CN211577037U - Micro-crack detection device after oxygen sensor chip packaging - Google Patents

Micro-crack detection device after oxygen sensor chip packaging Download PDF

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Publication number
CN211577037U
CN211577037U CN201921936967.5U CN201921936967U CN211577037U CN 211577037 U CN211577037 U CN 211577037U CN 201921936967 U CN201921936967 U CN 201921936967U CN 211577037 U CN211577037 U CN 211577037U
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Prior art keywords
oxygen sensor
relay
current
circuit
slot clamping
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CN201921936967.5U
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Chinese (zh)
Inventor
赵旭东
张海双
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Baoding Dongrui Automobile Electronic Technology Co ltd
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Baoding Dongrui Automobile Electronic Technology Co ltd
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Abstract

The utility model belongs to the technical field of automobile-used spare part processing, a microcrack detection device behind oxygen sensor chip package is proposed, including casing, voltage source one sets up in the casing, the relay sets up in the casing, binding post one sets up on the casing front panel for be connected with oxygen sensor's heating pin, binding post one in proper order with the relay voltage source one is connected, and the controller sets up in the casing, be used for control the break-make of relay. Through the technical scheme, the problems of complex operation and poor safety of microcrack detection after the oxygen sensing chip is packaged in the prior art are solved.

Description

Micro-crack detection device after oxygen sensor chip packaging
Technical Field
The utility model belongs to the technical field of automobile-used spare part processing, a microcrack detection device behind oxygen sensor chip package is related to.
Background
During the installation process of the oxygen sensing chip, the oxygen sensing chip is influenced by pressure, and fracture, delamination and microcrack can be generated. If the chip is integrally broken, the chip is easy to detect in subsequent processes, and because the chip is formed by co-firing two or more different ceramic raw materials and is integrally formed by multi-layer co-firing, interlayer microcracks can occur in the packaging process, and the chip is difficult to detect in a short time in conventional production. At present, a common detection mode for an oxygen sensor is that a heating end of the sensor is electrified with 12VDC on a combustion atmosphere table to detect a signal line output voltage value of the sensor, and the detection method needs additional combustible atmosphere, is complex to operate and cannot ensure safety.
SUMMERY OF THE UTILITY MODEL
The utility model provides a crazing line detection device behind oxygen sensor chip package has solved among the prior art problem that crazing line detection operation is complicated, the security is poor behind the oxygen sensor chip package.
The technical scheme of the utility model is realized like this: comprises that
A shell body, a plurality of first connecting rods and a plurality of second connecting rods,
a first voltage source arranged in the shell,
a relay disposed within the housing,
the first wiring terminal is arranged on the front panel of the shell and is used for being connected with a heating pin of the oxygen sensor, the first wiring terminal is sequentially connected with the relay and the first voltage source,
and the controller is arranged in the shell and used for controlling the on-off of the relay.
Further, the controller comprises a main control chip and a relay control circuit connected with the main control chip,
the relay control circuit comprises an optical coupling isolation circuit and a switch tube amplification circuit which are sequentially connected, the optical coupling isolation circuit is connected with the main control chip, and the switch tube amplification circuit is connected with the control end of the relay.
Further, the device also comprises a current source which is arranged in the shell,
a second wiring terminal arranged on the front panel of the shell and used for being connected with a signal pin of the oxygen sensor, the second wiring terminal is connected with the current source,
the first current sensor is used for detecting the current passing through a signal pin of the oxygen sensor and is connected with the controller.
Further, also comprises
A second voltage source arranged in the shell,
a third wiring terminal arranged on the front panel of the shell and used for being connected with a signal pin of the oxygen sensor, the third wiring terminal is connected with the second voltage source,
and the second current sensor is used for detecting the current passing through the signal pin of the oxygen sensor and is connected with the controller.
Further, the controller also comprises two current sampling circuits with the same structure, each sampling circuit comprises a sampling resistor, a voltage follower circuit and an output filter circuit which are connected in sequence,
the sampling resistor is connected with the first current sensor or the second current sensor, and the output filter circuit is connected with the main control chip.
Further, still include the standing groove, the standing groove sets up the outside of casing, be provided with mounting fixture in the standing groove, mounting fixture includes
A rotating plate rotatably arranged on the inner wall of the placing groove,
one leading-out end of the torsion spring is abutted against the inner wall of the placing groove, the other leading-out end of the torsion spring is abutted against the top end of the rotating plate,
the first slot clamping piece is arranged at the bottom of the rotating plate, the cross section of the first slot clamping piece is arc-shaped, the opening of the first slot clamping piece faces downwards,
the second slot clamping piece is arranged on the inner wall of the placing slot and is vertically and symmetrically arranged with the first slot clamping piece,
and the third slot clamping piece is arranged on the inner wall of the placing groove, is vertically arranged with the second slot clamping piece, and is communicated with the second slot clamping piece.
Furthermore, a protective door is arranged on the outer side of the placing groove, and a locking handle is arranged on the protective door.
The utility model discloses a theory of operation does:
the detection of the microcracks after the oxygen sensor chip is packaged comprises the detection of the microcracks of the heating circuit layer, the detection of the microcracks of the signal circuit layer and the detection of assembly.
The principle of the detection of the microcracks on the heating circuit layer is that if the microcracks are generated on the heating circuit layer, a chip can reach 900-1000 ℃ in a short time (generally within 10 seconds) by applying a higher voltage (14-16 VDC). And after the temperature is reached, powering off, rapidly cooling the chip, then powering on again, and executing 2-3 cycles. If in the chip packaging process, the heating circuit layer has a hidden trouble of microcrack, the hidden trouble is difficult to expose in a short time when the temperature is slowly raised, the microcrack is amplified under the influence of the thermal expansion of the ceramic by a method of rapidly heating and cooling, the contact resistance of the current passing through the microcrack is obviously increased, the temperature at the microcrack is abnormally increased, and finally the chip is heated and broken, so that the chip can not be heated.
The signal line layer microcrack detection principle is as follows: if the signal layer of the sensor chip has microcracks, the microcracks can be amplified after the cold-hot alternating circulation.
After the sensor is heated stably, if the signal layer of the sensor has no influence of microcracks, the internal resistance of the sensor is small, the general resistance is 10-100 ohms, and if the microcracks exist, the resistance is abnormally increased. And applying a constant current source to the signal pin, applying a constant current of 20-60 uA, detecting the current passing through the signal wire of the sensor, wherein if the current is slightly less than the applied current (generally less than about 10%), the sensor has no influence of microcracks, and if the test current is obviously reduced, the microcracks exist.
The principle of assembly detection is as follows: after the sensor is heated stably, a 1-1.5 VDC power supply is directly connected to a signal wire, the positive electrode of the power supply is connected with the positive electrode of the sensor, the negative electrode of the power supply is connected with the negative electrode of the sensor, and therefore oxygen in the outer side is pumped to the inner cavity of the chip in a limiting mode.
The inner chamber volume of chip is less, links to each other with the atmosphere through tiny passageway, when carrying out limit pump oxygen through the outside to the inner chamber, because the outside directly links to each other with the atmosphere, oxygen concentration is high, and the electric current that produces during limit pump oxygen is great. If the signal line is installed reversely when the sensor is assembled, when oxygen needs to be pumped from the outer side to the inner cavity, the oxygen is actually pumped from the inner cavity to the outer side.
When the signal line layer microcrack detects, because the electric current of applying for the signal pin is injectd in 20 ~ 60uA, no matter whether the signal pin connects conversely, as long as the signal line layer does not have the microcrack, the pump oxygen electric current can both reach 20 ~ 60uA, consequently, when the signal line is the microcrack and detects, need not to consider the signal pin and connect the condition of conversely.
The utility model has the advantages that:
1. when the micro-crack detection of the heating circuit layer is carried out, only two heating pins of the oxygen sensor are connected with corresponding pins of the first wiring terminal, the controller controls the relay to be switched on, the first voltage source is switched on with the heating pins of the oxygen sensor to heat the chip, the temperature of the chip is tested by the temperature measuring gun after the relay is switched on for 10s, the relay is switched off under the control of the controller, the relay is switched on again under the control of the controller after 10s, the temperature of the chip is tested by the temperature measuring gun after the relay is switched on for 10s, the relay is switched off under the control of the controller, the cycle is carried out for three times, if the micro-crack exists on the heating circuit layer, the micro-crack is amplified at the moment.
The utility model discloses can realize detecting the crazing line of oxygen sensor chip in the air, the testing result is accurate reliable.
2. The utility model discloses in through switch tube amplifier circuit, amplify the control signal of main control chip to satisfy the drive demand of relay, realize the reliable control of main control chip to the relay; the optical coupling isolation circuit is used for isolating external signals, so that interference signals are prevented from entering the main control chip through the relay, and reliable work of the main control chip is guaranteed.
3. When the micro-crack detection of the signal line layer is carried out, only two signal pins of the oxygen sensor are connected with corresponding pins of the second wiring terminal, the current source is connected with the signal pins, the controller reads data of the first current sensor and compares the data with a set value, if the difference value of the data with the set value is within 10%, the signal line layer is free from the micro-crack, and otherwise, the micro-crack of the signal line layer is judged.
4. When assembly detection is carried out, only two signal pins of the oxygen sensor are connected with corresponding pins of the third wiring terminal, the second voltage source is connected with the signal pins, the controller reads data of the second current sensor, then the two signal pins of the oxygen sensor are replaced, the controller reads data of the second current sensor, and if the difference value of the data of the second current sensor is large twice, for example, the data of the second current sensor at the previous time is larger than 10mA, and the data of the second current sensor at the next time is smaller than 1mA, the wiring mode of the previous time is correct.
The first current sensor and the second current sensor are used for detecting current passing through a signal pin of the oxygen sensor, the first current sensor is used for detecting microcracks of a signal circuit layer, the second current sensor is used for assembling and detecting, and different measuring ranges are selected for the first current sensor and the second current sensor due to the fact that the current levels in the two detections are different, and accuracy of a measuring result is guaranteed.
5. The utility model discloses well electric current sampling circuit is used for gathering the data of current sensor one or current sensor two to the level signal that main control chip can discern is converted. The sampling resistor is used for converting a current signal output by the current sensor I or the current sensor II into a voltage signal, then the voltage signal is conditioned by the voltage follower circuit, noise waves in the signal are filtered by the output filter circuit, and the signal is sent to the main control chip, so that the main control chip is ensured to read an accurate current signal.
6. The utility model discloses in set up the standing groove at the lateral wall of casing, conveniently place the temperature measurement rifle, avoid the temperature measurement rifle to put indiscriminately and lose, influence the temperature detection. When the temperature measuring gun needs to be placed, the first clamping groove piece and the rotating plate are lifted upwards, the space between the first clamping groove piece and the second clamping groove piece is enlarged, the temperature measuring gun is placed into the space surrounded by the first clamping groove piece, the second clamping groove piece and the third clamping groove piece, the main body part of the temperature measuring gun is located in the space surrounded by the first clamping groove piece and the second clamping groove piece, the handle part of the temperature measuring gun is located in the third clamping groove piece, then the first clamping groove piece is put down, and the first clamping groove piece and the second clamping groove piece clamp the temperature measuring gun under the elastic force of the torsion spring, so that the temperature measuring gun is prevented from falling off; when the temperature measuring gun needs to be taken, the first slot clamping piece and the rotating plate are lifted upwards, the space between the first slot clamping piece and the second slot clamping piece is enlarged, the temperature measuring gun can be taken out, and the operation is very convenient.
7. Set up the guard gate in the standing groove outside, play the guard action to the temperature measurement rifle, avoid the temperature measurement rifle to receive to collide with in the transportation, set up the locking handle on the guard gate, make things convenient for opening and closing of guard gate.
Drawings
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic diagram of a micro-crack detection circuit of the middle heating line layer of the present invention;
FIG. 3 is a schematic block diagram of a controller circuit according to the present invention;
FIG. 4 is a schematic diagram of a circuit of a main control chip of the present invention;
FIG. 5 is a schematic diagram of a relay control circuit according to the present invention;
FIG. 6 is a schematic diagram of a medium current collecting circuit according to the present invention;
FIG. 7 is a schematic diagram of a micro-crack detection circuit of the middle signal line layer of the present invention;
FIG. 8 is a schematic diagram of an assembly detection circuit of the present invention;
FIG. 9 is a schematic view of the internal structure of the middle placement trough of the present invention;
FIG. 10 is a schematic view illustrating an opened state of the protective door according to the present invention;
FIG. 11 is a schematic view of the closed state of the middle protective door according to the present invention;
in the figure: 1-shell, 2-voltage source I, 3-relay, 4-wiring terminal I, 5-oxygen sensor, 51-heating pin, 52-signal pin, 6-controller, 61-main control chip, 62-relay control circuit, 621-optical coupling isolation circuit, 622-switching tube amplifying circuit, 63-current sampling circuit, 631-sampling resistor, 632-voltage following circuit, 633-output filter circuit, 7-current source, 8-wiring terminal II, 9-current sensor I, 10-voltage source II, 11-wiring terminal III, 12-current sensor II, 13-placing groove, 14-fixing clamp, 141-rotating plate, 142-torsion spring, 143-clamping groove part I, 144-clamping groove part II, 145-third clamping groove part, 15-protective door, 151-locking handle, 16-temperature measuring gun, 161-main body part and 162-handle part.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely below with reference to the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
As shown in fig. 1-11, comprises
The number of the housings 1 is such that,
a first voltage source 2 arranged in the housing 1,
a relay 3, which is arranged in the shell 1,
a first connecting terminal 4 arranged on the front panel of the shell 1 and used for being connected with a heating pin 51 of the oxygen sensor 5, the first connecting terminal 4 is sequentially connected with the relay 3 and the first voltage source 2,
and the controller 6 is arranged in the shell 1 and used for controlling the on-off of the relay 3.
When the micro-crack detection of the heating circuit layer is carried out, only two heating pins 51 of the oxygen sensor 5 are required to be connected with corresponding pins of the first wiring terminal 4, the controller 6 controls the relay 3 to be switched on, the first voltage source 2 is switched on with the heating pins 51 of the oxygen sensor 5 to heat the chip, the temperature of the chip is tested by the temperature measuring gun 16 after the relay 3 is switched on for 10s, the relay 3 is controlled to be switched off by the controller 6, the relay 3 is controlled to be switched on again after 10s, the temperature of the chip is tested by the temperature measuring gun 16 after the relay 3 is switched on for 10s, the process is circulated for three times, if the micro-crack exists in the heating circuit layer, the micro-crack is amplified at the moment, the temperature of the chip can be found by testing the temperature of the chip by the.
The utility model discloses can realize detecting the crazing line of oxygen sensor chip in the air, the testing result is accurate reliable.
Further, the controller 6 includes a main control chip 61 and a relay control circuit 62 connected to the main control chip 61,
the relay control circuit 62 comprises an optical coupling isolation circuit 621 and a switching tube amplification circuit 622 which are sequentially connected, the optical coupling isolation circuit 621 is connected with the main control chip 61, and the switching tube amplification circuit 622 is connected with the control end of the relay 3.
In the utility model, the control signal of the main control chip 61 is amplified through the switch tube amplifying circuit 622 to meet the driving requirement of the relay 3, and the reliable control of the main control chip 61 on the relay 3 is realized; the optical coupling isolation circuit 621 is used for isolating external signals, so that interference signals are prevented from entering the main control chip 61 through the relay 3, and reliable work of the main control chip 61 is guaranteed.
Further, the device also comprises a current source 7 which is arranged in the shell 1,
a second terminal 8 arranged on the front panel of the shell 1 and used for connecting with a signal pin 52 of the oxygen sensor 5, the second terminal 8 is connected with the current source 7,
and a first current sensor 9 for detecting the current passing through the signal pin 52 of the oxygen sensor 5, wherein the first current sensor 9 is connected with the controller 6.
When the micro-crack detection of the signal line layer is carried out, only two signal pins 52 of the oxygen sensor 5 are connected with corresponding pins of the second connecting terminal 8, the current source 7 is connected with the signal pins 52, the controller 6 reads data of the first current sensor 9 and compares the data with a set value, if the difference value with the set value is within 10%, the signal line layer is free from the micro-crack, and otherwise, the micro-crack of the signal line layer is judged.
Further, also comprises
A second voltage source 10 arranged in the housing 1,
a third terminal 11 arranged on the front panel of the shell 1 and used for being connected with a signal pin 52 of the oxygen sensor 5, the third terminal 11 is connected with a second voltage source 10,
and a second current sensor 12 for detecting the current passing through the signal pin 52 of the oxygen sensor 5, wherein the second current sensor 12 is connected with the controller 6.
During assembly detection, only two signal pins 52 of the oxygen sensor 5 need to be connected with corresponding pins of the third connecting terminal 11, the second voltage source 10 is connected with the signal pins 52, the controller 6 reads data of the second current sensor 12, then the positions of the two signal pins 52 of the oxygen sensor are changed, the controller 6 reads data of the second current sensor 12, and if the difference between the two data of the second current sensor 12 is large, for example, the data of the second current sensor 12 at the previous time is larger than 10mA, and the data of the second current sensor 12 at the next time is smaller than 1mA, the wiring mode at the previous time is correct.
The first current sensor 9 and the second current sensor 12 are used for detecting the current passing through the signal pin 52 of the oxygen sensor 5, the first current sensor 9 is used for detecting the microcracks of the signal circuit layer, the second current sensor 12 is used for assembling detection, and because the current levels in the two detections are different, the first current sensor 9 and the second current sensor 12 adopt different measuring ranges, and the accuracy of the measuring result is ensured.
Further, the controller 6 further comprises two current sampling circuits 63 with the same structure, each of which comprises a sampling resistor 631, a voltage follower circuit 632 and an output filter circuit 633 which are connected in sequence,
the sampling resistor 631 is connected with the first current sensor 9 or the second current sensor 12, and the output filter circuit 633 is connected with the main control chip 61.
The utility model discloses well electric current sampling circuit 63 is used for gathering the data of one 9 or two 12 current sensor to the level signal that main control chip 61 can discern is converted. The sampling resistor 631 is configured to convert a current signal output by the first current sensor 9 or the second current sensor 12 into a voltage signal, condition the signal by the voltage follower circuit 632, filter noise therein by the output filter circuit 633, and send the conditioned signal to the main control chip 61, so as to ensure that the main control chip 61 reads an accurate current signal.
Further, the shell also comprises a placing groove 13, the placing groove 13 is arranged on the outer side of the shell 1, a fixing clamp 14 is arranged in the placing groove 13, and the fixing clamp 14 comprises
A rotating plate 141 rotatably provided on the inner wall of the placing groove 13,
a torsion spring 142, one leading-out end of the torsion spring 142 is pressed against the inner wall of the placing groove 13, the other leading-out end is pressed against the top end of the rotating plate 141,
the first slot clamping piece 143 is arranged at the bottom of the rotating plate 141, the cross section of the first slot clamping piece 143 is arc-shaped, the opening of the first slot clamping piece 143 faces downwards,
the second slot clamping piece 144 is arranged on the inner wall of the placing slot 13, the second slot clamping piece 144 and the first slot clamping piece 143 are arranged in an up-down symmetrical mode,
and the third slot clamping piece 145 is arranged on the inner wall of the placing groove 13, the third slot clamping piece 145 is perpendicular to the second slot clamping piece 144, and the third slot clamping piece 145 is communicated with the second slot clamping piece 144.
The utility model discloses in set up standing groove 13 at the lateral wall of casing 1, conveniently place temperature measurement rifle 16, avoid temperature measurement rifle 16 to put in disorder and lose, influence the temperature detection. When the temperature measuring gun 16 needs to be placed, the first clamping groove 143 and the rotating plate 141 are lifted upwards, the space between the first clamping groove 143 and the second clamping groove 144 is enlarged, the temperature measuring gun 16 is placed into the space surrounded by the first clamping groove 143, the second clamping groove 144 and the third clamping groove 145, the main body portion 161 of the temperature measuring gun 16 is located in the space surrounded by the first clamping groove 143 and the second clamping groove 144, the handle portion 162 of the temperature measuring gun 16 is located in the third clamping groove 145, then the first clamping groove 143 is put down, and the first clamping groove 143 and the second clamping groove 144 clamp the temperature measuring gun 16 under the elastic force of the torsion spring 142, so that the temperature measuring gun 16 is prevented from falling off; when the thermometer 16 needs to be taken, the first clamping groove 143 and the rotating plate 141 are lifted upwards, the space between the first clamping groove 143 and the second clamping groove 144 is enlarged, the thermometer 16 can be taken out, and the operation is very convenient.
Further, a protective door 15 is arranged outside the placing groove 13, and a locking handle 151 is arranged on the protective door 15.
Set up guard gate 15 in the standing groove 13 outside, play the guard action to thermoscope 16, avoid thermoscope 16 to receive to collide with in the transportation, set up locking handle 151 on guard gate 15, make things convenient for opening and closing of guard gate 15.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (7)

1. The utility model provides a crazing line detection device behind oxygen sensor chip package which characterized in that: comprises that
A shell body (1) is arranged in the shell body,
a first voltage source (2) arranged in the housing (1),
a relay (3) disposed in the housing (1),
the first wiring terminal (4) is arranged on the front panel of the shell (1) and is used for being connected with a heating pin (51) of the oxygen sensor (5), the first wiring terminal (4) is sequentially connected with the relay (3) and the first voltage source (2),
and the controller (6) is arranged in the shell (1) and is used for controlling the on-off of the relay (3).
2. The device for detecting microcracks after packaging of an oxygen sensor chip according to claim 1, wherein: the controller (6) comprises a main control chip (61) and a relay control circuit (62) connected with the main control chip (61),
relay control circuit (62) are including opto-isolator circuit (621) and switch tube amplifier circuit (622) that connect gradually, opto-isolator circuit (621) with main control chip (61) are connected, switch tube amplifier circuit (622) with the control end of relay (3) is connected.
3. The device for detecting microcracks after packaging of an oxygen sensor chip according to claim 2, wherein: further comprising a current source (7) arranged within the housing (1),
a second wiring terminal (8) arranged on the front panel of the shell (1) and used for being connected with a signal pin (52) of the oxygen sensor (5), the second wiring terminal (8) is connected with the current source (7),
the first current sensor (9) is used for detecting the current passing through a signal pin (52) of the oxygen sensor (5), and the first current sensor (9) is connected with the controller (6).
4. The device for detecting microcracks after packaging of an oxygen sensor chip according to claim 3, wherein: also comprises
A second voltage source (10) arranged in the housing (1),
a third wiring terminal (11) arranged on the front panel of the shell (1) and used for being connected with a signal pin (52) of the oxygen sensor (5), the third wiring terminal (11) is connected with the second voltage source (10),
and the second current sensor (12) is used for detecting the current passing through a signal pin (52) of the oxygen sensor (5), and the second current sensor (12) is connected with the controller (6).
5. The device for detecting microcracks after packaging of an oxygen sensor chip according to claim 4, wherein: the controller (6) also comprises two current sampling circuits (63) with the same structure, each sampling circuit comprises a sampling resistor (631), a voltage follower circuit (632) and an output filter circuit (633) which are connected in sequence,
the sampling resistor (631) is connected with the first current sensor (9) or the second current sensor (12), and the output filter circuit (633) is connected with the main control chip (61).
6. The device for detecting microcracks after packaging of an oxygen sensor chip according to claim 1, wherein: the shell is characterized by further comprising a placing groove (13), wherein the placing groove (13) is formed in the outer side of the shell (1), a fixing clamp (14) is arranged in the placing groove (13), and the fixing clamp (14) comprises
A rotating plate (141) rotatably provided on an inner wall of the placing groove (13),
a torsion spring (142), one leading-out end of the torsion spring (142) is pressed against the inner wall of the placing groove (13), the other leading-out end is pressed against the top end of the rotating plate (141),
a first slot clamping part (143) arranged at the bottom of the rotating plate (141), the cross section of the first slot clamping part (143) is arc-shaped, the opening of the first slot clamping part (143) faces downwards,
a second slot clamping piece (144) arranged on the inner wall of the placing slot (13), wherein the second slot clamping piece (144) and the first slot clamping piece (143) are arranged in a vertically symmetrical manner,
and the third slot clamping piece (145) is arranged on the inner wall of the placing groove (13), the third slot clamping piece (145) is perpendicular to the second slot clamping piece (144), and the third slot clamping piece (145) is communicated with the second slot clamping piece (144).
7. The device for detecting microcracks after packaging of an oxygen sensor chip according to claim 6, wherein: a protective door (15) is arranged on the outer side of the placing groove (13), and a locking handle (151) is arranged on the protective door (15).
CN201921936967.5U 2019-11-11 2019-11-11 Micro-crack detection device after oxygen sensor chip packaging Active CN211577037U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201921936967.5U CN211577037U (en) 2019-11-11 2019-11-11 Micro-crack detection device after oxygen sensor chip packaging

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201921936967.5U CN211577037U (en) 2019-11-11 2019-11-11 Micro-crack detection device after oxygen sensor chip packaging

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Publication Number Publication Date
CN211577037U true CN211577037U (en) 2020-09-25

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113238138A (en) * 2021-03-31 2021-08-10 无锡芯领域微电子有限公司 Fault detection method for pcie exchange chip

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113238138A (en) * 2021-03-31 2021-08-10 无锡芯领域微电子有限公司 Fault detection method for pcie exchange chip

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