CN211788942U - Workbench for improving product uniformity in etching process - Google Patents
Workbench for improving product uniformity in etching process Download PDFInfo
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- CN211788942U CN211788942U CN202021005388.1U CN202021005388U CN211788942U CN 211788942 U CN211788942 U CN 211788942U CN 202021005388 U CN202021005388 U CN 202021005388U CN 211788942 U CN211788942 U CN 211788942U
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Abstract
The utility model discloses an improve workstation of etching process product homogeneity, including reciprocating type drive arrangement, the even sprinkler of linking formula, conveyer belt, support frame and support column, the conveyer belt bottom is located to the support column, the conveyer belt both sides are located to the support frame, reciprocating type drive arrangement locates the support frame inboard, linking up the even sprinkler of formula and locating on reciprocating type drive arrangement, linking up the even sprinkler of formula and placing chamber, rotary turntable, rotating electrical machines, linking catch bar, sliding tray and sprinkler head including the carousel. The utility model belongs to the technical field of the etching, specifically be one kind can produce the rotatory effect of spraying that sprays in proper order one by one with the setting of fixed form, avoided etching solution to spout uneven and the different etching size that causes of dosage to produce the difference, improved product quality's improvement etching process product uniformity's workstation.
Description
Technical Field
The utility model belongs to the technical field of the etching, specifically indicate a workstation that improves etching process product homogeneity.
Background
Etching, also known as photochemical etching, is a technique for removing materials by using chemical reaction or physical impact, and can be divided into two types of wet etching and dry etching, generally referred to as photochemical etching, which means that after exposure plate making and development, a protective film of an area to be etched is removed, and a chemical solution is contacted during etching to achieve the effect of dissolution and corrosion, so as to form a concave-convex or hollow-out molding effect, and the etching can be used for manufacturing printed concave-convex plates such as copperplate and zincium plate at the earliest time, and also can be widely used for processing thin workpieces and the like which are difficult to process by lightening instrument panels, nameplates and traditional processing methods, and the like, and can also be used for processing electronic thin-sheet part precision etching products in aviation, machinery and chemical industries through continuous improvement and development of process equipment, particularly in the semiconductor manufacturing process, the etching is an indispensable technique; in the etching process, the time for the plate surface to contact the etching solution is different, and the dosage is also different, so that the etching is not uniform, and the size deviation is generated.
SUMMERY OF THE UTILITY MODEL
To the above situation, for overcoming prior art's defect, the utility model provides a can produce the effect that the rotation that sprays in proper order one by one sprays with the setting of fixed form, link up each other and can not produce the clearance, avoided etching solution to spout uneven and the dosage is different and the etching size that causes produces the difference, improved the workstation of product quality's improvement etching process product homogeneity.
The utility model adopts the following technical scheme: the utility model relates to a workbench for improving the product uniformity in the etching process, which comprises a reciprocating type driving device, a linking type uniform spraying device, a conveying belt, a supporting frame and a supporting column, wherein the supporting column is arranged at the bottom of the conveying belt, the supporting frame is arranged at two sides of the conveying belt, the reciprocating type driving device is arranged at the inner side of the supporting frame, the linking type uniform spraying device is arranged on the reciprocating type driving device, the linking type uniform spraying device comprises a turntable placing cavity, a rotating turntable, a rotating motor, a linking push rod, a sliding groove and a spraying head, the turntable placing cavity is arranged on the reciprocating type driving device, the rotating turntable can be rotatably arranged in the turntable placing cavity, the rotating motor is arranged in the turntable placing cavity, the output end of the rotating motor is arranged on the rotating turntable, the connecting rotary head is eccentrically arranged on the, the intracavity is placed to the carousel is located all around along rotatory carousel to the sliding tray, it has the control slide that sprays to articulate on the linking catch bar, but spray the control slide slidable and locate the sliding tray in, the sprinkler head is located each sliding tray bottom and is located the carousel and places the chamber diapire, and when rotating electrical machines drove rotatory carousel rotation, it is rotatory that the circumference is around rotatory carousel center to connect the turn, and then promotes each linking catch bar promotion one by one and sprays the control slide and slide to the sliding tray.
Furthermore, a spraying control button is arranged in the sliding groove and connected with a spraying head.
Further, the reciprocating driving device comprises a reciprocating driving frame, an incomplete gear and a reciprocating driving motor, a slideway is arranged on the supporting frame, the reciprocating driving frame can be slidably arranged in the slideway, an upper strip-shaped tooth and a lower strip-shaped tooth are respectively arranged on two sides in the reciprocating driving frame, the incomplete gear can be rotatably arranged on the upper bottom wall of the supporting frame and is positioned in the reciprocating driving frame and is meshed with the upper strip-shaped tooth and the lower strip-shaped tooth, the reciprocating driving motor can be rotatably arranged in the supporting frame, an output end of the reciprocating driving motor is arranged on the incomplete gear, when the reciprocating driving motor drives the incomplete gear to rotate, gear teeth of the incomplete gear are meshed with the upper strip-shaped tooth and are not contacted with the lower strip-shaped tooth, at the moment, the incomplete gear can drive the reciprocating driving frame to slide towards one side in the slideway, and when the incomplete gear teeth of the incomplete gear continuously rotate, at the moment, the incomplete gear can drive the reciprocating type driving frame to slide towards the other side in the slideway, and further the incomplete gear continuously rotates to enable the reciprocating type driving frame to do reciprocating motion in the slideway.
Furthermore, a stepping motor is arranged on the conveyor belt, so that the conveyor belt has a stepping transmission effect.
Furthermore, the spray heads are externally connected with an etching liquid pipe and are communicated with each other.
Adopt above-mentioned structure the utility model discloses the beneficial effect who gains as follows: the utility model provides an improve workstation of etching process product homogeneity, make each sprinkler head produce the state of spraying that sprays in proper order one by one and can link up each other through setting up the even sprinkler of linking formula, can not produce the clearance and spray evenly, the etching size that has avoided etching solution to spray unevenly and the dosage difference causes produces the difference, the effect of rotatory spraying can be produced with the setting of fixed form, it influences the etching process to avoid etching solution pipe to produce the winding, and make the sprinkler head can reach reciprocating cycle's spraying effect through reciprocating type drive arrangement's setting, carry out all-round etching to the etching board, neither produce to omit and can guarantee even etching effect, product quality has been improved.
Drawings
FIG. 1 is a schematic view of the overall structure of a worktable for improving the uniformity of products in the etching process according to the present invention;
FIG. 2 is a schematic structural view of a joining type uniform spraying device of a workbench for improving the product uniformity in the etching process of the present invention;
fig. 3 is a schematic structural diagram of the reciprocating driving device of the worktable for improving the product uniformity in the etching process of the present invention.
The automatic spraying device comprises a reciprocating driving device 1, a connecting type uniform spraying device 2, a conveying belt 3, a conveying belt 4, a supporting frame 5, a supporting column 6, a turntable placing cavity 7, a rotating turntable 8, a rotating motor 9, a connecting push rod 10, a sliding groove 11, a spraying head 12, a connecting rotating head 13, a spraying control sliding block 14, a spraying control button 15, a reciprocating driving frame 16, an incomplete gear 17, a reciprocating driving motor 18, a sliding way 19, upper strip-shaped teeth 20, lower strip-shaped teeth 21 and a stepping motor.
The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments; based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
As shown in figures 1-3, the utility model relates to a workbench for improving the product uniformity in the etching process, which comprises a reciprocating driving device 1, a linking type uniform spraying device 2, a conveyor belt 3, a supporting frame 4 and a supporting column 5, wherein the supporting column 5 is arranged at the bottom of the conveyor belt 3, the supporting frame 4 is arranged at two sides of the conveyor belt 3, the reciprocating driving device 1 is arranged at the inner side of the supporting frame 4, the linking type uniform spraying device 2 is arranged on the reciprocating driving device 1, the linking type uniform spraying device 2 comprises a turntable placing cavity 6, a rotary turntable 7, a rotary motor 8, a linking push rod 9, a sliding groove 10 and a spraying head 11, the turntable placing cavity 6 is arranged on the reciprocating driving device 1, the rotary turntable 7 is rotatably arranged in the turntable placing cavity 6, the rotary motor 8 is arranged in the turntable placing cavity 6, and the output end is arranged on the rotary turntable, the eccentric connection rotary head 12 that is equipped with on the rotatory carousel 7, it articulates on connecting rotary head 12 to link up catch bar 9, the sliding tray 10 is located the carousel around rotatory carousel 7 and is placed the chamber 6 in, it has spraying control slider 13 to articulate on the catch bar 9, spraying control slider 13 slidable locates in the sliding tray 10, spray head 11 locates each sliding tray 10 bottom and is located the carousel and places the 6 diapalls in chamber.
A spraying control button 14 is arranged in the sliding groove 10, and the spraying control button 14 is connected with a spraying head 11; the reciprocating driving device 1 comprises a reciprocating driving frame 15, an incomplete gear 16 and a reciprocating driving motor 17, a slideway 18 is arranged on the supporting frame 4, the reciprocating driving frame 15 can be slidably arranged in the slideway 18, upper strip teeth 19 and lower strip teeth 20 are respectively arranged on two sides in the reciprocating driving frame 15, the incomplete gear 16 can be rotatably arranged on the upper bottom wall of the supporting frame 4 and is positioned in the reciprocating driving frame 15 and is meshed with the upper strip teeth 19 and the lower strip teeth 20, the reciprocating driving motor 17 can be rotatably arranged in the supporting frame 4, and the output end of the reciprocating driving motor is arranged on the incomplete gear 16; a stepping motor 21 is arranged on the conveyor belt 3; the spray heads 11 are externally connected with an etching liquid pipe, and the spray heads 11 are communicated with each other.
When the etching device is used specifically, an etching plate moves to the lower part of the linking type uniform spraying device 2 under the transmission of the conveyor belt 3, a worker controls the rotating motor 8 to be started, when the rotating motor 8 drives the rotating turntable 7 to rotate, the connecting rotating head 12 rotates around the center of the rotating turntable 7 in a circumferential mode, and then each linking push rod 9 is pushed to push the spraying control slider 13 to slide into the sliding groove 10 in sequence, the spraying control slider 13 touches the spraying control button 14 to control the spraying head 11 to spray etching liquid on the etching plate when sliding, the rotating turntable 7 rotates continuously to generate each spraying head 11 to spray etching liquid on the etching plate in sequence, the etching plate is etched more uniformly, meanwhile, the worker starts the reciprocating driving motor 17 to drive the incomplete gear 16 to rotate, when the teeth of the incomplete gear 16 are meshed with the upper strip-shaped teeth 19 and are not contacted with the lower strip-shaped teeth 20, the incomplete gear 16 can drive the reciprocating driving frame 15 to slide to one side in, when the incomplete gear 16 continues to rotate and the gear teeth are meshed with the lower bar-shaped teeth 20 and are not contacted with the upper bar-shaped teeth 19, the incomplete gear 16 can drive the reciprocating driving frame 15 to slide towards the other side in the slide way 18, and further the incomplete gear 16 continuously rotates to enable the reciprocating driving frame 15 to do reciprocating motion in the slide way 18, so that the spraying of the spraying head 11 on the etching plate is more uniform and comprehensive.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
The present invention and the embodiments thereof have been described above, but the description is not limited thereto, and the embodiment shown in the drawings is only one of the embodiments of the present invention, and the actual structure is not limited thereto. In summary, those skilled in the art should understand that they should not be limited to the embodiments described above, and that they can design the similar structure and embodiments without departing from the spirit of the invention.
Claims (5)
1. The utility model provides an improve workstation of etching process product homogeneity which characterized in that: including reciprocating type drive arrangement, the even sprinkler of linking formula, conveyer belt, support frame and support column, the support column is located conveyer belt bottom, the support frame is located the conveyer belt both sides, reciprocating type drive arrangement locates the support frame inboard, the even sprinkler of linking formula locates reciprocating type drive arrangement, the even sprinkler of linking formula includes that the carousel places chamber, rotary turntable, rotating electrical machines, links up catch bar, sliding tray and sprinkler head, the carousel is placed the chamber and is located reciprocating type drive arrangement, rotary turntable can rotate and is located the intracavity, rotating electrical machines locates the carousel and places the intracavity and the output is located rotary turntable, the eccentric connection rotor that is equipped with on the rotary turntable, link up the catch bar and articulate on connecting the rotor, the sliding tray is located the carousel around the rotary turntable and is placed the intracavity, it has the spraying control slider to articulate on the catch bar, but spray control slider slidable and locate the sliding tray in, the sprinkler head is located each sliding tray bottom and is located the carousel and places the chamber diapire.
2. The stage of claim 1, wherein the stage is configured to improve product uniformity during an etching process, the stage comprising: reciprocating type drive arrangement is including reciprocating type drive frame, incomplete gear and reciprocating drive motor, be equipped with the slide on the support frame, reciprocating type drive frame slidable locates in the slide, both sides are equipped with bar tooth and bar tooth down respectively in the reciprocating type drive frame, incomplete gear is rotatable locate the support frame on the diapire and be located reciprocating type drive frame in and with last bar tooth and bar tooth meshing down, reciprocating drive motor is rotatable locate in the support frame and the output is located on incomplete gear.
3. The stage of claim 1, wherein the stage is configured to improve product uniformity during an etching process, the stage comprising: and a spraying control button is arranged in the sliding groove and is connected with a spraying head.
4. The stage of claim 1, wherein the stage is configured to improve product uniformity during an etching process, the stage comprising: and a stepping motor is arranged on the conveying belt.
5. The stage of claim 1, wherein the stage is configured to improve product uniformity during an etching process, the stage comprising: the sprinkler head is externally connected with an etching liquid pipe and communicated with each other.
Priority Applications (1)
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CN202021005388.1U CN211788942U (en) | 2020-06-04 | 2020-06-04 | Workbench for improving product uniformity in etching process |
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CN202021005388.1U CN211788942U (en) | 2020-06-04 | 2020-06-04 | Workbench for improving product uniformity in etching process |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114300396A (en) * | 2022-01-05 | 2022-04-08 | 郯城宏创高科技电子产业园有限公司 | Insulating layer etching device based on semiconductor device processing |
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2020
- 2020-06-04 CN CN202021005388.1U patent/CN211788942U/en active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114300396A (en) * | 2022-01-05 | 2022-04-08 | 郯城宏创高科技电子产业园有限公司 | Insulating layer etching device based on semiconductor device processing |
CN114300396B (en) * | 2022-01-05 | 2023-01-31 | 郯城宏创高科技电子产业园有限公司 | Insulating layer etching device based on semiconductor device processing |
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