CN211402799U - Dual-band terahertz wave absorber with graphene super-surface - Google Patents
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Abstract
Description
技术领域technical field
本发明涉及太赫兹技术领域,具体涉及一种石墨烯超表面的双频带太赫兹吸波器。The invention relates to the technical field of terahertz, in particular to a dual-band terahertz wave absorber with a graphene metasurface.
背景技术Background technique
太赫兹波是介于微波与红外波段之间频谱范围的电磁波谱。太赫兹波具有一些独特的性质:一、太赫兹波和微波一样对很多非极性物质穿透力强,如纸箱、塑料和布料等,因此太赫兹波可以对隐藏物进行检测;二、太赫兹波的波长比微波波长短,这样太赫兹波在成像方面拥有更高的空间分辨率;三、太赫兹波的光子能量比较低(1THz~4meV)不会对生物组织造成损伤。与太赫兹波相比,X射线的光子能量在keV范围,可能会对生物组织造成遗传性损伤和皮肤癌。四、由于大分子的振动和转动能级大多在太赫兹波段,通过太赫兹时域光谱技术可以获得它们的光谱信息,进而通过特征频率对它们的物质结构、物性进行分析和鉴定。Terahertz waves are the electromagnetic spectrum in the spectral range between the microwave and infrared bands. Terahertz waves have some unique properties: First, terahertz waves, like microwaves, have strong penetrating power to many non-polar substances, such as cartons, plastics, and cloth, so terahertz waves can detect hidden objects; The wavelength of hertz waves is shorter than that of microwaves, so that terahertz waves have higher spatial resolution in imaging; third, the photon energy of terahertz waves is relatively low (1THz ~ 4meV) and will not cause damage to biological tissues. Compared with terahertz waves, X-rays have photon energies in the keV range, which may cause genetic damage to biological tissues and skin cancer. 4. Since the vibrational and rotational energy levels of macromolecules are mostly in the terahertz band, their spectral information can be obtained by terahertz time-domain spectroscopy, and their material structures and properties can be analyzed and identified by their characteristic frequencies.
正是由于这些性质决定了太赫兹波在通信(宽带通信)、雷达、电子对抗、电磁武器、天文学、医学成像(无标记的基因检查、细胞水平的成像)、无损检测、安全检查(生化物的检查)等领域具有重要的应用。太赫兹成像技术和太赫兹波谱技术由此构成了太赫兹应用的两个主要关键技术。近年来,太赫兹波产生源与太赫兹波检测被公认为是制约太赫兹技术发展的两大关键问题。而太赫兹波的吸收和能量捕获是实现太赫兹检测的基础,也是太赫兹波标定、调控、转换和应用的核心问题。因此,的研发将有利于太赫兹技术的发展。而现存的普遍存在着结构复杂、吸收率低、结构尺寸大、难集成等缺点。针对以上缺点,本发明设计了一种具有双频吸收、高吸收率、宽入射角、结构简单、易于集成等优点的双频太赫兹。It is because of these properties that terahertz waves are used in communications (broadband communication), radar, electronic countermeasures, electromagnetic weapons, astronomy, medical imaging (label-free genetic inspection, imaging at the cellular level), non-destructive testing, security inspection (biochemical Inspection) and other fields have important applications. Terahertz imaging technology and terahertz spectroscopy technology thus constitute the two main key technologies for terahertz applications. In recent years, THz wave generation and THz wave detection have been recognized as two key issues restricting the development of THz technology. The absorption and energy capture of terahertz waves are the basis for realizing terahertz detection, and they are also the core issues of terahertz wave calibration, regulation, conversion and application. Therefore, the research and development of terahertz technology will be beneficial to the development of terahertz technology. However, the existing ones generally have disadvantages such as complex structure, low absorption rate, large structure size, and difficulty in integration. In view of the above shortcomings, the present invention designs a dual-frequency terahertz with the advantages of dual-frequency absorption, high absorption rate, wide incident angle, simple structure, and easy integration.
发明内容SUMMARY OF THE INVENTION
本发明提供了一种石墨烯超表面的双频带太赫兹吸波器。The invention provides a dual-band terahertz wave absorber with a graphene metasurface.
本发明的目的是这样实现的:该超表面吸波器由多个吸波器单元构成,吸波器单元由自下而上依次设置的底层金属薄膜(1),中间介质层(2)和顶层石墨烯薄膜(3)组成,底层金属薄膜(1)、中间介质层(2)和顶层石墨烯薄膜(3)之间相互贴合。所述底层金属薄膜(1)是全金属薄膜,顶层石墨烯薄膜(3)是图案化的单层石墨烯,所述图案化单层石墨烯的几何中心、中间介质层(2)的几何中心以及底层金属薄膜(1)的几何中心在一条直线上。The object of the present invention is achieved as follows: the metasurface wave absorber is composed of a plurality of wave absorber units, and the wave absorber unit is composed of a bottom metal film (1), an intermediate dielectric layer (2) and The top graphene film (3) is composed, and the bottom metal film (1), the intermediate medium layer (2) and the top graphene film (3) are bonded to each other. The bottom metal film (1) is an all-metal film, the top graphene film (3) is a patterned single-layer graphene, and the geometric center of the patterned single-layer graphene and the geometric center of the intermediate dielectric layer (2) And the geometric center of the underlying metal film (1) is on a straight line.
所述的每个单元的横剖面都为正方形,其边长P为2.1微米。The cross section of each unit is square, and its side length P is 2.1 μm.
所述底层金属薄膜(1)的厚度d为0.5微米,由金、银、铜或铝中的一种制成。The thickness d of the underlying metal film (1) is 0.5 microns, and is made of one of gold, silver, copper or aluminum.
所述的中间介质层(2)是二氧化硅,其厚度t为3.6微米,相对介电常数为3.9。The intermediate dielectric layer (2) is silicon dioxide, its thickness t is 3.6 microns, and the relative dielectric constant is 3.9.
所述的单层石墨烯结构进行图案化;所述图案是由四个几何形状完全相同的菱形和一个圆盘组成;所述四个菱形呈上下、左右镜像对称方式布置;所述四个菱形长对角线所对应的两个顶角中的一个顶角正对于中间介质层的四个边的中点,另一个顶角的顶点与圆盘的几何中心、中间介质层(2)的几何中心以及底层金属薄膜(1)的几何中心在一条直线上。The single-layer graphene structure is patterned; the pattern is composed of four rhombus with identical geometric shapes and a disk; the four rhombus are arranged in a mirror-symmetrical manner of up and down, left and right; the four rhombus One of the two vertices corresponding to the long diagonal is exactly at the midpoint of the four sides of the intermediate dielectric layer, and the vertex of the other vertex corresponds to the geometric center of the disc and the geometry of the intermediate dielectric layer (2). The center and the geometric center of the underlying metal film (1) are on a straight line.
所述的菱形的两条对角线长L1和L2分别为1.0微米和0.7微米,圆盘的半径r为0.2微米。The two diagonal lengths L1 and L2 of the rhombus are 1.0 μm and 0.7 μm respectively, and the radius r of the disk is 0.2 μm.
本发明与现有技术相比,其显著优点为:Compared with the prior art, the present invention has the following significant advantages:
1.超表面吸波器的顶层采用一个图案化的单层石墨烯,结构简单,紧凑,完美对称,易于实现,还可以使具有极化不敏感特性;1. The top layer of the metasurface absorber adopts a patterned single-layer graphene, which is simple, compact, perfectly symmetrical, easy to implement, and can also be polarized insensitive;
2.本发明提出的超表面吸波器,可以在6~16THz的频率范围内实现两个吸收峰,且都具有近乎完美的吸收率;2. The metasurface wave absorber proposed by the present invention can realize two absorption peaks in the frequency range of 6-16 THz, and both have almost perfect absorption rates;
3.入射角在0°~50°范围内,本发明仍能保持良好的吸收效果。3. When the incident angle is in the range of 0° to 50°, the present invention can still maintain a good absorption effect.
附图说明Description of drawings
图1:基于石墨烯超表面的双频带太赫兹吸波器三维结构示意图。Figure 1: Schematic diagram of the three-dimensional structure of a dual-band terahertz absorber based on graphene metasurfaces.
图2:基于石墨烯超表面的双频带太赫兹吸波器主示意图。Figure 2: Main schematic diagram of a dual-band terahertz absorber based on graphene metasurfaces.
图3:基于石墨烯超表面的双频带太赫兹吸波器仰视示意图。Figure 3: Schematic bottom view of a dual-band terahertz absorber based on a graphene metasurface.
图4:基于石墨烯超表面的双频带太赫兹吸波器性能曲线图。Figure 4: Graph of the performance of a dual-band terahertz absorber based on graphene metasurfaces.
图5:TM模式下,0°~70°入射时基于石墨烯超表面的双频带太赫兹吸波器性能图。Figure 5: Performance diagram of the graphene metasurface-based dual-band terahertz absorber at 0°-70° incidence in TM mode.
图6:TE模式下,0°~70°入射时基于石墨烯超表面的双频带太赫兹吸波器性能图。Figure 6: Performance diagram of a dual-band terahertz absorber based on graphene metasurface at 0°-70° incidence in TE mode.
具体实施方式Detailed ways
下面结合附图与具体实施方式对本发明作进一步详细描述。The present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments.
如图1~3所示,一种石墨烯超表面的双频带太赫兹吸波器,包括沿平面连续设置的多个吸波单元。吸波器单元由自下而上依次设置的底层金属薄膜(1),中间介质层(2)和顶层石墨烯薄膜(3)组成,底层金属薄膜(1)、中间介质层(2)和顶层石墨烯薄膜(3)之间相互贴合。所述底层金属薄膜(1)是全金属薄膜,顶层石墨烯薄膜(3)是图案化的单层石墨烯,所述图案化单层石墨烯的几何中心、中间介质层(2)的几何中心以及底层金属薄膜(1)的几何中心在一条直线上。As shown in Figures 1-3, a dual-band terahertz wave absorber with a graphene metasurface includes a plurality of wave absorbing units continuously arranged along a plane. The absorber unit is composed of a bottom metal film (1), an intermediate dielectric layer (2) and a top graphene film (3) arranged in sequence from bottom to top, the bottom metal film (1), the intermediate dielectric layer (2) and the top layer The graphene films (3) are adhered to each other. The bottom metal film (1) is an all-metal film, the top graphene film (3) is a patterned single-layer graphene, and the geometric center of the patterned single-layer graphene and the geometric center of the intermediate dielectric layer (2) And the geometric center of the underlying metal film (1) is on a straight line.
当多个吸波单元沿平面连续设置时,底层金属薄膜1和中间损耗介质2均连为一体,而顶层石墨烯薄膜(3)之间则相互隔离,使各个吸收单元独立工作。When a plurality of wave absorbing units are continuously arranged along the plane, the bottom metal film 1 and the intermediate
作为实施例,每个吸波单元的三层结构各尺寸参数如下:晶格周期P=2.1微米,顶层石墨烯薄膜(3)是图案化的单层石墨烯,所述图案化的单层石墨烯是由四个几何形状完全相同的菱形和一个圆盘组成;所述的菱形的两条对角线长L1和L2分别为1.0微米和0.7微米,圆盘的半径r为0.2微米;所述的顶层石墨烯薄膜(3)的厚度为1纳米;所示的底层金属薄膜(1)采用金,其厚度d为0.5微米;所示的中间介质层(2)是二氧化硅,其厚度t为3.6微米,相对介电常数为3.9。As an example, the size parameters of the three-layer structure of each wave absorbing unit are as follows: lattice period P=2.1 μm, the top graphene film (3) is a patterned single-layer graphene, and the patterned single-layer graphite The alkene is composed of four rhombus with identical geometric shapes and a disc; the two diagonal lengths L1 and L2 of the rhombus are 1.0 microns and 0.7 microns respectively, and the radius r of the disc is 0.2 microns; the The thickness of the top graphene film (3) is 1 nanometer; the bottom metal film (1) shown is gold, and its thickness d is 0.5 μm; the middle dielectric layer (2) shown is silicon dioxide, and its thickness t is 3.6 microns, and the relative dielectric constant is 3.9.
本实施例所述的一种石墨烯超表面的双频带太赫兹吸波器的吸收率定义为A=1-R-T,式中R为反射率,T为透射率。为了使吸收率最大化,要求在整个频率范围内反射率和透射率尽可能的小。本发明设计的吸波单元的底层为全金属膜(1),电磁波不能透射,透射率趋近于零,因此吸收率计算公式可简化为A=1-R。The absorptivity of the dual-band terahertz wave absorber of a graphene metasurface described in this embodiment is defined as A=1-R-T, where R is the reflectivity and T is the transmittance. To maximize absorptivity, reflectivity and transmittance are required to be as small as possible over the entire frequency range. The bottom layer of the wave absorbing unit designed by the present invention is an all-metal film (1), electromagnetic waves cannot be transmitted, and the transmittance is close to zero, so the calculation formula of the absorption rate can be simplified as A=1-R.
本实施例在电磁波正入射下的仿真结果如图4所示,该仿真结果由CST MicrowaveStudio软件计算得到。由图可知,当在石墨烯层和基底金属层之间给供电压时,在10.39THz和12.40处,该对太赫兹的吸收率均在99.45%以上,实现了双频带高吸收率。The simulation result of this embodiment under the normal incidence of electromagnetic waves is shown in FIG. 4 , and the simulation result is calculated by CST MicrowaveStudio software. It can be seen from the figure that when the supply voltage is applied between the graphene layer and the base metal layer, at 10.39THz and 12.40, the absorption rate of the pair of terahertz is above 99.45%, achieving dual-band high absorption rate.
本实施例在TM模式和TE模式下,0°~70°入射时基于石墨烯超表面的双频带太赫兹吸波器性能如图5和图6所示。从图中可以看出本发明提出的吸波器在TM模式和TE模式下的入射电磁波在角度0°~50°范围内具有良好的角度不依赖的吸收特性,而且吸收率均可保持在90%以上。由此可见,本实施例是一种性能良好的双频带、高吸收率的超表面吸波器。Figure 5 and Figure 6 show the performance of the graphene metasurface-based dual-band terahertz wave absorber in the TM mode and the TE mode in this example at an incidence of 0° to 70°. It can be seen from the figure that the wave absorber proposed by the present invention has good angle-independent absorption characteristics of incident electromagnetic waves in the TM mode and TE mode in the angle range of 0° to 50°, and the absorption rate can be maintained at 90° %above. It can be seen that this embodiment is a dual-band, high absorption rate metasurface wave absorber with good performance.
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