The wastewater recovery treatment system is assembled at the use end of the local water washing type gas washing tower, so that the gas or suspended particle adsorption capacity of the gas washing tower can be improved, and the equipment efficiency is improved; the pollution degree of return water is greatly reduced at the recycling end, and the recycling value and the treatment cost are more beneficial; especially, the concentration of chloride ions is very low, the harm to metal corrosion is greatly reduced, and the service life of the existing pipeline is effectively protected.
Additionally, the utility model provides a waste water recovery processing system compact structure, area is little, and automatic operation goes out water stable in quality of water, all has obvious advantage on technical and economic nature index.
In a specific embodiment, the ion exchanger may be a cation exchanger 6 or an anion exchanger 7.
Alternatively, the ion exchanger includes a cation exchanger 6 and an anion exchanger 7, and the water outlet of the cation exchanger 6 is communicated with the water inlet of the anion exchanger 7. I.e. the cation exchanger 6 is located upstream of the anion exchanger 7. The wastewater passes through a cation exchanger 6 and then an anion exchanger 7.
The cation exchanger 6 is provided with a water inlet, a water outlet, a backwashing water inlet, a backwashing water outlet, a regenerated liquid water inlet, a regenerated liquid water outlet and the like. The wastewater is pressurized by a pump and then sent into a cation exchanger 6, and the cation exchanger 6 mainly removes NH4 +And the like.
The anion exchanger 7 is provided with a water inlet and a water outlet, a backwashing water inlet, a backwashing water outlet, a regenerated liquid water inlet, a regenerated liquid water outlet and the like. The anion exchanger 7 removes mainly F-、Cl-And (4) plasma.
Additionally, the utility model provides a waste water recovery processing system is still including concatenating relay pool 5 between activated carbon filter 4 and ion exchanger, activated carbon filter 4's delivery port and relay pool 5's water inlet intercommunication, relay pool 5's delivery port and ion exchanger's water inlet intercommunication. So set up, the waste water that has handled through activated carbon filter 4 can be kept in relay pond 5 temporarily earlier.
Furthermore, the wastewater recovery treatment system also comprises a first backwashing pipeline, wherein the water inlet of the first backwashing pipeline is communicated with the backwashing water outlet of the relay water tank 5, and the water outlet of the first backwashing pipeline is communicated with the backwashing water inlet of the multimedia filter 3 and/or the backwashing water inlet of the activated carbon filter 4.
Specifically, the first backwashing pipeline is provided with a water inlet and two water outlets, the water inlet of the first backwashing pipeline is communicated with a backwashing water inlet of the relay water tank 5, and two water outlets of the first backwashing pipeline are respectively communicated with a backwashing water inlet of the multi-media filter 3 and a backwashing water inlet of the activated carbon filter 4. So arranged, the water of the relay water tank 5 enters the multi-media filter 3 and the activated carbon filter 4 through the first backwashing pipeline to backwash the multi-media filter 3 and the activated carbon filter 4. The first backwashing pipeline can be provided with a valve to control the opening and closing of the first backwashing pipeline.
Or the first backwashing pipeline is provided with a water inlet and a water outlet, the water inlet of the first backwashing pipeline is communicated with a backwashing water port of the relay water tank 5, and the outlet water of the first backwashing pipeline is communicated with a backwashing water port of the multimedia filter 3 or a backwashing water port of the activated carbon filter 4. So configured, the water in the relay water tank 5 enters the multimedia filter 3 or the activated carbon filter 4 through the first backwashing pipeline to backwash the multimedia filter 3 or the activated carbon filter 4.
The relay water tank 5 provides a backwashing water source for the multi-media filter 3 and the activated carbon filter 4.
The backwash water port of the relay water tank 5 and the water outlet of the relay water tank 5 may be the same communication port, or the backwash water port of the relay water tank 5 and the water outlet of the relay water tank 5 may be two communication ports, respectively, and is not limited herein.
The temperature of the wastewater discharged from the local water washing type gas washing tower is high, in order to reduce the temperature of the wastewater discharged from the local water washing type gas washing tower, the wastewater recycling treatment system further comprises a heat exchanger 2 arranged on the upstream of the multi-media filter 3, a cold water channel and a wastewater channel are arranged in the heat exchanger 2, and the heat exchanger 2 is used for cooling the wastewater before entering the multi-media filter 3. Namely, the waste water firstly enters the waste water channel of the heat exchanger 2, and enters the multi-media filter 3 after the heat exchange between the waste water channel and the cold water in the cold water channel.
The heat exchanger 2 comprises a waste water inlet, a waste water outlet, a cold water inlet and a cold water outlet, wherein the cold water inlet of the heat exchanger 2 is connected with a cold water inlet pipe, and the cold water outlet of the heat exchanger 2 is connected with a cold water return pipe.
Preferably, in the above embodiment, the temperature sensor and the regulating valve are further included. Wherein, the temperature detector is used for detecting the temperature of the waste water at the outlet of the waste water channel of the heat exchanger 2. The regulating valve is used for regulating the flow of cold water in the cold water channel. Therefore, according to the temperature of the waste water at the outlet of the waste water channel of the heat exchanger 2, the flow in the cold water channel is adjusted in time so as to ensure that the waste water cooled by the heat exchanger 2 is in a preset temperature range. Specifically, the temperature of the local water washing type gas scrubber waste water is reduced from 40 ℃ to 25 ℃ after heat exchange by the heat exchanger 2.
In the above embodiment, the wastewater recycling system may further include a neutralization device 1 disposed upstream of the heat exchanger 2, that is, the wastewater discharged from the local water washing type gas scrubber passes through the neutralization device 1 and then enters the heat exchanger 2. The wastewater is uniformly mixed in the homogenizing device 1 to achieve the purpose of homogenizing and homogenizing.
Specifically, the homogenizer 1 is provided with an aeration means. The wastewater is homogenized and uniformly measured under the action of aeration. Of course, the homogenizer 1 may be provided with a stirring member such as a stirring blade, and is not limited thereto.
In addition, the wastewater recovery processing system can also comprise a produced water storage device 8 arranged at the downstream of the ion exchanger. The produced water treated by the ion exchanger enters a produced water storage device 8 for storage.
Preferably, the system further comprises a second backwashing pipeline, the water inlet of the second backwashing pipeline is communicated with the backwashing water outlet of the water production storage device 8, and the outlet water of the second backwashing pipeline is communicated with the backwashing water inlet of the ion exchanger. The produced water storage device 8 provides a source of backwash water for the ion exchanger.
When the ion exchanger comprises a cation exchanger 6 and an anion exchanger 7, and the water outlet of the cation exchanger 6 is communicated with the water inlet of the anion exchanger 7.
The second backwashing pipeline is provided with a water inlet and two water outlets, the water inlet of the second backwashing pipeline is communicated with a backwashing water inlet of the water production storage device 8, and two water outlets of the second backwashing pipeline are respectively communicated with a backwashing water inlet of the cation exchanger 6 and a backwashing water inlet of the anion exchanger 7. So configured, the water of the produced water storage device 8 enters the cation exchanger 6 and the anion exchanger 7 through the second backwashing pipeline to backwash the cation exchanger 6 and the anion exchanger 7. A valve can be arranged on the second backwashing pipeline to control the opening and closing of the second backwashing pipeline.
Or the second backwashing pipeline is provided with a water inlet and a water outlet, the water inlet of the second backwashing pipeline is communicated with the backwashing water inlet of the water production storage device 8, and the outlet water of the second backwashing pipeline is communicated with the backwashing water inlet of the cation exchanger 6 or the backwashing water inlet of the anion exchanger 7. So configured, the water of the water production storage device 8 enters the cation exchanger 6 or the anion exchanger 7 through the second backwashing pipeline to backwash the cation exchanger 6 or the anion exchanger 7.
The backwash water port of the produced water storage device 8 and the water outlet of the produced water storage device 8 may be the same communication port, or the backwash water port of the produced water storage device 8 and the water outlet of the produced water storage device 8 are respectively two communication ports, which is not limited herein.
The resins of the cation exchanger 6 and the anion exchanger 7 are periodically cleaned and regenerated, so that the quality of the effluent is ensured to be continuous and stable. The relay water tank 5 provides a backwashing water source for the multi-medium filter 3 and the activated carbon filter 4; the water production storage device 8 provides water sources for the resin regeneration system and the backwashing system of the cation exchanger 6 and the anion exchanger 7 so as to achieve the purpose of saving water resources.
It should be noted that, in the wastewater recycling system provided by the present invention, a pressure pump may be disposed on the pipeline between the components to increase the circulation speed of water.
In one embodiment, the water source is the wastewater from a local water scrubbing gas scrubber of a semiconductor plant, and the main water quality indicators for the influent water are: pH of 2-10, conductivity of 500-2000 mu s/cm, F-:100～200mg/L、NH4 +:20～50mg/L、Cl-1-2 mg/L. When the wastewater recovery and treatment system is operated, the wastewater treatment capacity is set to 30m3H is used as the reference value. When the water temperature is about 25 ℃, the water quality of the produced water of the wastewater recovery treatment system is as follows: pH: 6.5-9, conductivity less than 10 mu s/cm, F-:＜1mg/L、NH4 +:＜5mg/L，Cl-:＜0.1mg/L。
Based on the waste water recovery processing system that provides in the above-mentioned embodiment, the utility model also provides a local water washing formula gas scrubber, this local water washing formula gas scrubber includes arbitrary waste water recovery processing system in the above-mentioned embodiment. Since the local water washing type gas scrubber employs the wastewater recycling system in the above embodiment, please refer to the above embodiment for the beneficial effects of the local water washing type gas scrubber.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
In the description herein, references to the description of "one embodiment," "an example," "a specific example," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The preferred embodiments of the present invention disclosed above are intended only to help illustrate the present invention. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and its practical applications, to thereby enable others skilled in the art to best understand the invention for and utilize the invention. The present invention is limited only by the claims and their full scope and equivalents.
Claims (10)
1. A wastewater reclamation treatment system, comprising:
a multimedia filter (3), the multimedia filter (3) having a water inlet and a water outlet;
the water inlet of the activated carbon filter (4) is communicated with the water outlet of the multi-medium filter (3);
an ion exchanger into which the water discharged from the activated carbon filter (4) enters.
2. The wastewater recovery treatment system according to claim 1, wherein said ion exchanger is a cation exchanger (6) or an anion exchanger (7).
3. The wastewater recovery treatment system according to claim 1, wherein the ion exchanger comprises a cation exchanger (6) and an anion exchanger (7), and the water outlet of the cation exchanger (6) is communicated with the water inlet of the anion exchanger (7).
4. The wastewater recovery treatment system according to claim 1, further comprising a relay tank (5) connected in series between the activated carbon filter (4) and the ion exchanger, wherein the water outlet of the activated carbon filter (4) is communicated with the water inlet of the relay tank (5), and the water outlet of the relay tank (5) is communicated with the water inlet of the ion exchanger.
5. The wastewater recovery treatment system according to claim 4, further comprising a first backwashing pipeline, wherein a water inlet of the first backwashing pipeline is communicated with a backwashing water outlet of the relay water tank (5), and a water outlet of the first backwashing pipeline is communicated with a backwashing water inlet of the multimedia filter (3) and/or a backwashing water inlet of the activated carbon filter (4).
6. The wastewater recycling treatment system according to claim 1, further comprising a heat exchanger (2) disposed upstream of the multi-media filter (3), wherein a cold water channel and a wastewater channel are disposed in the heat exchanger (2), and the heat exchanger (2) is used for cooling the wastewater before entering the multi-media filter (3).
7. The wastewater reclamation treatment system as recited in claim 6, further comprising a temperature detector for detecting a temperature of wastewater at an outlet of the wastewater channel of the heat exchanger (2) and a regulating valve for regulating a flow rate in the cold water channel.
8. A wastewater recovery treatment system according to claim 6, characterized by further comprising a homodyne device (1) arranged upstream of said heat exchanger (2), said homodyne device (1) being provided with aeration means.
9. The wastewater recovery treatment system according to claim 1, further comprising a produced water storage device (8) disposed downstream of said ion exchanger;
the water inlet of the second backwashing pipeline is communicated with a backwashing water outlet of the water production storage device (8), and the outlet water of the second backwashing pipeline is communicated with a backwashing water inlet of the ion exchanger.
10. A local water wash gas scrubber comprising a wastewater recovery treatment system as claimed in any one of claims 1 to 9.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202020432646.8U CN211799894U (en) | 2020-03-30 | 2020-03-30 | Local water washing type gas washing tower and wastewater recycling system thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202020432646.8U CN211799894U (en) | 2020-03-30 | 2020-03-30 | Local water washing type gas washing tower and wastewater recycling system thereof |
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| CN211799894U true CN211799894U (en) | 2020-10-30 |
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Address after: 101500 Kangbao Road, Industrial Development Zone, Miyun District, Beijing Patentee after: High Frequency (Beijing) Technology Co.,Ltd. Address before: 101500 Kangbao Road, Industrial Development Zone, Miyun District, Beijing Patentee before: TG HILYTE ENVIRONMENTAL TECHNOLOGY (BEIJING) CO.,LTD. |