CN211753305U

CN211753305U - A filtration system for refined sulphuric acid apparatus for producing of microelectronics level

Info

Publication number: CN211753305U
Application number: CN201922455679.4U
Authority: CN
Inventors: 霍广田; 张志清; 陈有祥; 王志亮; 何陆洋; 霍亚东; 徐爱莲
Original assignee: Jiangsu Tianrun Chemical Equipment Co ltd
Current assignee: Jiangsu Tianrun Chemical Equipment Co ltd
Priority date: 2019-12-30
Filing date: 2019-12-30
Publication date: 2020-10-27
Anticipated expiration: 2029-12-30

Abstract

The utility model discloses a filtration system for micro-electronic grade refined sulfuric acid production device, which comprises a cask-shaped sulfuric acid filter and a cask-shaped SO connected in turn on a sulfuric acid production pipeline₃A gas filter, wherein a flow equalizer is arranged in the gas filter below the inlet pipe orifice, and a filter device A and a filter device SO are arranged below the flow equalizer₃The top of the gas filter is provided with SO₃A gas outlet, a filtering device B is arranged in the gas outlet and close to the top of the gas outlet, a gas uniform distributor and an SO are arranged below the filtering device B₃The side wall of the gas filter is wrapped with a layer of heating jacket, and smooth convex blocks are fixed on the inner wall of the heating jacket at intervals along a spiral from top to bottom. The filtering system is simple to operate and can improve the product quality.

Description

A filtration system for refined sulphuric acid apparatus for producing of microelectronics level

Technical Field

The utility model belongs to the technical field of sulphuric acid production filtration equipment is relevant, concretely relates to a filtration system that is used for the refined sulphuric acid apparatus for producing of microelectronics level.

Background

The production process of the microelectronic-grade sulfuric acid is one of common raw materials in the microelectronic industry, and comprises the steps of preparing sulfur dioxide, oxidizing the sulfur dioxide into sulfur trioxide, absorbing the sulfur trioxide by fuming concentrated sulfuric acid in a nicotinic acid tower to form high-concentration nicotinic acid, enabling the nicotinic acid to enter a sulfur trioxide evaporator, purifying the evaporated sulfur trioxide, enabling the sulfur trioxide to enter an absorption tower, adding ultrapure water after absorption to prepare concentrated sulfuric acid, and purifying through a series of processes.

Existing microelectronic-grade sulfuric acid production systems typically include a filtration system for reducing trace ash and trace metal ions in the microelectronic-grade sulfuric acid product. For the existing production process adopting micro-electronic grade sulfuric acid, if the product quality is to be improved better, other technical means such as raw material filtration, finished product filtration and the like are needed, otherwise, the quality of the refined sulfuric acid is directly influenced.

SUMMERY OF THE UTILITY MODEL

To the deficiency that prior art exists, the utility model provides a filtration system for refined sulphuric acid apparatus for producing of microelectronics level, this filtration system easy operation just can improve product quality.

The utility model discloses a realize through following technical scheme: a filtration system for a microelectronic-grade refined sulfuric acid production device comprises a cylindrical sulfuric acid filter and a cylindrical SO sequentially connected to a sulfuric acid production pipeline₃The gas filter is characterized in that a pressure gauge and an exhaust port are arranged at the top of the sulfuric acid filter, a feeding pipe orifice is arranged on the side wall of the sulfuric acid filter, a flow equalizer is arranged below the feeding pipe orifice inside the sulfuric acid filter, a filtering device A is arranged below the flow equalizer, and a discharging pipe orifice is arranged at the bottommost part of the sulfuric acid filter;

the SO₃The top of the gas filter is provided with SO₃The gas outlet is internally provided with a filtering device B close to the top, a gas uniform distributor is arranged below the filtering device B, and the SO₃The side wall of the gas filter is provided with SO near the bottom thereof₃Gas inlet, said SO₃Wrap up the one deck heating jacket on the gas filter lateral wall, the heating jacket inner wall is fixed with glossy lug from top to bottom along week spiral interval, the heating jacket lateral wall is equipped with the heating source export by top position, the heating jacket lateral wall is equipped with the heating source import by the below position, SO₃The bottommost part of the gas filter is provided with a liquid outlet.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the first filtering device is arranged on the sulfuric acid filter, so that trace ash in acid can be reduced, and meanwhile, the flow equalizer is arranged above the first filtering device and can enable sulfuric acid to uniformly flow on the first filtering device, so that the filtering effect is improved;

2. to main raw material gas SO₃Adding SO of the second stage on the basis of the first stage filtration₃Gas filter, passing SO₃The filtering device B arranged in the gas filter can reduce trace metal ions in acid, and a gas uniform distributor is arranged below the filtering device B and can enable SO to be distributed₃The gas uniformly rises to the filtering device B, so that the filtering effect is improved;

3. smooth lugs are fixed on the inner wall of the heating jacket at intervals of spiral from top to bottom, and the lugs can enable the heating jacket and the SO₃The space between the outer walls of the gas filter is reduced, and the flow velocity of the heating source is further improved under the condition of the same flow, so that the heat transfer efficiency is improved.

Drawings

FIG. 1 is a schematic diagram of a sulfuric acid filter in a filtration system according to the present invention;

FIG. 2 shows SO in the filtering system of the present invention₃The structure of the gas filter is shown schematically.

In the drawings: 1. a sulfuric acid filter; 11. an exhaust port; 12. a feed tube orifice; 13. a current equalizer; 14. a first filtering device; 15. a discharge pipe orifice; SO 2₃A gas filter; SO 21₃A gas outlet; 22. a filtering device B; 23. a gas uniform distributor; SO 24₃A gas inlet; 25. a liquid discharge port; 3. heating a jacket; 31. a bump; 32. a heating source outlet; 33. a heat source inlet.

Detailed Description

The filtration system for the micro-electronic grade refined sulfuric acid production device comprises a cylindrical sulfuric acid filter 1 and a cylindrical SO which are sequentially connected with a sulfuric acid production pipeline₃ A gas filter 2 for filtering sulfuric acid and SO respectively₃The gas, thus reduce trace ash and trace metal ion in the sulphuric acid, sulphuric acid filter 1 top is equipped with manometer and gas vent 11, and its side wall is equipped with a feed pipe mouth 12, and its inside is installed the current equalizer 13 below feed pipe mouth 12, and current equalizer 13 below is installed filter equipment first 14, and sulphuric acid filter 1's bottommost is equipped with discharge pipe mouth 15.

Sulfuric acid enters the sulfuric acid filter 1 from the feeding pipe orifice 12, is uniformly distributed on the filtering device A14 after passing through the flow equalizer 13, flows out from the discharging pipe orifice 15 after being filtered by the filtering device A14, and the pressure gauge at the top and the exhaust port 11 can observe the internal pressure and exhaust gas of the device.

SO₃The top of the gas filter 2 is provided with SO₃A gas outlet 21, a filtering device B22 arranged in the gas outlet and close to the top, a gas uniform distributor 23 and an SO device arranged below the filtering device B22₃The side wall of the gas filter 2 is provided with SO near the bottom thereof₃ Gas inlet 24, SO₃The side wall of the gas filter 2 is wrapped with a layer of heating jacket 3, smooth lugs 31 are fixed on the inner wall of the heating jacket 3 from top to bottom at intervals along a circumferential spiral, and the upper position of the side wall of the heating jacket is close to the upper positionIs provided with a heating source outlet 32, a heating source inlet 33 and SO are arranged at the lower position of the side wall of the heating sleeve₃The gas filter 2 is provided at its lowermost portion with a liquid discharge port 25.

SO₃Gas from SO₃Gas inlet 24 enters the SO₃In the gas filter 2, after rising through the gas uniform distributor 23, SO₃The gas uniformly rises into a filtering device B22, and SO is arranged from the top after passing through the filtering device B22₃The gas outlet 21 discharges the gas, and the liquid discharge port 25 discharges the liquid generated during the process.

SO₃A heating jacket 3 is wrapped around the side wall of the gas filter 2, and the heating source is introduced through a heating source inlet 33 and discharged through a heating source outlet 32, SO that the whole SO is discharged₃The inside of the gas filter is heated to a certain temperature, smooth lugs 31 are fixed on the inner wall of the heating sleeve 3 from top to bottom along the circumferential spiral at intervals, and the lugs 31 can enable the heating sleeve 3 and the SO₃The space between the outer walls of the gas filter 2 is reduced, and the flow velocity of the heating source is further improved under the condition of the same flow, so that the heat transfer efficiency is improved.

The equipment is customized and processed, and the quality of the product is improved by adding the filtering equipment on the sulfuric acid production pipeline, and the operation is simple.

In summary, the present invention is only a preferred embodiment, and is not intended to limit the scope of the present invention, and all equivalent changes and modifications of the shapes, structures, features and spirit described in the claims of the present invention should be included in the scope of the present invention.

Claims

1. A filtration system for a microelectronic-grade refined sulfuric acid production device comprises a cylindrical sulfuric acid filter (1) and a cylindrical SO sequentially connected to a sulfuric acid production pipeline₃Gas filter (2), characterized in that: the top of the sulfuric acid filter (1) is provided with a pressure gauge and an exhaust port (11), the side wall of the sulfuric acid filter is provided with a feeding pipe orifice (12), a flow equalizer (13) is arranged below the feeding pipe orifice (12) inside the sulfuric acid filter, a filtering device A (14) is arranged below the flow equalizer (13), and the sulfuric acid filter is used for filtering sulfuric acidThe bottommost part of the device (1) is provided with a discharge pipe orifice (15);

the SO₃The top of the gas filter (2) is provided with SO₃A gas outlet (21) with a filtering device B (22) arranged at the position close to the top inside the gas outlet, a gas uniform distributor (23) arranged below the filtering device B (22), and SO₃SO is arranged on the side wall of the gas filter (2) and near the bottom thereof₃Gas inlet (24), said SO₃Gas filter (2) have wrapped up one deck heating jacket (3) on the lateral wall, heating jacket (3) inner wall is fixed with glossy lug (31) from top to bottom along week spiral interval, the heating jacket lateral wall is equipped with heating source export (32) by top position, the heating jacket lateral wall is equipped with heating source entry (33) by the below position, SO₃The bottommost part of the gas filter (2) is provided with a liquid outlet (25).