CN211576422U

CN211576422U - Flexible array type capacitance pressure sensor

Info

Publication number: CN211576422U
Application number: CN202020365959.6U
Authority: CN
Inventors: 彭玉鑫; 宋宪; 王健翔; 蔡燕琳; 杜文祥
Original assignee: Suzhou Taco Xindi Robot Co Ltd
Current assignee: Suzhou Taco Xindi Robot Co Ltd
Priority date: 2020-03-21
Filing date: 2020-03-21
Publication date: 2020-09-25
Anticipated expiration: 2030-03-21

Abstract

The utility model belongs to a flexible array capacitance pressure sensor, from the upper strata to the lower floor in proper order including encapsulated layer, upper electrode layer, dielectric layer, bottom electrode layer and stratum basale, upper electrode layer sets up the upper surface at the dielectric layer, and the bottom electrode layer sets up the upper surface at the stratum basale, and upper electrode layer is including a plurality of upper electrodes, the wire that the upper electrode is connected and the lead-out point that the wire afterbody set up, and the upper electrode of including five electrodes, one of them electrode is circular, and four electrodes are the arc; the arc-shaped electrodes are equidistantly surrounded on the outer side of the circular-shaped electrode in the circumference; the lower electrode layer comprises a plurality of lower electrodes; the lower electrode and the upper electrode have the same structure; the utility model discloses use the flexibility can tensile rubber materials, can carry out the precision measurement of multi-angle and multidimension degree, the pressure sensing of irregular object can be applied to its flexible characteristics simultaneously, and control effect is better, operates and assists in having important meaning to machining, medical treatment are recovered and daily life.

Description

Flexible array type capacitance pressure sensor

Technical Field

The utility model belongs to the technical field of the sensor, in particular to flexible array electric capacity pressure sensor.

Background

The pressure sensor is used as a detection tool widely applied to the field of automation, is used for detecting the pressure applied to an object, and is commonly used for pressure sensing during mechanical arm gripping, pressure feedback of intelligent artificial limb fingertips and finger pinching force detection in rehabilitation medicine. The traditional pressure sensor is made of rigid materials and has a large integral volume, and fine sensing cannot be carried out in the sensing process, so that precise-level sensing feedback cannot be carried out. In the precision operation field such as the operation and interaction of a manipulator, the manipulator which cannot perform multi-angle precision measurement can bring great potential safety hazard, and meanwhile, the control effect is not ideal.

SUMMERY OF THE UTILITY MODEL

The utility model aims to overcome the not enough of existence among the prior art and provide a can be applied to flexible array electric capacity pressure sensor of flexibility and accurate pressure sensing scene.

The purpose of the utility model is realized like this: a flexible array type capacitance pressure sensor sequentially comprises a packaging layer, an upper electrode layer, a dielectric layer, a lower electrode layer and a substrate layer from the upper layer to the lower layer, wherein the upper electrode layer is arranged on the upper surface of the dielectric layer, the lower electrode layer is arranged on the upper surface of the substrate layer, the upper electrode layer comprises a plurality of upper electrodes, leads connected with the upper electrodes and leading-out points arranged at the tail parts of the leads, the upper electrodes comprise five electrodes, one of the electrodes is circular, and the four electrodes are arc-shaped; the arc-shaped electrodes surround the outer side of the circular electrode at equal intervals in the circumference; the lower electrode layer comprises a plurality of lower electrodes; the lower electrode and the upper electrode have the same structure.

Preferably, the packaging layer and the substrate layer are both flexible stretchable rubber.

Preferably, the dielectric layer is flexible stretchable rubber doped with conductive particles.

Preferably, the wire structure is serpentine.

Preferably, the lead-out point protrudes from the wire.

The utility model discloses use the flexibility can tensile rubber materials, can carry out the precision measurement of multi-angle and multidimension degree, the pressure sensing of irregular object can be applied to its flexible characteristics simultaneously, and control effect is better, operates and assists in having important meaning to machining, medical treatment are recovered and daily life.

Drawings

Fig. 1 is a schematic structural view of the utility model;

fig. 2 is a schematic structural view of the lower electrode layer and the substrate layer of the utility model;

fig. 3 is a schematic structural diagram of the upper electrode layer and the dielectric layer of the present invention.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.

In the description of the present invention, it is to be understood that the terms "upper", "middle", "outer", "inner", and the like, indicate positional or positional relationships, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the referenced components or elements must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.

Embodiment 1, as shown in fig. 1, fig. 2 and fig. 3, a flexible array capacitive pressure sensor includes, in order from an upper layer to a lower layer, an encapsulation layer 1, an upper electrode layer 2, a dielectric layer 3, a lower electrode layer 4 and a substrate layer 5, where the encapsulation layer 1 and the substrate layer 5 are both flexible stretchable rubber. Rubber materials are routinely selected by those skilled in the art to be flexible and stretchable. The dielectric layer 3 is flexible stretchable rubber doped with conductive particles and used as a dielectric of the capacitor. The upper electrode layer 2 is arranged on the upper surface of the dielectric layer 4, the lower electrode layer 4 is arranged on the upper surface of the substrate layer 5, the upper electrode layer 2 comprises a plurality of upper electrodes, a lead 6 connected with the upper electrodes and a leading-out point 7 arranged at the tail part of the lead 6, the upper electrodes comprise five electrodes, one electrode 13 is circular, and four

electrodes

14, 15, 16 and 17 are arc-shaped; the arc-shaped electrodes (electrode 14, electrode 15, electrode 16 and electrode 17) are equidistantly surrounded on the outer side of the circular electrode (electrode 13) in the circumference; the pressure in four directions around can be detected. The wire structure is in a serpentine shape. Can be conveniently stretched and attached to the skin, and has wide application range. The leading-out point is protruded out of the lead. The lower electrode layer comprises a plurality of lower electrodes; the lower electrode and the upper electrode have the same structure, namely the electrode 8 is circular, and the electrode 9, the electrode 10, the electrode 11 and the electrode 12 are arc-shaped.

The utility model discloses in, the shaping is pour in advance through the mould to encapsulation layer 1 and stratum basale 5. The electrodes of the lower electrode layer are printed on the upper surface of the fixed flexible stretchable rubber substrate layer by a 3D printer. And the electrodes of the upper electrode layer, the wires of the serpentine structure and the leading-out points are printed on the upper surface of the flexible stretchable rubber dielectric layer doped with the conductive particles through a 3D printer. And the flexible stretchable rubber packaging layer is bonded on the upper surface of the upper electrode layer and is punched at the corresponding leading-out point position to complete bonding and packaging of the whole array type capacitance pressure sensor.

The expression for capacitance, as defined by the parallel plate capacitance:

according to the relation between pressure and deformation, the expression is as follows:

a is a constant, which is related to the material properties of the dielectric layer, i.e. the larger the pressure, the smaller the distance between the electrodes.

The capacitance expression can be expressed as:

it can be expressed as:

C＝σF (4)

wherein

For a constant input voltage U, the relationship between the charge Q and the capacitance C is:

the change in charge Q, i.e. the change in the capacitive pressure F, can now be measured by connecting the meandering structure wire 6 with the lead-out point 7 by means of a CDC circuit, i.e.:

as shown in fig. 2, the circular electrodes 8 and the circular arc-

shaped electrodes

9, 10, 11, 12 of the lower electrode layer 4 are printed on the upper surface of the fixed flexible stretchable rubber substrate layer 5 by a 3D printer.

As shown in fig. 3, the circular electrode 13 and the

circular arc electrodes

14, 15, 16, 17 of the upper electrode layer 2, the meandering-structure wire 6 and the lead-out point 7 are printed on the upper surface of the conductive particle-doped flexible stretchable rubber dielectric layer 3 by a 3D printer.

The capacitance is generated by doping the flexible stretchable rubber dielectric layer 3 with conductive particles between the upper electrode layer 2 and the lower electrode layer 4,

i.e. electrodes

8 and 13,

electrodes

9 and 14,

electrodes

10 and 15,

electrodes

11 and 16, and

electrodes

12 and 17, which together generate 5 capacitances C₁，C₂，C₃，C₄，C₅. By the formula(6) Can correspondingly generate 5 pressure values F₁，F₂，F₃，F₄，F₅. I.e. forming an array of capacitive pressure sensors.

In the description herein, references to the description of "one embodiment," "an example," "a specific example," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The preferred embodiments of the present invention disclosed above are intended only to help illustrate the present invention. The preferred embodiments are not exhaustive and do not limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and its practical applications, to thereby enable others skilled in the art to best understand the invention for and utilize the invention. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A flexible array capacitive pressure sensor, comprising: the packaging structure comprises a packaging layer, an upper electrode layer, a dielectric layer, a lower electrode layer and a substrate layer from the upper layer to the lower layer, wherein the upper electrode layer is arranged on the upper surface of the dielectric layer, the lower electrode layer is arranged on the upper surface of the substrate layer, the upper electrode layer comprises a plurality of upper electrodes, leads connected with the upper electrodes and leading-out points arranged at the tail parts of the leads, the upper electrodes comprise five electrodes, one of the electrodes is circular, and the four electrodes are arc-shaped; the arc-shaped electrodes surround the outer side of the circular electrode at equal intervals in the circumference; the lower electrode layer comprises a plurality of lower electrodes; the lower electrode and the upper electrode have the same structure.

2. The flexible array capacitive pressure sensor of claim 1, wherein: the packaging layer and the substrate layer are both flexible stretchable rubber.

3. The flexible array capacitive pressure sensor of claim 1, wherein: the dielectric layer is flexible stretchable rubber doped with conductive particles.

4. The flexible array capacitive pressure sensor of claim 1, wherein: the wire structure is in a serpentine shape.

5. The flexible array capacitive pressure sensor of claim 1, wherein: the leading-out point is protruded out of the lead.