CN211361841U - Shockproof wafer grinding machine mechanism - Google Patents
Shockproof wafer grinding machine mechanism Download PDFInfo
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- CN211361841U CN211361841U CN201922257500.4U CN201922257500U CN211361841U CN 211361841 U CN211361841 U CN 211361841U CN 201922257500 U CN201922257500 U CN 201922257500U CN 211361841 U CN211361841 U CN 211361841U
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Abstract
本实用新型公开了一种防震晶圆研磨机机构,包括支撑台、转动盘、固定块、操作板、支撑架、电动推杆、圆盘、弹性支撑脚、矩形槽、导杆、L型杆、弹簧一、磁块、方杆、方孔、卡块、矩形槽一、保护壳一、保护壳二、T型杆、弹簧二、凹槽、斜块一以及斜块二。本实用新型拉块移动带动L型杆移动,使得两个磁块相互分离,在弹簧一弹力的作用下,L型杆移动与限位槽一内壁贴合,同时向内推动保护壳一以及保护壳二,使得斜块一进入凹槽内部,斜块一对斜块二进行挤压,斜块一受到挤压移动,斜块一移动带动T型杆移动,T型杆移动对弹簧二进行拉伸,当斜块二与斜块一上的限位槽二对齐时,在弹簧二弹力的作用下,T型杆移动带动斜块一进入限位槽二内部。
The utility model discloses an anti-vibration wafer grinder mechanism, comprising a support table, a rotating disk, a fixed block, an operation board, a support frame, an electric push rod, a disc, an elastic support foot, a rectangular groove, a guide rod and an L-shaped rod , Spring 1, magnetic block, square rod, square hole, clamping block, rectangular slot 1, protective shell 1, protective shell 2, T-bar, spring 2, groove, inclined block 1 and inclined block 2. The movement of the pull block of the utility model drives the movement of the L-shaped rod, so that the two magnetic blocks are separated from each other. Under the action of the elastic force of the spring, the L-shaped rod moves and fits the inner wall of the limit groove 1, and simultaneously pushes the protective shell 1 and the protective shell 1 inward. Shell 2, so that the first inclined block enters the groove, the inclined block squeezes a pair of inclined blocks two, the first inclined block is squeezed and moved, the first inclined block moves to drive the T-bar to move, and the T-bar moves to pull the second spring. When the second inclined block is aligned with the second limiting groove on the first inclined block, under the action of the elastic force of the second spring, the T-bar moves to drive the first inclined block into the second limiting groove.
Description
技术领域technical field
本实用新型涉及一种晶圆研磨机,具体是一种防震晶圆研磨机机构,属于研磨机技术领域。The utility model relates to a wafer grinding machine, in particular to a shock-proof wafer grinding machine mechanism, which belongs to the technical field of grinding machines.
背景技术Background technique
研磨机是用涂上或嵌入磨料的研具对工件表面进行研磨的磨床,主要用于研磨工件中的高精度平面、内外圆柱面、圆锥面、球面、螺纹面和其他型面,研磨机的主要类型有圆盘式研磨机、转轴式研磨机和各种专用研磨机。The grinding machine is a grinding machine that grinds the surface of the workpiece with a grinding tool coated or embedded with abrasives. The main types are disc grinders, rotary shaft grinders and various special grinders.
目前使用的晶圆研磨机存在一定缺陷,缺少支撑架便捷连接机构,造成不方便对支撑架进行拆装,进而不方便对转动盘以及圆盘进行维护,同时缺少保护机构,造成操作板暴露在空气中,容易造成操作板的损坏。因此,针对上述问题提出一种防震晶圆研磨机机构。The wafer grinder currently used has certain defects. It lacks a convenient connection mechanism for the support frame, which makes it inconvenient to disassemble and assemble the support frame, thereby inconvenient to maintain the rotating disk and the disk. In the air, it is easy to cause damage to the operation panel. Therefore, an anti-vibration wafer grinder mechanism is proposed to solve the above problems.
实用新型内容Utility model content
本实用新型的目的就在于为了解决上述问题而提供一种防震晶圆研磨机机构。The purpose of the present invention is to provide an anti-vibration wafer grinder mechanism in order to solve the above problems.
本实用新型通过以下技术方案来实现上述目的,一种防震晶圆研磨机机构,包括支撑台、转动盘、固定块、操作板、支撑架、电动推杆、圆盘、弹性支撑脚、连接装置以及保护装置,所述支撑台顶端中间位置安装转动盘,所述支撑台底端均匀安装四个弹性支撑脚,所述支撑台顶端安装支撑架,所述支撑架顶端中间位置安装电动推杆,且电动推杆一端穿过支撑架,所述电动推杆底端固定安装圆盘,所述圆盘安装在转动盘上侧,所述支撑台前端固定安装固定块,且固定块顶端固定安装操作板;The utility model achieves the above objects through the following technical solutions. An anti-vibration wafer grinder mechanism includes a support table, a rotating disk, a fixed block, an operation panel, a support frame, an electric push rod, a disc, an elastic support foot, and a connecting device. and a protection device, a rotating disk is installed at the middle position of the top of the support table, four elastic support feet are evenly installed at the bottom end of the support table, a support frame is installed at the top of the support table, and an electric push rod is installed at the middle position of the top of the support frame. And one end of the electric push rod passes through the support frame, the bottom end of the electric push rod is fixedly installed with a disk, the disk is installed on the upper side of the rotating disk, the front end of the support table is fixedly installed with a fixed block, and the top of the fixed block is fixed and installed. plate;
所述连接装置包括矩形槽、导杆、L型杆、弹簧一以及磁块,所述支撑台顶端对称开设两个矩形槽,所述矩形槽内部固定安装导杆,所述导杆环形侧面上对称安装两个L型杆,所述导杆环形侧面上对称安装两个导杆,且导杆两端分别固定安装在L型杆上以及矩形槽内部,所述L型杆一端固定安装磁块;The connecting device includes a rectangular groove, a guide rod, an L-shaped rod, a
所述保护装置包括保护壳一、保护壳二、T型杆、弹簧二、凹槽、斜块一以及斜块二,所述固定块顶端对称安装保护壳一以及保护壳二,所述保护壳二左端中间位置固定安装斜块一,所述保护壳一右端中间位置开设凹槽,所述保护壳一顶端安装T型杆,且T型杆底端延伸至凹槽内部,所述T型杆底端固定安装斜块二,所述T型杆环形侧面上安装弹簧二,且弹簧二两端分别固定安装在T型杆上以及保护壳一上。The protection device includes a first protective shell, a second protective shell, a T-bar, a second spring, a groove, a first inclined block, and a second inclined block. The top of the fixed block is symmetrically installed with the first protective shell and the second protective shell. Two inclined blocks are fixedly installed in the middle of the left end, a groove is set in the middle of the right end of the protective shell, a T-shaped rod is installed at the top of the protective shell, and the bottom end of the T-shaped rod extends into the groove, and the T-shaped rod A second inclined block is fixedly installed at the bottom end, a second spring is installed on the annular side surface of the T-shaped rod, and two ends of the second spring are respectively fixedly installed on the T-shaped rod and the first protective shell.
优选的,所述支撑台一端开设矩形通槽,且矩形通槽一端与矩形槽相通,所述L型杆一端固定安装拉块,且拉块一端穿过矩形通槽并延伸至矩形通槽外侧。Preferably, one end of the support table is provided with a rectangular through slot, and one end of the rectangular through slot is communicated with the rectangular slot, one end of the L-shaped rod is fixedly installed with a pull block, and one end of the pull block passes through the rectangular through slot and extends to the outside of the rectangular through slot. .
优选的,所述L型杆一端开设圆形通孔,且圆形通孔内部安装导杆,所述圆形通孔内部均匀安装两个以上滚珠,且滚珠球形侧面与导杆环形侧面相贴合,所述L型杆一端固定安装方杆,且方杆顶端开设方形通孔。Preferably, a circular through hole is formed at one end of the L-shaped rod, and a guide rod is installed inside the circular through hole, more than two balls are evenly installed in the circular through hole, and the spherical side of the ball is in contact with the annular side of the guide rod. In combination, one end of the L-shaped rod is fixedly installed with a square rod, and a square through hole is formed at the top of the square rod.
优选的,所述支撑架底端开设限位槽一,且限位槽一横截面呈T型,所述L型杆顶端延伸至限位槽一内部,所述支撑架前后两端均开设方孔,且方孔一端与限位槽一相通,所述支撑架一端安装卡块,所述卡块一端固定安装T型块一,所述支撑架一端开设T型槽一,且T型槽一内部安装T型块一,所述T型槽一内部顶端固定安装磁方,且磁方一端与T型块一相贴合。Preferably, the bottom end of the support frame is provided with a
优选的,所述支撑架底端均匀固定安装四个方块,所述支撑台顶端均匀开设四个卡槽,且方块一端延伸至卡槽内部。Preferably, four squares are evenly fixed at the bottom end of the support frame, four card slots are evenly formed at the top of the support table, and one end of the squares extends into the inside of the card slots.
优选的,所述固定块顶端对称开设两个T型槽二,所述保护壳一以及保护壳底端均固定安装两个T型块二,且T型块二安装在T型槽二内部,所述T型块二一端固定安装弹簧三,且弹簧三一端固定安装在T型槽二上,所述斜块一顶端开设限位槽二。Preferably, two T-shaped slots two are symmetrically formed at the top of the fixing block, two T-shaped blocks are fixedly installed on the first protective shell and the bottom end of the protective shell, and the second T-shaped block is installed inside the second T-shaped slot. One end of the second T-shaped block is fixedly installed with the third spring, and the third end of the spring is fixedly installed on the second T-shaped groove, and the top end of the first inclined block is provided with a second limiting groove.
本实用新型的有益效果是:The beneficial effects of the present utility model are:
1、第一条有益效果,将支撑架安装在支撑台顶端,使得方块安装在卡槽内部,此时L型杆顶端安装在限位槽一内部,然后使用人员向外拉动两个拉块,拉块移动带动L型杆移动,使得两个磁块相互分离,在弹簧一弹力的作用下,L型杆移动与限位槽一内壁贴合,进而将支撑架卡接固定安装在支撑台顶端,解决了缺少支撑架便捷连接机构,造成不方便对支撑架进行拆装,进而不方便对转动盘以及圆盘进行维护的问题;1. The first beneficial effect is to install the support frame on the top of the support table, so that the block is installed inside the slot. At this time, the top of the L-shaped rod is installed inside the
2、第二条有益效果,同时向内推动保护壳一以及保护壳二,使得斜块一进入凹槽内部,斜块一对斜块二进行挤压,斜块一受到挤压移动,斜块一移动带动T型杆移动,T型杆移动对弹簧二进行拉伸,当斜块二与斜块一上的限位槽二对齐时,在弹簧二弹力的作用下,T型杆移动带动斜块一进入限位槽二内部,进而完成保护壳一与保护壳二的连接,对操作板进行覆盖保护,解决了缺少保护机构,造成操作板暴露在空气中,容易造成操作板损坏的弊端。2. The second beneficial effect is to push the
附图说明Description of drawings
为了更清楚地说明本实用新型实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本实用新型的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动性的前提下,还可以根据这些附图获得其它的附图。In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the following briefly introduces the accompanying drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description These are just some embodiments of the present invention, and for those of ordinary skill in the art, other drawings can also be obtained from these drawings without creative labor.
图1为本实用新型整体结构示意图;Fig. 1 is the overall structure schematic diagram of the present utility model;
图2为本实用新型连接装置结构示意图;Fig. 2 is the structural schematic diagram of the connecting device of the present invention;
图3为本实用新型保护装置结构示意图。FIG. 3 is a schematic structural diagram of the protection device of the present invention.
图中:1、支撑台,2、转动盘,3、固定块,4、操作板,5、支撑架,6、电动推杆,7、圆盘,8、弹性支撑脚,9、矩形槽,10、导杆,11、L型杆,12、弹簧一,13、磁块,14、方杆,15、方孔,16、卡块,17、矩形槽一,18、保护壳一,19、保护壳二,20、T型杆,21、弹簧二,22、凹槽,23、斜块一,24、斜块二。In the picture: 1. Support table, 2. Rotating plate, 3. Fixed block, 4. Operation panel, 5. Support frame, 6. Electric push rod, 7. Disc, 8. Elastic support foot, 9. Rectangular slot, 10. Guide rod, 11, L-shaped rod, 12,
具体实施方式Detailed ways
为使得本实用新型的实用新型目的、特征、优点能够更加的明显和易懂,下面将结合本实用新型实施例中的附图,对本实用新型实施例中的技术方案进行清楚、完整地描述,显然,下面所描述的实施例仅仅是本实用新型一部分实施例,而非全部的实施例。基于本实用新型中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其它实施例,都属于本实用新型保护的范围。In order to make the purpose, features and advantages of the present utility model more obvious and understandable, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the embodiments described below are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present invention.
下面结合附图并通过具体实施方式来进一步说明本实用新型的技术方案。The technical solutions of the present utility model will be further described below with reference to the accompanying drawings and through specific embodiments.
在本实用新型的描述中,需要理解的是,术语“上”、“下”、“顶”、“底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本实用新型和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本实用新型的限制。In the description of the present invention, it should be understood that the orientations or positional relationships indicated by the terms "upper", "lower", "top", "bottom", "inner", "outer", etc. are based on those shown in the accompanying drawings. The orientation or positional relationship is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a reference to the present utility model. limits.
请参阅图1-3所示,一种防震晶圆研磨机机构,包括支撑台1、转动盘2、固定块3、操作板4、支撑架5、电动推杆6、圆盘7、弹性支撑脚8、连接装置以及保护装置,所述支撑台1顶端中间位置安装转动盘2,所述支撑台1底端均匀安装四个弹性支撑脚8,所述支撑台1顶端安装支撑架5,所述支撑架5顶端中间位置安装电动推杆6,且电动推杆6一端穿过支撑架5,所述电动推杆6底端固定安装圆盘7,所述圆盘7安装在转动盘2上侧,所述支撑台1前端固定安装固定块3,且固定块3顶端固定安装操作板4;Please refer to Figures 1-3. A shock-proof wafer grinder mechanism includes a support table 1, a
所述连接装置包括矩形槽9、导杆10、L型杆11、弹簧一12以及磁块13,所述支撑台1顶端对称开设两个矩形槽9,所述矩形槽9内部固定安装导杆10,所述导杆10环形侧面上对称安装两个L型杆11,所述导杆10环形侧面上对称安装两个导杆10,且导杆10两端分别固定安装在L型杆11上以及矩形槽9内部,所述L型杆11一端固定安装磁块13,使用人员向内拉动两个拉块,拉块移动带动L型杆11沿着导杆10移动,L型杆11移动带动磁块13移动,使得两个磁块13相互吸附贴合,L型杆11移动对弹簧一12进行拉伸,使得弹簧一12产生弹力,弹簧一12的弹力小于两个磁块13之间之间的吸附力,然后使用人员将支撑架5安装在支撑台1顶端,使得方块安装在卡槽内部,此时L型杆11顶端安装在限位槽一17内部,然后使用人员向外拉动两个拉块,拉块移动带动L型杆11移动,使得两个磁块13相互分离,在弹簧一12弹力的作用下,L型杆11移动与限位槽一17内壁贴合,进而将支撑架5卡接固定安装在支撑台1顶端,L型杆11移动带动方杆14移动,使得方杆14穿过方孔15延伸至限位槽一17外侧,然后使用人员向下推动卡块16,卡块16移动带动T型块二移动磁磁方分离,卡块16继续移动进入方杆14顶端的方形通孔内部,进而对方杆14进行固定;The connecting device includes a
所述保护装置包括保护壳一18、保护壳二19、T型杆20、弹簧二21、凹槽22、斜块一23以及斜块二24,所述固定块3顶端对称安装保护壳一18以及保护壳二19,所述保护壳二19左端中间位置固定安装斜块一23,所述保护壳一18右端中间位置开设凹槽22,所述保护壳一18顶端安装T型杆20,且T型杆20底端延伸至凹槽22内部,所述T型杆20底端固定安装斜块二24,所述T型杆20环形侧面上安装弹簧二21,且弹簧二21两端分别固定安装在T型杆20上以及保护壳一18上,使用人员同时向内推动保护壳一18以及保护壳二19,使得T型块二沿着T型槽二移动,T型杆20二移动对弹簧三进行拉伸,使得弹簧三产生弹力,保护壳一18以及保护壳二19移动使得斜块一23进入凹槽22内部,斜块一23对斜块二24进行挤压,斜块一23受到挤压移动,斜块一23移动带动T型杆20移动,T型杆20移动对弹簧二21进行拉伸,使得弹簧二21产生弹力,当斜块二24与斜块一23上的限位槽二对齐时,在弹簧二21弹力的作用下,T型杆20移动带动斜块一23进入限位槽二内部,进而完成保护壳一18与保护壳二19的连接,对操作板4进行覆盖保护。The protective device includes a
所述支撑台1一端开设矩形通槽,且矩形通槽一端与矩形槽9相通,所述L型杆11一端固定安装拉块,且拉块一端穿过矩形通槽并延伸至矩形通槽外侧,该设计方便拉动L型杆11移动;所述L型杆11一端开设圆形通孔,且圆形通孔内部安装导杆10,所述圆形通孔内部均匀安装两个以上滚珠,且滚珠球形侧面与导杆10环形侧面相贴合,所述L型杆11一端固定安装方杆14,且方杆14顶端开设方形通孔,该设计滚珠的设计方便L型杆11在导杆10上滑动;所述支撑架5底端开设限位槽一17,且限位槽一17横截面呈T型,所述L型杆11顶端延伸至限位槽一17内部,所述支撑架5前后两端均开设方孔15,且方孔15一端与限位槽一17相通,所述支撑架5一端安装卡块16,所述卡块16一端固定安装T型块一,所述支撑架5一端开设T型槽一,且T型槽一内部安装T型块一,所述T型槽一内部顶端固定安装磁方,且磁方一端与T型块一相贴合,该设计方便固定L型杆11的位置,避免误碰到拉块带动L型杆11移动;所述支撑架5底端均匀固定安装四个方块,所述支撑台1顶端均匀开设四个卡槽,且方块一端延伸至卡槽内部,该设计起到辅助安装支撑架5的目的,同时避免支撑架5安装完成后发生水平移动;所述固定块3顶端对称开设两个T型槽二,所述保护壳一18以及保护壳底端均固定安装两个T型块二,且T型块二安装在T型槽二内部,所述T型块二一端固定安装弹簧三,且弹簧三一端固定安装在T型槽二上,所述斜块一23顶端开设限位槽二,该设计方便保护壳一18以及保护壳二19的移动,弹簧三的设计方便拉动保护壳一18以及保护壳二19开启。One end of the support table 1 is provided with a rectangular through slot, and one end of the rectangular through slot is communicated with the
本实用新型在使用时,将支撑架5安装在支撑台1顶端,使得方块安装在卡槽内部,此时L型杆11顶端安装在限位槽一17内部,然后使用人员向外拉动两个拉块,拉块移动带动L型杆11移动,使得两个磁块13相互分离,在弹簧一12弹力的作用下,L型杆11移动与限位槽一17内壁贴合,进而将支撑架5卡接固定安装在支撑台1顶端。When the utility model is in use, the support frame 5 is installed on the top of the support table 1, so that the block is installed inside the slot, and the top of the L-shaped
同时向内推动保护壳一18以及保护壳二19,使得斜块一23进入凹槽22内部,斜块一23对斜块二24进行挤压,斜块一23受到挤压移动,斜块一23移动带动T型杆20移动,T型杆20移动对弹簧二21进行拉伸,当斜块二24与斜块一23上的限位槽二对齐时,在弹簧二21弹力的作用下,T型杆20移动带动斜块一23进入限位槽二内部,进而完成保护壳一18与保护壳二19的连接,对操作板4进行覆盖保护。At the same time, push the protective shell one 18 and the protective shell two 19 inwards, so that the inclined block one 23 enters the
对于本领域技术人员而言,显然本实用新型不限于上述示范性实施例的细节,而且在不背离本实用新型的精神或基本特征的情况下,能够以其他的具体形式实现本实用新型。因此,无论从哪一点来看,均应将实施例看作是示范性的,而且是非限制性的,本实用新型的范围由所附权利要求而不是上述说明限定,因此旨在将落在权利要求的得同要件的含义和范围内的所有变化囊括在本实用新型内。不应将权利要求中的任何附图标记视为限制所涉及的权利要求。It will be apparent to those skilled in the art that the present invention is not limited to the details of the above-described exemplary embodiments, and that the present invention may be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention. Therefore, the embodiments are to be considered in all respects as exemplary and not restrictive, and the scope of the present invention is defined by the appended claims rather than the foregoing description, and it is therefore intended that the All changes within the meaning and scope of the required identical elements are included in the present invention. Any reference signs in the claims shall not be construed as limiting the involved claim.
以上所述,以上实施例仅用以说明本实用新型的技术方案,而非对其限制;尽管参照前述实施例对本实用新型进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本实用新型各实施例技术方案的精神和范围。As mentioned above, the above embodiments are only used to illustrate the technical solutions of the present utility model, but not to limit them; although the present utility model has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that it can still be Modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements to some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions depart from the spirit and scope of the technical solutions of the embodiments of the present invention .
Claims (6)
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