CN211601530U

CN211601530U - Vacuum sintering furnace

Info

Publication number: CN211601530U
Application number: CN202020174529.6U
Authority: CN
Inventors: 郑恩阳
Original assignee: Joint Power Shanghai Seals Co ltd
Current assignee: Joint Power Shanghai Seals Co ltd
Priority date: 2020-02-14
Filing date: 2020-02-14
Publication date: 2020-09-29
Anticipated expiration: 2030-02-14

Abstract

The application discloses a vacuum sintering furnace. The vacuum sintering furnace comprises: furnace with locate furnace pipe in the furnace, wherein: a gap is arranged between the furnace pipe and the hearth, the furnace pipe comprises an outer frame and a heating body arranged in the outer frame, and the lower part of the outer frame is provided with an opening; and a material receiving part made of a high-temperature-resistant material is arranged in the hearth and is positioned right below the opening. The method solves the problems that after multiple times of sintering, carbon felts in the furnace pipe are easy to block, so that the vacuum degree in the furnace body is unstable, sintered products have color difference, and the service life of the furnace pipe is shortened.

Description

Vacuum sintering furnace

Technical Field

The application relates to the field of sintering furnaces, in particular to a vacuum sintering furnace.

Background

Sintering furnaces refer to specialized equipment that allows powder compacts to be sintered to achieve desired physical, mechanical properties, and microstructures. The sintering furnace is used for drying slurry on the silicon wafer, removing organic components in the slurry and completing sintering of the aluminum back surface field and the grid line. The inside of the vacuum sintering furnace is generally a sintering zone consisting of a heating part and a heat insulation part. The heating mode includes two heating modes, namely heating by electric heating elements (such as carbon tubes and carbon rods) and medium-frequency induction heating. The furnace is cooled by a water jacket. To accelerate the cooling, a gas such as hydrogen, nitrogen, or argon may be introduced into the furnace.

The furnace pipe is used as an important structure in a sintering furnace, when products are fired, a large amount of carbon content and solid content can be discharged, the more the number of times of sintering, the more the carbon content and the solid content are, the more the carbon felt is arranged in the furnace pipe, the carbon felt in the furnace pipe is easy to block after multiple times of sintering, the vacuum degree in the furnace body is unstable while the carbon felt blocks, the uneven heating of the sintering furnace is influenced, the conductive ignition phenomenon is caused, the color difference of the products after sintering and discharging is caused, the heat preservation performance of the furnace body is influenced, the production of product materials is caused, and the service life of the furnace pipe is shortened.

Aiming at the problems that carbon felts in the furnace pipe are easy to block after multiple times of sintering in the related technology, so that the vacuum degree in the furnace body is unstable, the sintered products have color difference, and the service life of the furnace pipe is shortened, an effective solution is not provided at present.

SUMMERY OF THE UTILITY MODEL

The main purpose of this application is to provide a vacuum sintering furnace to solve among the relevant art after sintering many times easily cause the carbon felt jam in the stove courage, thereby lead to the internal vacuum of furnace unstability, lead to sintering product to have the colour difference, the problem that stove courage life shortens.

In order to achieve the above object, according to one aspect of the present application, there is provided a vacuum sintering furnace.

The vacuum sintering furnace according to the present application includes: furnace with locate furnace pipe in the furnace, wherein: a gap is arranged between the furnace pipe and the hearth, the furnace pipe comprises an outer frame and a heating body arranged in the outer frame, and the lower part of the outer frame is provided with an opening; and a material receiving part made of a high-temperature-resistant material is arranged in the hearth and is positioned right below the opening.

Further, furnace sets up to circular, the stove courage sets up to square, both ends all are provided with the connecting piece about the stove courage, connecting piece and furnace inner wall fixed connection.

Furthermore, a support piece is longitudinally arranged on the inner wall of the hearth, and the upper end of the support piece is connected with the lower bottom surface of the furnace pipe.

Further, connect the material piece including fixed setting at the support column of furnace inner wall, the support column upper end is provided with the supporting disk, the supporting disk upper end is provided with the carbon felt.

Further, the support column sets up to three and is the distribution of article font, the carbon felt is arranged in the supporting disk upper end.

Furthermore, the heating elements are uniformly distributed along the inner space of the outer frame.

Further, the heat-generating body comprises the graphite rod, the inner wall is provided with the support bar along the axial under the stove courage, the support bar sets up to two and symmetric distribution.

In the embodiment of the application, a mode of forming a hole at the lower part of the furnace pipe is adopted, a gap is formed between the furnace pipe and the hearth, the lower part of the outer frame of the furnace pipe is provided with the hole, then the material receiving part is arranged on the inner wall of the hearth and is positioned under the hole, the carbon content and the solid content generated in the sintering process in the furnace pipe are discharged from the hole and are received by the material receiving part under the hole, the aim of reducing the carbon content and the solid content in the furnace pipe is achieved, the problem of unstable vacuum degree in the furnace body caused by the blockage of carbon felts in the furnace pipe is avoided, the temperature of the sintering furnace is uniformly heated, the service life of the furnace pipe is prolonged, the production efficiency of products is improved, the technical effect of improving the quality of the products is achieved, and the problem that the carbon felts in the furnace pipe are easily blocked after multiple times of sintering in the related technology, so that the unstable vacuum degree in the furnace, the service life of the furnace is shortened.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this application, serve to provide a further understanding of the application and to enable other features, objects, and advantages of the application to be more apparent. The drawings and their description illustrate the embodiments of the invention and do not limit it. In the drawings:

FIG. 1 is a schematic elevation view of a structure according to an embodiment of the present application;

FIG. 2 is a cross-sectional structural schematic according to an embodiment of the present application.

Wherein, 1 furnace, 2 furnace pipes, 3 heat-generating bodies, 4 support bars, 5 carbon felts, 6 supporting disks, 7 support columns, 8 support pieces, 9 connecting pieces, 10 openings and 11 outer frames.

Detailed Description

In order to make the technical solutions better understood by those skilled in the art, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only partial embodiments of the present application, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It should be understood that the data so used may be interchanged under appropriate circumstances such that embodiments of the application described herein may be used.

In this application, the terms "upper", "lower", "left", "right", "bottom", "inner", "outer", "longitudinal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings. These terms are used primarily to better describe the invention and its embodiments, and are not intended to limit the indicated devices, elements or components to a particular orientation or to be constructed and operated in a particular orientation.

Moreover, some of the above terms may be used to indicate other meanings besides the orientation or positional relationship, for example, the term "on" may also be used to indicate some kind of attachment or connection relationship in some cases. The specific meaning of these terms in the present invention can be understood by those of ordinary skill in the art as appropriate.

Furthermore, the terms "mounted," "disposed," "provided," and "connected" are to be construed broadly. For example, it may be a fixed connection, a removable connection, or a unitary construction; can be a mechanical connection, or an electrical connection; may be directly connected, or indirectly connected through intervening media, or may be in internal communication between two devices, elements or components. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.

As shown in fig. 1 to 2, the present application relates to a vacuum sintering furnace comprising: furnace 1 with locate furnace pipe 2 in furnace 1, wherein: a gap for discharging carbon content and solid content generated by sintering in the furnace pipe 2 is arranged between the furnace pipe 2 and the hearth 1, the furnace pipe 2 comprises an outer frame 11 consisting of a metal shell and a heat insulation layer and a heating body 3 arranged in the outer frame 11, the lower part of the outer frame 11 is provided with a hole 10, the diameter of the hole 10 is set to be 120mm to 140mm, the hole 10 can be opened at the positive bottom of the furnace pipe 2 by adopting a hole 10 device with the outer diameter of 120mm, and whether the position of the hole 10 at the bottom of the furnace pipe 2 is blocked or not is checked every time one furnace is sintered, and if the blockage is immediately cleaned; set up in furnace 1 and connect the material piece by what high temperature resistant material made, connect the material piece to be located trompil 10 under, connect the material piece to be used for making the carbon content and the solid content that flow out among the reaction process directly dilute to connect the material piece after the trompil 10 flows out, avoid carbon content and solid content and furnace 1 direct contact, protection furnace 1.

In the embodiment, a mode of forming a hole 10 in the lower part of the furnace pipe 2 is adopted, a gap is formed between the furnace pipe 2 and the hearth 1, the hole 10 is formed in the lower part of an outer frame 11 of the furnace pipe 2, then a material receiving part is arranged on the inner wall of the hearth 1 and is positioned under the hole 10, so that the carbon content and the solid content generated in the sintering process in the furnace pipe 2 are discharged from the hole 10 and are received by the material receiving part under the hole 10, the aim of reducing the carbon content and the solid content in the furnace pipe 2 is achieved, the problem of unstable vacuum degree in the furnace body caused by the blockage of the carbon felt 5 in the furnace pipe 2 is avoided, the temperature of the sintering furnace is uniformly heated, the service life of the furnace pipe 2 is prolonged, the production efficiency of products is improved, the technical effect of product quality is improved, and further the problem of unstable vacuum degree in the furnace body caused by the blockage of the carbon felt 5 in the furnace pipe 2 after multiple times of sintering in the, the color difference of the sintered product is caused, and the service life of the furnace pipe 2 is shortened.

As shown in figures 1 to 2, furnace 1 in the device sets up to circular, and stove courage 2 sets up to square, and both ends all are provided with connecting piece 9 about stove courage 2, and connecting

piece

9 and 1 inner wall fixed connection of furnace, stove courage 2 are through the connecting piece 9 and the 1 fixed connection of furnace of controlling both ends, and connecting piece 9 plays the effect of supporting and connecting furnace 1, and connecting piece 9 adopts high temperature resistant material, ensures the stability in the use.

As shown in figures 1 to 2, a support member 8 is longitudinally arranged on the inner wall of a hearth 1 in the device, the upper end of the support member 8 is connected with the lower bottom surface of a furnace pipe 2, the support member 8 is made of high-temperature-resistant materials, and the support member 8 is positioned below the furnace pipe 2 and is fixedly or movably connected with the outer wall of the furnace pipe 2 to support the furnace pipe 2.

As shown in fig. 1 to 2, the material receiving member in the device comprises a support column 7 fixedly arranged on the inner wall of the hearth 1, a support plate 6 is arranged at the upper end of the support column 7, a carbon felt 5 is arranged at the upper end of the support plate 6, and the carbon content and the solid content discharged from the furnace pipe 2 are diluted and adsorbed by utilizing the good adsorbability and the heat resistance of the carbon felt 5, so that the damage to the hearth 1 caused by the carbon content and the solid content flowing onto the inner wall of the hearth 1 is avoided.

As shown in fig. 1 to 2, the number of the support columns 7 in the device is three and distributed in a delta shape, the carbon felt 5 is placed on the upper end of the support plate 6, and the support columns 7 are arranged in three to play a role of stable support for the support plate 6.

As shown in figures 1 to 2, the heating elements 3 in the device are uniformly distributed along the inner space of the outer frame 11, the heating elements 3 are composed of graphite rods, the lower inner wall of the furnace pipe 2 is provided with two support bars 4 for placing sintering pieces along the axial direction, and the two support bars 4 are symmetrically distributed.

From the above description, it can be seen that the following technical effects are achieved by the present application:

(1) through being equipped with the trompil in the stove courage lower part, reached the purpose that reduces carbon content and solid content in the stove courage, and avoided the interior carbon felt of stove courage to block up and lead to causing the unstable problem of vacuum in the stove body, thereby realized making sintering furnace temperature generate heat evenly, improve stove courage life, improve product production efficiency, improve the technical effect of product quality, and then solve because easily cause the interior carbon felt of stove courage to block up after sintering many times in the correlation technique, thereby cause and lead to the internal vacuum unstability of stove, lead to the sintering product to have the colour difference, the problem that stove courage life shortens.

(2) The furnace pipe is fixedly connected with the hearth through the connecting pieces at the left end and the right end, the connecting pieces play a role in supporting and connecting the hearth, and the connecting pieces are made of high-temperature-resistant materials, so that the stability in the using process is ensured.

(3) The carbon felt has good adsorbability and heat resistance, so that the carbon content and solid content discharged from the furnace liner are diluted and adsorbed, and the phenomenon that the carbon content and the solid content flow onto the inner wall of a hearth to damage the hearth is avoided.

The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A vacuum sintering furnace, comprising: furnace (1) with locate furnace pipe (2) in furnace (1), wherein:

a gap is arranged between the furnace pipe (2) and the hearth (1), the furnace pipe (2) comprises an outer frame (11) and a heating body (3) arranged in the outer frame (11), and the lower part of the outer frame (11) is provided with a hole (10);

a material receiving part made of high-temperature-resistant materials is arranged in the hearth (1), and the material receiving part is located right below the opening (10).

2. The vacuum sintering furnace according to claim 1, characterized in that the hearth (1) is arranged in a circular shape, the furnace pipe (2) is arranged in a square shape, connecting pieces (9) are arranged at the left end and the right end of the furnace pipe (2), and the connecting pieces (9) are fixedly connected with the inner wall of the hearth (1).

3. The vacuum sintering furnace according to claim 1, characterized in that the inner wall of the hearth (1) is longitudinally provided with a support member (8), and the upper end of the support member (8) is connected with the lower bottom surface of the furnace pipe (2).

4. The vacuum sintering furnace according to any one of the claims 1 to 3, characterized in that the receiving member comprises a supporting column (7) fixedly arranged on the inner wall of the hearth (1), a supporting disc (6) is arranged at the upper end of the supporting column (7), and a carbon felt (5) is arranged at the upper end of the supporting disc (6).

5. The vacuum sintering furnace according to claim 4, characterized in that the supporting columns (7) are arranged in three and distributed in a delta shape, and the carbon felt (5) is placed on the upper end of the supporting disk (6).

6. The vacuum sintering furnace according to claim 1, characterized in that the heat-generating bodies (3) are evenly distributed along the inner space of the outer frame (11).

7. The vacuum sintering furnace according to claim 6, characterized in that the heating body (3) is composed of graphite rods, the lower inner wall of the furnace pipe (2) is provided with support bars (4) along the axial direction, and the support bars (4) are arranged in two and are symmetrically distributed.