CN211401809U - Airtight quantitative sampling device of chlorosilane - Google Patents
Airtight quantitative sampling device of chlorosilane Download PDFInfo
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- CN211401809U CN211401809U CN201922171677.2U CN201922171677U CN211401809U CN 211401809 U CN211401809 U CN 211401809U CN 201922171677 U CN201922171677 U CN 201922171677U CN 211401809 U CN211401809 U CN 211401809U
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Abstract
The utility model discloses an airtight quantitative sampling device of chlorosilane solves prior art and can not quantitative sample thereby leads to the inconsistent technical problem who reduces the sample representativeness of every batch of sample volume. The utility model discloses a from the sampling tube that chlorosilane material pipeline connects out, along first valve, tee bend needle valve and the second valve that material flow direction set gradually in the sampling tube, with the tee bend needle valve is connected and is used for the sampling bottle coupling mechanism of sealing connection sampling bottle, sampling bottle coupling mechanism is equipped with the negative pressure mechanism of taking out that is used for taking out the negative pressure in the sampling bottle. The utility model has the advantages of simple structure and scientific and reasonable design, convenient to use can the effective control sample volume, guarantees that every batch of sample volume is unanimous, and the sample representativeness of taking is strong.
Description
Technical Field
The utility model belongs to the technical field of polycrystalline silicon production, concretely relates to airtight quantitative sampling device of chlorosilane.
Background
Chlorosilane has the characteristics of low boiling point, easy volatilization, easy water solubility, flammability, strong corrosiveness and the like, and reacts violently with compounds containing active hydrogen, such as water, alcohol, phenol, silanol, organic acid and the like to release hydrogen chloride. By reaction with an organometallic compound, the chlorine atom is replaced by the corresponding organic radical, giving an organochlorosilane or organosilane. Used as silicon source in the production process of silicon epitaxial wafer and raw material for preparing organic chlorosilane. It has strong irritation to eye and respiratory mucosa when inhaled or taken by human body. In high concentration, it can cause corneal opacity, airway inflammation, even pulmonary edema, and may be accompanied by dizziness, headache, asthenia, nausea, vomiting, palpitation, etc. When splashed on the skin, necrosis and ulcer can be caused, which can not be cured for a long time.
In the chemical production process, whether the product is qualified or not can be determined through sampling analysis, whether the chemical device operates stably or not can be determined, the process parameters can be adjusted in time according to the sampling analysis result, the device is ensured to operate safely and stably, and therefore the sampler has high requirements. For the sampler of the chemical device, on one hand, the key point to be considered is how to conveniently, accurately and safely take a representative sample.
Closed sampler is applicable to poisonous and harmful or flammable and explosive material, perhaps causes the high temperature high pressure material of injury to the human body, and chlorosilane need adopt closed sampler to take a sample because of its physical and chemical characteristics, and current chlorosilane closed sampler has following not enoughly: (1) due to the physicochemical property of chlorosilane, crystallization and blockage of the sampler are easily caused, certain potential safety hazards exist, and therefore after sampling is completed every time, the sampling device needs to be manually cleaned, and the cleaning work of workers is increased. (2) The sampling bottle of the closed sampler can not be fixed in the sampling process, and is easy to damage. (3) The biggest limitation is that the quantitative sampling cannot be realized, namely the sampling amount cannot be consistent.
Therefore, designing a chlorosilane sealed quantitative sampling device can effectively control the sampling amount and ensure that the sampling amount of each batch is consistent, and the technical problem to be solved by technical personnel in the technical field is urgently needed.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is: the utility model provides a chlorosilane is airtight quantitative sampling device, solves prior art and can not the quantitative sampling and lead to every batch of inconsistent sampling volume to reduce the representative technical problem of sample.
In order to achieve the above object, the utility model adopts the following technical scheme:
a chlorosilane sealed quantitative sampling device comprises a sampling tube connected out of a chlorosilane material pipeline, a first valve, a three-way needle valve and a second valve which are sequentially arranged along the flowing direction of materials in the sampling tube, and a sampling bottle connecting mechanism connected with the three-way needle valve and used for being connected with a sampling bottle in a sealing mode, wherein the sampling bottle connecting mechanism is provided with a negative pressure pumping mechanism used for pumping negative pressure in the sampling bottle.
Further, sample bottle coupling mechanism include with the tee bend needle valve be connected and with sample bottle matched with sample bottle safety cover and be located in the sample bottle safety cover and with the sample syringe needle that the tee bend needle valve is linked together.
Furthermore, the inner wall of the upper part of the sampling bottle protective cover is provided with a screw thread which is connected with the sampling bottle in a sealing way.
Further, the screw threads comprise small-caliber screw threads and large-caliber screw threads which are distributed up and down.
Further, articulated on the sample bottle protective cover have the bracket that is used for holding the sample bottle.
Further, the sampling bottle protective cover is made of polytetrafluoroethylene materials.
Further, the negative pressure pumping mechanism comprises a negative pressure pumping needle head extending into the sampling bottle connecting mechanism and a negative pressure pumping pump connected with the negative pressure pumping needle head.
Further, the outlet end of the sampling tube is connected with a storage tank.
Furthermore, the sampling tube is connected with a nitrogen tube for purging the pipeline, and the nitrogen tube is provided with a third valve.
Further, still include with sample bottle coupling mechanism matched with's tail gas collection tank.
Compared with the prior art, the utility model discloses following beneficial effect has:
the utility model has simple structure, scientific and reasonable design and convenient use, can effectively control the sampling amount, ensures that the sampling amount of each batch is consistent, and the representativeness of the sampled products is strong; the sampler adopts polytetrafluoroethylene materials, guarantees that the sample is not contaminated, improves the cleanliness factor of sample.
The utility model mainly comprises a sampling tube, a sampling bottle connecting mechanism and a negative pressure pumping mechanism, wherein the sampling tube is provided with a first valve, a three-way needle valve and a second valve, the three-way needle valve is connected with the sampling bottle connecting mechanism, the sampling bottle connecting mechanism comprises a sampling bottle protective cover and a sampling needle head, the sampling needle head is communicated with the three-way needle valve, the sampling bottle protective cover is hermetically connected on the three-way needle valve and is used for hermetically mounting the sampling bottle, the sampling bottle connecting mechanism is provided with the negative pressure pumping mechanism, the negative pressure pumping mechanism comprises the negative pressure pumping needle head and a negative pressure pumping pump which are mutually connected, when in use, the sampling bottle is hermetically connected in the sampling bottle protective cover through a screw thread, then the interior of the sampling bottle is vacuumized through the negative pressure pumping pump, then the first valve and the second valve are opened, chlorosilane in a material pipe flows into the sampling tube, the chlorosilane flows into a, the second valve and the first valve are closed in sequence, then the three-way needle valve is opened to enable the sampling bottle to be communicated with the sampling tube, under the action of negative pressure in the sampling bottle, chlorosilane in the sampling tube enters the sampling bottle, when pressure in the sampling tube and the sampling bottle is balanced, the three-way needle valve is closed, the sampling bottle is taken out, the tail gas collecting tank is connected into the sampling bottle protective cover, the three-way needle valve and the second valve are opened, the third valve is opened, the sampling tube and the sampling needle are swept and blown by relatively high-pressure nitrogen, sampling and pipeline cleaning are completed, and by controlling the negative pressure in the sampling bottle, sampling amount can be effectively controlled, and the sampling amount in each batch is guaranteed to be consistent. When the liquid material is taken, the liquid can be effectively prevented from volatilizing, so that the obtained sample is representative. The device has the advantages of airtight structure, short sampling time, clean and safe sampling, visual observation of the material liquid level in the sampling bottle, and convenient disassembly, cleaning and maintenance.
The utility model discloses establish small-bore screw thread and heavy-calibre screw thread in the sampling bottle safety cover, so can be suitable for the sampling bottle of different specifications, can effectively enlarge this airtight quantitative sampling device's application scope.
The utility model discloses it has the bracket to articulate on the sample bottle safety cover, and when the sample bottle inserts in the sample bottle safety cover, the accessible bracket held the bottle end of sample bottle, and the in-process is earlier revolved the bracket, inserts the sample bottle safety cover with the sample bottle again in, then puts down the bracket to the sample bottle end, so can effectively strengthen the steadiness that the sample bottle inserted in the sample bottle safety cover, avoids the sample bottle to drop the damage.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Wherein, the names corresponding to the reference numbers are:
1-nitrogen tube, 2-third valve, 3-sampling tube, 4-first valve, 5-three-way needle valve, 6-small-caliber screw thread, 7-large-caliber screw thread, 8-sampling needle, 9-sampling bottle protective cover, 10-bracket, 11-negative pressure pumping needle, 12-negative pressure pumping pump, 13-second valve, 14-storage tank and 15-tail gas collection tank.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings. It is to be understood that the embodiments described are only some embodiments of the invention, and not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and thus, it should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; of course, mechanical connection and electrical connection are also possible; alternatively, they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
As shown in figure 1, the utility model provides a pair of airtight quantitative sampling device of chlorosilane, simple structure, design scientific and reasonable, convenient to use can the effective control sample volume, guarantees that every batch of sample volume is unanimous. The utility model discloses a sampling tube 3 that connects out from chlorosilane material pipeline, along first valve 4, tee bend needle valve 5 and the second valve 13 that the material flow direction set gradually in the sampling tube 3, with tee bend needle valve 5 is connected and is used for the sampling bottle coupling mechanism of sealing connection sampling bottle, sampling bottle coupling mechanism is equipped with the suction pressure mechanism that is used for taking out the negative pressure in the sampling bottle, the exit end of sampling tube 3 is connected with holding vessel 14.
Specifically speaking, sample bottle coupling mechanism include with three-way needle valve 5 be connected and with sample bottle matched with sample bottle safety cover 9 and be located in sample bottle safety cover 9 and with the sample syringe needle 8 that three-way needle valve 5 is linked together. The upper portion inner wall of sampling bottle safety cover 9 is equipped with the screw thread with sampling bottle sealing connection, the screw thread is including being small-bore screw thread 6 and the heavy-calibre screw thread 7 that distributes from top to bottom, the utility model discloses establish small-bore screw thread and heavy-calibre screw thread in the sampling bottle safety cover, so can be suitable for the sampling bottle of different specifications, can effectively enlarge this airtight quantitative sampling device's application scope. Articulated on the sampling bottle safety cover 9 have a bracket 10 that is used for holding the sampling bottle, sampling bottle safety cover 9 adopts polytetrafluoroethylene material to make. The utility model discloses it has the bracket to articulate on the sample bottle safety cover, and when the sample bottle inserts in the sample bottle safety cover, the accessible bracket held the bottle end of sample bottle, and the in-process is earlier revolved the bracket, inserts the sample bottle safety cover with the sample bottle again in, then puts down the bracket to the sample bottle end, so can effectively strengthen the steadiness that the sample bottle inserted in the sample bottle safety cover, avoids the sample bottle to drop the damage.
Specifically speaking, the negative pressure pumping mechanism comprises a negative pressure pumping needle head 11 extending into the sampling bottle connecting mechanism and a negative pressure pumping pump 12 connected with the negative pressure pumping needle head 11.
Be connected with nitrogen gas pipe 1 that is used for sweeping the pipeline on the sampling tube 3, be equipped with third valve 2 on the nitrogen gas pipe 1.
The utility model discloses still include with sample bottle coupling mechanism matched with tail gas collection tank 15.
The utility model mainly comprises a sampling tube, a sampling bottle connecting mechanism and a negative pressure pumping mechanism, wherein the sampling tube is provided with a first valve, a three-way needle valve and a second valve, the three-way needle valve is connected with the sampling bottle connecting mechanism, the sampling bottle connecting mechanism comprises a sampling bottle protective cover and a sampling needle head, the sampling needle head is communicated with the three-way needle valve, the sampling bottle protective cover is hermetically connected on the three-way needle valve and is used for hermetically mounting the sampling bottle, the sampling bottle connecting mechanism is provided with the negative pressure pumping mechanism, the negative pressure pumping mechanism comprises the negative pressure pumping needle head and a negative pressure pumping pump which are mutually connected, when in use, the sampling bottle is hermetically connected in the sampling bottle protective cover through a screw thread, then the interior of the sampling bottle is vacuumized through the negative pressure pumping pump, then the first valve and the second valve are opened, chlorosilane in a material pipe flows into the sampling tube, the chlorosilane flows into a, the second valve and the first valve are closed in sequence, then the three-way needle valve is opened to enable the sampling bottle to be communicated with the sampling tube, under the action of negative pressure in the sampling bottle, chlorosilane in the sampling tube enters the sampling bottle, when pressure in the sampling tube and the sampling bottle is balanced, the three-way needle valve is closed, the sampling bottle is taken out, the tail gas collecting tank is connected into the sampling bottle protective cover, the three-way needle valve and the second valve are opened, the third valve is opened, the sampling tube and the sampling needle are swept and blown by relatively high-pressure nitrogen, sampling and pipeline cleaning are completed, and by controlling the negative pressure in the sampling bottle, sampling amount can be effectively controlled, and the sampling amount in each batch is guaranteed to be consistent. When the liquid material is taken, the liquid can be effectively prevented from volatilizing, so that the obtained sample is representative. The device has the advantages of airtight structure, short sampling time, clean and safe sampling, visual observation of the material liquid level in the sampling bottle, and convenient disassembly, cleaning and maintenance.
The utility model discloses be equipped with the sampling bottle safety cover, be equipped with the screw thread that the specification is unequal on this safety cover, consequently, can be suitable for the not equidimension sampling bottle of size. Meanwhile, the screw thread is matched with the bottle mouth of the sampling bottle, so that sampling bottles with different sizes can be fixed. The subsidiary nitrogen gas of sampling line sweeps, and polytetrafluoroethylene material is chooseed for use to the sampler simultaneously for airtight quantitative sampling device of chlorosilane has, airtight, clean, safety, difficult polluted environment, and can reach the quantitative sampling, also can audio-visual liquid level in the observation sampling bottle, convenient to detach washs the characteristics of maintaining.
The utility model discloses two syringe needles of different sizes of installation in the sample bottle safety cover, take out the certain negative pressure of sample bottle by the pump 11 of taking out 11 earlier from taking out negative pressure syringe needle, because the interior external differential pressure of sample bottle opens tee bend needle valve 5 again and presses the sample bottle with chlorosilane by sample syringe needle 8 in, the sample process security is high. After sampling, the sampling tube 3 is purged by nitrogen, the sampling bottle protective cover 9 and the sampling needle 8 are purged at the same time, and the purged liquid is discharged into the tail gas collecting tank and the storage tank for centralized treatment, so that high representativeness of sampling every time is ensured, and the environment is not polluted. Guarantee not to have in sampling tube and the sampling bottle safety cover to remain liquid, the sampling bottle safety cover is convenient for wash the maintenance, in time changes when inconvenient using. The top of the sampling bottle protective cover is provided with a screw head which is connected with a three-way needle valve in a sealing way. The sampling needle 8 is longer than the negative pressure pumping needle 11, so that quantitative sampling is convenient.
Finally, it should be noted that: the above embodiments are only preferred embodiments of the present invention to illustrate the technical solution of the present invention, but not to limit the same, and certainly not to limit the scope of the present invention; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention; that is, the technical problems solved by the present invention are still consistent with the present invention, and all the modifications or colors made in the spirit and the idea of the main design of the present invention are included in the protection scope of the present invention; in addition, will the technical scheme of the utility model direct or indirect application is in other relevant technical field, all including on the same reason the utility model discloses an in the patent protection scope.
Claims (10)
1. The utility model provides a airtight quantitative sampling device of chlorosilane which characterized in that: the sampling device comprises a sampling tube (3) connected out from a chlorosilane material pipeline, a first valve (4), a three-way needle valve (5) and a second valve (13) which are sequentially arranged along the material flow direction in the sampling tube (3), and a sampling bottle connecting mechanism which is connected with the three-way needle valve (5) and is used for being connected with a sampling bottle in a sealing manner, wherein the sampling bottle connecting mechanism is provided with a negative pressure pumping mechanism for pumping negative pressure in the sampling bottle.
2. The chlorosilane closed quantitative sampling device as claimed in claim 1, wherein the chlorosilane closed quantitative sampling device comprises: sampling bottle coupling mechanism include with tee bend needle valve (5) be connected and with sampling bottle matched with sampling bottle safety cover (9) and be located in sampling bottle safety cover (9) and with sample syringe needle (8) that tee bend needle valve (5) are linked together.
3. The chlorosilane closed quantitative sampling device as claimed in claim 2, is characterized in that: and the inner wall of the upper part of the sampling bottle protective cover (9) is provided with a screw thread which is connected with the sampling bottle in a sealing way.
4. A chlorosilane closed quantitative sampling device as claimed in claim 3, characterized in that: the screw threads comprise small-caliber screw threads (6) and large-caliber screw threads (7) which are distributed up and down.
5. The chlorosilane closed quantitative sampling device as claimed in claim 2, is characterized in that: the sampling bottle protective cover (9) is hinged with a bracket (10) used for supporting the sampling bottle.
6. The chlorosilane closed quantitative sampling device as claimed in claim 2, is characterized in that: the sampling bottle protective cover (9) is made of polytetrafluoroethylene materials.
7. The chlorosilane closed quantitative sampling device as claimed in claim 1, wherein the chlorosilane closed quantitative sampling device comprises: the negative pressure pumping mechanism comprises a negative pressure pumping needle head (11) extending into the sampling bottle connecting mechanism and a negative pressure pumping pump (12) connected with the negative pressure pumping needle head (11).
8. The chlorosilane closed quantitative sampling device as claimed in claim 1, wherein the chlorosilane closed quantitative sampling device comprises: the outlet end of the sampling tube (3) is connected with a storage tank (14).
9. The chlorosilane closed quantitative sampling device as claimed in claim 1, wherein the chlorosilane closed quantitative sampling device comprises: the sampling tube (3) is connected with a nitrogen tube (1) used for purging a pipeline, and the nitrogen tube (1) is provided with a third valve (2).
10. The chlorosilane closed quantitative sampling device as claimed in claim 1, wherein the chlorosilane closed quantitative sampling device comprises: and the tail gas collecting tank (15) is matched with the sampling bottle connecting mechanism.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201922171677.2U CN211401809U (en) | 2019-12-06 | 2019-12-06 | Airtight quantitative sampling device of chlorosilane |
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| CN201922171677.2U CN211401809U (en) | 2019-12-06 | 2019-12-06 | Airtight quantitative sampling device of chlorosilane |
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| CN211401809U true CN211401809U (en) | 2020-09-01 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114166576A (en) * | 2021-11-22 | 2022-03-11 | 深圳市奥图威尔科技有限公司 | Closed sampling device capable of quantitatively sampling |
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2019
- 2019-12-06 CN CN201922171677.2U patent/CN211401809U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114166576A (en) * | 2021-11-22 | 2022-03-11 | 深圳市奥图威尔科技有限公司 | Closed sampling device capable of quantitatively sampling |
| CN114166576B (en) * | 2021-11-22 | 2023-06-30 | 深圳市奥图威尔科技有限公司 | Closed sampling device capable of quantitatively sampling |
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