CN211569990U - Response elevating platform - Google Patents
Response elevating platform Download PDFInfo
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- CN211569990U CN211569990U CN201922129613.6U CN201922129613U CN211569990U CN 211569990 U CN211569990 U CN 211569990U CN 201922129613 U CN201922129613 U CN 201922129613U CN 211569990 U CN211569990 U CN 211569990U
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- block
- wedge
- guide rail
- lifting
- lifting block
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Abstract
The utility model discloses a response lifting platform, which comprises a lifting block, wherein a wedge block is embedded below the lifting block, and a linear motor is arranged below the wedge block; the lower side surface of the lifting block is an inclined surface, and the inclined angle of the inclined surface is the same as that of the wedge-shaped block; two side edges of the lifting block are respectively provided with a baffle in an extending way; a support is fixed on the bottom plate, a flexible limiting device is mounted on the support through a first mounting plate, and the other end of the flexible limiting device is mounted on the outer side face of the baffle through a second mounting plate; the bottom plate is further fixedly provided with a shell, an inward folded edge is arranged at the upper end of the shell, and the folded edge is arranged around the upper end of the lifting block. The utility model discloses utilize the wedge to realize the lift of workstation, improve the bearing capacity of workstation, reduce the processing cost, the running noise is less.
Description
Technical Field
The utility model relates to a semiconductor processing technology field specifically is a response elevating platform.
Background
In the technical field of semiconductor processing, a precision measuring instrument, a precision assembling machine and the like which have high precision positioning requirements are needed, and a positioning workbench is also needed to be arranged on the equipment so as to meet the positioning in the X direction, the Y direction or the Z direction, wherein the positioning in the Z direction is generally realized by using a lead screw to realize lifting positioning, but the lead screw lifting positioning has the defects of low bearing capacity, high processing cost, high running noise and the like, so the lead screw lifting positioning cannot be widely applied to the semiconductor processing industry.
SUMMERY OF THE UTILITY MODEL
For solving the defect of the prior art, the utility model provides a response elevating platform, the utility model discloses utilize the wedge to realize the lift of workstation, improve the bearing capacity of workstation, reduce the processing cost, the noise of operation is less.
In order to achieve the technical purpose, the utility model adopts the following technical scheme: a response lifting platform comprises a lifting block, a wedge-shaped block is embedded below the lifting block, and a linear motor is installed below the wedge-shaped block;
the lower side surface of the lifting block is an inclined surface, and the inclined angle of the inclined surface is the same as that of the wedge-shaped block; two side edges of the lifting block are respectively provided with a baffle in an extending way;
two ends of the upper side surface of the wedge-shaped block are respectively provided with an upper sliding chute, an upper guide rail is arranged in the upper sliding chute, the upper guide rail is connected with the lifting block, and the inclination angle of the upper guide rail is the same as that of the inclined plane; two side edges of the wedge-shaped block are respectively extended with a sliding block, the upper side surface of the sliding block is inclined, the inclination angle of the upper side surface of the sliding block is the same as that of the inclined surface, two ends of the lower side surface of the sliding block are respectively provided with a lower sliding groove, a lower guide rail is arranged in the lower sliding grooves, the lower guide rails are horizontally arranged, and the lower guide rails are fixed on the bottom plate; a groove is formed below the wedge-shaped block, the linear motor is installed in the groove, and the linear motor is horizontally arranged;
a support is fixed on the bottom plate, a flexible limiting device is mounted on the support through a first mounting plate, and the other end of the flexible limiting device is mounted on the outer side face of the baffle through a second mounting plate;
the bottom plate is further fixedly provided with a shell, an inward folded edge is arranged at the upper end of the shell, and the folded edge is arranged around the upper end of the lifting block.
Further, the baffle is positioned on the outer side of the wedge-shaped block; the baffle is positioned above the sliding block.
Further, the upper guide rail adopts a crossed roller guide rail.
Further, the lower guide rail adopts a crossed roller guide rail.
Furthermore, a grating ruler is further fixed on the side wall of the groove, a reading head is matched with the grating ruler, and the reading head is fixed on the bottom plate.
Further, a cable connector is mounted on the housing.
Further, the length of the bottom plate is larger than that of the wedge-shaped block.
Furthermore, the flexible limiting device is made of a steel belt.
To sum up, the utility model discloses following technological effect has been gained:
1. the utility model is provided with the wedge block and the lifting block, the lower side surface of the lifting block is arranged into an inclined plane, the inclined plane of the wedge block is utilized to convert the self horizontal motion into the up-and-down motion of the lifting block, the motion direction of the horizontal plane is converted into the positioning of the Z direction, and the motion and the positioning of the lifting platform are realized;
2. the utility model is provided with an upper guide rail and a lower guide rail, the wedge block realizes horizontal linear motion by utilizing the lower guide rail, and the lifting block realizes up-and-down motion by utilizing the upper guide rail and the wedge block, thereby ensuring the stability and the linearity of motion;
3. the utility model discloses set up the steel band, utilize the ductility that steel band itself only has a direction, guarantee that the elevator only is the up-and-down motion, can not control or the inclined motion.
Drawings
Fig. 1 is a schematic view of an elevating platform provided in an embodiment of the present invention;
FIG. 2 is a top view of FIG. 1;
FIG. 3 is a cross-sectional view AA in FIG. 2;
FIG. 4 is a cross-sectional view of BB of FIG. 2;
in the figure, 1, a lifting block, 101, a baffle, 2, a shell, 201, a folding edge, 3, a wedge-shaped block, 301, a groove, 302, a sliding block, 303, an upper chute, 304, a lower chute, 4, a linear motor, 5, a bottom plate, 6, an upper guide rail, 7, a lower guide rail, 8, a grating ruler, 9, a reading head, 10, a cable joint, 11, a bracket, 12, a second mounting plate, 13, a first mounting plate, 14 and a flexible limiting device.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
The present embodiment is only for explaining the present invention, and it is not limited to the present invention, and those skilled in the art can make modifications to the present embodiment without inventive contribution as required after reading the present specification, but all of them are protected by patent laws within the scope of the claims of the present invention.
Example (b):
as shown in fig. 1 and 2, a response elevating platform comprises an elevating block 1, the side surface of the elevating block 1 is used as a working platform, a shell 2 is arranged outside the elevating block 1, a wedge block 3 (shown in fig. 3) is embedded below the elevating block 1, the upper side surface of the wedge block 3 is an inclined plane, a linear motor 4 is installed below the wedge block 3, the linear motor 4 drives the wedge block 3 to move back and forth on the horizontal plane, and the wedge block 3 converts the horizontal movement of the wedge block 3 into the up-and-down movement of the elevating block 1 due to the inclined surface contact between the inclined surface of the wedge block 3 and the elevating block 1, so that the Z-direction positioning of the working platform is realized.
As shown in fig. 3, which is a cross-sectional view along direction AA, the relationship between the wedge block 3 and the elevator block 1 is shown, wherein the lower side surface of the elevator block 1 is an inclined surface, the inclined surface has the same inclination angle as the wedge block 3, and the upper surface of the elevator block 1 is a plane and is used as a working platform; two sides of the lifting block 1 are respectively extended with a baffle 101 (shown in fig. 4), and further, the baffles 101 are positioned outside the wedge block 3.
As shown in fig. 4, which is a cross-sectional view in the BB direction, the cross-sectional connection relationship between the wedge 3 and the elevator block 1 is shown, two ends of the upper side of the wedge 3 are respectively provided with an upper chute 303, the extending direction of the upper chute 303 is the same as the inclined direction and the angle of the wedge 3, an upper guide rail 6 is installed in the upper chute 303, the upper guide rail 6 is connected with the elevator block 1, the inclined angle of the upper guide rail 6 is the same as the inclined angle of the inclined plane, so as to ensure the up-and-down stable movement of the elevator block 1, and specifically, the upper guide rail 6 is a cross roller guide. The both sides limit of wedge 3 extends respectively and is equipped with slider 302, the slope of the side slope and the inclination on the inclined plane are the same on slider 302, baffle 101 is located the top of slider 302, guarantee can not touch lifter 1 when wedge 3 moves, guarantee the smooth and easy of operation, lower spout 304 has been opened respectively at the downside both ends of slider 302, install lower guideway 7 in the lower spout 304, lower guideway 7 level sets up, lower guideway 7 is fixed on bottom plate 5, lower guideway 7 adopts the alternately roller guide. A groove 301 is formed below the wedge block 3, a linear motor 4 is installed in the groove 301, and the linear motor 4 is horizontally arranged.
As shown in fig. 4, a support 11 is fixed on the bottom plate 5, a flexible limiting device 14 is mounted on the support 11 through a first mounting plate 13, the other end of the flexible limiting device 14 is mounted on the outer side surface of the baffle plate 101 through a second mounting plate 12, and further, the flexible limiting device 14 is made of a steel belt. One end of the steel belt is fixed on the bracket 11, the other end of the steel belt is fixed on the baffle 101, when the lifting block 1 moves up and down, the steel belt is limited to move only up and down but not left and right or obliquely due to the action of the steel belt, and the effect of ensuring the vertical line movement of the lifting block 1 is achieved. Furthermore, both sides all set up a steel band on the bottom plate 5, further guarantee the linear type of motion.
Still be fixed with shell 2 on the bottom plate 5, shell 2 upper end department is equipped with inward hem 201, and hem 201 sets up around elevator 1 upper end, and in elevator 1 up-and-down motion process, it is all the time in shell 2's within range, and shell 2 plays the effect of protection internals.
Further, the length of the bottom plate 5 is larger than that of the wedge-shaped block 3, and the space inside the shell 2 is enough for the movement space of the wedge-shaped block 3, so that the full movement is ensured.
A grating ruler 8 is further fixed on the side wall of the groove 301, the grating ruler 8 is matched with a reading head 9, and the reading head 9 is fixed on the bottom plate 5 and used for signal feedback.
A cable connector 10 is mounted on the housing 2 for connection transmission of cables.
The working principle is as follows:
as shown in fig. 1-4, the linear motor 4 is started, the linear motor 4 drives the wedge 3 to do horizontal linear motion, the wedge 3 drives the lifting block 1 to do vertical linear motion, the positioning in the Z direction is realized, meanwhile, the steel belt ensures the linear motion of the lifting block 1, and the deflection of the lifting block 1 is avoided.
The utility model is provided with the wedge block and the lifting block, the lower side surface of the lifting block is arranged into an inclined plane, the inclined plane of the wedge block is utilized to convert the self horizontal motion into the up-and-down motion of the lifting block, the motion direction of the horizontal plane is converted into the positioning of the Z direction, and the motion and the positioning of the lifting platform are realized; the utility model is provided with an upper guide rail and a lower guide rail, the wedge block realizes horizontal linear motion by utilizing the lower guide rail, and the lifting block realizes up-and-down motion by utilizing the upper guide rail and the wedge block, thereby ensuring the stability and the linearity of motion; the utility model discloses set up the steel band, utilize the ductility that steel band itself only has a direction, guarantee that the elevator only is the up-and-down motion, can not control or the inclined motion.
The above description is only for the preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and all the modifications and equivalents of the technical spirit of the present invention to any simple modifications of the above embodiments are within the scope of the technical solution of the present invention.
Claims (8)
1. A responsive lift station, comprising: the lifting platform comprises a lifting block (1), a wedge-shaped block (3) is embedded below the lifting block (1), and a linear motor (4) is installed below the wedge-shaped block (3);
the lower side surface of the lifting block (1) is an inclined surface, and the inclined angle of the inclined surface is the same as that of the wedge-shaped block (3); two side edges of the lifting block (1) are respectively provided with a baffle (101) in an extending way;
two ends of the upper side surface of the wedge-shaped block (3) are respectively provided with an upper sliding chute (303), an upper guide rail (6) is arranged in the upper sliding chute (303), the upper guide rail (6) is connected with the lifting block (1), and the inclination angle of the upper guide rail (6) is the same as that of the inclined plane; two side edges of the wedge-shaped block (3) are respectively provided with a sliding block (302) in an extending mode, the upper side face of the sliding block (302) inclines, the inclination angle of the sliding block is the same as that of the inclined face, two ends of the lower side face of the sliding block (302) are respectively provided with a lower sliding groove (304), a lower guide rail (7) is installed in the lower sliding groove (304), the lower guide rail (7) is horizontally arranged, and the lower guide rail (7) is fixed on the bottom plate (5); a groove (301) is formed below the wedge block (3), the linear motor (4) is installed in the groove (301), and the linear motor (4) is horizontally arranged;
a support (11) is fixed on the bottom plate (5), a flexible limiting device (14) is mounted on the support (11) through a first mounting plate (13), and the other end of the flexible limiting device (14) is mounted on the outer side face of the baffle (101) through a second mounting plate (12);
the lifting block is characterized in that a shell (2) is further fixed on the bottom plate (5), an inward folded edge (201) is arranged at the upper end of the shell (2), and the folded edge (201) surrounds the upper end of the lifting block (1).
2. A responsive lift station as claimed in claim 1, wherein: the baffle (101) is positioned on the outer side of the wedge-shaped block (3); the baffle (101) is positioned above the sliding block (302).
3. A responsive lift station as claimed in claim 1, wherein: the upper guide rail (6) adopts a crossed roller guide rail.
4. A responsive lift station as claimed in claim 1, wherein: the lower guide rail (7) adopts a crossed roller guide rail.
5. A responsive lift station as claimed in claim 1, wherein: still be fixed with grating chi (8) on recess (301) lateral wall, grating chi (8) are matchd there is reading head (9), reading head (9) are fixed on bottom plate (5).
6. A responsive lift station as claimed in claim 1, wherein: and a cable joint (10) is arranged on the shell (2).
7. A responsive lift station as claimed in claim 1, wherein: the length of the bottom plate (5) is larger than that of the wedge-shaped block (3).
8. A responsive lift station as claimed in claim 1, wherein: the flexible limiting device (14) is made of a steel belt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922129613.6U CN211569990U (en) | 2019-12-02 | 2019-12-02 | Response elevating platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922129613.6U CN211569990U (en) | 2019-12-02 | 2019-12-02 | Response elevating platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211569990U true CN211569990U (en) | 2020-09-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922129613.6U Active CN211569990U (en) | 2019-12-02 | 2019-12-02 | Response elevating platform |
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| CN (1) | CN211569990U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113459048A (en) * | 2021-06-28 | 2021-10-01 | 无锡地心科技有限公司 | High-response and high-balance working platform |
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2019
- 2019-12-02 CN CN201922129613.6U patent/CN211569990U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113459048A (en) * | 2021-06-28 | 2021-10-01 | 无锡地心科技有限公司 | High-response and high-balance working platform |
| CN113459048B (en) * | 2021-06-28 | 2024-04-16 | 无锡地心科技有限公司 | High-response high-balance working platform |
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