CN211628039U - Sweep frequency driving device of quartz wafer feeding device - Google Patents
Sweep frequency driving device of quartz wafer feeding device Download PDFInfo
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- CN211628039U CN211628039U CN201922380505.6U CN201922380505U CN211628039U CN 211628039 U CN211628039 U CN 211628039U CN 201922380505 U CN201922380505 U CN 201922380505U CN 211628039 U CN211628039 U CN 211628039U
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Abstract
A sweep frequency driving device of a quartz wafer feeding device comprises a direct current power supply, a high-voltage power supply module U2, two signal generation modules U1 and U3, a high-voltage operational amplification module U4, a resistor and a capacitor; the high-voltage power supply module U2 and the two signal generation modules U1 and U3 are connected with a direct-current power supply, and the U1, the U2 and the U3 are all powered by the direct-current power supply; the high-voltage operational amplification module U4 is connected with a high-voltage power supply module U2, and U4 is powered by U2; a resistor is arranged between the pin 3 of the U1 and the pin 8 of the U3; u4 is also connected with U3 and the generator of control signal; the utility model discloses a sweep frequency drive method can show the drift problem of overcoming quartz wafer material feeding unit's mechanical natural resonant frequency, also can overcome the drive frequency drift problem that drive circuit takes place along with ambient temperature changes simultaneously, can show the job stabilization nature and the adaptability that improve material feeding unit, can satisfy the demand of intermittent type formula pay-off moreover.
Description
Technical Field
The utility model relates to a pay-off field especially relates to a quartz wafer material feeding unit's sweep frequency drive arrangement.
Background
Quartz wafers are widely used for digital chip timing, and for example, quartz oscillators are an extremely important basic component in the electronic information industry to achieve accurate timing through the stability of crystal oscillation frequency. With the miniaturization of quartz wafer products, various automatic detection devices are in use, and in order to increase the detection rate and reduce the conveying damage rate, a high-efficiency feeding device is needed.
The traditional quartz crystal wafer feeding device often suffers from the trouble of poor driving effect in actual work, the material conveying efficiency is affected, and the output frequency of a driving circuit needs to be adjusted frequently. The utility model CN 100338538C considers the above practical problems, and is a closed-loop control driving method capable of realizing frequency self-adaptation and amplitude self-holding. However, the control method described in the utility model CN 100338538C is not suitable for the feeding of the diffused quartz crystal wafer, because the diffused quartz crystal wafer feeding device is an intermittent driving device as required, i.e. the driving circuit is discontinuous, and the control method described in CN 100338538C requires a continuous working signal to form a closed-loop control system; secondly, utility model patent CN 100338538C said control method need install photoelectric position sensor additional on the feeder device, and the closed-loop algorithm is complicated simultaneously, has not only increased the uncertainty to the system as a whole, has increased manufacturing cost and research and development cost again.
Disclosure of Invention
The utility model aims at solving the defects of the prior art, providing a sweep frequency driving device of a quartz wafer feeding device, simple structure and convenient use.
A sweep frequency driving device of a quartz wafer feeding device comprises a direct current power supply, a high-voltage power supply module U2, a signal generation module U1, a signal generation module U3, a high-voltage operational amplification module U4, a resistor and a capacitor; the high-voltage power supply module U2, the signal generation module U1 and the signal generation module U3 are connected with a direct-current power supply, and the signal generation module U1, the high-voltage power supply module U2 and the signal generation module U3 are all powered by the direct-current power supply; the high-voltage operational amplification module U4 is connected with the high-voltage power supply module U2, and the high-voltage operational amplification module U4 is powered by the high-voltage power supply module U2; a resistor is arranged between the pin 3 of the signal generation module U1 and the pin 8 of the signal generation module U3; the high-voltage operational amplification module U4 is also connected with the signal generation module U3 and a control signal generation device.
Further, the resistor comprises a variable resistor and a fixed resistor; the variable resistor comprises an adjustable end and two fixed ends.
Furthermore, pin 6 of the signal generation module U1 and pin 6 of the signal generation module U3 are both directly connected to the positive electrode of the dc power supply; pin 1 of the high-voltage power supply module U2 is directly connected with the anode of the direct-current power supply; one end of the fixed resistor R1 is connected with a pin 4 of the signal generation module U1, and the other end of the fixed resistor R1 is connected with the fixed end of the variable resistor TR 1; one end of the fixed resistor R2 is connected with the pin 5 of the signal generation module U1, the other end of the fixed resistor R2 is connected with the fixed end of the variable resistor TR1, and the fixed resistor R1 and the fixed resistor R2 are positioned on the same side of the variable resistor TR 1; the other end of the variable resistor TR1 is directly connected with the anode of the direct-current power supply; pin 11 of the signal generating module U1 is grounded, pin 10 is grounded after being connected with a capacitor C1 in series, and pin 3 is connected with the fixed end of a variable resistor TR 3; the other fixed end of the variable resistor TR3 is grounded, and the adjustable end of the variable resistor TR3 is connected with a pin 8 of the signal generation module U3; one end of the fixed resistor R3 is connected with a pin 4 of the signal generation module U3, and the other end of the fixed resistor R3 is connected with the fixed end of the variable resistor TR 2; one end of the fixed resistor R4 is connected with the pin 5 of the signal generation module U3, the other end of the fixed resistor R4 is connected with the fixed end of the variable resistor TR3, and the fixed resistor R3 and the fixed resistor R4 are positioned on the same side of the variable resistor TR 2; the other end of the variable resistor TR2 is directly connected with the anode of the direct-current power supply; pin 11 of U3 is grounded, pin 10 is grounded after being connected with capacitor C2 in series, pin 2 is connected with fixed resistor R5, and the other end of fixed resistor R5 is connected with pin 2 of high-voltage operational amplification module U4; the pin 2 of the high-voltage operational amplification module U4 is also connected with a fixed resistor R8, and the other end of the fixed resistor R8 is connected with the pin 6 of the high-voltage operational amplification module U4; a pin 5 of the high-voltage operational amplification module U4 is directly connected with a pin 2 of the high-voltage power supply module U2, a pin 4 of the high-voltage operational amplification module U4 is grounded, and the high-voltage operational amplification module U4 is powered by the high-voltage power supply module U2; pin 1 of the high-voltage operational amplification module U4 is connected with a fixed resistor R6, and the other end of the fixed resistor R6 is connected with the adjustable end of a variable resistor TR 4; the pin 1 of the high-voltage operational amplification module U4 is also connected with a fixed resistor R7, and the other end of the fixed resistor R7 is grounded; two fixed ends of the variable resistor TR4 are respectively grounded and connected with a power supply; wherein, the pin 7 of the high-voltage operational amplification module U4 is connected with a generating device of a control signal.
Further, the direct current power supply adopts a linear voltage-stabilized power supply or a switching power supply.
The utility model has the advantages that:
the utility model discloses a sweep frequency drive method, can show the drift problem that the mechanical natural resonant frequency of overcoming quartz wafer material feeding unit can change along with the weight after loading the wafer, the mechanical structure of device itself changes, reasons such as mechanical parts's wearing and tearing cause, also can overcome the drive frequency drift problem that drive circuit takes place along with ambient temperature changes simultaneously, can show the job stabilization nature and the adaptability that improve material feeding unit, can satisfy the demand of intermittent type formula pay-off moreover.
Sweep frequency drive method set up sweep frequency range and cycle through analog circuit and realize, for the self-adaptation sweep frequency method that needs digital circuit and complex algorithm to realize, the utility model discloses it is simple more reliable, do not need closed-loop control, reaction rate is fast.
The driving method is an on-demand intermittent feeding method controlled by square wave signals, the feeding quantity can be controlled by the square wave signals, and the method can be more suitable for the accurate feeding requirement of precise small materials such as quartz wafers and the like compared with the prior art and the method.
The utility model discloses a pay-off driven control is realized to the mould electricity, and the algorithm is simple is difficult for breaking down simultaneously.
Drawings
FIG. 1 is a schematic diagram of a frequency sweep driving circuit of the quartz wafer feeding device of the present invention;
fig. 2 is a schematic view of a frequency sweep driving method of the quartz wafer feeding device of the present invention.
Detailed Description
The following description of the embodiments of the present invention is provided for illustrative purposes, and other advantages and effects of the present invention will be readily apparent to those skilled in the art from the disclosure herein. The present invention can also be implemented or applied through other different specific embodiments, and various details in the present specification can be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict.
It should be noted that the drawings provided in the following embodiments are only for illustrating the basic concept of the present invention, and the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, and the form, amount and ratio of the components in actual implementation may be changed at will, and the layout of the components may be more complicated.
The first embodiment is as follows:
as shown in fig. 1, a sweep frequency driving apparatus of a quartz wafer feeding apparatus includes a dc power supply, a high voltage power supply module U2, a signal generation module U1, a signal generation module U3, a high voltage operational amplification module U4, a resistor, and a capacitor. The resistors include a variable resistor and a fixed resistor. The variable resistor comprises two fixed ends and two adjustable ends, the tissue between the two fixed ends cannot change along with the sliding of the adjustable ends, and the resistance value between the fixed ends and the adjustable ends can change along with the sliding of the adjustable ends. In this embodiment, a linear regulated power supply or a switching power supply is used as the dc power supply, the voltage of the dc power supply is 18V, and the rated current is 1A.
As shown in fig. 1 and 2, the pin 6 of the two signal generating modules U1 and U3 is directly connected to the positive electrode of the dc power supply, and both the signal generating module U1 and the signal generating module U3 are powered by the dc power supply. And pin 1 of the high-voltage power supply module U2 is directly connected with the anode of the direct-current power supply and is supplied with power by the direct-current power supply. One end of the fixed resistor R1 is connected with a pin 4 of the signal generation module U1, and the other end of the fixed resistor R1 is connected with the fixed end of the variable resistor TR 1; one end of the fixed resistor R2 is connected with the pin 5 of the signal generation module U1, the other end of the fixed resistor R2 is connected with the fixed end of the variable resistor TR1, and the fixed resistor R1 and the fixed resistor R2 are positioned on the same side of the variable resistor TR 1; the other end of the variable resistor TR1 is directly connected to the positive electrode of the dc power supply. Pin 11 of the signal generating module U1 is grounded, pin 10 is connected in series with the capacitor C1 and then grounded, and pin 3 is connected to the fixed end of the variable resistor TR 3. The other fixed end of the variable resistor TR3 is grounded, and the adjustable end of the variable resistor TR3 is connected with the pin 8 of the signal generating module U3. One end of the fixed resistor R3 is connected with a pin 4 of the signal generation module U3, and the other end of the fixed resistor R3 is connected with the fixed end of the variable resistor TR 2; one end of the fixed resistor R4 is connected with the pin 5 of the signal generation module U3, the other end of the fixed resistor R4 is connected with the fixed end of the variable resistor TR3, and the fixed resistor R3 and the fixed resistor R4 are positioned on the same side of the variable resistor TR 2; the other end of the variable resistor TR2 is directly connected to the positive electrode of the dc power supply. The pin 11 of the signal generating module U3 is grounded, the pin 10 is grounded after being connected with the capacitor C2 in series, the pin 2 is connected with the fixed resistor R5, and the other end of the fixed resistor R5 is connected with the pin 2 of the high-voltage operational amplifying module U4. The pin 2 of the high-voltage operational amplification module U4 is also connected with a fixed resistor R8, and the other end of the fixed resistor R8 is connected with the pin 6 of the high-voltage operational amplification module U4. The pin 5 of the high-voltage operational amplification module U4 is directly connected with the pin 2 of the high-voltage power supply module U2, the pin 4 of the high-voltage operational amplification module U4 is grounded, and the high-voltage operational amplification module U4 is powered by the high-voltage power supply module U2. Pin 1 of the high-voltage operational amplification module U4 is connected with a fixed resistor R6, and the other end of the fixed resistor R6 is connected with the adjustable end of a variable resistor TR 4; the pin 1 of the high-voltage operational amplification module U4 is also connected to a fixed resistor R7, and the other end of the fixed resistor R7 is grounded. Two fixed ends of the variable resistor TR4 are respectively grounded and connected with a power supply. Wherein, the pin 7 of the high-voltage operational amplification module U4 is connected with a generating device of a control signal. Pin 6 of the high voltage operational amplifier module U4 is used as a driving output, and the waveform of the driving output is shown in fig. 2.
A frequency sweep driving method of a quartz wafer feeding device comprises a frequency sweep signal, a driving signal, a control signal and a driving output. The driving signal is used for driving the intermittent feeding of the feeding device according to the requirement. And the drive signal is modulated by the sweep frequency signal, amplified by voltage and transmitted to the feeding device as drive output. Wherein the driving output is controlled by a control signal, and the purpose is to realize the intermittent feeding of the feeding device according to the requirement.
In this embodiment, the high voltage power module U2 is configured to provide a stable DC high voltage, the high voltage power module U2 is a DC-DC high voltage module of QS-0348CBD-15W, the input voltage of the high voltage power module U2 is in the range of 3-34V, and the pin 2 of the high voltage power module U2 can output a DC voltage of 60V at most through the boosting process of the high voltage power module U2.
The sweep frequency signal is a triangular wave signal with adjustable amplitude and period, wherein the amplitude is A, and the period is TFM. The frequency sweep signal is used to frequency modulate the drive signal, which is denoted by FM. Due to the frequency modulation, the amplitude A of the sweep frequency signal determines the range Deltaf of the frequency variation of the drive signal, the period T of the sweep frequency signalFMDetermining the frequency F of the variation of the drive signalFMIn which F isFM＝1/TFMSo that the frequency of the swept frequency signal is also equal to FFM。
The sweep frequency signal is obtained by a signal generating module U1, the signal generating module U1 adopts a function signal generator chip with the model of ICL8038, a pin 6 of the signal generating module U1 is connected with a power supply, and a pin 11 is connected with the reference ground. Frequency F of the swept frequency signalFM＝1/TFMThe variable resistor TR1, the fixed resistor R1, the fixed resistor R2 and the capacitor C1 are jointly used for determining the voltage. When R1 ═ R2 ═ R, the frequency of the sweep signal is:
FFM＝0.33/(TR1+R)*C1
f was obtained by setting variable resistor TR1 to 1k Ω, fixed resistor R1 to fixed resistor R2 to 2k Ω, and C1 to 0.1uFFMThe adjustable range of (1.10 kHz) to (1.65 kHz). Pin 3 of the signal generation module U1 outputs a sweep signal of a triangular waveform. The amplitude a of the frequency sweep signal is adjusted by a variable resistor TR 3. The maximum resistance value of the variable resistor TR3 is 5k Ω in the present embodiment, and the amplitude a ranges from 0V to 3V.
The driving signal is a sine wave signal with frequency changing continuously in a period T, and the center frequency of the driving signal is f0The center frequency is the frequency of the driving signal in one period T, at T/2, and is also the maximum frequency in one period T. The driving signal receives control signal modulation, and the control signal is a square wave signal. The frequency of the driving signal modulated by the control signal is f0In the range of. + -. Δ f and according to TFMThe frequency sweep driving function is realized by periodically changing.
The driving signal is obtained by a signal generating module U3, the signal generating module U3 adopts a function signal generator chip with the model number of ICL8038 as the signal generating module U1, a pin 6 of the signal generating module U3 is connected with a power supply, and a pin 11 is connected with the ground reference. The pin 8 of the signal generating module U3 is an external scan frequency voltage input pin, the voltage input at the pin 8 can control the frequency of the driving signal output from the pin 2 of the signal generating module U3, and the frequency output from the pin 2 is proportional to the voltage input at the pin 8. F of the drive signal0The variable resistor TR2, the fixed resistor R3, the fixed resistor R4 and the capacitor C2 are jointly used for determining the voltage. When R3 ═ R4 ═ R, the center frequency of the drive signal is:
f0＝0.33/(TR3+R)*C2
f was obtained by using a variable resistor TR1 ═ 5k Ω, R1 ═ R2 ═ 12k Ω, and C2 ═ 0.1uF0Is adjustable in the range of 195Hz to 275 Hz. Pin 2 of the signal generation module U3 outputs a drive signal of sine waveform, the amplitude of the drive signalThe value was 3V.
The driving output is obtained by processing the driving signal, so that the driving output is a sine wave voltage. The physical properties of the driving output are respectively reflected from the time domain and the frequency domain, so the driving output comprises a driving time domain output and a driving frequency domain output. In the time domain, the driving time domain output is obtained by enabling and controlling the driving signal by the control signal and then amplifying, and the effective driving output can be obtained only when the control signal is at a high potential. Viewed in the frequency domain, the driving frequency domain output appears as f0Sweep sine wave voltage with center frequency and range of delta F and sweep frequency of FFM。
The driving output is obtained by a high-voltage operational amplification module U4, the high-voltage operational amplification module U4 adopts a high-voltage operational amplifier chip with the model number of OPA547, a pin 5 of the high-voltage operational amplification module U4 is directly powered by a high-voltage power supply module U2, and a pin 4 of the high-voltage operational amplification module U4 is connected with the reference ground. The high-voltage operation amplification module U4 amplifies the voltage of the driving signal output by the signal generation module U3; the amplification factor of the high-voltage operational amplification module U4 can be adjusted by adjusting the ratio of the fixed resistor R5 to the fixed resistor R8, but the maximum voltage of the driving output does not exceed the input voltage of the pin 5 of the high-voltage operational amplification module U4. In this embodiment, the fixed resistor R5 is 5k Ω, and the fixed resistor R8 is 100k Ω, so that the input driving signal can be amplified by 20 times according to the rule of the amplifier, and the amplified driving signal can reach 60V and is the highest voltage output by the high-voltage power module U2. Since the high-voltage operational amplifier module U4 only uses the high-voltage power supply module U2 as a power supply, the dead zone problem of operational amplifier may cause the driving signal input to the high-voltage operational amplifier module U4 to be incomplete, and therefore, the signal lifting operation is required after the driving signal is input to the high-voltage operational amplifier module U4. According to the function of the operational amplifier, the signal is obtained by taking R6-R5-5 k Ω, R7-R8-100 k Ω,
drive output R5/R8 (ramp-up voltage-drive signal)
The boost voltage can be adjusted by adjusting the variable resistor TR4 to 5k Ω, and the range of the boost voltage is 0-18V. A control signal is input to a pin 7 of the high-voltage operational amplification module U4, when the control signal is at a high level, the high-voltage operational amplification module U4 works, otherwise, the high-voltage operational amplification module U4 does not work; pin 6 of the high-voltage operational amplification module U4 outputs a drive output of a sinusoidal waveform.
The control signal is a programmable square wave signal, when the control signal is at a high potential, the control circuit is in an enabling state, the driving circuit can effectively output, and the sweep frequency driving device has effective driving output; when the control signal is at a low potential, the control circuit is in an energy losing state, the driving circuit cannot effectively output, and the sweep frequency driving device does not have effective driving output. The control circuit is capable of generating a control signal; the drive circuit is capable of generating a drive signal and converting the drive signal into a drive output. The control signal can be set arbitrarily as required, and in this embodiment, the control signal is a regular signal with a period of T. The control signal is directly input to pin 7 of the high-voltage operational amplification module U4.
The sweep frequency driving method also comprises the step of adjusting parameters of the sweep frequency driving circuit, wherein the parameter adjustment comprises the following steps:
s1: switching on a direct current power supply of the sweep frequency driving circuit; adjusting a variable resistor TR3, and setting a frequency sweep signal to be 0V; the programming setting control signal is always kept at a high potential; the variable resistor TR4 is adjusted to ensure that the waveform of the sine wave voltage output by the drive is completely raised to be above 0V; fixed variable resistance TR4 resistance value;
s2: the driving output pin 6 of the high-voltage operation amplification module U4 is switched to a half-full-load feeding device; programming the setting control signal to keep high potential; adjusting the resistance of the variable resistor TR2 to change the operating center frequency f of the drive signal0The resonance of the driving signal and the feeding device is realized, and the resistance value of the variable resistor TR2 is fixed;
s3: the programming setting control signal still keeps high potential; setting the resistance values of the variable resistor TR1 and the variable resistor TR3 to set values; subjecting the driving signal to a frequency of FFMIn the range of f0A frequency sweep of Δ f such that the wafer is effectively transported from empty to full load of the feed device;
s4: setting a control signal at a set duty ratio, and setting the period of the control signal to be T; according to the feeding requirement of the feeding device, the resistance values of the variable resistor TR1 and the variable resistor TR3 are adjusted, so that the feeding device can effectively convey wafers from no load to full load; resistance values of the fixed variable resistor TR1 and the variable resistor TR 3; adjusting the period of the control signal according to the feeding requirement, and further changing the feeding quantity of the device; and finishing the parameter adjustment of the driving circuit.
The above description is only one specific example of the present invention and does not constitute any limitation to the present invention. It will be apparent to those skilled in the art that various modifications and variations in form and detail may be made without departing from the principles and structures of the invention, but such modifications and variations are within the scope of the invention as set forth in the appended claims.
Claims (4)
1. A frequency sweep driving device of a quartz wafer feeding device is characterized by comprising a direct-current power supply, a high-voltage power supply module U2, a signal generation module U1, a signal generation module U3, a high-voltage operation amplification module U4, a resistor and a capacitor; the high-voltage power supply module U2, the signal generation module U1 and the signal generation module U3 are connected with a direct-current power supply, and the signal generation module U1, the high-voltage power supply module U2 and the signal generation module U3 are all powered by the direct-current power supply; the high-voltage operational amplification module U4 is connected with the high-voltage power supply module U2, and the high-voltage operational amplification module U4 is powered by the high-voltage power supply module U2; a resistor is arranged between the pin 3 of the signal generation module U1 and the pin 8 of the signal generation module U3; the high-voltage operational amplification module U4 is also connected with the signal generation module U3 and a control signal generation device.
2. A sweep frequency drive device for a quartz wafer feed apparatus as claimed in claim 1, wherein said resistor includes a variable resistor and a fixed resistor; the variable resistor comprises an adjustable end and two fixed ends.
3. A sweep frequency driving device for a quartz wafer feeding device as claimed in claim 2, characterized in that pin 6 of both the signal generating module U1 and the signal generating module U3 are directly connected to the positive pole of the DC power supply; pin 1 of the high-voltage power supply module U2 is directly connected with the anode of the direct-current power supply; one end of the fixed resistor R1 is connected with the pin 4 of the signal generation module U1, and the other end of the fixed resistor R1 is connected with the fixed end of the variable resistor TR 1; one end of the fixed resistor R2 is connected with the pin 5 of the signal generation module U1, the other end of the fixed resistor R2 is connected with the fixed end of the variable resistor TR1, and the fixed resistor R1 and the fixed resistor R2 are positioned on the same side of the variable resistor TR 1; the other end of the variable resistor TR1 is directly connected with the anode of the direct-current power supply; pin 11 of the signal generating module U1 is grounded, pin 10 is grounded after being connected with a capacitor C1 in series, and pin 3 is connected with the fixed end of a variable resistor TR 3; the other fixed end of the variable resistor TR3 is grounded, and the adjustable end of the variable resistor TR3 is connected with a pin 8 of the signal generation module U3; one end of the fixed resistor R3 is connected with the pin 4 of the signal generation module U3, and the other end of the fixed resistor R3 is connected with the fixed end of the variable resistor TR 2; one end of the fixed resistor R4 is connected with the pin 5 of the signal generation module U3, the other end of the fixed resistor R4 is connected with the fixed end of the variable resistor TR3, and the fixed resistor R3 and the fixed resistor R4 are positioned on the same side of the variable resistor TR 2; the other end of the variable resistor TR2 is directly connected with the anode of the direct-current power supply; pin 11 of U3 is grounded, pin 10 is grounded after being connected with capacitor C2 in series, pin 2 is connected with fixed resistor R5, and the other end of fixed resistor R5 is connected with pin 2 of high-voltage operational amplification module U4; the pin 2 of the high-voltage operational amplification module U4 is also connected with a fixed resistor R8, and the other end of the fixed resistor R8 is connected with the pin 6 of the high-voltage operational amplification module U4; a pin 5 of the high-voltage operational amplification module U4 is directly connected with a pin 2 of the high-voltage power supply module U2, a pin 4 of the high-voltage operational amplification module U4 is grounded, and the high-voltage operational amplification module U4 is powered by the high-voltage power supply module U2; pin 1 of the high-voltage operational amplification module U4 is connected with a fixed resistor R6, and the other end of the fixed resistor R6 is connected with the adjustable end of a variable resistor TR 4; the pin 1 of the high-voltage operational amplification module U4 is also connected with a fixed resistor R7, and the other end of the fixed resistor R7 is grounded; two fixed ends of the variable resistor TR4 are respectively grounded and connected with a power supply; wherein, the pin 7 of the high-voltage operational amplification module U4 is connected with a generating device of a control signal.
4. A sweep frequency driving device for a quartz wafer feeder as claimed in claim 1, wherein said DC power supply is a linear regulated power supply or a switching power supply.
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| CN201922380505.6U CN211628039U (en) | 2019-12-26 | 2019-12-26 | Sweep frequency driving device of quartz wafer feeding device |
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