CN211394620U

CN211394620U - Plate type PECVD equipment

Info

Publication number: CN211394620U
Application number: CN201921960557.4U
Authority: CN
Inventors: 陈金元
Original assignee: Ideal Energy Sunflower Vacuum Equipment Taixing Ltd
Current assignee: Ideal Energy Sunflower Vacuum Equipment Taixing Ltd
Priority date: 2019-11-13
Filing date: 2019-11-13
Publication date: 2020-09-01
Anticipated expiration: 2029-11-13

Abstract

The utility model discloses a plate-type PECVD equipment, include: the three process tables are continuously attached and arranged together from left to right; the two loading and unloading platforms are respectively attached to the outer sides of the two process platforms positioned on the outermost sides; the two connecting mechanisms are respectively and fixedly arranged on the right side wall surfaces of the front end and the rear end of the process platform and the right side wall surfaces of the front end and the rear end of the loading and unloading platform positioned on the left side of the process platform; and the two fixing mechanisms are respectively fixedly arranged on the left side wall surfaces at the front end and the rear end of the process platform and the left side wall surfaces at the front end and the rear end of the loading and unloading platform positioned on the right side of the process platform and correspond to the connecting mechanism. This board-like PECVD equipment can realize splicing the equipment to loading and unloading platform and technology platform to it is very convenient to its dismouting, and the transport of the porter of being convenient for, labour saving and time saving reduces porter's intensity of labour, satisfies porter's work demand, is favorable to extensively promoting.

Description

Plate type PECVD equipment

Technical Field

The utility model relates to a PECVD technical field specifically is a plate-type PECVD equipment.

Background

PECVD is a process of ionizing a gas containing atoms of a film component by means of microwave or radio frequency, etc. to locally form plasma, which is chemically very reactive and easily reacts to deposit a desired film on a substrate, and uses the activity of plasma to promote the reaction in order to allow the chemical reaction to proceed at a low temperature, and thus is called plasma enhanced chemical vapor deposition.

In current board-like PECVD equipment, mainly constitute by business turn over microscope carrier, loading and unloading platform and process platform usually, nevertheless current loading and unloading platform and process platform structure as an organic whole usually to longer, very troublesome inconvenient to its transport, waste time and energy, increase porter's intensity of labour, can't satisfy porter's work demand, be unfavorable for extensive popularization.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a plate-type PECVD equipment to at least, solve the problem that unloading platform and technology platform are the integral structure and are not convenient for transport in prior art.

In order to achieve the above object, the utility model provides a following technical scheme: a plate-type PECVD apparatus, comprising:

the three process tables are continuously attached and arranged together from left to right;

the two loading and unloading platforms are respectively attached to the outer sides of the two process platforms positioned on the outermost sides;

the two connecting mechanisms are respectively and fixedly arranged on the right side wall surfaces of the front end and the rear end of the process platform and the right side wall surfaces of the front end and the rear end of the loading and unloading platform positioned on the left side of the process platform;

the two fixing mechanisms are respectively fixedly arranged on the left side wall surfaces at the front end and the rear end of the process platform and the left side wall surfaces at the front end and the rear end of the loading and unloading platform positioned on the right side of the process platform and correspond to the connecting mechanism;

still include connecting block, second inserted bar and a spill section of thick bamboo, two the right side wall at both ends around the technology platform and the right side wall that is located the left loading and unloading platform of technology platform front and back both ends of connecting block difference fixed mounting, and the connecting block is located coupling mechanism's inboard, second inserted bar fixed mounting puts at the right side central point of connecting block, two a spill section of thick bamboo is fixed mounting left side wall at both ends around the technology platform respectively and is located the loading and unloading platform on technology platform right side and the corresponding position of connecting block at the left side wall at both ends around with, and a spill section of thick bamboo is located coupling mechanism's inboard.

Preferably, the right end of the second inserted bar extends to the inner cavity of the concave barrel.

Preferably, the connection mechanism includes: the two concave blocks are respectively and fixedly arranged on the right side wall surfaces of the front end and the rear end of the process platform and the right side wall surfaces of the front end and the rear end of the loading and unloading platform positioned on the left side of the process platform; the upper end and the lower end of the rotating rod are installed together with the center positions of the upper end and the lower end of the inner cavity of the concave block through bearings, an inner ring of each bearing is in interference fit with the rotating rod, and an outer ring of each bearing is fixedly connected with the concave block; the left end of the connecting rod is in interference fit with the outer wall of the rotating rod, and a concave block extends out of the right end of the connecting rod; the through hole is formed in the middle of the top end of the connecting rod in the vertical direction; and the round handle is fixedly arranged at the right end of the connecting rod.

Preferably, the fixing mechanism includes: the two hollow blocks are respectively and fixedly arranged on the left side wall surfaces of the front end and the rear end of the process platform and the left side wall surfaces of the front end and the rear end of the loading and unloading platform positioned on the right side of the process platform and correspond to the connecting mechanism; the through hole is formed in the bottom end of the front side of the hollow block in the left-right direction; the slot is formed in the center of the bottom end of the inner cavity of the through opening; the first inserted bar is inserted into the inner cavity of the hollow block along the vertical direction, the hollow block extends out of the top end of the first inserted bar, and the bottom end of the first inserted bar penetrates through the through hole and extends to the inner cavity of the slot; the sleeve plate is in interference fit with the bottom end of the outer wall of the first inserted bar in the cavity of the hollow block; the spring is sleeved on the outer wall of the first inserted link positioned in the cavity of the hollow block, and the upper end and the lower end of the spring are respectively fixedly connected with the hollow block and the sleeve plate; the handle, handle fixed mounting is at the top of first inserted bar.

Preferably, the periphery of the outer wall of the sleeve plate is mutually attached to the inner wall of the hollow block.

Preferably, the bottom end of the first inserted bar penetrates through the through opening and extends to the length of the inner cavity of the slot, and the length of the bottom end of the first inserted bar is smaller than the distance between the top end of the sleeve plate and the top end of the inner cavity of the hollow block.

Preferably, the right end of connecting rod extends out concave block and opening in proper order, the bottom of first inserted bar runs through opening and through-hole in proper order and extends to the inner chamber of slot.

Compared with the prior art, the beneficial effects of the utility model are that: the plate type PECVD equipment can make the first insert rod move upwards to be completely separated from the inner cavities of the through hole and the slot by pulling the handle upwards, can drive the connecting rod to rotate to be separated from the inner cavity of the through hole or drive a part of the connecting rod to rotate to the inner cavity of the through hole by rotating the round handle, can be convenient to disassemble the loading and unloading platform and the three process platforms when the connecting rod rotates to be separated from the inner cavity of the through hole so as to be convenient to carry the loading and unloading platform, can make the handle loosened when a part of the connecting rod rotates to the inner cavity of the through hole, can drive the first insert rod to move downwards to reset through the elastic force of the spring, makes the first insert rod move downwards to penetrate through the through hole and extend to the inner cavity of the slot, and locks and fixes the loading and unloading platform and the three process platforms together, thereby realizing the splicing and assembling of the loading and unloading platform and the process platforms, being very convenient, time and labor are saved, the labor intensity of the carrying personnel is reduced, the working requirements of the carrying personnel are met, and the device is favorable for wide popularization.

Drawings

Fig. 1 is a schematic view of the structure of the present invention;

FIG. 2 is a schematic sectional view of the concave block and the hollow block of FIG. 1;

fig. 3 is a schematic sectional view of the connecting block and the concave cylinder in fig. 1 according to the present invention.

In the figure: 1. the technical scheme includes that the technical table comprises a technical table body, 2, an assembling and disassembling table, 3, a concave block, 4, a rotating rod, 5, a connecting rod, 6, a through hole, 7, a round handle, 8, a hollow block, 9, a through hole, 10, a slot, 11, a first inserting rod, 12, a sleeve plate, 13, a spring, 14, a handle, 15, a connecting block, 16, a second inserting rod, 17 and a concave cylinder.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-3, the present invention provides a technical solution: a plate-type PECVD apparatus, comprising: the three technological platforms 1 are continuously attached and arranged together from left to right; the two loading and unloading platforms 2 are respectively attached to the outer sides of the two technological platforms 1 positioned on the outermost sides; the two connecting mechanisms are respectively and fixedly arranged on the right side wall surfaces of the front end and the rear end of the process platform 1 and the right side wall surfaces of the front end and the rear end of the loading and unloading platform 2 positioned on the left side of the process platform 1; the two fixing mechanisms are respectively and fixedly arranged on the left side wall surfaces of the front end and the rear end of the process platform 1 and the left side wall surfaces of the front end and the rear end of the loading and unloading platform 2 positioned on the right side of the process platform 1 and correspond to the connecting mechanisms; two connecting blocks 15 are respectively fixedly arranged on the right side wall surfaces of the front end and the rear end of the process platform 1 and the right side wall surfaces of the front end and the rear end of the loading and unloading platform 2 on the left side of the process platform 1, the connecting blocks 15 are positioned on the inner side of the connecting mechanism, a second inserting rod 16 is fixedly arranged on the right center position of the connecting blocks 15, two concave cylinders 17 are respectively fixedly arranged on the left side wall surfaces of the front end and the rear end of the process platform 1 and the left side wall surfaces of the front end and the rear end of the loading and unloading platform 2 on the right side of the process platform 1 and correspond to the connecting blocks 15, the concave cylinders 17 are positioned on the inner side of the fixing mechanism, and the loading and unloading platform.

Preferably, the right end of the second inserting rod 16 extends to the inner cavity of the concave cylinder 17, and the assembling and disassembling platform 2 and the technological platform 1 can be conveniently butted together through the matching of the second inserting rod 16 and the concave cylinder 17.

Preferably, the connection mechanism further includes: the two concave blocks 3 are respectively and fixedly arranged on the right side wall surfaces of the front end and the rear end of the technological table 1 and the right side wall surfaces of the front end and the rear end of the loading and unloading platform 2 on the left side of the technological table 1; the upper end and the lower end of the rotating rod 4 are installed together with the center positions of the upper end and the lower end of the inner cavity of the concave block 3 through bearings, the inner ring of each bearing is in interference fit with the rotating rod 4, and the outer ring of each bearing is fixedly connected with the concave block 3; the left end of the connecting rod 5 is in interference fit with the outer wall of the rotating rod 4, the right end of the connecting rod 5 extends out of the concave block 3, the rotating rod 4 and the connecting rod 5 can be conveniently rotated through the matching of the rotating rod 4 and the concave block 3, and the connecting rod 5 can be conveniently connected with the fixing mechanism; the through hole 6 is arranged in the middle of the top end of the connecting rod 5 along the vertical direction; the round handle 7 is fixedly arranged at the right end of the connecting rod 5.

Preferably, the fixing mechanism further includes: the two hollow blocks 8 are respectively fixedly arranged on the left side wall surfaces of the front end and the rear end of the process platform 1 and the left side wall surfaces of the front end and the rear end of the loading and unloading platform 2 on the right side of the process platform 1 and correspond to the connecting mechanism; the through hole 9 is arranged at the bottom end of the front side of the hollow block 8 along the left-right direction; the slot 10 is arranged at the center of the bottom end of the inner cavity of the through opening 9; the first inserted bar 11 is inserted into the inner cavity of the hollow block 8 in the up-down direction, the hollow block 8 extends from the top end of the first inserted bar 11, the bottom end of the first inserted bar 11 penetrates through the through hole 9 and extends to the inner cavity of the slot 10, and the connecting rod 5 can be conveniently locked and fixed in the inner cavity of the through hole 9 through the first inserted bar 11; the sleeve plate 12 is in interference fit with the bottom end of the outer wall of the first inserted bar 11 positioned in the inner cavity of the hollow block 8; the spring 13 is sleeved on the outer wall of the first inserted link 11 positioned in the inner cavity of the hollow block 8, the upper end and the lower end of the spring 13 are fixedly connected with the hollow block 8 and the sleeve plate 12 respectively, the spring 13 can be conveniently extruded through the sleeve plate 12, the sleeve plate 12 and the first inserted link 11 can be conveniently driven to move downwards to reset through the spring 13, the elastic coefficient of the spring 13 is a compression spring with the elasticity coefficient of 18N/CM, the spring 13 generates elastic deformation after being stretched or extruded, and the spring is recovered to the initial state after external force is removed; the handle 14 is fixedly installed at the top end of the first inserting rod 11, and the first inserting rod 11 can be conveniently driven to move through the handle.

Preferably, the periphery of the outer wall of the sleeve plate 12 is attached to the inner wall of the hollow block 8, so that the sleeve plate 12 is limited, and the sleeve plate 12 can move more stably.

Preferably, the bottom end of the first plunger 11 penetrates through the through opening 9 and extends into the cavity of the slot 10 for a length less than the distance between the top end of the sleeve plate 12 and the top end of the cavity of the hollow block 8, so as to ensure that the first plunger 11 can be completely separated from the cavity of the through opening 9.

As preferred scheme, further, concave block 3 and opening 9 extend out in proper order to the right-hand member of connecting rod 5, and the bottom of first inserted bar 11 runs through opening 9 and through-hole 6 in proper order and extends to the inner chamber of slot 10, and through the cooperation of connecting rod 5 with first inserted bar 11, can be convenient for lock fixed connection together between connecting rod 5 and the hollow block 8.

The detailed connection means is a technique known in the art, and the following mainly describes the working principle and process, and the specific operation is as follows.

When the loading and unloading platform 2 and the technological platform 1 need to be carried, the handle 14 is pulled upwards, the handle 14 drives the first inserted bar 11 and the sleeve plate 12 to move upwards, the sleeve plate 12 extrudes the spring 13, when the first inserted bar 11 moves upwards and is completely separated from the inner cavity of the through hole 6 and the slot 10, the round handle 7 is rotated towards the front side, the round handle 7 drives the connecting rod 5 and the rotating rod 4 to rotate towards the front side, the connecting rod 5 is rotated out from the inner cavity of the through hole 9, the loading and unloading platform 2 and the three technological platforms 1 can be detached so as to be carried conveniently, when the loading and unloading platform 2 and the three technological platforms 1 need to be assembled together again, the loading and unloading platform 2 and the three technological platforms 1 are jointed together in a mutually fit manner, the second inserted bar 16 is inserted into the inner cavity of the concave barrel 17 at the adjacent position, the loading and unloading platform 2 and the three technological platforms 1 can be preliminarily jointed together mutually, and the handle 14 is pulled upwards, the first inserting rod 11 is enabled to move upwards, when the first inserting rod 11 moves upwards and is completely separated from the inner cavity of the through hole 9, the round handle 7 is rotated towards the rear side, the round handle 7 drives the connecting rod 5 to rotate towards the rear side, a part of the connecting rod 5 is enabled to rotate to the inner cavity of the through hole 9, the handle 14 is loosened, the sleeve plate 12 and the first inserting rod 11 can be driven to move downwards under the elastic action of the spring 13 to reset, the first inserting rod 11 moves downwards to penetrate through the inner cavity of the through hole 6 and extend to the slot 10, the connecting rod 5 and the hollow block 8 are locked and fixed together through the first inserting rod 11, the loading and unloading platform 2 and the three process platforms 1 are mutually locked and fixed together, the device is compact in structure and reasonable in design, the loading and unloading platform and the process platforms can be spliced and assembled, the device is very convenient to disassemble and assemble, and is convenient to carry a carrier, and meets the working requirements of the carrier.

In the description of the present invention, it is to be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "other end", "upper", "one side", "top", "inner", "front", "center", "both ends", and the like, indicate orientations or positional relationships based on the orientations or positional relationships illustrated in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation; also, unless expressly stated or limited otherwise, the terms "snap," "interference fit," "snap," "set," "mount," and the like are to be construed broadly and include, for example, a fixed connection, a removable connection, or an integral part; can be mechanically or electrically connected; they may be directly connected or indirectly connected through an intermediate medium, and may be connected through the inside of two elements or in an interaction relationship between two elements, unless otherwise specifically defined, and the specific meaning of the above terms in the present invention will be understood by those skilled in the art according to specific situations.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A plate type PECVD equipment is characterized in that: the method comprises the following steps:

the three process tables (1) are continuously attached and arranged together from left to right;

the two loading and unloading platforms (2) are respectively attached to the outer sides of the two process platforms (1) positioned on the outermost sides;

the two connecting mechanisms are respectively fixedly arranged on the right side wall surfaces of the front end and the rear end of the process table (1) and the right side wall surfaces of the front end and the rear end of the loading and unloading platform (2) positioned on the left side of the process table (1);

the two fixing mechanisms are respectively fixedly arranged on the left side wall surfaces of the front end and the rear end of the process table (1) and the left side wall surfaces of the front end and the rear end of the loading and unloading platform (2) on the right side of the process table (1) and correspond to the connecting mechanism;

the novel process platform is characterized by further comprising connecting blocks (15), second inserting rods (16) and concave cylinders (17), wherein the connecting blocks (15) are fixedly arranged on the right side wall surfaces of the front end and the rear end of the process platform (1) and the right side wall surfaces of the front end and the rear end of the loading and unloading platform (2) on the left side of the process platform (1) respectively, the connecting blocks (15) are located on the inner side of the connecting mechanism, the second inserting rods (16) are fixedly arranged on the right side center of the connecting blocks (15), the concave cylinders (17) are fixedly arranged on the left side wall surfaces of the front end and the rear end of the process platform (1) and the left side wall surfaces of the front end and the rear end of the loading and unloading platform (2) on the right side of the process platform (1) respectively and.

2. A plate-type PECVD apparatus according to claim 1, characterized in that: the right end of the second inserted bar (16) extends to the inner cavity of the concave cylinder (17).

3. A plate-type PECVD apparatus according to claim 1, characterized in that: the connecting mechanism includes:

the two concave blocks (3) are respectively and fixedly arranged on the right side wall surfaces of the front end and the rear end of the process table (1) and the right side wall surfaces of the front end and the rear end of the loading and unloading platform (2) on the left side of the process table (1);

the upper end and the lower end of the rotating rod (4) are installed together with the center positions of the upper end and the lower end of the inner cavity of the concave block (3) through bearings, the inner ring of each bearing is in interference fit with the rotating rod (4), and the outer ring of each bearing is fixedly connected with the concave block (3);

the left end of the connecting rod (5) is in interference fit with the outer wall of the rotating rod (4), and the right end of the connecting rod (5) extends out of the concave block (3);

the through hole (6) is formed in the middle of the top end of the connecting rod (5) in the vertical direction, and the through hole (6) is formed in the middle of the top end of the connecting rod (5) in the vertical direction;

the round handle (7), round handle (7) fixed mounting is at the right-hand member of connecting rod (5).

4. A plate-type PECVD apparatus according to claim 1, characterized in that: the fixing mechanism includes:

the two hollow blocks (8) are respectively fixedly arranged on the left side wall surfaces of the front end and the rear end of the process platform (1) and the left side wall surfaces of the front end and the rear end of the loading and unloading platform (2) on the right side of the process platform (1) and correspond to the connecting mechanism;

the through opening (9), the through opening (9) is arranged at the bottom end of the front side of the hollow block (8) along the left-right direction;

the slot (10), the said slot (10) is set up in the centre position of bottom end of cavity of the port (9);

the first inserting rod (11) is inserted into the inner cavity of the hollow block (8) in the vertical direction, the hollow block (8) extends out of the top end of the first inserting rod (11), and the bottom end of the first inserting rod (11) penetrates through the through hole (9) and extends to the inner cavity of the inserting groove (10);

the sleeve plate (12) is in interference fit with the bottom end of the outer wall of the first inserted rod (11) in the inner cavity of the hollow block (8);

the spring (13) is sleeved on the outer wall of the first inserted link (11) positioned in the inner cavity of the hollow block (8), and the upper end and the lower end of the spring (13) are respectively fixedly connected with the hollow block (8) and the sleeve plate (12);

and the handle (14), the handle (14) is fixedly arranged at the top end of the first inserted bar (11).

5. A plate-type PECVD apparatus as in claim 4 wherein: the periphery of the outer wall of the sleeve plate (12) is mutually attached to the inner wall of the hollow block (8).

6. A plate-type PECVD apparatus as in claim 4 wherein: the bottom end of the first inserted bar (11) penetrates through the through hole (9) and extends to the length of the inner cavity of the slot (10) to be smaller than the distance between the top end of the sleeve plate (12) and the top end of the inner cavity of the hollow block (8).