CN211401082U

CN211401082U - Novel probe card detection equipment

Info

Publication number: CN211401082U
Application number: CN202020423470.XU
Authority: CN
Inventors: 王艾琳; 赵梁玉; 于海超
Original assignee: Maxone Semiconductor Suzhou Co Ltd
Current assignee: Strong Half Conductor Suzhou Co ltd
Priority date: 2020-03-30
Filing date: 2020-03-30
Publication date: 2020-09-01
Anticipated expiration: 2030-03-30

Abstract

The utility model discloses a novel probe card check out test set, comprises a workbench, surface movable mounting has adjustment mechanism on the workstation, adjustment mechanism fixed surface installs fixed establishment, the workstation surface is located adjustment mechanism both sides fixed mounting and has the fixed bolster, fixed mounting has the mount pad on the fixed bolster, fixed mounting has the microscope on the mount pad, fixed mounting has the light under the mount pad, the workstation surface is located fixed bolster one side fixed mounting and has control panel, the workstation surface is located fixed bolster opposite side fixed mounting and has display screen, the workstation lower surface is located the equal fixed mounting in four corners position and has fixed stabilizer blade. A novel probe card check out test set, can transfer to make through the bearing adjust the support rotatory at the workstation surface to adjust the angle that detects, and can fix the probe card through rubber suction cup, thereby prevent to use anchor clamps to cause the damage to the probe card.

Description

Novel probe card detection equipment

Technical Field

The utility model relates to a check out test set field, in particular to novel probe card check out test set.

Background

Like the IC market, the probe card manufacturing industry has a huge market, and since the invention of the IC, for decades, each chip needs to be tested by using the probe card before being cut from the wafer, the probe card is composed of probes, a fixing ring, a PCB and the like, wherein the probes are the core of the whole probe card, the probes are usually made of alloy with good electrical conductivity, all the probes are fixedly installed on a specially designed PCB board, the tip area of the probes is very small, the diameter is usually only dozens to hundreds of micrometers, the length is 3-10mm, and the probe card needs to be tested before being used.

SUMMERY OF THE UTILITY MODEL

A primary object of the present invention is to provide a novel probe card testing apparatus, which can effectively solve the problems of the background art.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides a novel probe card check out test set, includes the workstation, surface movable mounting has adjustment mechanism on the workstation, adjustment mechanism fixed surface installs fixed establishment, the workstation surface is located adjustment mechanism both sides fixed mounting and has the fixed bolster, fixed mounting has the mount pad on the fixed bolster, fixed mounting has the microscope on the mount pad, fixed mounting has the light under the mount pad, the workstation surface is located fixed bolster one side fixed mounting and has control panel, the workstation surface is located fixed bolster opposite side fixed mounting and has the display screen, the workstation lower surface is located the equal fixed mounting in four corners position and has fixed stabilizer blade.

Preferably, adjustment mechanism includes dust cover, mounting groove, regulation support and bearing, the workstation surface is seted up in the mounting groove, fixed mounting has the bearing in the mounting groove, fixed mounting has the regulation support on lieing in the bearing in the mounting groove, it is equipped with the dust cover to adjust support surface cover.

Preferably, the bearing passes through mounting groove and workstation fixed connection, adjust the support and pass through bearing and workstation swing joint.

Preferably, the fixing mechanism comprises a rubber sucker, an exhaust duct, a duct valve and a connecting base, the connecting base is fixedly installed on the upper surface of the adjusting mechanism, the rubber sucker is fixedly installed on the surface of the connecting base, the exhaust duct is fixedly installed in the connecting base, and the duct valve is fixedly installed at one end of the exhaust duct.

Preferably, the rubber suction cup is fixedly connected with the adjusting mechanism through a connecting base, the other end of the exhaust duct is fixedly installed on the rubber suction cup, and the rubber suction cup is fixedly connected with the duct valve through the exhaust duct.

Preferably, the workbench is fixedly arranged on the ground through a fixing support leg, and the microscope is fixedly connected with the fixing support through a mounting seat.

Compared with the prior art, the utility model discloses following beneficial effect has:

the utility model discloses in, through setting up adjustment mechanism, adjustment mechanism can make the regulation support rotatory at the workstation surface through the bearing to adjust the angle that detects, and in dust or debris got into the bearing can be placed to the dust cover of adjusting the support surface, thereby the protection bearing, increase the life of device, through the fixed establishment who sets up, fixed establishment can pass through rubber suction cup and adsorb on the back of probe card, thereby prevent that anchor clamps from causing the damage to the probe card.

Drawings

Fig. 1 is a schematic view of the overall structure of a novel probe card detection device of the present invention;

fig. 2 is a schematic view of the distribution of the illumination lamps of the novel probe card detection device of the present invention;

fig. 3 is a schematic view of an adjusting mechanism of the novel probe card detecting apparatus of the present invention;

fig. 4 is a schematic view of a fixing mechanism of a novel probe card testing apparatus of the present invention.

In the figure: 1. an illuminating lamp; 2. an adjustment mechanism; 201. a dust cover; 202. mounting grooves; 203. adjusting the support; 204. a bearing; 3. a control panel; 4. a work table; 5. a fixed leg; 6. a mounting seat; 7. a display screen; 8. a fixing mechanism; 801. a rubber suction cup; 802. an exhaust conduit; 803. a catheter valve; 804. connecting a base; 9. fixing a bracket; 10. and (4) a microscope.

Detailed Description

In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the following embodiments.

In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "both ends", "one end", "the other end" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element to which the reference is made must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "connected," and the like are to be construed broadly, and for example, "connected" may be either fixedly connected or detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

As shown in fig. 1-4, a novel probe card detection device comprises a workbench 4, wherein an adjusting mechanism 2 is movably mounted on the upper surface of the workbench 4, a fixing mechanism 8 is fixedly mounted on the surface of the adjusting mechanism 2, fixing supports 9 are fixedly mounted on the surfaces of the workbench 4 at two sides of the adjusting mechanism 2, a mounting seat 6 is fixedly mounted on the fixing supports 9, a microscope 10 is fixedly mounted on the mounting seat 6, an illuminating lamp 1 is fixedly mounted on the lower surface of the mounting seat 6, a control panel 3 is fixedly mounted on one side of the fixing support 9 on the surface of the workbench 4, a display screen 7 is fixedly mounted on the other side of the fixing support 9 on the surface of the workbench 4, and fixing support legs 5 are fixedly mounted on the lower surface of the;

the adjusting mechanism 2 comprises a dust cover 201, a mounting groove 202, an adjusting support 203 and a bearing 204, the mounting groove 202 is arranged on the surface of the workbench 4, the bearing 204 is fixedly arranged in the mounting groove 202, the adjusting support 203 is fixedly arranged on the bearing 204 in the mounting groove 202, and the dust cover 201 is sleeved on the surface of the adjusting support 203; the bearing 204 is fixedly connected with the workbench 4 through the mounting groove 202, and the adjusting support 203 is movably connected with the workbench 4 through the bearing 204; the fixing mechanism 8 comprises a rubber sucker 801, an exhaust duct 802, a duct valve 803 and a connecting base 804, the connecting base 804 is fixedly arranged on the upper surface of the adjusting mechanism 2, the rubber sucker 801 is fixedly arranged on the surface of the connecting base 804, the exhaust duct 802 is fixedly arranged in the connecting base 804, and the duct valve 803 is fixedly arranged at one end of the exhaust duct 802; the rubber sucker 801 is fixedly connected with the adjusting mechanism 2 through a connecting base 804, the other end of the exhaust duct 802 is fixedly arranged on the rubber sucker 801, and the rubber sucker 801 is fixedly connected with the duct valve 803 through the exhaust duct 802; the worktable 4 is fixedly arranged on the ground through a fixing support leg 5, and the microscope 10 is fixedly connected with the fixing support 9 through a mounting seat 6.

It should be noted that the present invention is a novel probe card inspection apparatus, when in use, firstly, the whole apparatus is moved to the use position, then the probe card is placed on the surface of the rubber suction cup 801, then the air in the rubber suction cup 801 is exhausted through the exhaust duct 802, and the duct valve 803 is closed, so that the probe card can be conveniently fixed, and the probe card can not be contacted during fixing, thereby the damage to the probe by using the clamp can be prevented, after the inspection is finished, the probe card can be taken down by opening the duct valve 803, after the probe card is fixed, the adjusting support 203 is rotated, the adjusting support 203 can be rotated in the mounting groove 202 through the bearing 204, thereby the inspection angle can be adjusted, after the adjustment is finished, the probe can be magnified and observed through the microscope 10, and the microscope 10 can form images and transmit the images to the display screen 7 through the data line, finally, the image analysis unit is used for carrying out image analysis processing on the image information, measuring the diameter, the length, the position and the interval of the needle points of the probe and the height of each needle point, namely whether the needle points are coplanar or not, so that a measurement result is formed, probe design parameters are prestored in the processing unit, the processing unit is used for receiving the measurement result of the image analysis unit and comparing the measurement result with the probe design parameters to form a comparison result, and the processing unit is used for displaying the measurement result of the image analysis unit and the comparison result formed by the measurement result together with the image information, so that an operator can visually see the probe measurement result.

The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. A novel probe card detection device is characterized in that: comprises a workbench (4), an adjusting mechanism (2) is movably arranged on the upper surface of the workbench (4), the surface of the adjusting mechanism (2) is fixedly provided with a fixing mechanism (8), the surface of the workbench (4) is fixedly provided with a fixing bracket (9) positioned at two sides of the adjusting mechanism (2), the fixed bracket (9) is fixedly provided with a mounting seat (6), the mounting seat (6) is fixedly provided with a microscope (10), the lower surface of the mounting seat (6) is fixedly provided with an illuminating lamp (1), the surface of the workbench (4) is fixedly provided with a control panel (3) at one side of the fixed bracket (9), a display screen (7) is fixedly arranged on the surface of the workbench (4) at the other side of the fixed bracket (9), the lower surface of the workbench (4) is provided with fixed support legs (5) at four corners.

2. The novel probe card inspection apparatus of claim 1, wherein: adjustment mechanism (2) include dust cover (201), mounting groove (202), regulation support (203) and bearing (204), workstation (4) surface is seted up in mounting groove (202), fixed mounting has bearing (204) in mounting groove (202), be located bearing (204) in mounting groove (202) and go up fixed mounting and have regulation support (203), it is equipped with dust cover (201) to adjust support (203) surface cover.

3. The novel probe card inspection apparatus of claim 2, wherein: the bearing (204) is fixedly connected with the workbench (4) through the mounting groove (202), and the adjusting support (203) is movably connected with the workbench (4) through the bearing (204).

4. The novel probe card inspection apparatus of claim 1, wherein: fixed establishment (8) include rubber suction cup (801), exhaust pipe (802), pipe valve (803) and connect base (804), connect base (804) fixed mounting in adjustment mechanism (2) upper surface, it has rubber suction cup (801) to connect base (804) fixed surface, fixed mounting has exhaust pipe (802) in connecting base (804), exhaust pipe (802) one end fixed mounting has pipe valve (803).

5. The novel probe card inspection apparatus of claim 4, wherein: the rubber suction cup (801) is fixedly connected with the adjusting mechanism (2) through a connecting base (804), the other end of the exhaust guide pipe (802) is fixedly installed on the rubber suction cup (801), and the rubber suction cup (801) is fixedly connected with the guide pipe valve (803) through the exhaust guide pipe (802).

6. The novel probe card inspection apparatus of claim 1, wherein: the workbench (4) is fixedly arranged on the ground through a fixing support leg (5), and the microscope (10) is fixedly connected with the fixing support (9) through a mounting seat (6).