CN211454230U

CN211454230U - Table board cleaning structure for direct-writing exposure machine

Info

Publication number: CN211454230U
Application number: CN201922182846.2U
Authority: CN
Inventors: 肖磊
Original assignee: Shanghai Tanyue Semiconductor Equipment Co ltd
Current assignee: Shanghai Tanyue Semiconductor Equipment Co ltd
Priority date: 2019-12-09
Filing date: 2019-12-09
Publication date: 2020-09-08
Anticipated expiration: 2029-12-09

Abstract

The utility model discloses a write-through formula is clean structure of mesa for exposure machine, including exposure machine body, fan pipeline and motor, the glass mesa is installed to the inboard of exposure machine body, and the top of glass mesa is provided with the cleaning roller, the outside of cleaning roller is connected with the protection piece, the surface reservation of cleaning roller has the dust absorption hole, and the both ends of cleaning roller link to each other through intake pipe and connecting pipe, the outside cover of intake pipe is equipped with the gear, and is fixed with the fixed plate on the exposure machine body of gear below, the outside cover of connecting pipe is equipped with the cover piece, the motor is installed in the outside of exposure machine body, and the end department of motor is connected with the motor shaft. This clean structure of mesa for direct-writing exposure machine clears up the dust on the mesa through the mode of adhesive dust subsides and dust absorption, the clean efficiency of promotion that can be better also need not to paste frequent change to the adhesive dust to be equipped with and carry out the mechanism of protection to the mesa, can avoid causing the damage to the mesa.

Description

Table board cleaning structure for direct-writing exposure machine

Technical Field

The utility model relates to a direct-write exposure machine technical field specifically is a clean structure of direct-write exposure machine mesa.

Background

The exposure machine refers to an apparatus for transferring an image on a transparent body to other substances through ultraviolet irradiation, compared with the conventional exposure machine, the direct-writing exposure machine is widely used due to higher precision, and the requirement on the table-board cleaning degree is very high in order to ensure that the surface of the exposed substance does not contain other impurities for imaging, so that the direct-writing exposure machine needs a specific table-board cleaning mechanism, but the existing table-board cleaning mechanism still has the following defects in the using process:

1. most of the dust removal is realized by a dust sticker, and a large amount of dust is left on the surface of the dust sticker after use, so that the dust sticker needs to be frequently replaced and is not beneficial to efficiently cleaning the table top;

2. moreover, after the traditional mechanism for cleaning the table top is contacted with the table top for a long time, the table top can be damaged to a certain extent, and the exposure of the exposure machine is further influenced.

In order to solve the problems, innovative design is urgently needed on the basis of the original table top cleaning mechanism.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a clean structure of direct-write table top for exposure machine to solve above-mentioned background art and propose need frequent change pasting the dust, be unfavorable for the high-efficient cleanness to the mesa, traditional clean mechanism of mesa contacts the back with the mesa for a long time, can cause the problem of certain damage to the mesa.

In order to achieve the above object, the utility model provides a following technical scheme: a table-board cleaning structure for a direct-writing type exposure machine comprises an exposure machine body, a fan pipeline and a motor, wherein a glass table-board is arranged on the inner side of the exposure machine body, a cleaning roller is arranged above the glass table-board, the outer side of the cleaning roller is connected with a protective block, the surface of the protective block is provided with a dust sticking patch, the surface of the cleaning roller is reserved with a dust collecting hole, and the two ends of the cleaning roller are connected with a connecting pipe through an air inlet pipe, a gear is sleeved outside the air inlet pipe, a fixing plate is fixed on the exposure machine body below the gear, and the upper end surface of the fixed plate is provided with a tooth block, the outer side of the connecting pipe is sleeved with a sleeve block, the side of the sleeve block is connected with a fan pipeline, and the surface of the connecting pipe is provided with a through hole, the motor is arranged on the outer side of the exposure machine body, and the end of the motor is connected with a motor shaft, and the outer side of the motor shaft is sleeved with a movable block.

Preferably, the protection blocks are distributed at equal angles on the cleaning roller, the protection blocks are made of rubber, and the protection blocks are connected with the dust sticker in a sticking mode.

Preferably, the dust suction holes are distributed on the cleaning roller at equal intervals, and the cleaning roller and the air inlet pipe form a relative rolling structure.

Preferably, the connecting pipe is of an inverted U-shaped structure, two ends of the connecting pipe are respectively communicated with the cleaning roller and the sleeve block through the air inlet pipe and the through hole, and the sleeve block is rotatably connected with the connecting pipe.

Preferably, the tooth blocks are distributed on the fixing plate at equal intervals, and the tooth blocks are in meshed connection with the gears.

Preferably, the motor shaft is provided with 2 thread grooves with the same thread pitch and opposite rotation directions, the motor shaft and the movable block are in threaded connection, and the motor shaft is symmetrically distributed around the central axis of the glass table top.

Compared with the prior art, the beneficial effects of the utility model are that: according to the table board cleaning structure for the direct-writing exposure machine, dust on the table board is cleaned in a dust sticking and dust collecting mode, the cleaning efficiency can be better improved, the dust sticking does not need to be frequently replaced, and the table board is protected by a mechanism, so that the table board can be prevented from being damaged;

1. through the transmission of the motor and the motor shaft, the cleaning roller can stably move through the movable block and the connecting pipe, and can rotate in the cleaning process through the meshing of the gear and the tooth block, so that the purposes of dust collection of the dust collection hole and dust sticking and sticking of dust are achieved, and the cleaning degree of the table top is further ensured;

2. the protection piece with the mesa contact is the rubber material, has consequently avoided causing the damage to the mesa, is linked together through cleaning roller, intake pipe, connecting pipe and cover piece, and the convenience is directly discharged from the fan pipeline by inspiratory dust.

Drawings

FIG. 1 is a schematic front view of the present invention;

FIG. 2 is an enlarged schematic view of the structure at A of FIG. 1 according to the present invention;

FIG. 3 is a schematic side view of the cleaning roller of the present invention;

FIG. 4 is a schematic view of the internal structure of the nest block of the present invention;

fig. 5 is a schematic side view of the present invention.

In the figure: 1. an exposure machine body; 2. a glass table top; 3. a cleaning roller; 4. a protection block; 5. sticking dust paste; 6. a dust collection hole; 7. an air inlet pipe; 8. a connecting pipe; 9. a gear; 10. a tooth block; 11. a fixing plate; 12. sleeving blocks; 13. a fan duct; 14. a through hole; 15. a movable block; 16. a motor shaft; 17. an electric motor.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-5, the present invention provides a technical solution: a table-board cleaning structure for a direct writing type exposure machine comprises an exposure machine body 1, a glass table-board 2, a cleaning roller 3, a protective block 4, a sticky dust sticker 5, a dust suction hole 6, an air inlet pipe 7, a connecting pipe 8, a gear 9, a tooth block 10, a fixing plate 11, a sleeve block 12, a fan pipeline 13, a through hole 14, a movable block 15, a motor shaft 16 and a motor 17, wherein the glass table-board 2 is installed on the inner side of the exposure machine body 1, the cleaning roller 3 is arranged above the glass table-board 2, the protective block 4 is connected to the outer side of the cleaning roller 3, the sticky dust sticker 5 is arranged on the surface of the protective block 4, the dust suction hole 6 is reserved on the surface of the cleaning roller 3, two ends of the cleaning roller 3 are connected with the connecting pipe 8 through the air inlet pipe 7, the gear 9 is sleeved on the outer side of the air inlet pipe 7, the fixing plate 11 is fixed, a sleeve block 12 is sleeved on the outer side of the connecting pipe 8, a fan pipeline 13 is connected to the side of the sleeve block 12, a through hole 14 is formed in the surface of the connecting pipe 8, a motor 17 is installed on the outer side of the exposure machine body 1, a motor shaft 16 is connected to the end of the motor 17, and a movable block 15 is sleeved on the outer side of the motor shaft 16;

the protective blocks 4 are distributed on the cleaning roller 3 at equal angles, the protective blocks 4 are made of rubber, the protective blocks 4 are connected with the dust sticker 5 in a sticking mode, the protective blocks 4 are driven to be in contact with the glass table top 2 when the cleaning roller 3 rotates, the rubber can avoid damage to the glass table top 2, and the dust sticker 5 can be conveniently replaced through the sticking connection;

the dust collection holes 6 are distributed on the cleaning roller 3 at equal intervals, the cleaning roller 3 and the air inlet pipe 7 form a relative rolling structure, and the external fan connected with the fan pipeline 13 generates suction force to suck dust on the surface of the glass table top 2 into the cleaning roller 3 from the dust collection holes 6;

the connecting pipe 8 is of an inverted U-shaped structure, two ends of the connecting pipe 8 are respectively communicated with the cleaning roller 3 and the sleeve block 12 through an air inlet pipe 7 and a through hole 14, the sleeve block 12 is rotatably connected with the connecting pipe 8, dust sucked into the cleaning roller 3 enters the connecting pipe 8 through the air inlet pipe 7, then enters the sleeve block 12 through the through hole 14, and finally is directly discharged by a fan pipeline 13;

the tooth blocks 10 are distributed on the fixing plate 11 at equal intervals, the tooth blocks 10 are in meshed connection with the gear 9, and the cleaning roller 3 synchronously rotates in the moving process through the meshing of the gear 9 and the tooth blocks 10;

the motor shaft 16 is provided with 2 thread grooves with the same thread pitch and opposite rotation directions, the motor shaft 16 is in threaded connection with the movable block 15, the motor shaft 16 is symmetrically distributed about the central axis of the glass table top 2, and the motor 17 drives the motor shaft 16 to rotate so as to drive the movable block 15 and the connecting pipe 8 to stably move.

The working principle is as follows: when the table top cleaning structure for the direct-writing exposure machine is used, as shown in fig. 1-2 and fig. 5, firstly as shown in fig. 5, the motor 17 drives the motor shaft 16 to rotate, and further drives the movable block 15 and the connecting pipe 8 to stably move, as shown in fig. 1, the connecting pipe 8 drives the cleaning roller 3 to move above the glass table top 2 when moving, as shown in fig. 2, the cleaning roller 3 synchronously rotates in the moving process through the meshing of the gear 9 and the tooth block 10, and the dust on the surface of the glass table top 2 can be sucked into the cleaning roller 3 from the dust suction hole 6 through the suction force generated by the fan externally connected with the fan pipeline 13;

as shown in fig. 1 and 3-4, the dust sucked into the cleaning roller 3 enters the connecting pipe 8 through the air inlet pipe 7, as shown in fig. 4, enters the sleeve block 12 through the through hole 14, and is directly discharged by the fan pipeline 13, as shown in fig. 3, the cleaning roller 3 drives the dust sticker 5 to glue the dust on the glass table top 2 in the rotating process, the efficiency can be improved by cleaning simultaneously in different modes, the cleaning roller 3 can drive the protective block 4 to contact with the glass table top 2 when rotating, and the rubber material can avoid damaging the glass table top 2.

Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments or portions thereof without departing from the spirit and scope of the invention.

Claims

1. The utility model provides a clean structure of mesa for direct-write exposure machine, includes exposure machine body (1), fan pipeline (13) and motor (17), its characterized in that: the glass table board (2) is installed on the inner side of the exposure machine body (1), the cleaning roller (3) is arranged above the glass table board (2), the outer side of the cleaning roller (3) is connected with the protective block (4), the surface of the protective block (4) is provided with the sticky dust sticker (5), the surface of the cleaning roller (3) is reserved with the dust suction hole (6), the two ends of the cleaning roller (3) are connected with the connecting pipe (8) through the air inlet pipe (7), the outer side of the air inlet pipe (7) is sleeved with the gear (9), the exposure machine body (1) below the gear (9) is fixed with the fixing plate (11), the upper end face of the fixing plate (11) is provided with the tooth block (10), the outer side of the connecting pipe (8) is sleeved with the sleeve block (12), the lateral side of the sleeve block (12) is connected with the fan pipeline (13), and the surface of the connecting pipe (, the motor (17) is arranged on the outer side of the exposure machine body (1), a motor shaft (16) is connected to the end of the motor (17), and a movable block (15) is sleeved on the outer side of the motor shaft (16).

2. The structure for cleaning a stage of a direct write exposure machine according to claim 1, characterized in that: the protective blocks (4) are distributed at equal angles on the cleaning roller (3), the protective blocks (4) are made of rubber, and the protective blocks (4) are connected with the dust sticker (5) in a sticking mode.

3. The structure for cleaning a stage of a direct write exposure machine according to claim 1, characterized in that: the dust absorption holes (6) are distributed on the cleaning roller (3) at equal intervals, and the cleaning roller (3) and the air inlet pipe (7) form a relative rolling structure.

4. The structure for cleaning a stage of a direct write exposure machine according to claim 1, characterized in that: the connecting pipe (8) is of an inverted U-shaped structure, two ends of the connecting pipe (8) are respectively communicated with the cleaning roller (3) and the sleeve block (12) through the air inlet pipe (7) and the through hole (14), and the sleeve block (12) is rotatably connected with the connecting pipe (8).

5. The structure for cleaning a stage of a direct write exposure machine according to claim 1, characterized in that: the tooth blocks (10) are distributed on the fixing plate (11) at equal intervals, and the tooth blocks (10) are in meshed connection with the gear (9).

6. The structure for cleaning a stage of a direct write exposure machine according to claim 1, characterized in that: the motor shaft (16) is provided with 2 thread grooves with the same thread pitch and opposite rotation directions, the motor shaft (16) is in threaded connection with the movable block (15), and the motor shaft (16) is symmetrically distributed around the central axis of the glass table top (2).