CN211376583U - In-situ physicochemical reaction sample table of scanning electron microscope - Google Patents
In-situ physicochemical reaction sample table of scanning electron microscope Download PDFInfo
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- CN211376583U CN211376583U CN201922318490.0U CN201922318490U CN211376583U CN 211376583 U CN211376583 U CN 211376583U CN 201922318490 U CN201922318490 U CN 201922318490U CN 211376583 U CN211376583 U CN 211376583U
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Abstract
The utility model belongs to the field of sample detection, in particular to a scanning electron microscope in-situ physicochemical reaction sample stage, which comprises a sample stage body and a heat conduction interlayer arranged in the sample stage body and used for placing a sample; the heat conduction interlayer divides the sample table body into a gas chamber and a temperature control chamber; a gas inlet and a gas outlet are arranged in the gas cavity; a heating pipeline and a cooling pipeline are arranged in the temperature control chamber; two ends of the heating pipeline are respectively connected with the heating medium inlet and the heating medium outlet; and two ends of the cooling pipeline are respectively connected with the refrigerant inlet and the refrigerant outlet. According to the in-situ physicochemical reaction sample stage of the scanning electron microscope, observation and component analysis of microstructure appearance of a sample in the sample stage under different temperatures and different chemical atmospheres can be realized by converting the gas type of the sample chamber and adjusting the temperature of a cooling and heating medium.
Description
Technical Field
The utility model belongs to the sample detection field, concretely relates to scanning electron microscope normal position materialization reaction sample platform.
Background
Scanning electron microscopes are used as important tools for analyzing the appearance and components of microstructures, and are widely applied to the fields of materials, chemistry, biology, microelectronics and the like. The method has the characteristics of simple sample preparation, wide adjustable range of magnification, high image resolution, large depth of field, stereoscopic impression of imaging and the like.
With the development of modern technology, other scanning electron microscopy combined analysis functions are also developed, such as a micro-hot stage and a micro-cold stage system, which are used for observing and analyzing material phase change, recrystallization transition, grain growth, oxidation reaction, gas reaction, element migration, electronic device failure analysis and the like during heating and freezing of materials, respectively.
At present, no sample stage can realize the observation of the whole physical and chemical process from ultralow temperature to high temperature of a sample and simultaneously observe the state switching of the sample in vacuum and reaction atmosphere exposure.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a scanning electron microscope normal position materialization reaction sample platform.
The utility model discloses a realize above-mentioned purpose, adopt following technical scheme:
a scanning electron microscope in-situ physicochemical reaction sample stage comprises a sample stage body and a heat conduction interlayer which is arranged in the sample stage body and is used for placing a sample; the heat conduction interlayer divides the sample table body into a gas chamber and a temperature control chamber; a gas inlet and a gas outlet are arranged in the gas cavity; a heating pipeline and a cooling pipeline are arranged in the temperature control chamber; two ends of the heating pipeline are respectively connected with the heating medium inlet and the heating medium outlet; and two ends of the cooling pipeline are respectively connected with the refrigerant inlet and the refrigerant outlet.
The sample table body is provided with an observation window; the position of the observation window corresponds to the placement position of the sample; the observation window and the sample stage body can be connected in an openable and closable manner.
And a sealing gasket is arranged at the contact part of the observation window and the sample table body.
The device also comprises a heat insulation sealing cavity; the sample table body is arranged in the heat insulation sealing cavity.
The heat insulation sealed cavity is provided with an observation port which can be connected with the heat insulation sealed cavity in an opening and closing manner.
A thermometer is arranged in the gas cavity.
Compared with the prior art, the beneficial effects of the utility model are that:
according to the in-situ physicochemical reaction sample stage of the scanning electron microscope, observation and component analysis of microstructure appearance of a sample in the sample stage under different temperatures and different chemical atmospheres can be realized by converting the gas type of the sample chamber and adjusting the temperature of a cooling and heating medium.
Drawings
FIG. 1 is a schematic view of the overall structure of a sample stage for in-situ physicochemical reaction of a scanning electron microscope according to the present invention;
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the present invention will be further described in detail with reference to the accompanying drawings and preferred embodiments.
FIG. 1 shows a scanning electron microscope in-situ physicochemical reaction sample stage, which comprises a heat insulation sealed cavity 1, a sample stage body 9 and a heat conduction interlayer 11 arranged in the sample stage body and used for placing a sample 14; the heat conduction interlayer divides the sample table body into a gas chamber and a temperature control chamber; a gas inlet 3 and a gas outlet 4 are arranged in the gas cavity; a heating pipeline 12 and a cooling pipeline 13 are arranged in the temperature control chamber; two ends of the heating pipeline are respectively connected with a heat medium inlet 5 and a heat medium outlet 6; and two ends of the cooling pipeline are respectively connected with a refrigerant inlet 7 and a refrigerant outlet 8.
The sample table body is provided with an observation window 10; the position of the observation window corresponds to the placement position of the sample; the observation window and the sample stage body can be connected in an openable and closable manner. And a sealing gasket is arranged at the contact part of the observation window and the sample table body. The sample table body is arranged inside the heat insulation sealed cavity 1. The heat insulation sealed cavity is provided with an observation port 2 which is connected with the heat insulation sealed cavity in an openable and closable manner. A thermometer is arranged in the gas cavity.
The heat insulation sealing cavity 1 plays a role in heat insulation and sealing, the outer layer of the material is a smooth stainless steel plate, the inner layer of the material is inorganic heat insulation materials such as asbestos, diatomite, perlite, aerogel felt, glass fiber, foam concrete, calcium silicate and the like, and the material can also be organic heat insulation materials such as cork, polystyrene foam plastics, polyurethane, cow felt, wool felt and the like. The observation port and the observation window are made of pressure-resistant toughened glass or pressure-resistant organic glass. The gas inlet 3 is matched with the gas outlet 4, the pipe is a stainless steel pipe or an organic plastic pipe, and the gas is conventional inert gas such as helium, nitrogen and the like, or oxygen, air or organic redox gas. The heat medium inlet 5 is matched with the heat medium outlet 6, and the pipe material is a stainless steel pipe or a heat-resistant organic plastic pipe. The refrigerant inlet 7 is matched with the refrigerant outlet 8, and the pipe is a stainless steel pipe or a cold-resistant organic plastic pipe; the sample table body 9 is made of corrosion-resistant stainless steel; the heat conduction interlayer 11 plays a role in transferring heat and sealing, and is made of corrosion-resistant stainless steel. The heating medium is heat-conducting high-temperature oil. The refrigerant is liquid nitrogen, liquid helium, dry ice, etc.
The above description is only for the preferred embodiment of the present invention, and for those skilled in the art, there are variations on the detailed description and the application scope according to the idea of the present invention, and the content of the description should not be construed as a limitation to the present invention.
Claims (6)
1. A scanning electron microscope in-situ physicochemical reaction sample stage is characterized by comprising a sample stage body and a heat conduction interlayer which is arranged in the sample stage body and used for placing a sample; the heat conduction interlayer divides the sample table body into a gas chamber and a temperature control chamber; a gas inlet and a gas outlet are arranged in the gas cavity; a heating pipeline and a cooling pipeline are arranged in the temperature control chamber; two ends of the heating pipeline are respectively connected with the heating medium inlet and the heating medium outlet; and two ends of the cooling pipeline are respectively connected with the refrigerant inlet and the refrigerant outlet.
2. The in-situ physicochemical reaction sample stage for a scanning electron microscope according to claim 1, wherein the sample stage body is provided with an observation window; the position of the observation window corresponds to the placement position of the sample; the observation window and the sample stage body can be connected in an openable and closable manner.
3. The in-situ physicochemical reaction sample stage for a scanning electron microscope according to claim 2, wherein a sealing gasket is arranged at the contact position of the observation window and the sample stage body.
4. The in-situ physicochemical reaction sample stage for a scanning electron microscope according to claim 1, further comprising a heat-insulating sealed cavity; the sample table body is arranged in the heat insulation sealing cavity.
5. The in-situ physicochemical reaction sample stage for the scanning electron microscope according to claim 4, wherein the heat-insulating sealed cavity is provided with an observation port which is in openable and closable connection with the heat-insulating sealed cavity.
6. The in-situ materialized reaction sample stage for the scanning electron microscope according to claim 1, wherein a thermometer is arranged in the gas chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922318490.0U CN211376583U (en) | 2019-12-20 | 2019-12-20 | In-situ physicochemical reaction sample table of scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922318490.0U CN211376583U (en) | 2019-12-20 | 2019-12-20 | In-situ physicochemical reaction sample table of scanning electron microscope |
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| Publication Number | Publication Date |
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| CN211376583U true CN211376583U (en) | 2020-08-28 |
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| CN201922318490.0U Active CN211376583U (en) | 2019-12-20 | 2019-12-20 | In-situ physicochemical reaction sample table of scanning electron microscope |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116519727A (en) * | 2023-03-21 | 2023-08-01 | 浙江大学 | Scanning electron microscope and observation method for microstructure evolution of sample thereof |
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2019
- 2019-12-20 CN CN201922318490.0U patent/CN211376583U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116519727A (en) * | 2023-03-21 | 2023-08-01 | 浙江大学 | Scanning electron microscope and observation method for microstructure evolution of sample thereof |
| CN116519727B (en) * | 2023-03-21 | 2024-03-26 | 浙江大学 | Scanning electron microscope and observation method for microstructure evolution of sample thereof |
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