CN211605110U

CN211605110U - Fat removing device

Info

Publication number: CN211605110U
Application number: CN202020683429.6U
Authority: CN
Inventors: 杨帆; 吴六一; 沈先余; 严鑫
Original assignee: Forehope Electronic Ningbo Co Ltd
Current assignee: Forehope Electronic Ningbo Co Ltd
Priority date: 2020-04-28
Filing date: 2020-04-28
Publication date: 2020-09-29
Anticipated expiration: 2030-04-28

Abstract

The embodiment of the utility model provides a degreasing device relates to the semiconductor production field, and this degreasing device includes tray and clearance piece, and the tray is provided with the clamping part that is used for advancing line location to the base plate, and the clamping part is provided with the opening that is used for exposing the resin, and clearance piece movably sets up in the tray to clear up the resin of adhesion on the base plate edge that exposes from the opening. The degreasing device can effectively improve degreasing efficiency.

Description

Fat removing device

Technical Field

The utility model relates to a semiconductor production field particularly, relates to a fat removal device.

Background

For most semiconductor products, a plastic packaging process is required to be added in the product manufacturing process in order to provide a better protection mode for components and chips, and the most widely used straight material in the plastic packaging process is a plastic packaging material cake. In the production process, the epoxy resin and the hardening agent are subjected to a crosslinking reaction at 175 ℃ to generate a crosslinked product, the crosslinked product has quite high fluidity, the fluidity is slowly reduced until the crosslinked product is solidified along with the time, some of the incompletely-injected crosslinked products are solidified at the edge of the substrate to form excessive grease, the excessive grease falls in the subsequent process, so that the back of a chip is polluted, the product yield is influenced, and some excessive grease even blocks a track in the subsequent process to influence the output.

In the traditional degreasing process, manual degreasing is adopted, the degreasing mode is time-consuming and labor-consuming, and the working efficiency is low.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a fat removal device, it can improve the above-mentioned technical problem effectively.

The embodiment of the utility model is realized like this:

an embodiment of the utility model provides a degreasing device for the resin to the marginal adhesion of base plate clears up, degreasing device includes tray and clearance piece, the tray is provided with the clamping part that is used for advancing line location to the base plate, the clamping part is provided with and is used for exposing the opening of resin, clearance piece movably set up in the tray, with to the follow the adhesion that the opening exposes is in on the base plate edge the resin clears up.

In an alternative embodiment, the clamping portion is provided with a plurality of clamping areas distributed in a stacked manner, the plurality of clamping areas are all communicated with the opening, and the plurality of clamping areas are used for respectively clamping a plurality of different substrates so as to position the plurality of different substrates.

In an optional embodiment, the tray is provided with a guide groove, the guide groove includes a first side wall, a second side wall and a third side wall which are connected in sequence, the clamping portion is located in the guide groove, the opening includes a first port, a second port, a third port and a fourth port which are communicated in sequence along the circumferential direction of the clamping portion, the first port faces the first side wall, the second port faces the second side wall, the third port faces the third side wall, and the guide groove is used for guiding the substrate to enter the clamping area from the fourth port.

In an alternative embodiment, the first side wall and the third side wall are respectively provided with a first through hole and a second through hole, the first through hole is communicated with the first port, and the second through hole is communicated with the third port;

the cleaning member is connected to both the first side wall and the third side wall, and is configured to perform a cleaning operation on the resin adhered to one side edge of the base plate exposed through the first port and the first through hole and the resin adhered to the other side edge of the base plate exposed through the third port and the second through hole.

In an optional embodiment, the grease removing device further includes an electrostatic skin, two sides of the electrostatic skin respectively abut against the second sidewall and the clamping portion, and the electrostatic skin is used for sealing the second opening.

In an alternative embodiment, the grease removing device further comprises a baffle detachably connected to the tray to open or close the fourth port.

In an alternative embodiment, the cleaning member includes a first plate, a second plate and a third plate, which are connected in sequence and form a U-shaped structure, the clamping portion is located between the first plate and the third plate, and the second plate is movably connected to the tray so that the first plate and the third plate can respectively clean the resin adhered to the opposite edges of the substrate exposed through the first port and the third port.

In an alternative embodiment, a side of the first plate adjacent to the third plate and a side of the third plate adjacent to the first plate are provided with a plurality of spaced protrusions.

In an alternative embodiment, the grease removing device further includes a first support column, and the tray is rotatably connected to the first support column, so that the base plate can enter the clamping area from the fourth opening along the extending direction of the guide groove under the action of gravity.

In an alternative embodiment, the degreasing device further comprises a second support column spaced apart from the first support column and a fastener detachably connected to the second support column and the tray to switch between a first state and a second state;

in the first state, the fastener is connected to the second support column and the tray at the same time, the tray and the second support column are relatively fixed, and the tray cannot rotate relative to the first support column;

in the second state, the fastener is disengaged from the second support column and/or the tray, and the tray is rotatable relative to the first support column.

The utility model discloses beneficial effect includes, for example:

the embodiment of the utility model provides a degrease device, clamping part fix a position the base plate to the adhesion can be followed the opening and exposed at the resin on the base plate edge, and the clearance piece can be cleared up the resin that exposes from the opening for the in-process of tray motion, can improve degrease efficiency effectively.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.

Fig. 1 is a schematic structural diagram of a grease removing device according to an embodiment of the present invention at a first viewing angle;

fig. 2 is a schematic structural diagram of a grease removing device according to an embodiment of the present invention at a second viewing angle;

fig. 3 is a schematic structural diagram of a tray according to an embodiment of the present invention;

fig. 4 is a schematic structural view of a clamping portion according to an embodiment of the present invention;

fig. 5 is a schematic structural view of a cleaning member according to an embodiment of the present invention.

Icon: 1-a degreasing device; 11-a tray; 111-a clamping portion; 1111-a clamping area; 112-opening; 1121-first mouth; 1122-second port; 1123-third port; 1124-fourth port; 113-a guide slot; 1131 — a first sidewall; 1132 — a second sidewall; 1133 — a third sidewall; 1134 — a first via; 1135 — a second via; 12-a cleaning member; 121-a first plate; 122-a second plate; 123-a third plate; 124-bulges; 13-electrostatic peel; 14-a baffle; 15-a first support column; 16-a second support column; 17-a fastener; 18-a base; 19-rubber pad; 20-a guide rail; 3-initial position; 4-the working position.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which is usually placed when the product of the present invention is used, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.

Furthermore, the terms "horizontal", "vertical" and the like do not imply that the components are required to be absolutely horizontal or pendant, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Referring to fig. 1 and 2, the present embodiment provides a grease removing device 1, the grease removing device 1 includes a tray 11 and a cleaning member 12, the tray 11 is provided with a clamping portion 111, the clamping portion 111 clamps a substrate to position the substrate, and the cleaning member 12 is movably disposed on the tray 11.

In the semiconductor production process, resin is adhered to the edge of the substrate, which affects the subsequent use of the substrate. In the embodiment, the clamping portion 111 is provided with the opening 112, and after the substrate is clamped by the clamping portion 111, the resin attached to the edge of the substrate is exposed from the opening 112, so that the cleaning member 12 can clean the resin attached to the edge of the substrate exposed from the opening 112 in the process that the cleaning member 12 moves relative to the tray 11, and the cleaning efficiency can be effectively improved.

Referring to fig. 1-3, in the present embodiment, the clamping portion 111 is provided with a plurality of clamping areas 1111 distributed in a stacked manner, and the plurality of clamping areas 1111 are all communicated with the opening 112. Thus, the substrate can enter the clamping area 1111 from the opening 112, and the clamping area 1111 positions the substrate and prevents the substrate from shaking during the cleaning process by the cleaning member 12.

It is understood that, in the present embodiment, each clamping area 1111 can be used for clamping the substrate, so that the clamping portion 111 can simultaneously clamp a plurality of substrates, and the cleaning member 12 can simultaneously clean the resin on the edges of the plurality of substrates, thereby effectively improving the cleaning efficiency.

Referring to fig. 1 to 4, in the present embodiment, the tray 11 is provided with a guide groove 113, the guide groove 113 includes a first side wall 1131, a second side wall 1132 and a third side wall 1133, and the first side wall 1131, the second side wall 1132 and the third side wall 1133 are sequentially connected to form a U-shaped groove.

In the present embodiment, the clamping portion 111 is located in the guide groove 113, the opening 112 includes a first port 1121, a second port 1122, a third port 1123 and a fourth port 1124, the first port 1121, the second port 1122, the third port 1123 and the fourth port 1124 are sequentially communicated in a circumferential direction of the clamping portion 111, the first port 1121 faces the first side wall 1131, the second port 1122 faces the second side wall 1132, and the third port 1123 faces the third side wall 1133.

This arrangement is such that the fourth port 1124 is oriented in the same direction as the U-shaped port of the guide groove 113. After the substrate is placed in the guide groove 113, the guide groove 113 can guide the substrate from the fourth port 1124 into the clamping area 1111, and the work efficiency can be improved.

Specifically, taking fig. 4 as an example, the position of one end of the guide groove 113 is an initial position 3, the position of the other end of the guide groove 113 is an operating position 4, and the clamping portion 111 is located at the operating position 4. In the actual working process, the cartridge clip structure with the same structure as the clamping portion 111 is placed at the initial position 3, a plurality of substrates are clamped inside the cartridge clip structure, then the cartridge clip structure is moved towards the direction close to the clamping portion 111, after the cartridge clip structure is abutted to the clamping portion 111, the substrates in the cartridge clip structure are transferred into the clamping portion 111 from the fourth opening 1124, and then the subsequent cleaning operation is performed.

In the present embodiment, after the cartridge structure abuts against the clamping portion 111, the substrate in the cartridge structure is transferred from the fourth opening 1124 into the clamping portion 111 by gravity. Referring to fig. 1 and 2, in the present embodiment, the grease removing apparatus 1 further includes a first supporting column 15, and the tray 11 is rotatably connected to the first supporting column 15, so that when the tray 11 rotates relative to the first supporting column 15, the substrate can enter the clamping area 1111 from the fourth opening 1124 under the action of gravity.

Specifically, in the present embodiment, the tray 11 is rotatably connected to the first support column 15 by a pin. In other embodiments, the tray 11 and the first support column 15 may be hinged.

Referring to fig. 1 and 2, in the present embodiment, the grease removing device 1 further includes a second supporting column 16 and a fastening member 17, the second supporting column 16 is disposed at a distance from the first supporting column 15, and the fastening member 17 is detachably connected to the second supporting column 16 and the tray 11 to switch between the first state and the second state.

In the first state, the fastener 17 is connected to both the second support column 16 and the tray 11, and at this time, the tray 11 is fixed relative to the second support column 16, and the tray 11 cannot rotate relative to the first support column 15. In the first state, the cleaning member 12 cleans the resin at the edge of the substrate. The state shown in fig. 2 is the first state.

In the second state, the fastener 17 is disengaged from the second support post 16 and/or the tray 11, at which point the tray 11 is able to rotate relative to the first support post 15. In the second state, the substrate in the cassette structure can enter the clamping area 1111 of the clamping portion 111 from the fourth opening 1124 by gravity.

It should be noted that, in actual use, the fastening member 17 may be a screw, a bolt, a spring pin, or the like.

Referring to fig. 1 and 2, in the present embodiment, the grease removing device 1 further includes a base 18, and the first supporting column 15 and the second supporting column 16 are both fixedly connected to the base 18. In this way, the stability of the first support column 15 and the second support column 16 can be effectively improved.

Referring to fig. 1 and 2, in the embodiment, the grease removing device 1 further includes a rubber pad 19, the rubber pad 19 is connected to the first support column 15, and the rubber pad 19 is located on a side of the first support column 15 close to the second support column 16, when the tray 11 rotates relative to the first support column 15 in a direction close to the second support column 16, the rubber pad 19 can prevent the tray 11 from colliding with the first support column 15, reduce damage to the tray 11 and the first support column 15, and prolong the service life of the tray 11 and the first support column 15.

Referring to fig. 1 and 4, in the present embodiment, the grease removing device 1 further includes a baffle 14, and the baffle 14 is detachably connected to the tray 11. When the shutter 14 is attached to the tray 11, the shutter 14 can close the fourth opening 1124, and thus the substrate can be prevented from being detached from the clamping area 1111 from the fourth opening 1124, and the substrate can be restricted. When the shutter 14 is removed from the tray 11, the fourth opening 1124 is opened, so that the substrate in the cassette structure can be easily inserted into the clamping area 1111 from the fourth opening 1124.

In actual use, the shutter 14 is not mounted on the tray 11 in advance, and after the substrate of the cassette structure enters the clamping area 1111 of the clamping portion 111, the shutter 14 is mounted on the tray 11 to prevent the substrate from being separated from the clamping area 1111 from the fourth opening 1124 when the substrate is cleaned.

Referring to fig. 1-4, in the present embodiment, the grease removing device 1 further includes an electrostatic sheath 13, two sides of the electrostatic sheath 13 respectively abut against the second sidewall 1132 and the clamping portion 111, and the electrostatic sheath 13 can close the second port 1122.

It can be understood that after the substrate enters the clamping region 1111 from the fourth opening 1124 under the action of gravity, the substrate will collide with the electrostatic coating 13, and the electrostatic coating 13 can buffer and protect the substrate, thereby reducing the damage to the substrate. In addition, the static electricity on the substrate can be eliminated even after the static electricity sheet 13 is brought into contact with the substrate.

Referring to fig. 4, in the present embodiment, the first side wall 1131 and the third side wall 1133 are respectively provided with a first through hole 1134 and a second through hole 1135, the first through hole 1134 is communicated with the first port 1121, and the second through hole 1135 is communicated with the third port 1123.

Thus, the resin on one of the side edges of the substrate can be exposed through the first port 1121 and the first through-hole 1134, and the resin on the other of the side edges of the substrate can be exposed through the third port 1123 and the second through-hole 1135.

In this embodiment, the cleaning member 12 can clean the resin adhered to the edges of the two sides of the substrate simultaneously during the movement relative to the tray 11, and the cleaning efficiency can be effectively improved.

Specifically, referring to fig. 1, fig. 2 and fig. 5, in the present embodiment, the cleaning element 12 includes a first plate 121, a second plate 122 and a third plate 123, the first plate 121, the second plate 122 and the third plate 123 are connected in sequence and form a U-shaped structure, and the clamping portion 111 is located between the first plate 121 and the third plate 123.

The second plate 122 is movably connected with the tray 11, so as to drive the first plate 121 and the third plate 123 to move relative to the tray 11, and the first plate 121 and the third plate 123 clean the resin on the two opposite side edges of the substrate respectively.

It should be noted that, in this embodiment, the tray 11 is provided with the guide rail 20, the length direction of the guide rail 20 is the same as the length direction of the guide groove 113, the second plate 122 is slidably connected to the guide rail 20, and the second plate 122 can reciprocate on the guide rail 20, so as to drive the first plate 121 and the third plate 123 to perform reciprocating cleaning on the resin at the edge of the substrate, which is more beneficial to clean the resin on the substrate.

It should be noted that in other embodiments, the second plate 122 may also be rotatably connected to the tray 11, and the first plate 121 and the third plate 123 may also clean the resin on the edge of the substrate during the rotation process following the second plate 122.

Referring to fig. 5, in the present embodiment, a side of the first plate 121 close to the third plate 123 and a side of the third plate 123 close to the first plate 121 are provided with a plurality of spaced protrusions 124.

Thus, the plurality of projections 124 act on the resin at the edge of the substrate, enabling the resin to be more easily cleaned from the edge of the substrate.

In summary, the grease removing device 1 provided by the present embodiment has the following working principle:

in the second state, the fastening member 17 is not attached to the tray 11 and the second support column 16, the clip structure having the same structure as the holding portion 111 is placed at the initial position 3, the tray 11 is rotated relative to the first support column 15, the clip structure moves in the longitudinal direction of the guide groove 113 and abuts against the holding portion 111, and the substrate in the clip structure enters the holding region 1111 of the holding portion 111 from the fourth opening 1124 by gravity.

The fastener 17 is mounted on the tray 11 and the second support column 16, and the second state is switched to the first state. The shutter 14 is mounted on the tray 11 to close the fourth opening 1124, and the second plate 122 is moved along the length direction of the guide rail 20, and the first plate 121 and the third plate 123 perform a cleaning operation on the resin on the opposite side edges of the substrate while following the movement of the second plate 122.

After the cleaning is finished, the air gun can be used for cleaning the fine scraps remained on the substrate again, and the pollution of the fine scraps to other objects is avoided.

The above description is only exemplary of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a degreasing device for resin to the edge adhesion of base plate clears up, its characterized in that, degreasing device includes tray and clearance piece, the tray is provided with the clamping part that is used for advancing line location to the base plate, the clamping part is provided with and is used for exposing the opening of resin, clearance piece movably set up in the tray, with to follow the adhesion that the opening exposes is in on the base plate edge the resin clears up.

2. The degreasing device as claimed in claim 1, wherein the clamping portion is provided with a plurality of clamping areas arranged in a stacked manner, each of the plurality of clamping areas communicating with the opening, the plurality of clamping areas being configured to clamp a plurality of different substrates, respectively, to position the plurality of different substrates.

3. The fat removing device as claimed in claim 2, wherein the tray is provided with a guide groove, the guide groove comprises a first side wall, a second side wall and a third side wall which are connected in sequence, the clamping portion is located in the guide groove, the opening comprises a first port, a second port, a third port and a fourth port which are communicated in sequence along the circumferential direction of the clamping portion, the first port faces the first side wall, the second port faces the second side wall, the third port faces the third side wall, and the guide groove is used for guiding the substrate from the fourth port into the clamping area.

4. A grease removing device according to claim 3, wherein the first side wall and the third side wall are provided with a first through hole and a second through hole, respectively, the first through hole communicating with the first port, and the second through hole communicating with the third port;

5. The fat removal device of claim 3, further comprising an electrostatic skin, wherein two sides of the electrostatic skin abut against the second sidewall and the clamping portion, respectively, and the electrostatic skin is configured to close the second port.

6. A grease removing device according to claim 3, further comprising a baffle detachably connected to the tray to open or close the fourth port.

7. A grease removing device according to claim 3, wherein the cleaning member includes a first plate, a second plate and a third plate which are connected in sequence and form a U-shaped configuration, the nip portion is located between the first plate and the third plate, and the second plate is movably connected to the tray so that the first plate and the third plate can respectively clean the resin adhered to the opposite edges of the base plate exposed through the first port and the third port.

8. The fat removal device of claim 7, wherein a side of the first plate adjacent the third plate and a side of the third plate adjacent the first plate are each provided with a plurality of spaced projections.

9. A grease removing device according to any one of the claims 3-8, characterized in that the grease removing device further comprises a first support column, to which the tray is rotatably connected to enable the base plate to enter the clamping area from the fourth port in the extension direction of the guide slot under the influence of gravity.

10. The fat removal device of claim 9, further comprising a second support column spaced from the first support column and a fastener removably connected to the second support column and the tray to switch between a first state and a second state;