CN211390143U

CN211390143U - Counterpoint sealing device and vacuum laminating equipment

Info

Publication number: CN211390143U
Application number: CN201922293289.1U
Authority: CN
Inventors: 杨美高
Original assignee: Shenzhen Baling Union Equipment Co ltd
Current assignee: Shenzhen Baling Union Equipment Co ltd
Priority date: 2019-12-19
Filing date: 2019-12-19
Publication date: 2020-09-01
Anticipated expiration: 2029-12-19

Abstract

The utility model discloses a counterpoint sealing device and vacuum laminating equipment relates to automatic laminating equipment technical field. The alignment sealing device comprises an alignment platform and a vacuum assembly, wherein the vacuum assembly comprises a jig base plate and a vacuum cavity, a workpiece can be placed on the jig base plate, and the vacuum cavity is arranged on the outer side of the jig base plate so as to coat the jig base plate; the upper part of the supporting component penetrates through the vacuum cavity and is connected to the jig bottom plate, and the other end of the supporting component is connected to the alignment platform; the corrugated pipe is sleeved on the outer side of the supporting part, and the first end of the corrugated pipe is hermetically connected with one of the alignment platform and the vacuum cavity; the drive assembly, drive assembly's output and the second end of bellows are connected, and drive assembly can drive the bellows flexible to realize that the second end of bellows and another butt in counterpoint platform and the vacuum chamber or break away from. The problem of bellows production torsion when having overcome the angle counterpoint, improved counterpoint precision and laminating effect.

Description

Counterpoint sealing device and vacuum laminating equipment

Technical Field

The utility model relates to an automatic laminating equipment technique especially relates to a counterpoint sealing device and vacuum laminating equipment.

Background

The vacuum laminating equipment is industrial automation equipment controlled by a PLC or a single chip microcomputer, can be used for coating a film on the surface of a workpiece, and has the laminating principle that the surface of the workpiece is placed in a vacuum cavity in a vacuum environment, the positions of the workpiece and an inner mold of the vacuum cavity are adjusted by utilizing an alignment sealing device, the inner mold of the vacuum cavity is lowered by the pressure of a cylinder of a machine, and the surface film placed on a lower mold of the vacuum cavity and the workpiece are completely laminated.

The existing alignment sealing device comprises a vacuum cavity, an alignment platform and a corrugated pipe connected with the components, and the corrugated pipe is directly connected with the vacuum cavity in a sealing manner so as to ensure the vacuum sealing environment inside the vacuum cavity. However, when the alignment platform adjusts the processing position of the workpiece, the alignment platform and the vacuum chamber rotate relatively when performing angle alignment, and then torque is generated in the bellows, which affects alignment accuracy and bonding effect.

Therefore, it is an urgent need to solve the above-mentioned problems by those skilled in the art to improve the existing alignment sealing device and vacuum bonding apparatus.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a counterpoint sealing device, the bellows produces the problem of torsion when can overcoming the angle counterpoint, improves counterpoint precision and laminating effect.

To achieve the purpose, the utility model adopts the following technical proposal:

an alignment sealing device, includes the alignment platform, still includes:

the vacuum assembly comprises a jig base plate and a vacuum cavity, a workpiece can be placed on the jig base plate, and the vacuum cavity is arranged on the outer side of the jig base plate so as to coat the jig base plate;

one end of the supporting component penetrates through the vacuum cavity and is connected to the jig bottom plate, and the other end of the supporting component is connected to the alignment platform;

the corrugated pipe is sleeved on the outer side of the supporting part, and the first end of the corrugated pipe is hermetically connected with one of the alignment platform and the vacuum cavity;

the output end of the driving assembly is connected with the second end of the corrugated pipe, and the driving assembly can drive the corrugated pipe to stretch out and draw back so as to realize that the second end of the corrugated pipe is abutted against or separated from the alignment platform and the other one of the vacuum cavities.

Optionally, the drive assembly comprises:

the clamping plate is clamped with the flange of the second end of the corrugated pipe;

and the driving part is arranged on the alignment platform and can drive the clamping plate to move along the vertical direction.

Optionally, the alignment sealing device further includes:

a guide assembly capable of guiding the card to move in a vertical direction.

Optionally, the guide assembly comprises:

the supporting plate is fixedly connected with the lower surface of the clamping plate;

the guide component is fixedly connected with the alignment platform, and the supporting plate is connected to the guide component in a sliding mode along the vertical direction.

Optionally, the alignment sealing device includes a plurality of supporting members and the bellows, one bellows is sleeved outside each supporting member, and the driving assembly can drive the plurality of bellows to extend and retract.

Optionally, the drive assembly comprises a plurality of clamping plates, each clamping plate clamping at most two of the bellows.

Optionally, the alignment stage is a UVW alignment stage.

Optionally, the vacuum cavity is provided with a through hole, the supporting component penetrates through the through hole and is fixedly connected with the jig bottom plate, and the through hole is coated by the projection of the upper end flange of the corrugated pipe along the vertical direction.

Optionally, the alignment sealing device further comprises an outer support, the outer support is sleeved outside the alignment platform, and the upper end of the outer support is fixedly connected with the lower end of the vacuum cavity.

Another object of the utility model is to provide a vacuum laminating equipment, the bellows produces the problem of torsion when can overcoming the angle counterpoint, improves counterpoint precision and laminating effect.

a vacuum laminating device comprises the alignment sealing device.

The utility model has the advantages that:

the utility model provides a pair of counterpoint sealing device and vacuum laminating equipment, including counterpoint platform, vacuum subassembly, support part and cup joint the bellows in the support part outside, the vacuum subassembly includes tool bottom plate and vacuum cavity, can place the work piece on the tool bottom plate, the vacuum cavity sets up in the tool bottom plate outside to cladding tool bottom plate; one end of the supporting component penetrates through the vacuum cavity and is connected with the jig bottom plate, and the other end of the supporting component is connected with the alignment platform; the bellows is sleeved outside the supporting part, and the first end of the bellows is in sealing connection with one of the alignment platform and the vacuum cavity. The alignment sealing device further comprises a driving assembly, the output end of the driving assembly is connected with the second end of the corrugated pipe, and the driving assembly can drive the corrugated pipe to stretch and retract so as to enable the second end of the corrugated pipe to be abutted or separated from the alignment platform and the other end of the vacuum cavity. When counterpoint platform adjustment tool bottom plate position, drive assembly drives the bellows and withdraws for the bellows breaks away from with counterpoint platform or vacuum cavity, and the bellows produces torsion and influences the counterpoint precision when avoiding the angle counterpoint, and after counterpoint the platform is accomplished to the counterpoint, drive assembly drives the bellows extension, makes the bellows connect counterpoint platform and vacuum cavity, in order to realize counterpoint sealing device's sealed. Through the separation design with the bellows, the bellows produces the problem of torsion when having avoided counterpointing, improves counterpoint precision and laminating effect.

Drawings

Fig. 1 is a schematic structural diagram of an alignment sealing device according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of an alignment sealing device including an external bracket according to an embodiment of the present invention;

fig. 3 is a schematic structural view of another angle of the alignment sealing device according to the embodiment of the present invention;

fig. 4 is a front view of the alignment sealing device according to the embodiment of the present invention;

fig. 5 is a side view of the alignment sealing device according to the embodiment of the present invention.

In the figure:

1. aligning the platform; 2. a vacuum assembly; 3. a support member; 4. a bellows; 5. a drive assembly; 6. a guide assembly; 7. an outer support;

21. a jig base plate; 22. a vacuum chamber; 51. clamping a plate; 52. a drive member; 61. a support plate; 62. a guide member;

221. and a through hole.

Detailed Description

In order to make the technical problem solved by the present invention, the technical solution adopted by the present invention and the technical effect achieved by the present invention clearer, the technical solution of the present invention will be further explained by combining the drawings and by means of the specific implementation manner.

In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, detachably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "right", etc. are used in an orientation or positional relationship based on that shown in the drawings only for convenience of description and simplicity of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to have a special meaning.

The technical solution of the present invention is further explained by the following embodiments with reference to the accompanying drawings.

The embodiment provides a vacuum laminating equipment, vacuum laminating equipment includes control system and vacuum cavity subassembly, through arranging the work piece surface in vacuum cavity subassembly of vacuum environment, by the interior mould position of control system control vacuum cavity subassembly adjustment work piece and vacuum cavity subassembly for the projection coincidence of work piece position and interior mould position, the interior mould of control system control vacuum cavity subassembly descends, will put the surface film of putting in vacuum cavity subassembly lower mould and the work piece is in the same place with seamless mode is completely laminated, realize the surface coating of work piece.

Specifically, the vacuum chamber assembly includes a registration seal to effect adjustment of the position of the workpiece. As shown in fig. 1, the existing alignment sealing device includes a vacuum assembly 2, an alignment platform 1, and a bellows 4 connecting the vacuum assembly 2 and the alignment platform 1, wherein the bellows 4 is integrally connected with the alignment platform 1 and the vacuum assembly 2 to achieve vacuum sealing. However, when adjusting the position of the workpiece through the alignment platform 1, the angular direction adjustment of the workpiece is usually involved, and when performing the angular alignment of the workpiece, the alignment platform 1 and the vacuum assembly 2 will rotate relatively, so the bellows 4 connected to the alignment platform 1 and the vacuum assembly 2 in a sealing manner will generate a torque force, which will hinder the alignment adjustment of the workpiece, and affect the alignment accuracy and the bonding effect.

In order to solve the above problem, the present embodiment provides an alignment sealing device, as shown in fig. 1 to 5, the alignment sealing device includes an alignment platform 1, a vacuum assembly 2, a supporting member 3 and a bellows 4, one end of the supporting member 3 is connected to the vacuum assembly 2, and the other end is connected to the alignment platform 1, so as to connect the alignment platform 1 and the vacuum assembly 2. The bellows 4 is sleeved outside the support part 3, and a first end of the bellows 4 is hermetically connected with one of the alignment platform 1 and the vacuum assembly 2. The alignment sealing device further comprises a driving assembly 5, the output end of the driving assembly 5 is connected with the second end of the corrugated pipe 4, and the driving assembly 5 can drive the corrugated pipe 4 to stretch and retract so as to enable the second end of the corrugated pipe 4 to be abutted to or separated from the other of the second end and the corrugated pipe. Through the disconnect-type design of bellows 4, vacuum assembly 2 and counterpoint platform 1 relative rotation cause the bellows 4 to twist reverse and influence the counterpoint effect when having avoided counterpointing, and bellows 4 joinable counterpoint platform 1 and vacuum assembly 2 after counterpointing simultaneously to realize counterpointing sealing device's vacuum seal.

In this embodiment, as shown in fig. 1, the alignment sealing device is configured as an installation manner in which the first end of the bellows 4 is connected to the alignment platform 1 in a sealing manner, and the second end of the bellows 4 is connected to or separated from the vacuum assembly 2 through the driving assembly 5, and compared with an installation manner in which the first end of the bellows 4 is connected to the vacuum assembly 2 in a sealing manner, and the second end of the bellows 4 is connected to or separated from the alignment platform 1 through the driving assembly 5, the arrangement manner of this manner is simpler and conforms to the usage habit. Therefore, for convenience of description, the first end of the bellows 4 of the present embodiment is hereinafter referred to as the lower end of the bellows 4, and the second end of the bellows 4 is referred to as the upper end of the bellows 4.

Preferably, as shown in fig. 1, the alignment and sealing device includes a plurality of supporting members 3 and bellows 4, one bellows 4 is sleeved outside each supporting member 3, and the driving assembly 5 can drive the plurality of bellows 4 to extend and retract. Through setting up a plurality of supporting component 3 and connecting vacuum assembly 2 and counterpoint platform 1, its holding power distributes more evenly, also is convenient for simultaneously carry out counterpoint platform 1 through a plurality of supporting component 3 and is connected with vacuum assembly 2's correspondence to realize the adjustment of work piece position in the vacuum assembly 2. In this embodiment, counterpoint sealing device is provided with four supporting component 3 and bellows 4, and four supporting component 3 and bellows 4 set up respectively in counterpoint platform 1's corner position, are more convenient for carry out the adjustment of work piece position through counterpoint platform 1, and supporting component 3's symmetric distribution simultaneously for vacuum assembly 2's atress is more even, has improved the counterpoint effect. Wherein the support member 3 may be provided as a support bar.

Optionally, the bellows 4 is a disc-type bellows, the disc-type bellows is a tubular elastic sensitive element formed by connecting foldable corrugated sheets along a folding and stretching direction, an opening end of the disc-type bellows is fixed, a sealing end of the disc-type bellows is in a free state, an auxiliary helical spring is used for increasing elasticity, and the disc-type bellows can extend along the length direction of the tube under the action of pressure during operation and is suitable for sealing connection of vacuum laminating equipment.

In order to realize the separation of the vacuum assembly 2 from the bellows 4 during the alignment, in this embodiment, as shown in fig. 2, the alignment sealing device further includes an outer support 7, the outer support 7 is sleeved outside the alignment platform 1, and an upper end of the outer support 7 is fixedly connected to a lower end of the vacuum assembly 2. When the driving component 5 drives the corrugated pipe 4 to retract, the upper end of the outer support 7 is abutted to the vacuum component 2, so that the corrugated pipe 4 is separated from the vacuum component 2, the corrugated pipe 4 is prevented from generating torsion due to connection with the vacuum component 2 during angle alignment, and the alignment precision is improved.

In this embodiment, as shown in fig. 1-2, the vacuum assembly 2 includes a jig base plate 21, a workpiece can be placed on the jig base plate 21, the vacuum assembly 2 further includes a vacuum cavity 22, the vacuum cavity 22 is disposed outside the jig base plate 21 to cover the jig base plate 21, so as to ensure that the jig base plate 21 can be in a vacuum environment, and the vacuum cavity 22 can be abutted to or separated from the bellows 4. The workflow of the drive assembly 5 is therefore: when a workpiece is placed on the jig bottom plate 21, the driving assembly 5 drives the corrugated pipe 4 to retract, so that the corrugated pipe 4 is separated from the vacuum cavity 22, and the alignment platform 1 adjusts the position of the jig bottom plate 21; after the alignment platform 1 completes alignment, the driving assembly 5 drives the bellows 4 to extend, so that the upper end flange of the bellows 4 abuts against the vacuum cavity 22, thereby realizing vacuum sealing of the alignment sealing device.

Specifically, the alignment platform 1 is connected to the jig base plate 21 through the supporting member 3, and when a workpiece is placed on the jig base plate 21, the position of the jig base plate 21 can be adjusted through the alignment platform 1, so as to adjust the position of the workpiece. The lower end of the vacuum cavity 22 is abutted with the upper end of the outer support 7, and when the driving assembly 5 drives the corrugated pipe 4 to stretch, the corrugated pipe 4 can be abutted with and separated from the vacuum cavity 22.

In order to realize the connection between the supporting member 3 and the jig base plate 21, as shown in fig. 1-3, the vacuum chamber 22 is provided with a through hole 221, the supporting member 3 is fixedly connected to the jig base plate 21 by penetrating the through hole 221, and the through hole 221 is covered by the projection of the upper end flange of the corrugated tube 4 along the vertical direction. On the one hand, the connection between the supporting component 3 and the jig bottom plate 21 is ensured, on the other hand, when the driving assembly 5 drives the corrugated pipe 4 to extend, the upper end flange of the corrugated pipe 4 is abutted to the lower surface of the vacuum cavity 22, and the through hole 221 is completely coated by the upper end flange of the corrugated pipe 4, so that the sealing performance inside the vacuum cavity 22 is ensured, and the vacuum fitting of a workpiece is realized.

Optionally, the alignment platform 1 is a UVW alignment platform, the UVW alignment platform relates to three-axis movement adjustment, the three axes are located on the same plane, automatic angle rotation and x-axis movement can be achieved, the accuracy is high, the alignment platform is thin, and the occupied space is small. Because the alignment platform 1 is connected with the jig base plate 21 through the supporting part 3, the alignment platform 1 can adjust the position of the jig base plate 21 through the supporting part 3, thereby changing the position of the workpiece. The working principle is as follows: when a workpiece is placed on the jig bottom plate 21, the alignment platform 1 obtains the position of the workpiece on the jig bottom plate 21 through the built-in camera, and the alignment platform 1 drives the jig bottom plate 21 to perform translation and rotation actions according to the position of the current workpiece so as to adjust the workpiece to the position corresponding to the attaching mold.

It should be noted that the UVW alignment stage and the control system thereof are conventional in the art and will not be described herein. Any kind UVW counterpoints the platform in this embodiment can adopt prior art, the utility model discloses no longer carry out the detailed description to each partial connected relation, concrete structure and the concrete control mode of UVW counterpoint platform.

In this embodiment, as shown in fig. 3 to 4, the driving assembly 5 includes a clamping plate 51, the clamping plate 51 is clamped to the upper end flange of the bellows 4, the driving assembly 5 further includes a driving part 52, the driving part 52 is installed on the aligning platform 1, and the driving part 52 can drive the clamping plate 51 to move in the vertical direction. When the alignment is performed, the driving part 52 can drive the clamping plate 51 to vertically descend, after the upward abutting force of the clamping plate 51 of the bellows 4 is lost, the upper end of the bellows 4 is separated from the vacuum component 2, and after the alignment is performed, the driving part 52 can drive the clamping plate 51 to vertically ascend, the clamping plate 51 is clamped with the flange at the upper end of the bellows 4, so that the bellows 4 extends along the vertical direction, and the bellows 4 is tightly abutted to the vacuum component 2 under the driving action of the clamping plate 51, so that the vacuum sealing of the alignment sealing device is realized.

Alternatively, the driving part 52 may be configured as a lifting cylinder, the clamping plate 51 is fixedly connected to the output end of the cylinder, and the lifting of the clamping plate 51 can be realized under the driving of the cylinder. The cylinder is suitable for being applied to the occasion of reciprocating linear motion, is particularly suitable for carrying out the straight line transport of parts in the industrial automation, and the stable speed control can be simply realized only by adjusting the one-way throttle valves arranged at the two sides of the cylinder, and the cylinder has simple operation and structure, can basically realize maintenance-free and is convenient.

Optionally, the driving assembly 5 can also be set as a screw driving mechanism, the driving part 52 can be set as a motor, the driving assembly 5 further comprises linear guide rails and a driving screw, the vacuum assembly 2 is connected to one end of each of the two linear guide rails, the other end of the two linear guide rails is connected with the aligning platform 1, the driving screw is parallelly arranged between the two linear guide rails, the clamping plate 51 is meshed with the driving screw, the driving screw is fixedly connected with the output end of the motor, the motor can control the rotating direction and speed by control equipment such as a relay, the clamping plate 51 is connected with the upper end of the corrugated pipe 4, the automatic lifting of the clamping plate 51 is realized along the linear guide rails under the driving.

Preferably, as shown in fig. 3, the driving assembly 5 comprises a plurality of clamping plates 51, and by providing a plurality of clamping plates 51, a single clamping plate 51 can clamp at most two bellows 4, so as to ensure that each bellows 4 can be disengaged from the vacuum assembly 2 when the driving assembly 5 drives the clamping plate 51 to vertically descend, and each bellows 4 can be in sealing abutment with the vacuum assembly 2 when the driving assembly 5 drives the clamping plate 51 to vertically ascend. Because four supporting rods 3 and the corrugated pipe 4 are arranged in the alignment sealing device, two clamping plates 51 are symmetrically arranged, the function realization of the clamping plates 51 and the corrugated pipe 4 is ensured, and the stress stability of the alignment sealing device is improved.

In order to ensure that the clamping plate 51 moves in the vertical direction, in this embodiment, as shown in fig. 5, the alignment sealing device further includes a guiding assembly 6, the guiding assembly 6 includes a supporting plate 61, and the supporting plate 61 is fixedly connected to the lower surface of the clamping plate 51, so that the clamping plate 51 and the supporting plate 61 can move synchronously. The guide assembly 6 further comprises a guide part 62, the guide part 62 is fixedly connected with the aligning platform 1, the supporting plate 61 is connected to the guide part 62 in a sliding mode along the vertical direction, and then the clamping plate 51 moves along the vertical direction along with the supporting plate 61.

Alternatively, the guiding member 62 may be configured as a sealing guiding rod, the guiding rod may be inserted into the supporting plate 61, and the supporting plate 61 is slidably connected to the guiding rod along the vertical direction to guide the supporting plate 61 to move along the vertical direction. In addition, the guiding component 62 can also be configured as a linear guide rail, the linear guide rail is connected with the alignment platform 1 and the vacuum assembly 2 along the vertical direction, and the supporting plate 61 is connected with the linear guide rail in a sliding manner so as to guide the supporting plate 61 to do reciprocating linear motion along the direction of the linear guide rail.

In this embodiment, as shown in fig. 1 to 5, the working procedure of the alignment and sealing device is as follows: when a workpiece is placed on the jig bottom plate 21, the driving part 52 drives the clamping plate 51 to abut against the supporting plate 61 and descend along the direction of the guiding part 62, the corrugated pipe 4 is separated from the vacuum cavity 22 under the condition that the abutting force of the clamping plate 51 is lost, and the alignment platform 1 is automatically adjusted according to the position of the workpiece so as to adjust the workpiece to the position corresponding to the attaching mold. After the alignment platform 1 finishes alignment, the driving part 52 drives the clamping plate 51 and the supporting plate 61 to ascend along the direction of the guiding part 62, and the clamping plate 51 abuts against the upper end flange of the corrugated pipe 4, so that the corrugated pipe 4 is hermetically connected with the vacuum cavity 22, and the product is processed in a vacuum state.

The above description is only for the preferred embodiment of the present invention, and for those skilled in the art, there are variations on the detailed description and the application scope according to the idea of the present invention, and the content of the description should not be construed as a limitation to the present invention.

Claims

1. An alignment sealing device comprises an alignment platform (1), and is characterized by further comprising:

the vacuum assembly (2) comprises a jig base plate (21) and a vacuum cavity (22), a workpiece can be placed on the jig base plate (21), and the vacuum cavity (22) is arranged on the outer side of the jig base plate (21) to cover the jig base plate (21);

one end of the supporting component (3) penetrates through the vacuum cavity (22) and is connected to the jig bottom plate (21), and the other end of the supporting component (3) is connected to the alignment platform (1);

the corrugated pipe (4) is sleeved on the outer side of the supporting part (3), and the first end of the corrugated pipe (4) is hermetically connected with one of the alignment platform (1) and the vacuum cavity (22);

drive assembly (5), the output of drive assembly (5) with the second end of bellows (4) is connected, drive assembly (5) can drive bellows (4) are flexible, in order to realize the second end of bellows (4) with counterpoint platform (1) with another butt in vacuum cavity (22) or break away from.

2. The aligning sealing device of claim 1, wherein the drive assembly (5) comprises:

the clamping plate (51), the clamping plate (51) is clamped with the flange of the second end of the corrugated pipe (4);

the driving part (52), the driving part (52) is installed on the aligning platform (1), and the driving part (52) can drive the clamping plate (51) to move along the vertical direction.

3. The alignment seal of claim 2, further comprising:

a guide assembly (6), wherein the guide assembly (6) can guide the clamping plate (51) to move along the vertical direction.

4. The alignment seal of claim 3, wherein the guide assembly (6) comprises:

the supporting plate (61), the supporting plate (61) is fixedly connected with the lower surface of the clamping plate (51);

the guide component (62) is fixedly connected with the alignment platform (1), and the supporting plate (61) is connected to the guide component (62) in a sliding mode along the vertical direction.

5. The alignment sealing device according to any one of claims 2-4, comprising a plurality of supporting members (3) and the bellows (4), wherein one bellows (4) is sleeved outside each supporting member (3), and the driving assembly (5) can drive the plurality of bellows (4) to expand and contract.

6. The alignment sealing device according to claim 5, wherein the driving assembly (5) comprises a plurality of clamping plates (51), and each clamping plate (51) clamps at most two corrugated pipes (4).

7. Alignment sealing device according to any of claims 1-4, wherein the alignment platform (1) is a UVW alignment platform.

8. The alignment sealing device according to any one of claims 1 to 4, wherein the vacuum chamber (22) is provided with a through hole (221), the supporting member (3) is fixedly connected to the jig base plate (21) through the through hole (221), and a projection of an upper end flange of the corrugated tube (4) along a vertical direction covers the through hole (221).

9. The alignment sealing device according to any one of claims 1 to 4, further comprising an outer support (7), wherein the outer support (7) is sleeved outside the alignment platform (1), and the upper end of the outer support (7) is fixedly connected with the lower end of the vacuum chamber (22).

10. A vacuum bonding apparatus comprising the alignment sealing device according to any one of claims 1 to 9.