CN211492332U - Cooling liquid circulation system - Google Patents
Cooling liquid circulation system Download PDFInfo
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- CN211492332U CN211492332U CN201921765651.4U CN201921765651U CN211492332U CN 211492332 U CN211492332 U CN 211492332U CN 201921765651 U CN201921765651 U CN 201921765651U CN 211492332 U CN211492332 U CN 211492332U
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Abstract
The utility model provides a cooling liquid circulating system, which comprises a centralized overflow device used for transferring cooling liquid; the line cutting machine liquid supply circulating branch is used for being communicated and circulated with the line cutting machine, a liquid inlet end and a liquid outlet end of the line cutting machine liquid supply circulating branch are both communicated with the centralized overflow device, and cooling liquid supply and centralized recovery of the plurality of line cutting machines are carried out; and the liquid inlet end and the liquid outlet end of the liquid supplementing circulation branch are communicated with the centralized overflow device, so that the waste liquid of the cooling liquid can conveniently enter the centralized overflow device after being treated. The beneficial effects of the utility model are that simple structure, easy maintenance is dismantled in the installation, has concentrated overflow arrangement and concentrated filter equipment, can concentrate the filtration to the coolant liquid that gets into many line cutting machines, guarantees to get into the uniformity of cutting storehouse internal cooling liquid quality, reduces impurity such as dope in the online liquid, promotes online coolant liquid quality.
Description
Technical Field
The utility model belongs to the technical field of the silicon chip cutting, especially, relate to a coolant liquid circulation system.
Background
At present, a diamond wire slicing technology is adopted for silicon wafer cutting, and the mechanism is that a machine drives a diamond wire wound on a grooved pulley to run at a high speed and rub a single crystal silicon rod to finish cutting. This process generates a large amount of heat, requiring a cooling fluid for cooling. The defoaming agent added into the cooling liquid mainly comprises organic matters which are insoluble or slightly soluble in water, and the organic matters are demulsified and separated out visible milky sticky matters under the actions of high-speed shearing in an online cutting machine, temperature change and the like; sticky matters are continuously separated out, agglomerated and accumulated in the online liquid circulation system, so that a fine filter of the online liquid system and a filter bag at the front end of a line cutting machine are frequently blocked, the filter bag is frequently replaced and the using amount is large, and the stability, the quality consistency and the like of online liquid supply are influenced.
Disclosure of Invention
In view of the above problem, the to-be-solved problem of the utility model is to provide a coolant liquid circulation system is applicable to line cutting machine coolant liquid circulation system and uses, adopts and concentrates overflow arrangement and concentrate filter equipment, concentrates the filtration to the coolant liquid, and the coolant liquid after the filtration gets into simultaneously in many line cutting machines, guarantees to get into the uniformity of the coolant liquid quality in the cutting storehouse.
In order to solve the technical problem, the utility model discloses a technical scheme is: a cooling liquid circulation system comprises a cooling liquid circulation system,
a centralized overflow device for the transit of the cooling liquid;
the line cutting machine liquid supply circulating branch is used for being communicated and circulated with the line cutting machine, a liquid inlet end and a liquid outlet end of the line cutting machine liquid supply circulating branch are both communicated with the centralized overflow device, and cooling liquid supply and centralized recovery of the plurality of line cutting machines are carried out;
and the liquid inlet end and the liquid outlet end of the liquid supplementing circulation branch are communicated with the centralized overflow device, so that the waste liquid of the cooling liquid can conveniently enter the centralized overflow device after being treated.
Furthermore, the line cutting machine circulation branch system comprises a centralized liquid supply device and a centralized filtering device, the centralized overflow device, the centralized liquid supply device and the centralized filtering device are sequentially connected, the liquid outlet end of the centralized filtering device is respectively connected with the filtering systems of the multiple line cutting machines, and the liquid outlet ends of the filtering systems of the multiple line cutting machines are connected with the centralized overflow water tank, so that cooling liquid can be conveniently provided for the line cutting machines and centralized recovery can be conveniently carried out.
Furthermore, the liquid supplementing circulation branch comprises a cooling liquid treatment device and a filtering device, the concentrated overflow device, the cooling liquid treatment device and the filtering device are sequentially connected, and the liquid outlet end of the filtering device is connected with the concentrated overflow device, so that the cooling liquid waste liquid can conveniently enter the concentrated overflow device for liquid supplementing through treatment.
Further, the centralized liquid supply device is a liquid supply pump.
Further, the centralized filtering device is a filter.
Further, the filtering device is a non-pressure filter.
Furthermore, the centralized overflow device is a centralized overflow water tank.
Furthermore, the cooling liquid treatment device comprises a liquid supply pump, a pressure filter, a sequential inspection device, a pre-preparation tank, a preparation device, a secondary inspection device and a fine filter, wherein the centralized overflow device, the liquid supply pump, the pressure filter, the sequential inspection device, the pre-preparation tank, the preparation device, the secondary inspection device and the fine filter are sequentially connected with the filtering device.
By adopting the technical scheme, the cooling liquid circulating system is simple in structure and convenient to mount, dismount and maintain, and is provided with the centralized overflow device and the centralized filtering device, so that cooling liquid entering a plurality of line cutting machines can be filtered in a centralized manner, the consistency of the quality of the cooling liquid entering a cutting bin is ensured, impurities such as sticky substances and the like in the online liquid are reduced, and the quality of the online cooling liquid is improved;
the cooling liquid waste liquid overflowing from the centralized overflow device enters a cooling liquid treatment device of a large circulation workshop for treatment and allocation, so that the finished product liquid enters the centralized overflow device through a non-pressure filter for liquid supplement at any time, the replacement frequency of a filter bag is reduced, and the cost investment of auxiliary materials and labor is reduced;
concentrate filter equipment, filter equipment and coolant liquid processing apparatus's setting, furthest will be thick thing filtering in the online liquid, reduce the adhesion of thick thing to pipeline and tank inner wall, guarantee the pipeline flow, reduce cleaning system's frequency.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of the present invention.
In the figure:
1. filter device 2, coolant treatment device 3, and concentrated overflow device
4. Centralized liquid supply device 5 and centralized filtering device
Detailed Description
The invention will be further described with reference to the accompanying drawings and specific embodiments.
Fig. 1 shows the structure schematic diagram of an embodiment of the utility model, specifically show the structure of this embodiment, this embodiment relates to a coolant liquid circulation system, a line cutter uses among the single crystal silicon rod cutting process, line cutter supplies liquid circulation branch road and fluid infusion circulation branch road has, can adopt concentrated collection to the coolant liquid that many line cutters used, concentrate the filtration, make coolant liquid circulation system can provide the coolant liquid for many line cutters simultaneously, and simultaneously, concentrate the recovery to the coolant liquid that comes out from many line cutters, make the coolant liquid can recycle, and simultaneously, can be to concentrating the coolant liquid fluid infusion often among the overflow arrangement, the coolant liquid recycling of being convenient for, promote online coolant liquid quality, guarantee to get into the uniformity of line cutter cutting storehouse coolant liquid quality.
A cooling liquid circulation system is applied to a monocrystalline silicon rod line cutting machine, as shown in figure 1, and comprises,
the centralized overflow device 3 is used for transferring the cooling liquid, and the centralized overflow device 3 is used for storing the cooling liquid and recovering and collecting the cooling liquid circulated from each line cutting machine;
the line cutting machine liquid supply circulation branch is used for being communicated with the line cutting machine for circulation, a liquid inlet end and a liquid outlet end of the line cutting machine liquid supply circulation branch are both connected with the centralized overflow device 3, cooling liquid supply is carried out on the plurality of line cutting machines, and cooling liquid is recycled;
a liquid supplementing circulation branch for supplementing the cooling liquid to the centralized overflow device, wherein the liquid inlet end and the liquid outlet end of the liquid supplementing circulation branch are both communicated with the centralized overflow device 3, so that the waste cooling liquid enters the centralized overflow device after being treated to be supplemented with the liquid; the liquid supplementing circulation branch is used for treating and blending the waste liquid of the cooling liquid in the centralized overflow device to form finished liquid, the finished liquid flows back to the centralized overflow device 3 again, the finished liquid of the cooling liquid is supplemented to the centralized overflow device 3 at any time, the capacity and the quality of the cooling liquid in the centralized overflow device 3 are guaranteed, and the cooling liquid can be provided for a plurality of line cutting machines conveniently.
When the cooling liquid circulating system is used, the centralized overflow device 3 is used as cooling liquid for transfer, the cooling liquid is stored in the centralized overflow device 3, and the line cutting machines are communicated with the centralized overflow water device 3 through the line cutting machine liquid supply circulating branch to form a cooling liquid recycling system, so that the cooling liquid is treated through the line cutting machine liquid supply circulating branch from the centralized overflow device 3 and enters the line cutting machines for internal cutting bins, the line cutting machines are cooled when single crystal silicon rods are cut, and meanwhile, used cooling liquid waste liquid flows out of the line cutting machines and flows back to the centralized overflow device 3 to form cooling liquid recycling; meanwhile, the cold area liquid in the centralized overflow device 3 is processed and blended through a liquid supplementing circulation branch to form finished product liquid, the finished product liquid enters the centralized overflow device 3 again, the finished product liquid is supplemented to the centralized overflow device 3 at all times, the quality of the cooling liquid is guaranteed, and the use requirements of a plurality of line cutting machines are met.
Specifically, the concentrated overflow device 3 is a concentrated overflow water tank, and is used for performing overflow treatment on the cooling liquid entering the concentrated overflow water tank, so that sticky matters in the cooling liquid are settled, the cooling liquid can conveniently enter the line cutting machine through a liquid supply circulation branch of the line cutting machine for use, and the quality of the online cooling liquid is ensured. The centralized overflow water tank can be a commercially available overflow water tank or a lift well, and is selected according to actual requirements, and no specific requirement is made here.
Foretell line cutter circulation branch road system is including concentrating confession liquid device 4 and centralized filter equipment 5, concentrate overflow arrangement 3, concentrate confession liquid device 4 and concentrate filter equipment 5 and connect gradually, concentrate filter equipment 5's play liquid end respectively through connecting tube and many line cutter intercommunication, many line cutter's play liquid end is connected with concentrated overflow arrangement 3, be convenient for provide the coolant liquid and concentrate for many line cutter and carry out waste liquid recovery, this concentrate confession liquid device 4's effect is for concentrating the coolant liquid in overflow arrangement 3 and get into line cutter and provide power, make the coolant liquid in the concentrated overflow arrangement 3 get into line cutter fast in, guarantee the user demand of coolant liquid in the line cutter. The concentrated filtering device 5 is used for filtering the cooling liquid flowing out of the concentrated overflow device 3 and filtering out sticky substances, so that the cooling liquid entering the line cutting machine meets the use requirement, and the quality of the cooling liquid entering the line cutting machine on line is ensured. The cooling liquid in the centralized overflow device 3 enters the centralized filtering device 5 under the action of the centralized liquid supply device 4 to be filtered, and after the treatment, the cooling liquid respectively enters a plurality of line cutting machines to be used by the line cutting machines, after the cooling liquid is used in the line cutting machines, the waste liquid of the cooling liquid flows out of the line cutting machines and enters the centralized overflow device 3 to finish the use of the cooling liquid in the line cutting machines and carry out the centralized recovery of the waste liquid.
The centralized liquid supply device 4 is a liquid supply pump, is a commercially available product, and is selected according to actual requirements, and no specific requirements are made here.
The centralized filtering device 5 is a filter, is a commercially available product, and is selected according to actual requirements, and is not specifically required here.
The liquid supplementing circulation branch comprises a cooling liquid treatment device 2 and a filtering device 1, a centralized overflow device 3, the cooling liquid treatment device 2 is sequentially connected with the filtering device 1, the liquid outlet end of the filtering device 1 is connected with the centralized overflow device 3, the cooling liquid waste liquid is convenient to enter the centralized overflow device 3 for liquid supplementing through treatment, the cooling liquid overflowing from the centralized overflow device 3 enters the cooling liquid treatment device 2 for cooling liquid treatment and blending to form finished liquid, the finished liquid enters the filtering device 1 for filtering, the filtered finished cooling liquid enters the centralized overflow device 3 again for supplementing, the total amount and the quality of the cooling liquid in the centralized overflow device are ensured to meet the use requirements of a plurality of line cutting machines, and the replacement frequency of filter bags in the filtering device is reduced.
This filter equipment 1 is the non-pressure filter, can be the product of selling, also can be the filter tank of installing filter pulp, filter screen or filter bag, selects according to actual demand, does not do the specific requirement here.
The cooling liquid treatment device 2 comprises a liquid supply pump, a pressure filter, a primary inspection device, a pre-blending tank, a blending device, a secondary inspection device and a fine filter, wherein the liquid supply pump, the pressure filter, the primary inspection device, the pre-blending tank, the blending device, the secondary inspection device and the fine filter are sequentially connected, cooling liquid waste liquid overflowing from the concentrated overflow device 4 is treated and blended, processed and blended finished liquid enters the concentrated overflow device 4 again, the concentrated overflow device 4 is supplemented with the finished liquid of the cooling liquid timely and online, and the consistency of the quality of the cooling liquid entering the cutting bin of the line cutting machine is ensured.
The filter press is connected with the centralized overflow device 3 through a liquid supply pump, and waste liquid is conveyed to the filter press by the pressure of the liquid supply pump to be filtered. The filter press is a commercially available product, and can filter out impurities such as sticky substances, silicon powder particles and the like in waste liquid.
And conveying the cooling liquid filtered by the waste liquid to a primary detection device for detection. The primary inspection device comprises a viscosity tester, a conductivity tester and a pH value tester, and is used for detecting the viscosity value, the conductivity and the pH value of the cooling liquid solution respectively. And the qualified cooling liquid solution after the primary inspection is a semi-finished product and is contained in a pre-preparation tank. The outlet of the pre-blending tank is connected with the inlet of the blending device, the blending device is used for blending the semi-finished product solution, and meanwhile, a concentration detection device is arranged between the blending device and the pre-blending tank and is used for detecting the concentration value of the semi-finished product solution.
And (4) the blended cooling liquid enters a secondary inspection device for secondary inspection. The secondary testing device and the primary testing device are the same and comprise a viscosity tester, a conductivity tester and a pH value tester for testing viscosity, conductivity and pH value. And (3) conveying the solution subjected to the secondary inspection to a fine filter for fine filtration, wherein the fine filter is a commercially available product, and is selected according to actual requirements to filter impurities such as sticky substances, silicon powder particles and the like. The solution after fine filtration is called finished product.
And the finished product liquid is decompressed and filtered by a non-pressure filter, and then enters the centralized overflow device 3 to be supplemented online all the time.
When the cooling liquid circulating system is used, the concentrated overflow device 3 plays a role of a transfer station, waste liquid of the cooling liquid is temporarily stored in the concentrated overflow device 3, and when the waste liquid of the cooling liquid is in the concentrated overflow device 3, impurities such as sticky substances, silicon powder particles and the like are settled; and the cooling liquid circulating system is communicated with the line cutting machines through connecting pipelines so as to facilitate the circulation use of the cooling liquid.
The cooling liquid in the centralized overflow device 3 enters the centralized filtering device 5 for filtering under the action of the power of the centralized liquid supply device 4, so that silicon powder in the cooling liquid is filtered, and the filtered cooling liquid simultaneously enters a plurality of line cutting machines for use by the line cutting machines, so that the line cutting machines can conveniently cool when cutting silicon rods; the waste liquid after the cooling liquid is used enters a centralized overflow device 3 for centralized recovery;
after the waste liquid enters the centralized overflow device 3, the cooling liquid and the waste liquid overflowing from the centralized overflow device 3 enter the cooling liquid treatment device 2 for treatment and allocation, at the moment, the cooling liquid enters a filter press for filtration under the action of a liquid supply pump, the filtered cooling liquid enters a primary inspection device for viscosity, conductivity and pH value detection, the detected cooling liquid enters a pre-allocation tank for transfer, the cooling liquid enters an allocation device for allocation after coming out of the pre-allocation tank, the allocated cooling liquid enters a secondary inspection device for inspection, the detected cooling liquid enters a fine filter for filtration to form a cooling liquid finished product liquid, the finished liquid enters a non-pressure filter for reduced pressure filtration and enters the centralized overflow device 3 for online and real-time liquid supplement to ensure the total amount of the cooling liquid in the centralized overflow device, the supply and use of the cooling liquid of a plurality of line cutting machines are ensured.
By adopting the technical scheme, the cooling liquid circulating system is simple in structure and convenient to mount, dismount and maintain, and is provided with the centralized overflow device and the centralized filtering device, so that cooling liquid entering a plurality of line cutting machines can be filtered in a centralized manner, the consistency of the quality of the cooling liquid entering a cutting bin is ensured, impurities such as sticky substances and the like in the online liquid are reduced, and the quality of the online cooling liquid is improved; the cooling liquid waste liquid overflowing from the centralized overflow device enters a cooling liquid treatment device of a large circulation workshop for treatment and allocation, so that the finished product liquid enters the centralized overflow device through a non-pressure filter for liquid supplement at any time, the replacement frequency of a filter bag is reduced, and the cost investment of auxiliary materials and labor is reduced; concentrate filter equipment, filter equipment and coolant liquid processing apparatus's setting, furthest will be thick thing filtering in the online liquid, reduce the adhesion of thick thing to pipeline and tank inner wall, guarantee the pipeline flow, reduce cleaning system's frequency.
The embodiments of the present invention have been described in detail, but the description is only for the preferred embodiments of the present invention and should not be construed as limiting the scope of the present invention. All the equivalent changes and improvements made according to the application scope of the present invention should still fall within the patent coverage of the present invention.
Claims (8)
1. A coolant circulation system, characterized by: comprises the steps of (a) preparing a mixture of a plurality of raw materials,
a centralized overflow device for the transit of the cooling liquid;
the line cutting machine liquid supply circulating branch is used for being communicated and circulated with the line cutting machine, a liquid inlet end and a liquid outlet end of the line cutting machine liquid supply circulating branch are both communicated with the centralized overflow device, and cooling liquid supply and centralized recovery of the plurality of line cutting machines are carried out;
a fluid infusion circulation branch road that is used for concentrating overflow arrangement and carries out the coolant liquid and supply, the feed liquor end and the play liquid end of fluid infusion circulation branch road all with concentrate overflow arrangement intercommunication, get into after the coolant liquid waste liquid of being convenient for handles concentrate overflow arrangement.
2. The coolant circulation system of claim 1, wherein: the line cutting machine circulating branch system comprises a centralized liquid supply device and a centralized filtering device, the centralized overflow device and the centralized liquid supply device are sequentially connected with the centralized filtering device, the liquid outlet end of the centralized filtering device is respectively connected with the filtering systems of a plurality of line cutting machines, and the liquid outlet ends of the filtering systems of the plurality of line cutting machines are connected with the centralized overflow water tank, so that cooling liquid can be conveniently provided for the line cutting machines and centralized recovery can be conveniently carried out.
3. The coolant circulation system according to claim 1 or 2, wherein: the liquid supplementing circulation branch comprises a cooling liquid treatment device and a filtering device, the concentrated overflow device and the cooling liquid treatment device are sequentially connected with the filtering device, and the liquid outlet end of the filtering device is connected with the concentrated overflow device, so that the cooling liquid waste liquid can conveniently enter the concentrated overflow device for liquid supplementing through treatment.
4. The coolant circulation system of claim 2, wherein: the centralized liquid supply device is a liquid supply pump.
5. The coolant circulation system according to claim 2 or 4, wherein: the centralized filtering device is a filter.
6. The coolant circulation system of claim 3, wherein: the filtering device is a non-pressure filter.
7. The coolant circulation system of claim 6, wherein: the centralized overflow device is a centralized overflow water tank.
8. The coolant circulation system according to claim 6 or 7, wherein: the cooling liquid treatment device comprises a liquid supply pump, a pressure filter, a sequential inspection device, a pre-blending tank, a blending device, a secondary inspection device and a fine filter, wherein the centralized overflow device, the liquid supply pump, the pressure filter, the sequential inspection device, the pre-blending tank, the blending device, the secondary inspection device and the fine filter are sequentially connected with one another.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921765651.4U CN211492332U (en) | 2019-10-21 | 2019-10-21 | Cooling liquid circulation system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921765651.4U CN211492332U (en) | 2019-10-21 | 2019-10-21 | Cooling liquid circulation system |
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| Publication Number | Publication Date |
|---|---|
| CN211492332U true CN211492332U (en) | 2020-09-15 |
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| CN201921765651.4U Active CN211492332U (en) | 2019-10-21 | 2019-10-21 | Cooling liquid circulation system |
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| CN (1) | CN211492332U (en) |
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