CN211652957U

CN211652957U - Large-load high-precision electric Z-axis displacement table for probe card test

Info

Publication number: CN211652957U
Application number: CN201922334597.4U
Authority: CN
Inventors: 张冀阳; 邢玉兵
Original assignee: Corad Electronic Technology Zhuhai Co ltd
Current assignee: Zero one electronics (Zhuhai) Co.,Ltd.
Priority date: 2019-12-24
Filing date: 2019-12-24
Publication date: 2020-10-09
Anticipated expiration: 2029-12-24

Abstract

The utility model discloses a high-precision electric Z-axis displacement table for probe card testing, which comprises a storage platform, a cylinder body, a fixed table, a lifting block, a lead screw, a shaft coupling, a planetary reducer and a servo motor, wherein the cylinder body is positioned below the storage platform and has an opening at the upper end; the upper end of elevator with storage platform connects, the side of cylinder body is equipped with the grating sensor, the grating sensor includes spacing dead lever of light, photoelectricity limit switch, grating scale and grating reading head, the grating reading head can follow the spacing dead lever of light and slide, the grating reading head with storage platform's side passes through the connecting rod and connects. The utility model discloses be applied to probe card testing process, convenient operation, the repeated positioning accuracy is high, improves the detection efficiency of probe card.

Description

Large-load high-precision electric Z-axis displacement table for probe card test

Technical Field

The utility model relates to a probe card production check out test set especially relates to an electronic Z axle displacement table of high accuracy is used in probe card test.

Background

The probe card is a test interface, and is mainly used for testing a bare chip, and testing parameters of the chip by connecting a test machine and the chip and transmitting signals. When the vertical probe card is used for testing in production, the probe card needs to be placed on a Z-axis displacement table, and detection is carried out through up-down repeated positioning. A commonly used Z-axis displacement table uses a linear bearing guide rail, and a servo motor and a worm are connected through an elastic coupling. The existing linear guide rail of the Z-axis displacement table has poor repeated positioning precision and poor load capacity, and is easy to generate unbalance loading swing.

SUMMERY OF THE UTILITY MODEL

To the above-mentioned prior art, the to-be-solved technical problem of the utility model is to provide an electronic Z axle displacement table of high accuracy is used in probe card test, its simple structure, convenient operation, the repeated positioning accuracy is high.

In order to solve the technical problem, the utility model discloses the technical scheme who adopts is:

a high-precision electric Z-axis displacement table for probe card testing comprises a storage platform, a cylinder body, a fixed table, a lifting block, a screw rod, a coupler, a planetary reducer and a servo motor, wherein the cylinder body is positioned below the storage platform and is provided with an opening at the upper end; the upper end of elevator with storage platform connects, the side of cylinder body is equipped with the grating sensor, the grating sensor includes spacing dead lever of light, photoelectricity limit switch, grating scale and grating reading head, the grating reading head can follow the spacing dead lever of light and slide, the grating reading head with storage platform's side passes through the connecting rod and connects.

Inside arranging lifting unit such as lifter block, lead screw in the cylinder body, can effectively prevent that the lifting guide surface from being infected with the dust, reinforcing mechanical structure's reliability improves the accuracy and the stability of lift location. When the displacement platform reciprocates, servo motor provides power, carries out the transmission through planetary reducer, shaft coupling, lead screw, promotes elevator and object placing platform and removes, and the grating sensor can real-time measurement object placing platform displacement to convey the signal to servo motor and compensate the correction, improve displacement platform's repeated positioning accuracy greatly.

Further, a right-angle needle bearing is arranged at the side end of the lifting block, the right-angle needle bearing is embedded into the side end of the lifting block, and the right-angle needle bearing is in contact with the side wall of the cylinder body. The elevator slides from top to bottom along the lateral wall of cylinder body through right angle bearing, prevents that the unbalance loading swing from appearing when the platform is heavily loaded to influence the precision of location.

Furthermore, limiting blocks are arranged on two sides of the upper end of the cylinder body, and the limiting blocks can limit the upward movement of the right-angle needle bearing to prevent the needle bearing from moving out of the cylinder body.

Compared with the prior art, the utility model provides an electronic Z axle displacement platform has following beneficial effect:

(1) the lifting guide rail is arranged in the cylinder body, the lifting block moves in the cylinder body through the right-angle roller pin under the transmission driving of the screw rod to realize the lifting of the storage platform, the equipment structure is stable, the load capacity is enhanced, the unbalance loading does not swing, the guide rail is not easy to be stained with dust, the positioning precision is high, and the service life is long;

(2) through the linkage of the grating ruler and the servo motor, displacement transmission data are acquired, closed-loop compensation is realized, and the repeated positioning precision of the displacement table is improved.

Drawings

Fig. 1 is a schematic front view of the present invention;

fig. 2 is a schematic diagram of the right-side structure of the present invention;

FIG. 3 is an enlarged schematic view of the portion A in FIG. 2;

FIG. 4 is a schematic structural view taken along the line B-B in FIG. 2;

FIG. 5 is an enlarged schematic view of the portion C in FIG. 4;

the labels in the figure are: 1-a placement platform; 2-cylinder body; 3-a fixed table; 4-lifting block; 5-a screw rod; 51-a feed screw nut; 6-a coupler; 7-a planetary reducer; 8-a servo motor; 9-a grating sensor; 91-light limiting fixing rod; 92-photoelectric limit switch; 93-a grating scale; 94-grating reading head; 10-right angle needle roller bearing; 11-a limiting block.

Detailed Description

The following describes embodiments of the present invention in detail with reference to the accompanying drawings.

As shown in fig. 1 to 5, a high-precision electric Z-axis displacement stage for probe card testing includes a platform 1, a cylinder 2 located below the platform 1 and having an open upper end, a fixed stage 3 located at a lower end of the cylinder 2, a lifting block 4 located inside the cylinder 2, a lead screw 5 fixed to a lower end of the lifting block 4, a coupling 6 connected to a lower end of the lead screw 5, a planetary reducer 7, and a servo motor 8; the lifter 4 is fixed with lead screw 5 through screw-nut 51, the upper end of lifter 4 with storage platform 1 connects, the side of cylinder body 2 is equipped with grating sensor 9, grating sensor 9 includes the spacing dead lever 91 of light, photoelectricity limit switch 92, grating scale 93 and grating reading head 94, grating reading head 94 can follow the spacing dead lever 91 of light and slide, grating reading head 94 with storage platform 1's side passes through the connecting rod and connects.

The side end of the lifting block 4 is provided with a right-angle needle roller bearing 10, the right-angle needle roller bearing 10 is embedded into the side end of the lifting block 4, and the right-angle needle roller bearing 10 is in contact with the side wall of the cylinder body 2. And two sides of the upper end of the cylinder body 2 are provided with limiting blocks 11.

The present invention has been described in detail with reference to the specific embodiments. However, the present invention is not limited to the above description. Within the knowledge of a person skilled in the art, variations are possible without departing from the inventive concept, which falls within the scope of the invention.

Claims

1. A high-precision electric Z-axis displacement table for probe card testing is characterized in that: the device comprises a storage platform, a cylinder body, a fixed platform, a lifting block, a screw rod, a coupler, a planetary reducer and a servo motor, wherein the cylinder body is positioned below the storage platform and is provided with an opening at the upper end; the upper end of elevator with storage platform connects, the side of cylinder body is equipped with the grating sensor, the grating sensor includes spacing dead lever of light, photoelectricity limit switch, grating scale and grating reading head, the grating reading head can follow the spacing dead lever of light and slide, the grating reading head with storage platform's side passes through the connecting rod and connects.

2. The high-precision electric Z-axis displacement table for probe card testing according to claim 1, wherein: the side end of the lifting block is provided with a right-angle needle roller bearing, the right-angle needle roller bearing is embedded into the side end of the lifting block, and the right-angle needle roller bearing is in contact with the side wall of the cylinder body.

3. The high-precision electric Z-axis displacement table for probe card test according to claim 1 or 2, wherein: and limiting blocks are arranged on two sides of the upper end of the cylinder body.