CN211428135U

CN211428135U - Clamping device for a product carrier, product carrier and system with such a product carrier

Info

Publication number: CN211428135U
Application number: CN201920283576.1U
Authority: CN
Inventors: 托比亚斯·斯拜思
Original assignee: RENA Technologies GmbH
Current assignee: Rena GmbH; RENA Technologies GmbH
Priority date: 2018-03-07
Filing date: 2019-03-06
Publication date: 2020-09-04
Anticipated expiration: 2029-03-06
Also published as: DE202019100606U1; TWM585984U; KR20190002325U

Abstract

The utility model provides a clamping device, have clamping device's product carrier and have the product carrier and arrange the system of the product wherein. A gripping device (8) for a product carrier (2) comprises a cavity (9). The walls (10) of the cavity (9) are at least partially formed of a deformable material. The holding device (8) is mounted on a holder (7). The wall has a portion in which said wall formed of a deformable material can be brought into contact with a product arranged in the product carrier by introducing a fluid (11) into the cavity. The product carrier comprises at least one bar (5) arranged opposite the gripping means, in particular a bar (5) having a plurality of tooth-like projections (6). By means of the clamping device, products arranged in the product carrier can be clamped between the rod and the clamping device (8). In particular, the product is a substrate, in particular a wafer.

Description

Clamping device for a product carrier, product carrier and system with such a product carrier

Technical Field

The utility model relates to a clamping device and product carrier who has clamping device for a product carrier. The utility model discloses still relate to a system that has the product carrier and set up the product in the product carrier.

Background

When conveying and/or processing products in one product carrier, such as substrates in a substrate carrier, the products may move within the product carrier and may even become detached from the product carrier. If the product is wetted with a liquid, slippery product in the product carrier may stick together in some cases due to capillary forces.

To reduce the movement of the products in the product carrier, mechanical stops or hold-downs may be provided on the product carrier. This has the disadvantage that the products arranged in the product carrier may in some cases be mechanically loaded and/or damaged by the stops or the pressing device. Furthermore, the stops or hold-down devices are typically required to provide a certain amount of play to the product disposed in the product carrier so that the product can still move to some extent even in the presence of the stops or hold-down devices. This may lead to the persistence of some of the above problems, particularly in the case of thin products. Furthermore, the stoppers or hold-down devices may cause scratches on the product during its movement, especially at the edges of the product.

SUMMERY OF THE UTILITY MODEL

The object of the invention is to avoid or at least reduce the movement of products in a product carrier when transporting and/or handling the products.

This object is achieved by a clamping device according to one aspect of the invention, a product carrier according to another aspect of the invention and a system according to yet another aspect of the invention.

A clamping device for a product carrier according to the invention has a cavity, the walls of which are at least partly made of a deformable material.

The deformable material allows the wall to change its shape such that the wall can be used to clamp and thus secure a product in the product carrier, preventing it from moving within the product carrier. The deformability allows the walls to adapt to the size and orientation of the product to be fixed. The clamping device is thus particularly useful for fixing products of different sizes and different orientations. The deformability of the walls also makes it possible to selectively adjust the duration of action of the gripping means on the product and the gripping force of the gripping means. In particular, the adjustability of the clamping force enables the product to be reliably secured without damaging the product during the securing.

For the purposes of the present invention, "the wall is at least partially formed of a deformable material" is understood to mean that the wall has at least one portion formed of a deformable material.

Advantageously, a fluid may be introduced into the cavity of the clamping device. It is also advantageous that the cavity is adapted to receive a fluid. In order to introduce fluid into the cavity of the holding device, a pump is suitably used.

The shape of the deformable material may be varied, for example, by introducing a fluid into the cavity. In this case, a gas or a liquid may be used as the fluid. Introducing a fluid into the cavity represents a cost-effective method of changing the shape of the deformable material. The amount of fluid introduced into the chamber can conveniently be used to control the extent to which the shape of the deformable material changes.

Preferably, the deformable material is stretchable and/or elastic. The elastic embodiment of the deformable material has particular advantages, namely: the deformable material may return to its original shape again after the shape change so that the gripping device may be used multiple times to secure the product in the product carrier.

As the deformable material, a material having an elastic modulus such that: the deformable material is given an elastic deformation with little resistance against resistance, which in turn gives the wall a good fit to the dimensions and orientation of the product to be fixed. The materials that can be used as the deformable material depend, among other things, on the desired clamping force and/or the properties of the products to be secured, such as their strength.

In a preferred embodiment of the invention, the deformable material is or comprises an elastomer. Elastomers are characterized by a low modulus of elasticity and are therefore particularly suitable for ensuring easy elastic deformability of deformable materials.

Furthermore, in an advantageous embodiment of the invention, at least 30% of the walls of the cavity are formed by the deformable material. Preferably, at least 50% and more preferably at least 80% of the walls of the cavity are formed of deformable material. In particular, the entire wall of the cavity may be formed of a deformable material.

According to the utility model discloses a product bearing device has good grounds the utility model discloses a clamping device.

Furthermore, the product carrier may comprise two side panels, in particular two side panels parallel to each other. Furthermore, the product carrier can have a plurality of bars, in particular bars parallel to one another, which connect the side panels to one another. Preferably, the side plates and the bars define a receiving space for receiving a product. Each bar may have a plurality of tooth-like projections extending towards the receiving space, which act as spacers between adjacent products.

Furthermore, it is advantageous if the product carrier has a support, in particular a rod-shaped support. The holding device can in particular be fixed to the support. The bracket itself may, for example, be attached to the aforementioned side plate, in particular fixed in a releasable manner.

Conveniently, the gripping means extends with its longitudinal direction along the longitudinal direction of the product carrier. In particular, when the products are arranged one after the other in the longitudinal direction of the product carrier, a plurality of products can be fixed in the product carrier simultaneously in this way with the clamping device.

The gripping means extends for example along the longitudinal direction of the product carrier over at least 60% of the length of the product carrier. Preferably, the gripping means extends along the longitudinal direction of the product carrier over at least 80% of the length of the product carrier. In particular, the gripping device may extend in the longitudinal direction of the product carrier over the entire length of the product carrier.

In a preferred embodiment of the invention, the walls of the cavity are arranged and deformable such that, with the product being held in the product carrier by the holding means, a wave-like shape is formed on the wall surface of the surface facing away from the cavity.

The system according to the invention comprises a product carrier according to the invention and a plurality of products, in particular disc-shaped or sheet-shaped products, arranged in the product carrier.

Advantageously, the wall of the cavity of the gripping device has a portion formed by a deformable material, which is brought into contact with the product arranged in the product carrier by introducing a fluid into the cavity.

In a preferred embodiment of the invention, the product carrier comprises at least one bar arranged opposite the holding means, in particular a bar having a plurality of serrations. By means of the clamping device, a product arranged in the product carrier can be clamped between the rod and the clamping device.

The state of the system is particularly advantageous when the cavities of the clamping device are filled with fluid and the product is fixed in the product carrier by means of the clamping device. Hereinafter, this state will be referred to as "fixed state of the product".

In the fixed state of the product, the fluid pressure in the cavity of the holding device is, for example, at least 0.8 bar, preferably at least 1.5 bar, more preferably at least 2 bar. The pressure values mentioned above and below are overpressure values relative to the ambient pressure around the holding device.

It is also advantageous if, in the fixed state of the product, the wall of the cavity has a region in which the surface of the wall facing the product is undulated. As a result, the wall can enclose the edge of the product, thereby ensuring a particularly good fixation of the product. Advantageously, the undulation of the wall adjusts itself by enclosing the wall on the product.

In the fixed state of the product, the walls of the cavity preferably have a corrugated portion in the section between the contact points of the walls with the product. In the present case, a corrugated portion is understood to mean a bulging of the wall.

The product carrier may in particular be designed as a substrate carrier. The product may be, for example, a substrate, in particular a wafer or a glass plate.

Hereinafter, the present invention will be explained in more detail with reference to the accompanying drawings. Identical or equivalent elements have, where appropriate, the same reference numerals. The invention is not limited to the embodiments shown in the figures-even in the functional features. The foregoing description and the following description of the drawings contain many features, and the claims also contain many features. However, the person skilled in the art will also consider these features individually and assemble them into meaningful further combinations. In particular, these features can be combined individually and in any suitable combination with a clamping device according to the invention, a product carrier according to the invention and/or a system according to the invention.

Drawings

Fig. 1 shows an embodiment of a system according to the invention, which in a side view comprises a product carrier with a holding device and a plurality of products arranged in the product carrier;

FIG. 2 shows a cross-sectional view along section A-A of FIG. 1;

FIG. 3A is an enlarged view of a portion of FIG. 2 with the clamping device in a relaxed state;

fig. 3B is an enlarged view of the same portion as in fig. 3A, wherein the clamping device is clamped;

FIG. 4 shows the system in plan view;

FIG. 5A is an enlarged view of a portion of FIG. 4 with the clamping device in a relaxed state;

fig. 5B is an enlarged view of the same portion as that shown in fig. 5A, in which the clamping device is in a clamped state.

Detailed Description

Fig. 1 shows a side view of a system 1, which system 1 comprises a product carrier 2 and a plurality of products 3 arranged one after the other in the product carrier 2.

In the present embodiment, the product carrier 2 is designed as a substrate carrier. The products 3 arranged in the product carrier 2 in the present exemplary embodiment are disk-shaped substrates, for example wafers.

The product carrier 2 comprises two mutually parallel side plates 4 and a number of bars 5 extending perpendicularly to the side plates 4 and connected to the side plates 4. Furthermore, the bars 5 of the product carrier 2 each have a plurality of tooth-like projections 6, which serve as spacers between adjacent products 3. Such bars 5 are also called comb teeth.

Furthermore, the product carrier 2 has bar-like holders 7 which are fixed to the two side plates 4. In fig. 1, the holder 7 is partially covered by one of the rods 5 described above. On the holder 7 is fixed a clamping device 8, by means of which the products 3 can be fixed in the product carrier 2 (see below). The clamping device 8 is hidden in fig. 1 by one of the aforementioned rods 5.

Fig. 2 shows a cross-sectional view of the system 1 along section a-a of fig. 1.

In fig. 2, the above-mentioned rod 5, one of the side plates 4, the holder 7 and the above-mentioned gripping device 8 of the product carrier 2 are shown. In addition, in fig. 2, one product 3 is shown arranged in the product carrier 2.

Fig. 3A shows an enlarged view of a partial region B of the product carrier 2 (indicated by a dashed circle in fig. 2).

In fig. 3A, the holder 7, the gripping device 8 and a part of the products 3 arranged in one product carrier 2 are shown.

The holding device 8 has a cavity 9 and the wall 10 is formed of a deformable material. The deformable material forming the wall 10 of the chamber 9 is an elastic material, the shape of which is changed by introducing a fluid into the chamber 9. The deformable material may be, for example, elastomeric or contain an elastomer.

Fig. 3A shows the holding device 8, more particularly the wall 10 of the cavity 9, in a relaxed state. In this state, the pressure in the cavity 9 of the gripping device 8 corresponds to the ambient pressure around the gripping device 8, and the gripping device 8 is separated from the products 3 arranged in the product carrier 2.

Fig. 3B shows the same sub-area of the product carrier 2 as fig. 3A.

In fig. 3B, a situation is shown in which the clamping means 8, more precisely the walls 10 of the cavity 9, are tensioned, wherein the walls 10 are in contact with the products 3 in the product carrier 2. In this state, the holding device 8 is filled with the fluid 11, wherein the fluid pressure in the cavity 9 of the holding device 8 is, for example, about 1.5 bar.

If the gripping device 8 is in the state shown in fig. 3B, the products 3 arranged in the product carrier 2 are fixed in the product carrier 2 by the gripping device 8. In this case, the product 3 is clamped by the clamping device 8 between the clamping device 8 and the rod 5 arranged opposite the clamping device 8 (see fig. 2).

As can be seen in fig. 3A and 3B, the wall 10 of the cavity 9 has a rounded, in particular circular, cross-sectional shape both when the clamping device 8 is in a relaxed state and when the clamping device 8 is in a tensioned state.

Fig. 4 shows a plan view of the system 1. In this view, the holder 7 and the gripping device 8 are not obscured by one of the bars 5 of the product carrier 2.

As can be seen from fig. 4, the gripping device 8 extends with its longitudinal direction 12 along the longitudinal direction 13 of the product carrier 2. In the present exemplary embodiment, the gripping device 8 extends along the longitudinal direction 13 of the product carrier 2 over approximately 90% of the length L of the product carrier 2.

Fig. 5A shows an enlarged view of a partial region C of the product carrier 2 (indicated by a dashed circle in fig. 4).

In fig. 5A, a part of the holder 7, a part of the gripping device 8 and a part of the plurality of products 3 arranged in the product carrier 2 are shown.

Fig. 5A shows the same product carrier 2 as fig. 3A, but from a different perspective. That is, in fig. 5A, the gripping device 8 is shown in a relaxed and spaced apart state from the products 3 arranged in the product carrier 2.

Fig. 5B shows the same sub-area of the product carrier 2 as fig. 5A, however, the clamping device 8 in fig. 5B is in its tensioned state. That is, the state shown in fig. 5B corresponds to the state of the product carrier 2 shown in fig. 3B.

As can be seen in fig. 5B, the wall 10 of the holding device 8 has a wave shape in its tensioned state. Between the contact points 14, where their walls 10 are in contact with the products 3 arranged in the product carrier 2, the walls 10 each have an antinode 15. The respective antinodes 15 extend into the spatial region between two adjacent products 3.

The invention has been described in detail with reference to the illustrated embodiments. However, the present invention is not limited to the disclosed examples. Other variations can be made by a person skilled in the art without departing from the basic idea of the invention.

List of reference numerals

1 System

2 product carrier

3 products of

4 side plate

5-bar

6 dentate projections

7 rod-shaped retainer

8 clamping device

9 cavities

10 wall

11 fluid

12 longitudinal direction

13 longitudinal direction

14 contact point

15 antinode

Length of L

Claims

1. Clamping device for a product carrier, comprising a cavity (9), the walls (10) of which cavity (9) are at least partly formed of a deformable material, wherein the product carrier (2) is a substrate carrier.

2. The clamping device of claim 1, wherein:

a fluid (11) may be introduced into the cavity (9).

3. Clamping device according to claim 1 or 2, characterized in that:

the shape of the deformable material can be changed by introducing a fluid (11) into the cavity (9).

4. The clamping device of claim 1, wherein:

the deformable material is stretchable and/or elastic.

5. The clamping device of claim 1, wherein:

the deformable material is or contains an elastomer.

6. The clamping device of claim 1, wherein:

at least 30% of the walls (10) of the cavity (9) are formed of a deformable material.

7. The clamping device of claim 1, wherein:

at least 50% of the walls (10) of the cavity (9) are formed of a deformable material.

8. The clamping device of claim 1, wherein:

at least 80% of the walls (10) of the cavity (9) are formed of a deformable material.

9. Product carrier, characterized in that it comprises a gripping device (8) according to one of the preceding claims.

10. The product carrier as recited in claim 9, wherein:

the holding device (8) is mounted on a holder (7).

11. The product carrier as recited in claim 9, wherein:

the gripping device (8) extends with its longitudinal direction (12) along the longitudinal direction of the product carrier (2).

12. The product carrier as recited in claim 9, wherein:

the gripping device (8) extends in the longitudinal direction of the product carrier (2) over at least 60% of the length (L) of the product carrier (2).

13. The product carrier as recited in claim 9, wherein:

the gripping device (8) extends along the longitudinal direction of the product carrier (2) over at least 80% of the length (L) of the product carrier (2).

14. The product carrier as recited in claim 9, wherein:

the clamping device (8) extends in the longitudinal direction of the product carrier (2) for an entire length (L) of the product carrier (2).

15. The product carrier as recited in claim 9, wherein:

the wall (10) of the cavity (9) is arranged and set deformable in such a way that, in the event that the product (3) is fixed in the product carrier (2) by the holding device (8), a wave is formed on a surface of the wall (10) facing away from the cavity (9).

16. A system, characterized by comprising a product carrier (2) according to claim 9 and a plurality of products (3) placed in the product carrier (2).

17. The system of claim 16, wherein:

the wall (10) of the cavity (9) of the holding device (8) has a portion in which the wall (10) formed of a deformable material can be brought into contact with the products (3) arranged in the product carrier (2) by introducing a fluid (11) into the cavity (9).

18. The system of claim 16, wherein:

the product carrier (2) comprises at least one rod (5) arranged opposite to the gripping device (8), and

by means of the clamping device (8), a product (3) arranged in the product carrier (2) can be clamped between the rod (5) and the clamping device (8).

19. The system of claim 18, wherein:

the at least one rod (5) has a plurality of tooth-like projections (6).

20. The system of claim 16, wherein:

the cavity (9) of the clamping device (8) is filled with a fluid (11), and

the products (3) are held in the product carrier (2) by a holding device (8).

21. The system of claim 20, wherein:

the pressure of the fluid in the chamber (9) of the holding device (8) is at least 0.8 bar.

22. The system of claim 20, wherein:

the pressure of the fluid in the chamber (9) of the holding device (8) is at least 1.5 bar.

23. The system of claim 20, wherein:

the pressure of the fluid in the chamber (9) of the holding device (8) is at least 2 bar.

24. The system of claim 20, wherein:

the wall (10) of the cavity (9) has an area in which the surface of the wall (10) facing the product (3) is undulated.

25. The system of claim 20, wherein:

the wall (10) of the cavity (9) has an antinode (15) in each portion between its contact point (14) with a product (3) arranged in the product carrier (2).

26. The system of claim 16, wherein:

the product (3) is a substrate.

27. The system of claim 16, wherein:

the product (3) is a wafer.