CN211465930U - Carousel and polishing equipment - Google Patents
Carousel and polishing equipment Download PDFInfo
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- CN211465930U CN211465930U CN201922466850.1U CN201922466850U CN211465930U CN 211465930 U CN211465930 U CN 211465930U CN 201922466850 U CN201922466850 U CN 201922466850U CN 211465930 U CN211465930 U CN 211465930U
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- strengthening rib
- rib subassembly
- subassembly
- turntable
- reinforcing
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Abstract
The utility model relates to a polishing equipment technical field especially relates to a carousel and polishing equipment. This carousel includes carousel body and strengthening rib subassembly, be provided with locating pin installation position and multiunit rubbing head installation position on the carousel body, the strengthening rib subassembly includes first strengthening rib subassembly, second strengthening rib subassembly and third strengthening rib subassembly, first strengthening rib subassembly encloses the week side of establishing at locating pin installation position, the week side of establishing at multiunit rubbing head installation position is enclosed to the second strengthening rib subassembly, and the center of first strengthening rib subassembly and the center of second strengthening rib subassembly all with the center coincidence of carousel body, the setting of third strengthening rib subassembly is between adjacent two sets of rubbing head installation positions and the both ends of third strengthening rib subassembly are connected with first strengthening rib subassembly and second strengthening rib subassembly respectively. The turntable is simple in structure, the structural strength of the turntable can be improved, the verticality and the parallelism between the turntable and a polishing head are guaranteed, and the polishing quality is guaranteed.
Description
Technical Field
The utility model relates to a polishing equipment technical field especially relates to a carousel and polishing equipment.
Background
In silicon wafer polishing equipment, a turntable is used for mounting a polishing head and driving the polishing head to move so as to switch stations, so that the turntable is required to have enough strength and rigidity, otherwise, the verticality and the parallelism of the polishing head and the polishing disk are easy to deviate, the polished quantity of the silicon wafer is uneven, and the yield is reduced. Therefore, a turntable is needed to solve the above problems.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a carousel to solve among the prior art problem that the carousel warp easily.
Another object of the utility model is to provide a polishing equipment, through using above-mentioned carousel, can prevent that the carousel from warping, guarantee the straightness and the depth of parallelism of hanging down between carousel and the rubbing head, guarantee polishing quality.
In order to realize the purpose, the following technical scheme is provided:
a rotary table, comprising:
the polishing head mounting positions are uniformly arranged along the circumferential direction of the turntable body;
strengthening rib subassembly, including first strengthening rib subassembly, second strengthening rib subassembly and third strengthening rib subassembly, first strengthening rib subassembly encloses to be established week side of locating pin installation position, second strengthening rib subassembly encloses to be established in the multiunit week side of rubbing head installation position, just the center of first strengthening rib subassembly with the center of second strengthening rib subassembly all with the center coincidence of carousel body, third strengthening rib subassembly sets up adjacent two sets ofly between the rubbing head installation position just the both ends of third strengthening rib subassembly respectively with first strengthening rib subassembly with second strengthening rib subassembly is connected.
As a preferred scheme of the turntable, the number of the polishing head mounting positions is four, the first reinforcing rib assembly is square, and each polishing head mounting position is arranged corresponding to one side of the first reinforcing rib assembly.
As a preferable scheme of the turntable, the first reinforcing rib assembly comprises first reinforcing ribs, and four first reinforcing ribs are arranged in an enclosing manner to form a square shape.
Preferably the second stiffener assembly is in the shape of an equilateral octagon.
As the preferred scheme of carousel, the second strengthening rib subassembly includes the second strengthening rib, eight the second strengthening rib encloses to establish and forms equilateral octagon.
As a preferable scheme of the turntable, the third reinforcing rib assembly includes four third reinforcing ribs, and one third reinforcing rib is disposed between two adjacent sets of polishing head mounting positions.
As a preferable scheme of the turntable, one end of the third reinforcing rib is connected to a corner of the first reinforcing rib assembly, and the other end of the third reinforcing rib is connected to a middle position of one of the second reinforcing ribs in the second reinforcing rib assembly.
As a preferable scheme of the turntable, each set of the polishing head mounting positions includes two mounting holes, and each mounting hole correspondingly mounts one polishing head.
A polishing apparatus comprising a turntable as described above.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model provides a turntable, which comprises a turntable body and a reinforcing rib assembly, wherein the turntable body is provided with a positioning pin mounting position and a plurality of groups of polishing head mounting positions, the center of the positioning pin mounting position coincides with the center of the turntable body, and the plurality of groups of polishing head mounting positions are uniformly arranged along the circumferential direction of the turntable body; the stiffener assembly includes a first stiffener assembly, a second stiffener assembly, and a third stiffener assembly. This carousel encloses through week at locating pin installation position and establishes first strengthening rib subassembly, encloses to establish second strengthening rib subassembly in week of rubbing head installation position, sets up the third strengthening rib subassembly between adjacent two sets of rubbing head installation positions to make the third strengthening rib subassembly be connected with first strengthening rib subassembly and second strengthening rib subassembly respectively, can improve carousel structural strength, prevent that the carousel from taking place to warp under the effect of rubbing head, guarantee the straightness and the depth of parallelism between carousel and the rubbing head, guarantee polishing quality.
The utility model provides a polishing equipment through using above-mentioned carousel, can prevent that the carousel from warping, guarantees the straightness and the depth of parallelism of hanging down between carousel and the rubbing head, guarantees polishing quality.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required to be used in the description of the embodiments of the present invention will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the contents of the embodiments of the present invention and the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a front surface of a turntable according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a back surface of a turntable according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a side surface of a turntable according to an embodiment of the present invention.
Reference numerals:
1-a turntable body; 11-a positioning pin mounting position; 12-a polishing head mounting location;
2-a reinforcing rib assembly; 21-a first reinforcing rib; 22-a second reinforcing rib; 23-third reinforcing rib.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the technical solution of the present invention is further described below by referring to the drawings and the detailed description.
In the description of the present invention, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate the directions or positional relationships based on the directions or positional relationships shown in the drawings, or the directions or positional relationships that are usually placed when the product is used, and are only for convenience of description of the present invention, and do not indicate or imply that the device or element indicated must have a specific direction, be constructed and operated in a specific direction, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first", "second", and the like are used for descriptive purposes only or to distinguish between different structures or components and are not to be construed as indicating or implying relative importance.
As shown in fig. 1 to 3, the present embodiment provides a turntable, including a turntable body 1 and a reinforcing rib assembly 2, wherein the turntable body 1 is provided with a positioning pin mounting position 11 and a plurality of sets of polishing head mounting positions 12, a center of the positioning pin mounting position 11 coincides with a center of the turntable body 1, and the plurality of sets of polishing head mounting positions 12 are uniformly arranged along a circumferential direction of the turntable body 1; the reinforcing rib assembly 2 comprises a first reinforcing rib assembly, a second reinforcing rib assembly and a third reinforcing rib assembly, the first reinforcing rib assembly surrounds the periphery of the positioning pin mounting position 11, the second reinforcing rib assembly surrounds the periphery of the polishing head mounting position 12, the center of the first reinforcing rib assembly and the center of the second reinforcing rib assembly coincide with the center of the turntable body 1, the third reinforcing rib assembly is arranged between the two adjacent sets of polishing head mounting positions 12, and two ends of the third reinforcing rib assembly are respectively connected with the first reinforcing rib assembly and the second reinforcing rib assembly. This carousel is through setting up first strengthening rib subassembly, second strengthening rib subassembly and third strengthening rib subassembly, simple structure, and can improve the structural strength of carousel, prevents that the carousel from taking place to warp under the effect of rubbing head, guarantees the straightness and the depth of parallelism between carousel and the rubbing head, guarantees polishing quality.
Preferably, as shown in fig. 2, the number of the polishing head mounting positions 12 is four, the shape of the first reinforcing rib assembly is square, and each set of the polishing head mounting positions 12 is provided corresponding to one side of the first reinforcing rib assembly. Through first strengthening rib subassembly setting between locating pin installation position 11 and rubbing head installation position 12, can improve the structural strength of carousel body 1, prevent that carousel body 1 from taking place to warp.
Each set of polishing head mounting locations 12 illustratively includes two mounting holes, and one polishing head is mounted to each mounting hole. Of course, the number of mounting holes in each set of polishing head mounting positions 12 can also be designed according to the number of silicon wafers and the size of the turntable, and is not illustrated here.
Further, the first reinforcing rib assembly comprises a first reinforcing rib 21, and four first reinforcing ribs 21 are arranged in a surrounding mode to form a square shape. A set of polishing head mounting positions 12 is correspondingly arranged on the same side of the first reinforcing rib 21, that is, two mounting holes are correspondingly arranged on the same side of the first reinforcing rib 21. Preferably, the two mounting holes are symmetrically disposed about a center line of the first reinforcing bead 21.
Preferably the second reinforcing bar assembly is equilateral octagonal in shape. The second strengthening rib subassembly of equilateral octagon encloses and establishes the week side at multiunit polishing head installation position 12, and it cooperatees with the first strengthening rib subassembly of square in order to support the week side of polishing head installation position 12 to improve the structural strength of polishing head installation position 12 week side, prevent that carousel body 1 from drawing the effect of polishing head and take place to warp.
Further, the second bar assembly comprises second bars 22, eight second bars 22 being enclosed to form an equilateral octagon.
Preferably, the third strengthening rib subassembly includes four third strengthening ribs 23, all is provided with a third strengthening rib 23 between two sets of adjacent rubbing head installation positions 12, uses four sets of rubbing head installation positions 12 to divide carousel body 1 into four workspace for the reference, and the third strengthening rib subassembly cooperatees with second strengthening rib subassembly and first strengthening rib subassembly simultaneously, can improve the structural strength of first strengthening rib subassembly and second strengthening rib subassembly on the one hand, and on the other hand can improve the structural strength of carousel body 1.
Further, one end of the third reinforcing bead 23 is connected to a corner of the first reinforcing bead assembly, and the other end thereof is connected to a middle position of one second reinforcing bead 22 of the second reinforcing bead assembly. Four working areas divided by the four third reinforcing ribs 23 are hexagonal, so that the structural strength of the turntable body 1 is improved.
Illustratively, as shown in fig. 3, the first, second, and third reinforcing beads 21, 22, and 23 have the same height.
The carousel that this embodiment provided, as shown in fig. 2, polishing head installation position 12 is four groups, and carousel body 1 is circular, and strengthening rib subassembly 2 is the four subregion strengthening rib structures of interior square outer octagon, can cooperate the overall arrangement of polishing head installation position 12, improves the structural strength of carousel body 1, prevents that carousel body 1 from taking place to warp.
This embodiment still provides a polishing equipment, including foretell carousel, through using above-mentioned carousel, can prevent that the carousel from warping, guarantee the straightness and the depth of parallelism between carousel and the burnishing head, guarantee polishing quality.
It should be noted that the foregoing is only a preferred embodiment of the present invention and the technical principles applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious modifications, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail with reference to the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the scope of the present invention.
Claims (9)
1. A rotary table, comprising:
the polishing device comprises a turntable body (1), wherein a positioning pin mounting position (11) and a plurality of groups of polishing head mounting positions (12) are arranged on the turntable body (1), the center of the positioning pin mounting position (11) is overlapped with the center of the turntable body (1), and the plurality of groups of polishing head mounting positions (12) are uniformly arranged along the circumferential direction of the turntable body (1);
strengthening rib subassembly (2), including first strengthening rib subassembly, second strengthening rib subassembly and third strengthening rib subassembly, first strengthening rib subassembly encloses to be established week side of locating pin installation position (11), the second strengthening rib subassembly encloses to be established in the multiunit week side of rubbing head installation position (12), just the center of first strengthening rib subassembly with the center of second strengthening rib subassembly all with the center coincidence of carousel body (1), the third strengthening rib subassembly sets up adjacent two sets of between rubbing head installation position (12) just the both ends of third strengthening rib subassembly respectively with first strengthening rib subassembly with second strengthening rib subassembly is connected.
2. A turntable according to claim 1, wherein the number of polishing head mounting locations (12) is four, the shape of the first reinforcing bar assembly is square, and each set of polishing head mounting locations (12) is provided corresponding to one side of the first reinforcing bar assembly.
3. The turntable according to claim 2, characterized in that the first reinforcing rib assembly comprises a first reinforcing rib (21), four first reinforcing ribs (21) being enclosed to form a square.
4. The rotary pan of claim 2 wherein the second bar assembly is in the shape of an equilateral octagon.
5. A turntable according to claim 4, characterized in that the second stiffener assembly comprises second stiffeners (22), eight of the second stiffeners (22) being enclosed to form an equilateral octagon.
6. The turntable according to claim 5, wherein the third reinforcing rib assembly comprises four third reinforcing ribs (23), and one third reinforcing rib (23) is arranged between two adjacent sets of the polishing head mounting positions (12).
7. A turntable as claimed in claim 6, characterised in that the third reinforcing bar (23) is connected at one end to a corner of the first reinforcing bar assembly and at its other end to an intermediate position of one of the second reinforcing bars (22) in the second reinforcing bar assembly.
8. A turntable according to any one of claims 1-7, characterized in that each set of polishing head mounting locations (12) comprises two mounting holes and one polishing head is mounted in each mounting hole.
9. A polishing apparatus comprising the turntable according to any one of claims 1 to 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922466850.1U CN211465930U (en) | 2019-12-31 | 2019-12-31 | Carousel and polishing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922466850.1U CN211465930U (en) | 2019-12-31 | 2019-12-31 | Carousel and polishing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211465930U true CN211465930U (en) | 2020-09-11 |
Family
ID=72379802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922466850.1U Active CN211465930U (en) | 2019-12-31 | 2019-12-31 | Carousel and polishing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211465930U (en) |
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2019
- 2019-12-31 CN CN201922466850.1U patent/CN211465930U/en active Active
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