CN211112212U

CN211112212U - Tubular PECVD's electrode mechanism

Info

Publication number: CN211112212U
Application number: CN201921963101.3U
Authority: CN
Inventors: 陈金元
Original assignee: Ideal Energy Sunflower Vacuum Equipment Taixing Ltd
Current assignee: Ideal Energy Sunflower Vacuum Equipment Taixing Ltd
Priority date: 2019-11-13
Filing date: 2019-11-13
Publication date: 2020-07-28
Anticipated expiration: 2029-11-13

Abstract

The utility model discloses a tubular PECVD's electrode mechanism, including the electrode guide arm, the left side of electrode guide arm is provided with the connecting pipe, the left side of connecting pipe is provided with first clamping mechanism, the right side of electrode guide arm is provided with the second connecting seat, first fixed establishment's bottom is provided with first base, the equal threaded connection in both ends has first bolt, second fixed establishment around the first base, the bottom of second fixed establishment is provided with the second base, the equal threaded connection in both ends has the second bolt around the second base. This tubular PECVD's electrode mechanism, the device can effectual person of facilitating the use carry out quick installation and dismantlement to the electrode guide arm, and easy operation is more convenient, and it is convenient to change it when the electrode guide arm damages, and convenience and practicality when having increased the electrode guide arm and using more accord with actual user demand.

Description

Tubular PECVD's electrode mechanism

Technical Field

The utility model relates to a solar cell technical field specifically is a tubular PECVD's electrode mechanism.

Background

PECVD: the method is characterized in that gas containing film component atoms is ionized by microwave or radio frequency and the like to form plasma locally, the plasma has strong chemical activity and is easy to react, a desired film is deposited on a substrate, and the activity of the plasma is utilized to promote the reaction in order to enable the chemical reaction to be carried out at a lower temperature, so the CVD is called Plasma Enhanced Chemical Vapor Deposition (PECVD);

with the development of the PECVD equipment technology, the capacity of a single tube is also getting larger, the diameter of a corresponding vacuum reaction tube is also getting larger, the size and the weight of a corresponding graphite boat are also getting larger, the local pressure on an electrode guide rod is also getting larger, so that the electrode guide rod is easy to damage and needs to be replaced, the fixing mode of the electrode guide rod is complicated, and the electrode guide rod is inconvenient to detach and replace, so that a tubular PECVD electrode mechanism needs to be developed to solve the problems.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a tubular PECVD's electrode mechanism can solve among the prior art inconvenient problem of dismantling the change to it when the electrode guide arm damages.

In order to achieve the above object, the utility model provides a following technical scheme: an electrode mechanism of a tubular PECVD (plasma enhanced chemical vapor deposition) device,

the electrode guide rod clamping device comprises an electrode guide rod, wherein a connecting pipe is arranged on the left side of the electrode guide rod, a first clamping mechanism is arranged on the left side of the connecting pipe, and a second connecting seat is arranged on the right side of the electrode guide rod;

the bottom end of the first fixing mechanism is provided with a first base, and the front end and the rear end of the first base are in threaded connection with first bolts;

the bottom of the second fixing mechanism is provided with a second base, and the front end and the rear end of the second base are in threaded connection with second bolts.

Preferably, the first clamping mechanism comprises a first connecting seat, inner walls of inner cavities at the front end and the rear end of the first connecting seat are provided with one end of a first spring, the other end of the first spring is provided with a first spring seat, and a clamping block is arranged on the outer side of the first spring seat.

Preferably, the lower end surface of the fixture block is designed to be an inclined plane.

Preferably, the first fixing mechanism comprises a first supporting seat, a slot is formed in the top end surface of the first supporting seat, and clamping holes are formed in the inner walls of the front end and the rear end of the inner cavity of the slot.

Preferably, the first connecting seat is located in an inner cavity of the slot.

Preferably, the second fixing mechanism comprises a second supporting seat, jacks communicated with the inner cavity are formed in the front side and the rear side of the top end surface of the second supporting seat, one end of a second spring is arranged on the inner wall of the front end and the rear end of the inner cavity of the second supporting seat, a second spring seat is arranged at the other end of the second spring, and a supporting block is arranged on the inner side of the second spring seat.

Preferably, the inner side surface of the supporting block is provided with a groove.

Compared with the prior art, the beneficial effects of the utility model are that: the tubular PECVD electrode mechanism prompts the fixture block to drive the first spring seat to move towards the inner cavity of the first connecting seat to extrude the first spring by applying external force to the inner side of the fixture block, when the fixture block moves out of the inner cavity of the clamping hole, the external force which is applied to the electrode guide rod and upwards is applied to the fixture block, so that the first connecting seat is convenient to drive the fixture block to move upwards and move out of the inner cavity of the slot, the fixture block is contacted with the supporting block by downwards moving the second connecting seat and pushes the supporting block to move outwards to extrude the second spring, when the second connecting seat moves to the inner side of the supporting block, the second spring seat and the supporting block are pushed to move inwards by elastic force which is restored to deform by the second spring, the second connecting seat is fixed by extruding the inner wall of the supporting block and the second supporting seat, the installation of the electrode guide rod is completed, the device can, when the electrode guide rod is damaged, the electrode guide rod is convenient to replace, the convenience and the practicability of the electrode guide rod during use are improved, and the practical use requirement is met.

Drawings

FIG. 1 is a schematic structural view of the present invention;

fig. 2 is a left side view of the first supporting base of the present invention;

fig. 3 is a right side view of the second supporting seat of the present invention.

In the figure: 1. electrode guide rod, 2, connecting pipe, 3, first clamping mechanism, 31, first connecting seat, 32, first spring, 33, first spring seat, 34, fixture block, 4, second connecting seat, 5, first fixed establishment, 51, first supporting seat, 52, slot, 53, the card hole, 6, first base, 7, first bolt, 8, second fixed establishment, 81, second supporting seat, 82, jack, 83, second spring, 84, second spring seat, 85, the supporting shoe, 9, second base, 10, second bolt.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-3, the present invention provides a technical solution: the utility model provides a tubular PECVD's electrode mechanism, including electrode guide arm 1, electrode guide arm 1's left side is provided with connecting pipe 2, the left side of connecting pipe 2 is provided with first clamping mechanism 3, electrode guide arm 1's right side is provided with second connecting seat 4, first fixed establishment 5's bottom is provided with first base 6, the equal threaded connection in both ends has first bolt 7 around first base 6, second fixed establishment 8, the bottom of second fixed establishment 8 is provided with second base 9, the equal threaded connection in both ends has second bolt 10 around second base 9.

Preferably, the first locking mechanism 3 includes a first connecting seat 31, inner walls of inner cavities of front and rear ends of the first connecting seat 31 are provided with one end of a first spring 32, the first spring 32 is a coil spring, an elastic coefficient is 20N/CM, the first spring 32 is elastically deformed after being stretched or extruded, and returns to an initial state after an external force is removed, the other end of the first spring 32 is provided with a first spring seat 33, an outer side of the first spring seat 33 is provided with a latch 34, the latch 34 is urged to drive the first spring seat 33 to move towards the inner cavity of the first connecting seat 31 to extrude the first spring 32 by the external force applied to an inner side of the latch 34, and when the latch 34 moves out of the inner cavity of the latch hole 53, the external force applied to the electrode guide rod 1 is applied upwards, so that the first connecting seat 31 drives the latch 34 to move upwards and move out of the inner cavity of the slot 52.

Preferably, the lower end surface of the latch 34 is designed to be an inclined surface, the electrode guide rod 1 drives the first connecting seat 31 to move downward, and when the first connecting seat 31 moves into the inner cavity of the slot 52, the first spring seat 33 and the latch 34 are pushed to move outward into the inner cavity of the latch hole 53 by the elastic force of the first spring 32 recovering deformation, so that the first connecting seat 31 is fixed in the inner cavity of the slot 52.

As a preferred scheme, further, the first fixing mechanism 5 includes a first supporting seat 51, a slot 52 is formed in a top end surface of the first supporting seat 51, clamping holes 53 are formed in inner walls of front and rear ends of an inner cavity of the slot 52, the electrode guide rod 1 drives the connecting pipe 2 and the first connecting seat 31 to move towards the inner cavity of the slot 52, the first spring seat 33 and the clamping block 34 are pushed to move towards the outside by restoring the deformed elastic force of the first spring 32, the inner cavity of the clamping hole 53 is moved into, and the left side of the electrode guide rod 1 is fixed on the first supporting seat 51.

Preferably, the first connecting seat 31 is located in the inner cavity of the inserting groove 52, and the external force applied to the latch 34 to the inner side causes the latch 34 to drive the first spring seat 33 to move towards the inner cavity of the first connecting seat 31 to press the first spring 32, so as to facilitate the movement of the latch 34 out of the inner cavity of the latching hole 53.

As a preferable scheme, further, the second fixing mechanism 8 includes a second supporting seat 81, the front and rear sides of the top surface of the second supporting seat 81 are both provided with insertion holes 82 communicated with the inner cavity, the inner walls of the front and rear ends of the inner cavity of the second supporting seat 81 are both provided with one end of a second spring 83, the second spring 83 is a coil spring, the elastic coefficient is 19N/CM, the second spring 83 is elastically deformed after being stretched or extruded, and is restored to the initial state after external force is removed, the other end of the second spring 83 is provided with a second spring seat 84, the inner side of the second spring seat 84 is provided with a supporting block 85, the second spring seat 4 is pulled to move upwards to contact with the supporting block 85, the supporting block 85 is pushed to drive the second spring seat 84 to move outwards to extrude the second spring 83, the electrode 1 drives the second connecting seat 4 to move out of the inner cavity, thereby realizing the detachment of the right side of the electrode lead 1.

Preferably, a groove is formed in an inner side surface of the support block 85, the second connection holder 4 moves downward to contact the support block 85 and push the support block 85 to move outward to press the second spring 83, when the second connection holder 4 moves to the inner side of the support block 85, the second spring holder 84 and the support block 85 are pushed to move inward by the elastic force of the second spring 83 restoring deformation, the second connection holder 4 is fixed by the inner wall of the support block 85 and the inner wall of the second support holder 81, and the electrode lead 1 is mounted.

The detailed connection means is a technique known in the art, and the following mainly describes the working principle and process, and the specific operation is as follows.

When the electrode lead bar is used, an inward external force is applied to the fixture block 34 to cause the fixture block 34 to drive the first spring seat 33 to move towards the inner cavity of the first connecting seat 31 to extrude the first spring 32, after the fixture block 34 moves out of the inner cavity of the fixture hole 53, an upward external force is applied to the electrode lead bar 1 to cause the electrode lead bar 1 to drive the first connecting seat 31 and the second connecting seat 4 to move upwards through the connecting tube 2, the first connecting seat 31 drives the fixture block 34 to move upwards and out of the inner cavity of the slot 52, the second connecting seat 4 moves upwards to be in contact with the supporting block 85, the supporting block 85 is pushed to drive the second spring seat 84 to move outwards to extrude the second spring 83, the second spring 83 is deformed under force to tighten the reverse thrust of the second spring seat 84 and the supporting block 85, the electrode lead bar 1 drives the second connecting seat 4 to move out of the inner cavity of the second supporting seat 81 through the insertion hole 82, so as to realize the disassembly of the electrode lead bar 1, the electrode, the lower end surface of the latch 34 contacts the inner wall of the slot 52 and presses the latch 34 to drive the first spring seat 33 to move towards the inner cavity of the first connection seat 31 to press the first spring 32, when the first connection seat 31 moves into the inner cavity of the slot 52, the first spring seat 33 and the latch 34 are pushed to move outwards by the elastic force of the first spring 32 restoring deformation and move into the inner cavity of the latch hole 53 to fix the first connection seat 31 in the inner cavity of the slot 52, the second connection seat 4 moves downwards to contact the supporting block 85 and push the supporting block 85 to move outwards to press the second spring 83, when the second connection seat 4 moves to the inner side of the supporting block 85, the second spring seat 84 and the supporting block 85 are pushed to move inwards by the elastic force of the second spring 83 restoring deformation, the supporting block 85 presses the inner wall of the second connection seat 81 to fix the second connection seat 4, and the installation of the electrode guide rod 1 is completed, the device simple structure, operation convenient to use can effectual person of facilitating the use carry out quick installation and dismantlement to the electrode guide arm, convenience and practicality when having increased the electrode guide arm use more accord with actual user demand.

In the description of the present invention, it is to be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "other end", "upper", "one side", "top", "inner", "front", "center", "both ends", and the like, indicate orientations or positional relationships based on the orientations or positional relationships illustrated in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation; also, unless expressly stated or limited otherwise, the terms "disposed," "coupled," "plugged," "welded," "clamped," and the like are to be construed broadly, e.g., as meaning a fixed connection, a removable connection, or an integral part; can be mechanically or electrically connected; they may be directly connected or indirectly connected through an intermediate medium, and may be connected through the inside of two elements or in an interaction relationship between two elements, unless otherwise specifically defined, and the specific meaning of the above terms in the present invention will be understood by those skilled in the art according to specific situations.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A tubular PECVD electrode mechanism is characterized in that:

the electrode guide rod comprises an electrode guide rod (1), wherein a connecting pipe (2) is arranged on the left side of the electrode guide rod (1), a first clamping mechanism (3) is arranged on the left side of the connecting pipe (2), and a second connecting seat (4) is arranged on the right side of the electrode guide rod (1);

the device comprises a first fixing mechanism (5), wherein a first base (6) is arranged at the bottom end of the first fixing mechanism (5), and first bolts (7) are in threaded connection with the front end and the rear end of the first base (6);

the bottom end of the second fixing mechanism (8) is provided with a second base (9), and the front end and the rear end of the second base (9) are in threaded connection with a second bolt (10).

2. The electrode mechanism for tubular PECVD as recited in claim 1, further comprising: first clamping mechanism (3) include first connecting seat (31), both ends inner chamber inner wall all is provided with the one end of first spring (32) around first connecting seat (31), the other end of first spring (32) is provided with first spring holder (33), the outside of first spring holder (33) is provided with fixture block (34).

3. The electrode mechanism for tubular PECVD as recited in claim 2, further comprising: the lower end surface of the clamping block (34) is designed to be an inclined plane.

4. The electrode mechanism for tubular PECVD as recited in claim 1, further comprising: first fixed establishment (5) include first supporting seat (51), slot (52) have been seted up on the top surface of first supporting seat (51), card hole (53) have all been seted up to the inner wall at both ends around the inner chamber of slot (52).

5. The electrode mechanism for tubular PECVD as recited in claim 2, further comprising: the first connecting seat (31) is positioned in the inner cavity of the slot (52).

6. The electrode mechanism for tubular PECVD as recited in claim 1, further comprising: the second fixing mechanism (8) comprises a second supporting seat (81), jacks (82) communicated with the inner cavity are formed in the front side and the rear side of the surface of the top end of the second supporting seat (81), one end of a second spring (83) is arranged on the inner walls of the front end and the rear end of the inner cavity of the second supporting seat (81), a second spring seat (84) is arranged at the other end of the second spring (83), and a supporting block (85) is arranged on the inner side of the second spring seat (84).

7. The electrode mechanism for tubular PECVD as recited in claim 6, further comprising: the inner side surface of the supporting block (85) is provided with a groove.