CN211436868U - Spin coating equipment for positioning substrate and preventing flying wafer - Google Patents
Spin coating equipment for positioning substrate and preventing flying wafer Download PDFInfo
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- CN211436868U CN211436868U CN201922466697.2U CN201922466697U CN211436868U CN 211436868 U CN211436868 U CN 211436868U CN 201922466697 U CN201922466697 U CN 201922466697U CN 211436868 U CN211436868 U CN 211436868U
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Abstract
The utility model discloses a spin coating device for substrate positioning and preventing flying, which comprises a vacuum chuck, a driving device, a circle center positioning tray, a tray bracket and a substrate, the utility model has simple structure and strong practicability, the vacuum chuck and the circle center are of metal structures, the substrate can not deform under the conditions of higher contact temperature and high pressure, when the circle center positioning tray is used for positioning the circle center before spin coating, does not contact the surface of the substrate, avoids pollution and damage to the substrate, improves the positioning precision and stability, is beneficial to the consistency and uniformity of the thickness of the glue layer, wherein, the structure of the air passage group can make the distribution of the vacuum adsorption force more uniform and avoid the generation of the phenomenon of 'flying chip', after the spin coating is finished, the circle center positioning tray can be detached from the tray bracket, and the spin-coated substrate is transferred to be operated in the next step by matching with the vacuum chuck, so that the errors of manually moving and scraping the edge of the substrate and the like are avoided.
Description
Technical Field
The utility model relates to a nanometer impression technical field specifically is a spin coating equipment that is used for the substrate location and can prevents the flyaway piece.
Background
The nano-imprinting technology achieves ultrahigh resolution by means of mechanical transfer, is a novel micro-nano processing technology, and comprises the basic steps of coating glue solution on a substrate, imprinting, curing, separating and the like, wherein the coating modes of the imprinting glue comprise spin coating, glue dripping, roll coating, spraying and the like, wherein the spin coating is the most common, the spin coating principle is that various glue solutions are dripped on the substrate rotating at high speed, the glue solution dripped on the substrate is uniformly coated on the substrate by utilizing centrifugal force, the thickness is different according to different glue solutions, rotating speed, rotating time and viscosity coefficients among the substrates, before the spin coating is started, the substrate is placed in the center of a sucking disc, the center of the substrate and the center of the sucking disc are coaxial and form effective fixation, so that the stability of the substrate during high-speed rotation can be ensured, the substrate deviates and is not even with the axis of a vacuum sucking disc, and the substrate is in a high-time low bumping state during the spin coating, the good spin coating effect cannot be obtained, the stability of the substrate in high-speed rotation is influenced, the consistency and uniformity of the thickness of the glue layer are further influenced, some substrates can fly out even in the rotating process, the substrate is broken, and the production cost is increased.
Chinese patent "spin coater sucker" (CN110238000A) provides a spin coater sucker, which structurally comprises: the suction part and the support connecting part are provided with a plurality of adsorption air passages communicated with each other, each adsorption air passage comprises a plurality of first air passages and a plurality of second air passages, the plurality of first air passages are arranged along the radial direction of the suction part at intervals, the plurality of second air passages are respectively communicated with the plurality of first air passages, and the second air passages are connected with the air pumping hole.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a spin coating equipment that is used for the substrate location and can prevent to fly the piece to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: a spin coating device for positioning a substrate and preventing the substrate from flying comprises a vacuum chuck, a driving device, a circle center positioning tray, a tray support and the substrate, wherein the vacuum chuck is assembled on the driving device, the vacuum chuck is spliced and assembled on the circle center positioning tray, and the circle center positioning tray is assembled on the tray support;
vacuum chuck includes vacuum chuck plane top plate and vacuum chuck plane bottom plate, and vacuum chuck plane top plate integrated into one piece in the upper surface of vacuum chuck plane bottom plate, the last lateral wall of vacuum chuck plane top plate is fixed to be equipped with air flue group. The upper side wall of the upper plate of the vacuum sucker plane is uniformly provided with vacuum holes, the vacuum holes are communicated with the air passage group, the lower side wall of the lower plate of the vacuum sucker plane is integrally formed with a base, and the lower side wall of the base is provided with a positioning clamping groove;
the driving device comprises a motor, the motor is connected to an external power supply through a wire, a motor shaft is fixedly installed at the output end of the motor, a positioning bolt is fixedly installed at the upper end of the motor shaft, and the positioning bolt is in threaded connection with the inside of the positioning clamping groove;
the circle center positioning tray comprises a positioning part, a handle is fixedly mounted on the right side wall of the positioning part, and a positioning hole is formed in the right side of the upper side wall of the handle;
tray support includes the pillar, the last side wall fixed mounting of pillar has the flat board, symmetry fixed mounting has the guide rail around the dull and stereotyped last side wall, the last lateral wall of guide rail all slides and is equipped with the slider, the last side wall fixed mounting of slider has the slide, the left side wall of slider slides and is equipped with the location pillar, logical groove has been seted up to the flat board last side wall, and the lower extreme of location pillar runs through logical groove.
Preferably, the air flue group comprises an annular air flue and a linear air flue, the annular air flue is fixedly installed on the upper side wall of the upper plate of the vacuum chuck plane, and the linear air flue is fixedly communicated between the annular air flues.
Preferably, the positioning part comprises an upper positioning part layer and a lower positioning part layer, the diameter of the upper positioning part layer is the same as that of the substrate, and the diameter of the lower positioning part layer is the same as that of the upper plate of the vacuum chuck plane.
Compared with the prior art, the beneficial effects of the utility model are that: the utility model discloses simple structure, therefore, the clothes hanger is strong in practicability, vacuum chuck and centre of a circle are metallic structure, can not warp when higher substrate of contact temperature and high pressure, before the spin coating use centre of a circle location tray location centre of a circle, contactless substrate surface, pollution and damage substrate have been avoided, and positioning accuracy and stability have been improved, be favorable to the uniformity and the homogeneity of glue film thickness, wherein the structure of air flue group, can make vacuum adsorption power distribute more evenly, and can avoid the emergence of "flyer" phenomenon, the spin coating finishes the back, centre of a circle location tray can be followed tray support and pulled down, cooperate vacuum chuck to shift the good substrate of spin coating and carry out operation on next step, manual movement has been avoided and has been cut to the mistake such as rubbing substrate edge.
Drawings
Fig. 1 is a front view of the present invention.
Fig. 2 is a top view of the vacuum chuck of the present invention.
Fig. 3 is a front view of the vacuum chuck of the present invention.
Fig. 4 is a top view of the circle center positioning tray of the present invention.
Fig. 5 is a top view of the circle center positioning tray and the substrate of the present invention.
Fig. 6 is a top view of the tray support of the present invention.
Fig. 7 is a schematic structural view of the present invention, without the substrate placed, with the circle center positioning tray returning to the original position.
Fig. 8 is a top view of the vacuum chuck of the present invention without a substrate and with a circle center positioning tray for positioning the circle center.
Fig. 9 is a top view of the present invention when a substrate is placed.
In the figure: 1. vacuum chuck, 11, vacuum chuck plane upper plate, 12, air flue group, 121, annular air flue, 122, linear air flue, 13, vacuum chuck plane lower plate, 14, vacuum hole, 15, base, 16, positioning clamping groove, 2, driving device, 21, motor, 22, motor shaft, 23, positioning bolt, 3, circle center positioning tray, 31, positioning part, 311, positioning part upper layer, 312, positioning part lower layer, 32, handle, 33, positioning hole, 4, tray support, 41, pillar, 42, flat plate, 43, guide rail, 44, slide block, 45, slide plate, 46, positioning pillar, 47, through groove, 5, substrate.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1, fig. 2, fig. 3, fig. 4, fig. 5, fig. 6, fig. 7, fig. 8 and fig. 9, the present invention provides a technical solution: a spin coating device for substrate positioning and capable of preventing flying comprises a vacuum chuck 1, a driving device 2, a circle center positioning tray 3, a tray support 4 and a substrate 5, wherein the vacuum chuck 1 and the circle center positioning tray 3 are made of metal materials, the substrate 5 after contact baking is not easy to deform, the vacuum chuck 1 is assembled on the driving device 2, the vacuum chuck 1 is assembled on the circle center positioning tray 3 in an inserted manner, and the circle center positioning tray 3 is assembled on the tray support 4;
the driving device 2 comprises a motor 21, the motor 21 is connected to an external power supply through a lead, a motor shaft 22 is fixedly installed at the output end of the motor 21, a positioning bolt 23 is fixedly installed at the upper end of the motor shaft 22, and the positioning bolt 23 is screwed in the positioning clamping groove 16, so that the vacuum chuck 1 is installed on the driving device 2;
the circle center positioning tray 3 comprises a positioning part 31, a handle 32 is fixedly arranged on the right side wall of the positioning part 31, the movement work is finished through the handle 32, various manual errors such as manual movement and rubbing of the edge of a die are avoided, and a positioning hole 33 is formed in the right side of the upper side wall of the handle 32;
the tray support 4 comprises a pillar 41, a flat plate 42 is fixedly installed on the upper side wall of the pillar 41, the upper side wall of the flat plate 42 is symmetrically and fixedly provided with guide rails 43 in front and back, the upper side wall of each guide rail 43 is provided with a sliding block 44 in a sliding way, the upper side wall of each sliding block 44 is fixedly provided with a sliding plate 45, by means of the slide 44, the slide 45 is made movable along the guide rail 43, the circle center positioning tray 3 is placed on the slide 45, the left side wall of the slider 44 is slidably fitted with a positioning stay 46, the positioning stay 46 can move up and down at the slider 44 and be fixed in position, when the positioning plate moves upwards, the positioning plate can be inserted into the positioning hole 33 on the handle 32 to limit the position of the circle center positioning tray 3, a through groove 47 is arranged on the upper side wall of the flat plate 42, and the lower end of the positioning strut 46 penetrates through the through groove 47, and the positioning strut 46 can move in the through groove 47, so that the circle center positioning tray 3 can move conveniently.
Specifically, the air passage group 12 includes an annular air passage 121 and a linear air passage 122, the annular air passage 121 is uniformly distributed in concentric circles, so that the adsorption force of the annular air passage 121 on the substrate is more uniform, the annular air passage 121 is fixedly installed on the upper side wall of the vacuum chuck plane upper plate 11, and the linear air passage 122 is fixedly communicated between the annular air passages 121.
Specifically, the positioning portion 31 includes a positioning portion upper layer 311 and a positioning portion lower layer 312, the diameter of the positioning portion upper layer 311 is the same as that of the substrate 5, and the diameter of the positioning portion lower layer 312 is the same as that of the vacuum chuck plane upper plate 11, so that the circle centers of the vacuum chuck 1 and the substrate 5 can be conveniently positioned.
The working principle is as follows: when the center of a circle is positioned before spin coating, firstly, a positioning hole 33 of a center positioning tray 3 penetrates through a positioning support column 46 of a tray support 4 and is arranged on a sliding plate 45, the center positioning tray 3 is arranged on the tray support 4, a substrate 5 is placed on a vacuum chuck 1, then the position of the center positioning tray 3 is moved, the edge of the substrate 5 is attached to an upper layer 311 arc of a positioning part of the center positioning tray 3, the edge of an upper layer plate 11 of a vacuum chuck plane is attached to a lower layer 312 arc of the positioning part of the center positioning tray 3, a vacuum pump is opened to adsorb the substrate 5 on the vacuum chuck 1, the center of the substrate 5 is coaxial with the vacuum chuck 1 at the moment, the stability of the substrate during high-speed rotation is ensured, then the center positioning tray 3 is moved to reset, and then spin coating work can be carried out, after the spin coating is finished, the circle center positioning tray 3 is moved to the edge of the substrate 5 to be attached to the 311 arc part on the upper layer of the positioning part of the circle center positioning tray 3, the edge of the upper plate 11 on the plane of the vacuum chuck is attached to the 312 arc part on the lower layer of the positioning part of the circle center positioning tray 3, the vacuum pump is closed, the positioning support column 46 is pressed downwards to the positioning hole 33 lower than the circle center positioning tray, and the circle center positioning tray 3 and the substrate 5 are taken down.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (3)
1. A spin coating apparatus for substrate positioning capable of preventing flying, characterized in that: the device comprises a vacuum chuck (1), a driving device (2), a circle center positioning tray (3), a tray support (4) and a substrate (5), wherein the vacuum chuck (1) is assembled on the driving device (2), the vacuum chuck (1) is spliced and assembled on the circle center positioning tray (3), and the circle center positioning tray (3) is assembled on the tray support (4);
the vacuum sucker (1) comprises a vacuum sucker plane upper plate (11) and a vacuum sucker plane lower plate (13), the vacuum sucker plane upper plate (11) is integrally formed on the upper surface of the vacuum sucker plane lower plate (13), and an air channel group (12) is fixedly assembled on the upper side wall of the vacuum sucker plane upper plate (11); the upper side wall of the vacuum sucker plane upper plate (11) is uniformly provided with vacuum holes (14), the vacuum holes (14) are communicated with the air passage group (12), the lower side wall of the vacuum sucker plane lower plate (13) is integrally formed with a base (15), and the lower side wall of the base (15) is provided with a positioning clamping groove (16);
the driving device (2) comprises a motor (21), the motor (21) is connected to an external power supply through a lead, a motor shaft (22) is fixedly installed at the output end of the motor (21), a positioning bolt (23) is fixedly installed at the upper end of the motor shaft (22), and the positioning bolt (23) is screwed in the positioning clamping groove (16);
the circle center positioning tray (3) comprises a positioning part (31), a handle (32) is fixedly installed on the right side wall of the positioning part (31), and a positioning hole (33) is formed in the right side of the upper side wall of the handle (32);
tray support (4) include pillar (41), the last side wall fixed mounting of pillar (41) has flat board (42), symmetry fixed mounting has guide rail (43) around the last side wall of flat board (42), the last side wall of guide rail (43) all slides and is equipped with slider (44), the last side wall fixed mounting of slider (44) has slide (45), the left side wall of slider (44) slides and is equipped with location pillar (46), logical groove (47) have been seted up to the last side wall of flat board (42), and the lower extreme of location pillar (46) runs through logical groove (47).
2. A spin coating apparatus for substrate positioning capable of preventing flying as claimed in claim 1, wherein: the air channel group (12) comprises an annular air channel (121) and a linear air channel (122), the annular air channel (121) is fixedly installed on the upper side wall of the upper plate (11) of the vacuum chuck plane, and the linear air channel (122) is fixedly communicated between the annular air channels (121).
3. A spin coating apparatus for substrate positioning capable of preventing flying as claimed in claim 1, wherein: the positioning part (31) comprises an upper positioning part layer (311) and a lower positioning part layer (312), the diameter of the upper positioning part layer (311) is the same as that of the substrate (5), and the diameter of the lower positioning part layer (312) is the same as that of the upper vacuum chuck plane plate (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922466697.2U CN211436868U (en) | 2019-12-31 | 2019-12-31 | Spin coating equipment for positioning substrate and preventing flying wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922466697.2U CN211436868U (en) | 2019-12-31 | 2019-12-31 | Spin coating equipment for positioning substrate and preventing flying wafer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211436868U true CN211436868U (en) | 2020-09-08 |
Family
ID=72321020
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922466697.2U Active CN211436868U (en) | 2019-12-31 | 2019-12-31 | Spin coating equipment for positioning substrate and preventing flying wafer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211436868U (en) |
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2019
- 2019-12-31 CN CN201922466697.2U patent/CN211436868U/en active Active
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