CN211320561U - Laser output coupling device - Google Patents
Laser output coupling device Download PDFInfo
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- CN211320561U CN211320561U CN202020122398.7U CN202020122398U CN211320561U CN 211320561 U CN211320561 U CN 211320561U CN 202020122398 U CN202020122398 U CN 202020122398U CN 211320561 U CN211320561 U CN 211320561U
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Abstract
The utility model relates to a laser technical field, in particular to laser output coupling device. The laser output coupling device comprises an output coupling mirror assembly, an adjusting assembly and a mounting plate; the bottom plate of the adjusting component is fixedly arranged on one side of the mounting plate, and the output coupling mirror component is fixedly arranged on the other side of the mounting plate; the adjusting assembly further comprises a first adjusting rod assembly and a first adjusting ball, and a second adjusting rod assembly and a second adjusting ball; the bottom plate is provided with a first light path channel, a first guide rail, a second guide rail and a groove; one side of the output coupling mirror assembly is provided with an inclined plane-shaped adjusting pin, a concave plane-shaped adjusting pin and a positioning block; the other side of the output coupling mirror assembly is pressed on the laser output coupling device through a fixing device with an elastic component, and a positioning block of the coupling mirror assembly is rotatably pressed in a groove on the bottom plate; the utility model provides a laser output coupling device has alleviated the output coupling device who exists among the prior art and has adjusted the degree of difficulty height, and has dangerous technical problem.
Description
Technical Field
The application relates to the technical field of laser, in particular to a laser output coupling device.
Background
In the high-end photoetching field, the high repetition frequency excimer laser is an absolutely dominant light source applied in the semiconductor photoetching field at present due to the characteristics of high repetition frequency, narrow line width and large energy.
In high repetition frequency excimer laser systems, the optical output suffers from a number of problems, the first of which is that the laser light emitted from the discharge chamber cannot meet the narrow linewidth and large energy requirements.
In general, an output coupling mirror having a certain reflectance and transmittance is added to perform a back-folding oscillation on the output laser light, so that the laser light is output after the line width is narrowed. In the tuning process of the output coupling device, the output light with higher energy can be obtained only by spending longer time for debugging in the resonant cavity state, the traditional structure with the same direction of the output light and the adjusting position not only increases the tuning difficulty but also improves the personnel danger in the adjusting process, the connection mode at the two ends of the traditional output coupling device is cantilever type flange connection, the traditional output coupling device is not stable enough after being installed, and after a complete light path is connected, the tuning result can generate deviation again. In addition, for high repetition frequency excimer laser, the specific position can be determined only by starting up the output light position, which causes inconvenience to the butt joint of laser systems.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a laser output coupling device to it is high to solve current output coupling device and adjust the degree of difficulty, and has the dangerous problem of personnel in the accommodation process.
In order to achieve the above object, the present invention provides a laser output coupling device, which includes an output coupling mirror assembly, an adjusting assembly and a mounting plate;
the mounting plate is provided with a first light path channel, a bottom plate of the adjusting component is fixedly arranged on one side of the first light path channel, and the output coupling mirror component is fixedly arranged on the other side of the first light path channel;
the adjusting assembly further comprises a first adjusting rod assembly and a first adjusting ball, and a second adjusting rod assembly and a second adjusting ball;
the bottom plate is provided with a second light path channel, a first guide rail, a second guide rail and a groove;
one side of the output coupling mirror assembly is provided with an inclined plane-shaped adjusting pin, a concave plane-shaped adjusting pin and a positioning block;
the other side of the output coupling mirror assembly is pressed on the laser output coupling device through a fixing device with an elastic component, and a positioning block of the coupling mirror assembly is rotatably pressed in a groove on the bottom plate;
the first adjusting ball is positioned between the first guide rail and the inclined plane-shaped adjusting pin, one end of the first adjusting rod assembly is in contact with the first adjusting ball, and the first adjusting ball can slide along the first guide rail under the pushing of the first adjusting rod assembly;
the second adjusting ball is positioned between the second guide rail and the concave adjusting pin, one end of the second adjusting rod assembly is in contact with the second adjusting ball, and the second adjusting ball can slide along the second guide rail under the pushing of the second adjusting rod assembly;
the mounting panel be equipped with the mounting hole that first light path passageway link up, first regulating lever subassembly and second regulating lever subassembly all install in the mounting hole.
The first adjusting rod assembly and the second adjusting rod assembly are installed in the installation hole.
Preferably, the inclined plane-shaped adjusting pin, the concave plane-shaped adjusting pin and the positioning block are distributed in a triangular shape.
Preferably, the groove is a spherical groove, a conical groove or a frustoconical groove.
Preferably, the guide rail may be a V-groove guide rail, a trapezoidal groove guide rail or a spherical groove guide rail.
Preferably, the inclined surface of the inclined surface-shaped adjusting pin is a wedge surface or an inclined concave surface.
Preferably, the concave surface of the concave surface-shaped adjusting pin is V-shaped, trapezoid, concave spherical surface or rectangular.
Preferably, the concave surface-shaped adjusting pin is an inclined surface V-shaped adjusting pin, an inclined surface trapezoid, an inclined surface concave spherical surface or an inclined surface rectangular adjusting pin.
Preferably, the positioning block is a spherical positioning block or a truncated cone positioning block.
Preferably, the laser output coupling device further comprises a slit located between the output coupling mirror assembly and the base plate of the adjustment assembly.
Preferably, the number of the mounting holes is two, and the two mounting holes are respectively used for mounting the first adjusting rod and the second adjusting rod.
Preferably, the first and second lever assemblies are of different lengths.
The utility model discloses technical scheme's beneficial effect: the utility model provides a laser output coupling device, first adjusting ball can follow first guide rail and slide under the promotion of first regulating lever subassembly, the second guide rail that can follow slides under the promotion of second regulating lever subassembly is adjusted to the second regulating ball, and the other end of first regulating lever subassembly and second regulating lever subassembly extends to the outside of mounting panel, can make the position change of establishing the output coupling mirror subassembly in the light path passageway through adjustment mechanism in the outside of mounting panel like this, thereby realize the purpose of regulation, it is high to alleviate the output coupling device regulation degree of difficulty that exists among the prior art, and have dangerous technical problem.
Drawings
FIG. 1: the embodiment of the utility model provides an appearance structure sketch map of laser output coupling device;
FIG. 2: the embodiment of the utility model provides a laser output coupling device's main part axle profile map;
FIG. 3: the embodiment of the utility model provides a connection schematic diagram of an adjusting component and an output coupling mirror component;
FIG. 4: the embodiment of the utility model provides an output coupling mirror assembly's structure sketch map;
FIG. 5: the embodiment of the utility model provides a structure schematic diagram of a first adjusting rod component;
FIG. 6: the embodiment of the utility model provides an installation schematic diagram of a slit structure;
FIG. 7: the embodiment of the utility model provides a schematic structure diagram of a connecting seat component;
FIG. 8: the embodiment of the utility model provides an output light direction mechanism's schematic structure diagram;
FIG. 9: the embodiment of the utility model provides a structure schematic diagram of a light path transposition mirror assembly;
FIG. 10: the embodiment of the utility model provides a laser output coupling device disconnection state diagram;
FIG. 11: the embodiment of the utility model provides a laser output coupling device points to the state diagram;
FIG. 12: the embodiment of the utility model provides a laser output coupling device connection state diagram;
FIG. 13: the embodiment of the utility model provides a laser output coupling device integral erection blast map.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the application and do not constitute a limitation on the application.
The utility model discloses a laser output coupling device as shown in figure 1. Wherein the mounting plate 1 is a carrier for carrying all mechanisms of the whole output coupling device; the window distribution flange 2 is a sealing flange used for connecting a left-end module light path and is an input end of the light path; the output flange 3 is a sealing flange for connecting the optical path of the right module and is the output end of the optical path.
The mounting plate 1 is provided with an output coupling mirror assembly 4, an adjusting assembly 5, an output light direction mechanism 6, an air inlet nozzle 7 and a connecting seat assembly 8, as shown in fig. 2.
The mounting plate 1 is provided with an output coupling device fixing interface 101, adopts a three-point positioning mode, can effectively reduce the assembly deviation with a left end module, and is integrally made of a hard aluminum alloy material or other materials with high rigidity and easy heat dissipation. The top of the mounting plate 1 is provided with an air inlet nozzle 7, and the air inlet direction of the air inlet nozzle 7 can be vertical to the two sides of the optical path of the output coupling mirror and can not directly cut the center of the optical path. The mounting plate 1 is provided with a first light path channel, and the side surface of the mounting plate is provided with a mounting hole communicated with the first light path channel.
The output coupling mirror assembly 4 is pressed against the mounting plate 1 by 3 shoulder set screws with springs, although it is also possible to fix the output coupling mirror assembly 4 to the mounting plate 1 by other means with elastic structures. The structure of the output coupling mirror assembly 4 is as shown in fig. 3 and 4, the output coupling mirror 401 is placed in an annular groove of the bottom plate 402 of the mirror holder, the upper surface of the output coupling mirror 401 is pressed by a pressing ring-shaped elastic element 403, the top plate 404 of the mirror holder is installed and fixed, the bottom plate 401 of the mirror holder is respectively provided with a concave adjusting pin 406, a slope adjusting pin 407, a positioning block 405, a slope adjusting pin, a concave adjusting pin and a positioning block which are distributed triangularly, and the installation position needs to adopt a positioning structure to ensure the installation angle precision. The positioning block 405 in this example is installed in an interference fit manner, the concave surface-shaped adjusting pin 406 is limited by the positioning groove structure, the degree of freedom in the angular direction of the inclined surface-shaped adjusting pin 407 is limited by the concave surface of the concave surface-shaped adjusting pin 406, and the movement track of the output coupling mirror assembly 4 during pitching is limited by the concave surface of the concave surface-shaped adjusting pin 406, so that shaking in other directions can be effectively prevented when the output coupling mirror assembly 4 is adjusted in two dimensions.
The inclined surface of the inclined surface-shaped adjusting pin 407 is a wedge surface or an inclined concave surface. The concave surface of the concave adjusting pin 406 is V-shaped, trapezoidal, concave spherical or rectangular. The concave adjustment pin 406 itself may also be beveled, and the concave adjustment pin may be a beveled V-shaped adjustment pin, a beveled trapezoid, a beveled concave spherical surface, or a beveled rectangular adjustment pin. The locating block 405 is a spherical locating block or a frustoconical locating block.
The adjustment assembly 5, as shown in FIG. 3, includes a base plate 501, a first adjustment rod assembly 502, a second adjustment rod assembly 503, a first adjustment ball 504 and a second adjustment ball 505. The bottom plate 501 is made of stainless steel or other high-hardness material, and has a second optical path, a first guide rail and a second guide rail. The first guide rail and the second guide rail can be V-shaped grooves, trapezoidal grooves or spherical grooves and the like, and the first guide rail and the second guide rail can be the same or different. The guide rail can be a V-shaped groove, a trapezoidal groove or a spherical groove; the first adjusting ball 504 is located between the first guide rail and the bevel-shaped adjusting pin 407 of the output coupling mirror assembly 4, one end of the first adjusting rod assembly 502 is in contact with the first adjusting ball 504, and the first adjusting ball 504 of the output coupling mirror assembly 4 can slide along the first guide rail under the pushing of the first adjusting rod assembly 502; the second adjusting ball 505 is located between the second guide rail and the concave adjusting pin 406, one end of the second adjusting rod assembly 503 is in contact with the second adjusting ball 505, and the second adjusting ball 505 can slide along the second guide rail under the pushing of the second adjusting rod assembly 503.
Because the inclined plane-shaped adjusting pin 407, the positioning block 405, the inclined plane-shaped adjusting pin, the concave plane-shaped adjusting pin and the positioning block are distributed in a triangular shape, and the positioning block 405 is positioned in a direction deviating from one adjusting rod, the first adjusting rod assembly 502 and the second adjusting rod assembly 503 are two adjusting assemblies with the same structure and different lengths, so that tuning operation is easy to perform. Wherein the first adjustment lever assembly 502 is configured as shown in figure 5. The left port of the adjusting rod 502.1 is of a double-layer thread structure, the inner layer of threads controls the extension and retraction of the adjusting top column 502.2, and the outer layer of threads is used for installing a plug 502.3 so as to seal the inner space. Of course, the structure of the adjusting rod assembly may be other length-adjustable structures and sealing structures, as long as the length-adjustable and sealing functions can be achieved, and the specific structure is not limited.
The using method of the adjusting assembly 5 is as follows, the plug 502.3 of the first adjusting rod assembly 502 is opened, the adjusting top column 502.2 is rotated to extend or retract, the adjusting top column 502.2 pushes the first adjusting ball 504, the first adjusting ball 504 advances along the first guide rail in the bottom plate 501, a spring on a shaft shoulder set screw connected with the output coupling mirror assembly 4 is jacked up, and the output coupling mirror assembly 4 completes one-dimensional adjustment by taking the positioning block 5 as a supporting point; during the adjustment of the other dimension, the same operation is performed on the second adjustment rod assembly 503, and the out-coupling mirror assembly 4 completes the tuning of the other dimension with the positioning block 5 as a supporting point. Adjustment of the different dimensions and/or angles of the out-coupling mirror assembly 4 is accomplished by adjusting the first adjustment rod assembly 502 and/or the second adjustment rod 503.
In another embodiment of the present invention, the first adjusting rod assembly 502 and the second adjusting rod assembly 503 may have the same structure and different lengths, and of course, the lengths may be different or the structures may be different. In addition, the two adjusting rods may be disposed on the same side, and may be parallel to each other or may not be parallel to each other to form a certain angle, and the positions of the two guide rails on the bottom plate 501 and the positions of the two adjusting pins on the coupling mirror assembly 4 are adjusted accordingly.
In another embodiment of the present invention, the two adjusting rods may also be disposed at different sides, and the structure and the length may be the same or different, and may be parallel or form a certain angle therebetween, and the two guide rail positions on the bottom plate 501 and the positions of the two adjusting pins on the coupling mirror assembly 4 are correspondingly adjusted.
The above can be implemented for adjustment of the output coupling mirror assembly 4 in different dimensions and/or angles.
In order to conveniently calibrate the working angle of the output coupling mirror assembly 4, a slit structure 9 is additionally arranged between the output coupling mirror assembly 4 and incident light, as shown in fig. 6, the slit structure 9 has the functions of limiting the shape of a laser spot and filtering out stray light, the slit structure 9 can be circular, square or any other shape, and the mounting plate 1 needs a positioning structure so that the slit structure 9 can be accurately mounted and positioned, can be a positioning groove with higher precision, can also be used for mounting a positioning pin and the like. When the slit structure 9 is used in cooperation with other module slits at the left end of the output coupling device, the ideal position of the output coupling mirror can be achieved only by tuning the output coupling device to align the laser at the centers of the two slits without the state of a resonant cavity.
The output light directing mechanism 6 comprises an alignment adjusting frame 601, a directing light source 602 and a light path transposing mirror assembly 603, the light path transposing mirror assembly 603 aims to reflect emergent light of the directing light source 602 to the same direction as that of output light of the laser, then the position of the directing light source is finely adjusted through the alignment adjusting frame 601, so that the directing light and the output light of the laser are aligned and positioned, the adjusting assembly 5 can be locked and fixed after the directing light source is positioned, and the output position of the laser can be judged through a light path route of the directing light source after the directing light source is fixed. The directional light source 602 may be selected from any low power visible light generator such as a laser diode, helium-neon laser, or the like.
The light path transposing mirror assembly 603 is composed of a transposing base plate 603.1, a light path transposing mirror 603.2, and a rotary mount 603.3, as shown in fig. 9. The transposition bottom plate 603.1 is provided with a light-passing hole for pointing to the light path, the lower bottom surface of the transposition bottom plate is provided with a positioning pin and a magnetic element, the light path transposition mirror 603.2 rotates through a rotating fixing piece 603.3, and the requirements of using and separating pointing laser can be quickly met through butt joint of the positioning pin and adsorption of the magnetic element. The optical path transposing mirror 603.2 can use a 45-degree right-angle prism, and transpose is completed by coating reflection on the bevel edge of the 45-degree prism or incidence of a right-angle surface through internal reflection, or can use a plane mirror to transpose to 45 degrees for optical path transposing, and the fixing mode can adopt ultraviolet glue bonding or mechanical clamping and the like.
The connector assembly 8 comprises a connector 801, a magnetic element 802, a first contact switch 803, and a second contact switch 804. The connecting seat 801 is installed outside the output coupling mirror assembly 4, can protect the output coupling mirror assembly 4 and seal the light path, and has a positioning pin hole on the outer surface, and is equipped with the magnetic element 802, and the number and the position of the magnetic element 802 are designed in association with the corresponding piece on the transposing bottom plate 603.1, which can help the light path transposing mirror 603.2 to complete the quick positioning, and the first contact switch 803 and the second contact switch 804 are installed side by side at the left end of the connecting seat.
The implementation of the position detection function is shown in fig. 10-12. When the optical path transpose mirror 603.2 is in the separated position and the output flange 3 is normally abutted to the connection seat assembly 8, at this time, the first contact switch 803 and the second contact switch 804 are not triggered, and the system can determine that the current state is the off state as shown in fig. 10; when the optical path transposing mirror 603.2 reaches the pointing position, the first contact switch 803 is not triggered, the second contact switch 804 is triggered, and the system can determine that the current pointing state is as shown in fig. 11; when the optical path transposing mirror 603.2 leaves the pointing position and the output flange 3 is completely mounted, the first contact switch 803 and the second contact switch 804 are both triggered, and the system can determine that the laser output coupling device is in the state of complete connection as shown in fig. 12.
As shown in fig. 13, the laser output coupling device of the present invention is composed of a mounting plate 1, a window arrangement flange 2, an output flange 3, an output coupling mirror assembly 4, an adjusting assembly 5 (including a bottom plate 501, an adjusting rod assembly 502, 503), an output light directing mechanism 6 (including an alignment adjusting frame 601, a directing light source 602, a light path transposition mirror assembly 603), an air inlet nozzle 7, a connecting seat assembly 8, and a slit structure 9.
The present embodiment provides a laser output coupling device, which has the following structural functions: the laterally placed output coupling mirror can be adjusted in two dimensions in the forward direction (normal operating direction); the output coupling mirror is provided with an air inlet interface, so that the output coupling mirror can be effectively radiated and inert gas is injected to ensure the stability of a light path; the output light directing mechanism is convenient to move in and out of the optical path of the laser; the optical path connection state detection device has an in-place detection function, and can monitor the connection state of the output flange and the optical path transpose mirror in real time so as to judge the connection state of the optical path.
Compared with the prior art, the laser output coupling device can obtain the following beneficial effects:
(1) the positioning deviation between the interface of the output coupling device and the interface of the left end module is effectively reduced;
(2) the output coupling device can be reliably fixed in the system, and the integral deviation of the output coupling mirror caused by the influence of external force is reduced;
(3) the convenient tuning and calibration of the output coupling device can be met, and the optical path is sealed after the tuning;
(4) the rotating rod with an integrated structure is used for effectively solving the unsmooth rotation phenomenon caused by friction force during tuning;
(5) the tuning method of pushing the objective lens bracket by using the steel ball to advance in the guide rail effectively solves the phenomena of idle stroke and unstable offset in the adjustment of the output coupling device;
(6) the output position of the laser can be positioned by starting the pointing light source under the condition of not starting the laser;
(7) the real-time monitoring of the connection condition of the output coupling device is realized, and the reliability and maintainability of the equipment are improved.
The first and second lever assemblies of the tuning mechanism of the present embodiment are respectively mounted in two mounting holes of the mounting plate, and may be actually mounted in one mounting hole, or mounted outside the mounting plate, and the like, and are not limited to the mounting range of the present embodiment.
The first optical path channel of the mounting plate and the second optical path channel of the adjusting component bottom plate can be approximately concentric or non-concentric as long as the laser can be ensured to pass through.
The above-described embodiments of the present application do not limit the scope of the present application. Any other corresponding changes and modifications made according to the technical idea of the present application should be included in the protection scope of the claims of the present application.
Claims (10)
1. A laser output coupling device is characterized in that,
the laser output coupling device comprises an output coupling mirror assembly, an adjusting assembly and a mounting plate;
the mounting plate is provided with a first light path channel;
the bottom plate of the adjusting component is fixedly arranged on one side of the first light path channel, and the output coupling mirror component is fixedly arranged on the other side of the first light path channel;
the adjusting assembly further comprises a first adjusting rod assembly and a first adjusting ball, and a second adjusting rod assembly and a second adjusting ball;
the bottom plate is provided with a second light path channel, a first guide rail, a second guide rail and a groove;
one side of the output coupling mirror assembly is provided with an inclined plane-shaped adjusting pin, a concave plane-shaped adjusting pin and a positioning block;
the other side of the output coupling mirror assembly is pressed on the laser output coupling device through a fixing device with an elastic component, and a positioning block of the coupling mirror assembly is rotatably pressed in a groove on the bottom plate;
the first adjusting ball is positioned between the first guide rail and the inclined plane-shaped adjusting pin, one end of the first adjusting rod assembly is in contact with the first adjusting ball, and the first adjusting ball can slide along the first guide rail under the pushing of the first adjusting rod assembly;
the second adjusting ball is positioned between the second guide rail and the concave adjusting pin, one end of the second adjusting rod assembly is in contact with the second adjusting ball, and the second adjusting ball can slide along the second guide rail under the pushing of the second adjusting rod assembly;
the adjustment assembly is mounted on the mounting plate.
2. The laser output coupling device of claim 1, wherein the bevel-shaped adjustment pin, the concave-shaped adjustment pin, and the positioning block are triangularly disposed.
3. The laser output coupling device of claim 1, wherein the groove is a spherical groove, a conical groove, or a frustoconical groove.
4. The laser output coupling device of claim 1, wherein the bevel of the bevel-shaped tuning pin is a wedge or a beveled concave surface.
5. The laser outcoupling apparatus of claim 1, wherein the concave surface of said concave-shaped adjustment pin is V-shaped, trapezoidal, concave spherical, or rectangular.
6. The laser outcoupling apparatus of claim 5, wherein said concave shaped adjustment pin is a beveled V shaped adjustment pin, a beveled trapezoid, a beveled concave spherical surface, or a beveled rectangular adjustment pin.
7. The laser out-coupling apparatus of claim 1, wherein the positioning block is a spherical positioning block or a frustoconical positioning block.
8. The laser out-coupling apparatus of claim 1, further comprising a slit between the output coupling mirror assembly and the base of the adjustment assembly.
9. The laser output coupling device of claim 1, wherein the mounting plate is provided with a mounting hole therethrough for the first optical path passage, and the first and second lever assemblies are mounted in the mounting hole.
10. The laser output coupling arrangement of claim 9, wherein there are two of said mounting holes, one for mounting said first and second adjustment rod assemblies.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020122398.7U CN211320561U (en) | 2020-01-18 | 2020-01-18 | Laser output coupling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020122398.7U CN211320561U (en) | 2020-01-18 | 2020-01-18 | Laser output coupling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211320561U true CN211320561U (en) | 2020-08-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020122398.7U Active CN211320561U (en) | 2020-01-18 | 2020-01-18 | Laser output coupling device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211320561U (en) |
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2020
- 2020-01-18 CN CN202020122398.7U patent/CN211320561U/en active Active
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