CN211372936U - 一种制取高纯度液氮的设备系统 - Google Patents

一种制取高纯度液氮的设备系统 Download PDF

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CN211372936U
CN211372936U CN201922169081.9U CN201922169081U CN211372936U CN 211372936 U CN211372936 U CN 211372936U CN 201922169081 U CN201922169081 U CN 201922169081U CN 211372936 U CN211372936 U CN 211372936U
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pipe
liquid nitrogen
molecular sieve
cold box
fractionating tower
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周涛
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
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    • F25J3/04151—Purification and (pre-)cooling of the feed air; recuperative heat-exchange with product streams
    • F25J3/04163—Hot end purification of the feed air
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    • F25J3/04187—Cooling of the purified feed air by recuperative heat-exchange; Heat-exchange with product streams
    • F25J3/04218—Parallel arrangement of the main heat exchange line in cores having different functions, e.g. in low pressure and high pressure cores
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    • F25J3/04248—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
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    • F25J3/0429—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using internal refrigeration by open-loop gas work expansion, e.g. of intermediate or oxygen enriched (waste-)streams of feed air, e.g. used as waste or product air or expanded into an auxiliary column
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    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
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    • F25J3/04248—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
    • F25J3/04375—Details relating to the work expansion, e.g. process parameter etc.
    • F25J3/04393—Details relating to the work expansion, e.g. process parameter etc. using multiple or multistage gas work expansion
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    • F25J3/044—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air using a single pressure main column system only
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    • F25J3/04866—Construction and layout of air fractionation equipments, e.g. valves, machines
    • F25J3/0489—Modularity and arrangement of parts of the air fractionation unit, in particular of the cold box, e.g. pre-fabrication, assembling and erection, dimensions, horizontal layout "plot"
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    • F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
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    • F25J3/04957—Arrangements of multiple air fractionation units or multiple equipments fulfilling the same process step, e.g. multiple trains in a network and inter-connecting equipments upstream of the fractionation unit (s), i.e. at the "front-end"
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Abstract

本实用新型属于空分装置技术领域，尤其涉及一种制取高纯度液氮的设备系统。一种制取高纯度液氮的设备系统，包括以管路依次相连的过滤器、压缩机、预冷机、分馏塔冷箱和液氮贮槽，所述预冷机与分馏塔冷箱之间还设有分子筛纯化系统，分子筛纯化系统包括两台一级纯化装置和两台二级纯化装置，两台一级纯化装置通过管路连接第一循环管，两台二级纯化装置通过第二循环管相连，第一循环管与第二循环管之间通过管路相连，所述预冷机通过管路与第一循环管相连，所述第一循环管与第二循环管分别通过管路与所述分馏塔冷箱相连。本实用新型提供了一种液氮纯度高、管路设计合理的制取高纯度液氮的设备系统。

Description

一种制取高纯度液氮的设备系统
技术领域
本实用新型属于空分装置技术领域，尤其涉及一种制取高纯度液
氮的设备系统。
背景技术
液氮，液态的氮气。是惰性的，无色，无臭，无腐蚀性，不可燃，
温度极低。氮构成了大气的大部分（体积比78.03%，重量比75.5%）。
氮是不活泼的，不支持燃烧，氮气占空气78%。
在常压下，液氮温度为－196℃；1立方米的液氮可以膨胀至696
立方米21°C的纯气态氮。液氮是无色、无味，在高压下低温的液体和气体。液氮（常写为LN2），是氮气在低温下形成的液体形态。氮的沸点为-196°C，在正常大气压下温度如果在这以下就会形成液氮；如果加压，可以在更高的温度下得到液氮。
在工业中，液态氮是由空气分馏而得。先将空气净化后，在加压、
冷却的环境下液化，借由空气中各组分之沸点不同加以分离。
现有的氮气分离设备如中国专利 CN105758122B 公开的技术内容：一种制取高纯度氮气和低纯度氧气的装置，其特征在于，所述装置包括主换热器E1、精馏塔C1、冷凝器K1、冷凝器K2、过冷器E2和透平膨胀机ET1，各设备之间通过管道相连通，连接关系为：主换热器E1的进气口为经过过滤、净化后空气的输入口，其出气口通过101管道与精馏塔C1下部的空气进气口连通；精馏塔C1顶部的高纯氮气出口经201管道分两部分分别进入201A管道和201B管道，201A管道与主换热器E1高纯氮气进气口连通，高纯氮气从主换热器E1出气口排出收集；201B管道分别与冷凝器K2高纯氮气进气口和冷凝器K1高纯氮气进气口连通；冷凝器K1和冷凝器K2底部液氮出口分别经201D管道、201C管道共同进入201E管道，201E管道与精馏塔C1上部液氮进口连通；精馏塔C1底部富氧液空出口经301管道与过冷器E2富氧液空进口连通，过冷器E2富氧液空出口经301A管道与冷凝器K1富氧液空进口连通；冷凝器K1富氧废气出口经301B管道与主换热器E1富氧废气进口连通，主换热器E1富氧废气出口经301C管道与透平膨胀机ET1富氧废气进口连通，透平膨胀机ET1富氧废气出口经301D管道与过冷器E2富氧废气进口连通，过冷器E2富氧废气出口经301E管道与主换热器E1富氧气体1进口连通，富氧气体1由主换热器E1出口排出收集；冷凝器K1底部富氧液空出口经301F管道与冷凝器K2富氧液空进口连通，冷凝器K2富氧气体2出口经301G管道与主换热器E1富氧气体2进口连通，富氧气体2经主换热器E1出口排出收集。
虽然上述技术方案能够获取高纯度氮气的同时，还能获得不同纯
度、不同压力的具有较高氧气纯度的富氧气产品，但是对于制取液氮
还缺乏关键的步骤，且其提取的氮气纯度还稍有不足。
发明内容
本实用新型所要解决的技术问题是提供一种液氮纯度高、管路设计合理的制取高纯度液氮的设备系统。为此，本实用新型采用以下技
术方案：
一种制取高纯度液氮的设备系统，包括以管路依次相连的过滤器、压缩机、预冷机、分馏塔冷箱和液氮贮槽，所述预冷机与分馏塔
冷箱之间还设有分子筛纯化系统，分子筛纯化系统包括两台一级纯化装置和两台二级纯化装置，两台一级纯化装置通过管路连接第一循环管，两台二级纯化装置通过第二循环管相连，第一循环管与第二循环管之间通过管路相连，所述预冷机通过管路与第一循环管相连，所述第一循环管与第二循环管分别通过管路与所述分馏塔冷箱相连；空气通过相通的管路依次经过过滤器、压缩机、预冷机、分子筛纯化系统、分馏塔冷箱进行过滤与冷却形成高纯度液氮后于液氮贮槽内进行贮藏。
由于一级纯化装置容积较大，第一循环管设于一级纯化装置外可
更好地进行循环纯化，而二级纯化装置容积较小，直接将两台二级纯化装置连接进行循环不仅增加了纯化效果，而且可进行多次纯化，更好地去除空气中的杂质。
在采用上述技术方案的基础上，本实用新型还可采用以下进一步
的技术方案：
所述一级纯化装置为吸附器且二级纯化装置为电加热器，两台吸
附器中一台用于吸附空气中的杂质，另一台用于再生作用；同时，两台电加热器非同时开启，当一台开启时另一台为备用，用于加热污氮气给用于再生的吸附器再生所用。或一级纯化装置为填充 X 型沸石的分子筛且二级纯化装置为填充A型沸石的分子筛，一级纯化装置的容积为二级纯化装置容积的八倍。
所述过滤器与压缩机之间通过第一粗管相连，第一粗管靠近过滤
器处还连接有第二粗管，所述第二粗管的尾端与分馏塔冷箱相连；所述压缩机与预冷机之间、预冷机与分子筛纯化系统之间、分子筛纯化系统与分馏塔冷箱之间均通过细管相连，所述分子筛纯化系统内部的管路均为细管。
第二粗管的气流方向为自分馏塔冷箱至过滤器，可将分馏塔冷箱
中分馏后的气体与经过过滤器后的空气一起自压缩机开始进行净化和冷却，可充分地利用吸入的空气，节能环保。同时，第一粗管的设计可使得进压缩机的空气量较大，而后均采用细管则是更好地为了净化和冷却。
所述分馏塔冷箱还连接有两台膨胀机，一膨胀机与分子筛纯化系
统的第一循环管通过细管相连，该膨胀机还通过细管与一台后冷却器相连，所述后冷却器的另一端通过细管与分馏塔冷箱相连。
所述分馏塔冷箱还通过细管连接一低温冷冻机组，所述分馏塔冷
箱还设有蒸发器。
所述压缩机与预冷机相连的细管前端还通过细管连接一空气消
音器，所述第一循环管和第二循环管均通过细管连接有第一污氮气消音器，所述第二粗管的后端通过细管连接有第二污氮气消音器。
所述膨胀机包括同轴且管路连接的膨胀机叶轮和压缩机叶轮，压缩机叶轮的前端开设气门，所述分子筛纯化系统的第一循环管和后冷
却器均通过细管与气门相连；所述膨胀机叶轮还连接有喷嘴。
所述液氮贮槽至少设有两个。
本实用新型的优点是：通过分子筛纯化系统的设置可对经过过
滤、压缩和冷却后的空气进行进一步地脱水和净化，其中，X型沸石分子筛的极性亲水性，可以对空气进行较好地干燥，而由于A型沸石分子筛结构的特殊性及种类的多样化，可较好地分离二甲苯等杂质。
附图说明：
图 1 为本实用新型一种制取高纯度液氮的设备系统的连接示意图。
图 2 为本实用新型一种制取高纯度液氮的设备系统的分子筛纯化系统结构示意图。
图 3 为本实用新型一种制取高纯度液氮的设备系统的膨胀机结构示意图。
其中，过滤器1，第一粗管11，第二粗管12，压缩机2，预冷机3，分子筛纯化系统4，一级纯化装置41，二级纯化装置42，第一循环管43，第二循环管44，分馏塔冷箱5，蒸发器51，膨胀机6，膨胀机叶轮61，压缩机叶轮62，气门63，喷嘴64，后冷却器7，低温冷冻机组8，空气消音器91，第一污氮气消音器92，第二污氮气消音器93，液氮贮槽10。
具体实施方式
结合附图，对本实用新型提供的一一种制取高纯度液氮的设备系统作进一步说明。
空气分离的基本原理，是利用液化空气中各组份沸点的不同而将
各组份分离开来。要达到这个目的，空分装置的工作包括下列过程：
(1)空气的过滤和压缩：大气中的空气先经过空气过滤器1过滤其灰尘等机械杂质，然后在空气压缩机2中被压缩到所需的压力，压缩产生的热量由冷却水带走。
(2)空气中水份和二氧化碳的清除：加工空气中的水份和二氧化碳若进入空分设备的低温区后，会形成冰和干冰，就会阻塞换热器的通道和塔板上的小孔。因而配用分子筛纯化系统4来预先清除空气中的水份和二氧化碳，进入分子筛纯化系统4的空气温度约为10℃。一级纯化装置41和二级纯化装置42轮换使用，一只工作时另一只再生。
(3)空气被冷却到液化温度：空气的冷却是在主换热器中进行的，空气被返流气体冷却到液化温度。与此同时，冷的返流气体被复热。
(4)冷量的制取：由于绝热损失、换热器的复热不足损失和冷箱中向外直接排放低温液体，分馏塔正常运行所需的冷量是由空气在膨胀机6中等熵膨胀和等温节流效应来获得的。
(5)液化：在启动阶段，加工空气在主换热器中与返流冷气流换热而被液化，在正常运行中，氮气和液空的热交换是在冷凝蒸发器中进行的，由于两种流体压力的不同，氮气被液化而液空被蒸发，这是保证塔精馏过程正常进行所必须具备的条件。
（6）精馏。
实施例一，如图 1-3 所示，一种制取高纯度液氮的设备系统，包括以管路依次相连的过滤器1、压缩机2、预冷机3、分馏塔冷箱5和液氮贮槽10，预冷机3与分馏塔冷箱5之间还设有分子筛纯化系
统4。
过滤器1为自洁式空气过滤器，通过多孔过滤材料的作用从气固
两相流中捕集粉尘，可采用AF型高效过滤器。原料空气在过滤器AF中除去了灰尘和机械杂质后，进入空气透平压缩机2，将空气压缩到一定压力，然后送入预冷机组进行冷却。
压缩机2为空气透平压缩机，用于输送空气和各种气体并提高其压力，可采用H200－6.3/0.97型透平压缩机。
预冷机3为空气预冷机，用于将压缩空气冷却除水，并将压缩空
气温度降低，可采用带法国美优乐牌压缩机的空气预冷机。
分子筛纯化系统4包括两台一级纯化装置41和两台二级纯化装置42，两台一级纯化装置41通过管路连接第一循环管43，两台二级
纯化装置42通过第二循环管44相连，第一循环管43与第二循环管44之间通过管路相连。
其中，预冷机3通过管路与第一循环管43相连，第一循环管43
与第二循环管44分别通过管路与分馏塔冷箱5相连。
进一步地，一级纯化装置41为吸附器，可采用立式分子筛吸附
器，二级纯化装置42为电加热器，用于加热污氮气给用于再生的吸附器再生所用，可采用风道式防爆电加热器。
其中，出预冷机组的空气进入交替工作的分子筛吸附器。在那里
原料空气中的水份、CO2、C2H2等有害杂质被分子筛吸附。分子筛纯化器自动切换使用，其中一只工作时，另一只再生。两台分子筛吸附器中一台用于吸附空气中的杂质，另一台用于再生作用。
两台电加热器非同时开启，当一台开启时另一台为备用。
进一步地，过滤器1与压缩机2之间通过第一粗管11相连，第一粗管11靠近过滤器1处还连接有第二粗管12，第二粗管12的尾端与分馏塔冷箱5相连。
其中，第二粗管12的气流方向为自分馏塔冷箱5至过滤器1。
进一步地，压缩机2与预冷机3之间、预冷机3与分子筛纯化系
统4之间、分子筛纯化系统4与分馏塔冷箱5之间均通过细管相连。
进一步地，分子筛纯化系统4内部的管路均为细管。
分馏塔冷箱5采用低温精馏的气体分离方法，先将气体混合物冷凝为液体，然后再按各组分沸点的不同将它们分离。还连接有两台膨胀机6，一膨胀机6与分子筛纯化系统4的第一循环管43通过细管相连，该膨胀机6还通过细管与一台后冷却器7相连，后冷却器7的另一端通过细管与分馏塔冷箱5相连。
膨胀机6利用压缩气体膨胀降压时向外输出机械功使气体温度降低的原理以获得能量，可采用透平膨胀机，具有流量大、结构简单、
体积小、效率高和运转周期长等特点，适用于大中型深低温设备。
进一步地，膨胀机6包括同轴且管路连接的膨胀机叶轮61和压缩机叶轮62，压缩机叶轮62的前端开设气门63，分子筛纯化系统4的第一循环管43和后冷却器7均通过细管与气门63相连。
进一步地，膨胀机叶轮61还连接有喷嘴64。后冷却器7用于将空压机出口的高温空气冷却至 40℃以下，将大量水蒸气和变质油雾冷凝成液态水滴和油滴，可采用双管程、单壳程立式冷却器。
进一步地，分馏塔冷箱5还通过细管连接一低温冷冻机组8，进一步地进行降温冷冻。
进一步地，分馏塔冷箱5还设有蒸发器51，蒸发器51采用风机排液蒸发器，低温的冷凝液体通过蒸发器51，与外界的空气进行热交换，气化吸热，达到制冷的效果。压缩机2与预冷机3相连的细管前端还通过细管连接一空气消音器91，第一循环管43和第二循环管44均通过细管连接有第一污氮气消音器92，第二粗管12的后端通过细管连接有第二污氮气消音器93。空气消音器91、第一污氮气消音器92和第二污氮气消音器93可以用附有吸声衬里的管道及弯头或利用截面积突然改变及其他声阻抗不连续的管道等降噪器件，使管道内噪声得到衰减或反射回去。
液氮贮槽 10 设有两个。
空气通过相通的管路依次经过过滤器1、压缩机2、预冷机3、分子筛纯化系统4、分馏塔冷箱5进行过滤与冷却形成高纯度液氮后
于液氮贮槽10内进行贮藏。
净化后的加工空气分为三股：一股作为仪表空气；第二股直接进
入主换热器被冷却到一定温度从中部抽出进入气体轴承膨胀机，膨胀后进入下塔参与精馏；第三股进入油轴承膨胀机增压端增压并冷却后进入主换热器，被冷却至251K的时候进入冷冻机冷却到243K后再进入主换热器，冷却后的气体分两部分，一部分进膨胀机膨胀，膨胀后作为返流空气经主换热器复热后回到循环空气压缩机前；另一部分被继续冷却后经节流进入下塔参与精馏。空气经精馏塔精馏后，在塔顶获得纯液氮。在塔底部获得液空，进入过冷器过冷后送入冷凝蒸发器，蒸发后进入主换热器复热出冷箱，一部分送入纯化系统作为再生气体，其余放空。
实施例二，如图2-3所示，一种制取高纯度液氮的设备系统，包括以管路依次相连的过滤器1、压缩机2、预冷机3、分馏塔冷箱5和液氮贮槽10，预冷机3与分馏塔冷箱5之间还设有分子筛纯化系统 4。
过滤器1为自洁式空气过滤器，通过多孔过滤材料的作用从气固
两相流中捕集粉尘，可采用GB型高效过滤器。
压缩机2为空气透平压缩机，用于输送空气和各种气体并提高其
压力，可采用H200－6.3/0.97型透平压缩机。
预冷机3为空气预冷机，用于将压缩空气冷却除水，并将压缩空
气温度降低，可采用带法国美优乐牌压缩机的空气预冷机。
分子筛纯化系统4包括两台一级纯化装置41和两台二级纯化装
置42，两台一级纯化装置41通过管路连接第一循环管43，两台二级纯化装置42通过第二循环管44相连，第一循环管43与第二循环管44之间通过管路相连。
其中，预冷机3通过管路与第一循环管43相连，第一循环管43与第二循环管44分别通过管路与分馏塔冷箱5相连。
进一步地，一级纯化装置41内采用X型沸石分子筛，二级纯化
装置42内采用A型沸石分子筛，一级纯化装置41的容积为二级纯化装置42容积的八倍。
进一步地，过滤器1与压缩机2之间通过第一粗管11相连，第一粗管11靠近过滤器1处还连接有第二粗管12，第二粗管12的尾端与分馏塔冷箱5相连。
其中，第二粗管12的气流方向为自分馏塔冷箱5至过滤器1。
进一步地，压缩机2与预冷机3之间、预冷机3与分子筛纯化系
统4之间、分子筛纯化系统4与分馏塔冷箱5之间均通过细管相连。
进一步地，分子筛纯化系统4内部的管路均为细管。
分馏塔冷箱5采用低温精馏的气体分离方法，先将气体混合物冷
凝为液体，然后再按各组分沸点的不同将它们分离。还连接有两台膨胀机6，一膨胀机6与分子筛纯化系统4的第一循环管43通过细管相连，该膨胀机6还通过细管与一台后冷却器7相连，后冷却器7的另一端通过细管与分馏塔冷箱5相连。
膨胀机6利用压缩气体膨胀降压时向外输出机械功使气体温度
降低的原理以获得能量，可采用透平膨胀机，具有流量大、结构简单、体积小、效率高和运转周期长等特点，适用于大中型深低温设备。
进一步地，膨胀机6包括同轴且管路连接的膨胀机叶轮61和压
缩机叶轮62，压缩机叶轮62的前端开设气门63，分子筛纯化系统4的第一循环管43和后冷却器7均通过细管与气门63相连。
进一步地，膨胀机叶轮61还连接有喷嘴64。
后冷却器7用于将空压机出口的高温空气冷却至40℃以下，将
大量水蒸气和变质油雾冷凝成液态水滴和油滴，可采用双管程、单壳程立式冷却器。
进一步地，分馏塔冷箱5还通过细管连接一低温冷冻机组8，进
一步地进行降温冷冻。
进一步地，分馏塔冷箱5还设有蒸发器51，蒸发器51采用风机
排液蒸发器，低温的冷凝液体通过蒸发器51，与外界的空气进行热交换，气化吸热，达到制冷的效果。
压缩机2与预冷机3相连的细管前端还通过细管连接一空气消音
器91，第一循环管43和第二循环管44均通过细管连接有第一污氮气消音器92，第二粗管12的后端通过细管连接有第二污氮气消音器93。
空气消音器91、第一污氮气消音器92和第二污氮气消音器93
可以用附有吸声衬里的管道及弯头或利用截面积突然改变及其他声阻抗不连续的管道等降噪器件，使管道内噪声得到衰减或反射回去。
液氮贮槽10设有四个。
空气通过相通的管路依次经过过滤器1、压缩机2、预冷机3、
分子筛纯化系统4、分馏塔冷箱5进行过滤与冷却形成高纯度液氮后于液氮贮槽10内进行贮藏。
虽然本实用新型已通过参考优选的实施例进行了图示和描述，但
是，本专业普通技术人员应当了解，在权利要求书的范围内，可作形式和细节上的各种各样变化。

Claims (9)

1.一种制取高纯度液氮的设备系统，包括以管路依次相连的过滤器、压缩机、预冷机、分馏塔冷箱和液氮贮槽，其特征在于所述预冷机与分馏塔冷箱之间还设有分子筛纯化系统，分子筛纯化系统包括两台一级纯化装置和两台二级纯化装置，两台一级纯化装置通过管路连接第一循环管，两台二级纯化装置通过第二循环管相连，第一循环管与第二循环管之间通过管路相连，所述预冷机通过管路与第一循环管相连，所述第一循环管与第二循环管分别通过管路与所述分馏塔冷箱相连；空气通过相通的管路依次经过过滤器、压缩机、预冷机、分子筛纯化系统、分馏塔冷箱进行过滤与冷却形成高纯度液氮后于液氮贮槽内进行贮藏。
2.根据权利要求1所述的一种制取高纯度液氮的设备系统，其特征在于所述一级纯化装置为吸附器且二级纯化装置为电加热器，或一级纯化装置为填充X型沸石的分子筛且二级纯化装置为填充A型沸石的分子筛。
3.根据权利要求2所述的一种制取高纯度液氮的设备系统，其特征在于所述一级纯化装置为填充X型沸石的分子筛且二级纯化装置为填充A型沸石的分子筛时，一级纯化装置的容积为二级纯化装置容积的八倍。
4.根据权利要求1所述的一种制取高纯度液氮的设备系统，其特征在于所述过滤器与压缩机之间通过第一粗管相连，第一粗管靠近过滤器处还连接有第二粗管，所述第二粗管的尾端与分馏塔冷箱相连；所述压缩机与预冷机之间、预冷机与分子筛纯化系统之间、分子筛纯化系统与分馏塔冷箱之间均通过细管相连，所述分子筛纯化系统内部的管路均为细管。
5.根据权利要求4所述的一种制取高纯度液氮的设备系统，其特征在于所述分馏塔冷箱还连接有两台膨胀机，一膨胀机与分子筛纯化系统的第一循环管通过细管相连，该膨胀机还通过细管与一台后冷却器相连，所述后冷却器的另一端通过细管与分馏塔冷箱相连。
6.根据权利要求5所述的一种制取高纯度液氮的设备系统，其特征在于所述分馏塔冷箱还通过细管连接一低温冷冻机组，所述分馏塔冷箱还设有蒸发器。
7.根据权利要求4所述的一种制取高纯度液氮的设备系统，其特征在于所述压缩机与预冷机相连的细管前端还通过细管连接一空气消音器，所述第一循环管和第二循环管均通过细管连接有第一污氮气消音器，所述第二粗管的后端通过细管连接有第二污氮气消音器。
8.根据权利要求5所述的一种制取高纯度液氮的设备系统，其特征在于所述膨胀机包括同轴且管路连接的膨胀机叶轮和压缩机叶轮，压缩机叶轮的前端开设气门，所述分子筛纯化系统的第一循环管和后冷却器均通过细管与气门相连；所述膨胀机叶轮还连接有喷嘴。
9.根据权利要求1所述的一种制取高纯度液氮的设备系统，其特征在于所述液氮贮槽至少设有两个。
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