CN211318816U - Filter based on double guided mode resonance grating mode coupling mechanism - Google Patents
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- CN211318816U CN211318816U CN202020093412.5U CN202020093412U CN211318816U CN 211318816 U CN211318816 U CN 211318816U CN 202020093412 U CN202020093412 U CN 202020093412U CN 211318816 U CN211318816 U CN 211318816U
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Abstract
The utility model belongs to the technical field of photoelectron components and parts, in particular to a filter based on a double-guided mode resonance grating mode coupling mechanism, which comprises a transparent covering layer, a first guided mode resonance grating layer, an intermediate medium layer, a second guided mode resonance grating layer and a transparent basal layer; the utility model has the advantages of it is following: (1) the device has the characteristics of frequency selective characteristic and sensitivity height. (3) The intermediate dielectric layer is dynamically controlled by electricity, light, sound, magnetism and heat, so that the effective modulation of the electromagnetic induction-like transparent resonance peak is realized. (4) The device of the utility model has simple structure, adopts COMS compatible micro-processing technology to realize, is easy to prepare, is convenient to use, and can operate under normal temperature and normal pressure.
Description
Technical Field
The utility model belongs to the technical field of optoelectronic components and parts, concretely relates to wave filter based on two mode resonance grating mode coupling systems of leading.
Background
The guided-mode resonance grating consists of a grating and a planar optical waveguide. Under the periodic modulation of the grating, the incident light interacts with the optical mode supported by the waveguide, causing the light energy to be redistributed and diffracted out of the planar optical waveguide to form reflections or transmissions. Guided mode resonance gratings are typically composed of only dielectric materials, and thus can be highly transparent and can be widely used in transmissive or reflective elements, as well as in various high power optoelectronic devices.
In the prior art, the Chinese patent application for the invention discloses a sensor based on guided mode resonance effect: 2018-08-10, and the sensor can be used for detecting the tiny change of the refractive index of a sample to be detected. The double-layer guided mode resonance grating structure design used by the device does not produce optical mode coupling effect between the two gratings, and the application range and the function of the device are both greatly limited.
The double-layer guided mode resonance grating induces an electromagnetic induction-like transparent effect through optical mode coupling, can realize a spectral structure forming a steep and narrow transparent peak in a wide absorption peak, and is usually accompanied with a strong dispersion effect, so that the light speed is greatly reduced, and the double-layer guided mode resonance grating provides a potential solution for an optical system with low loss and an ultrahigh quality factor and realizes a plurality of important applications, such as an optical filter, an optical modulator, a sensor, slow light transmission, an optical memory, an optical buffer and the like. So far, the simulation of realizing the electromagnetic induction transparent effect based on a plurality of coupled microcavity optical systems such as a Fabry-Perot (F-P) microcavity structure, a Whispering Gallery Mode (WGM) structure, a photonic crystal structure, a metamaterial structure and the like is proposed. The electromagnetic induction-like transparent effect generated by mode coupling between the double guided mode resonance gratings provides a new idea and a new method for the design of novel micro-nano photonic devices and photonic integrated devices.
SUMMERY OF THE UTILITY MODEL
To the shortcoming or not enough of above-mentioned prior art, the utility model provides a wave filter based on two mode resonance grating mode coupling mechanisms that lead can be used to realize photoelectron components and parts preparation such as sensor, light modulator, photoswitch, wave filter, and the device has characteristics such as simple structure, tunable, sensitivity height.
The utility model discloses detailed technical scheme does: a filter based on a double-guided mode resonance grating mode coupling mechanism comprises a transparent covering layer A, a first guided mode resonance grating layer GMRG1, an intermediate medium layer B, a second guided mode resonance grating layer GMRG2 and a transparent substrate layer C; the transparent covering layer A has a thickness D1For reducing reflection of light; first guided mode resonance grating layer GMRG1 includes first grating layer 10 and first optical waveguide layer 11, and first grating layer 10 material is the same with first optical waveguide layer 11, for the cuboid arch of periodic arrangement in first optical waveguide layer 11 upper surface, and the grating period is P, and the height is H1The width of the grating ridge is W1The first optical waveguide layer 11 is H2A thickness of a high refractive index medium; the intermediate medium layer B is arranged at a distance D between the first guided mode resonance grating layer GMRG1 and the second guided mode resonance grating layer GMRG22Under the fixed condition, the light transmission phase between the first guided mode resonance grating layer GMRG1 and the second guided mode resonance grating layer GMRG2 can be regulated and controlled by changing the refractive index; the second guided mode resonance grating layer GMRG2 comprises a second grating layer 20 and a second optical waveguide layer 21, the materials and the structure of the second guided mode resonance grating layer GMRG1 can be completely the same as those of the first guided mode resonance grating layer GMRG1, so that guided mode resonance frequencies of the second guided mode resonance grating layer GMRG2 and the first guided mode resonance grating layer GMRG1 are overlapped, and coherent coupling of an optical mode is realized and electromagnetic induction-like transparent resonance is generated together; the transparent base layer C is used to support the device.
Further, the transparent covering layer A is silicon dioxide.
Further, the thickness D of the transparent cover layer A1Between 400nm and 1800 nm.
Further, the first and second guided-mode resonance grating layers GMRG1 and GMRG2 are silicon or silicon nitride.
Further, in the first grating layer 10 and the second grating layer 20, the grating period P ranges from 400nm to 800nm, the grating ridge width W ranges from 80nm to 300nm, and the grating height H is1In the range of 30nm to 250 nm.
Further, the first optical waveguide layer 11 and the second optical waveguide layerLayer 21, thickness H2In the range of 250nm to 650 nm.
Further, the transparent substrate layer C is silicon dioxide.
Further, the distance D between the first guided mode resonance grating layer GMRG1 and the second guided mode resonance grating layer GMRG22The setting of (2) satisfies the transmission phase matching principle, and is usually between 1000nm and 8000 nm.
Further, the intermediate dielectric layer B is an electro-optical material or a ferroelectric material, such as potassium dihydrogen phosphate (KDP), potassium dihydrogen phosphate (DKDP), Ammonium Dihydrogen Phosphate (ADP), lithium niobate (LiNbO)3) Lithium iodate (LiIO)3) Barium titanate (BaTiO)3) Strontium titanate (SrTiO)3) Potassium tantalate (KTaO)3) Etc. by electrically controlling the refractive index of the region.
Further, the intermediate dielectric layer B is a phase change material, such as germanium-antimony-tellurium (GST), and the refractive index of the region is controlled by temperature.
Further, the intermediate medium layer B is a magneto-optical material, such as Yttrium Iron Garnet (YIG), Gadolinium Gallium Garnet (GGG), CdCr2S4Etc. the refractive index of the region is modulated by a magnetic field.
Further, the intermediate dielectric layer B is an acousto-optic material, such as lead molybdate (PbMoO)4) Lead di (Pb) molybdate2MoO5) Tellurium dioxide (TeO)2) Mercury sulfide (HgS), mercurous chloride (Hg)2Cl2) The refractive index of the region is regulated by acoustic waves, mechanical waves, external forces, and the like.
Further, the intermediate medium layer B is a semiconductor material, such as gallium arsenide (GaAs) or tin telluride (CdTe), and the refractive index of the region is optically controlled.
The utility model discloses based on following principle: the first guided mode resonance grating layer and the second guided mode resonance grating layer respectively generate peak wavelengths lambda under incident light1And λ2The frequencies of the two guided mode formants overlap. By utilizing the diffraction characteristic of the grating, the first guided mode resonance grating layer and the second guided mode resonance grating layer can diffract light upwards and downwards, so that one grating layer is providedPart of light is reflected back and forth between the two grating layers, and when the transmission phase matching between the two grating layers generates coherent resonance coupling, a new optical mode can be formed, namely, narrow-band electromagnetic induction transparent resonance is realized. The transmission phase between the two grating layers can be changed by the change of the refractive index of the middle medium layer, so that the electromagnetic induction-like transparent resonance peak position regulation and control are realized. The quasi-electromagnetic induction transparent peak of the device has the advantages of high quality factor and controllable resonance peak position.
The utility model has the advantages of it is following: (1) the double-guided mode resonance grating mode coupling induction type electromagnetic induction transparency physical effect is utilized, the double-guided mode resonance grating mode coupling induction type electromagnetic induction transparency physical effect has rich physical significance and practical application value, and can be used for preparing filters, sensors, optical modulators, optical switches and other photoelectronic components. (2) The electromagnetic induction-like transparent resonance peak has a high quality factor, and the position of the resonance peak can be regulated, so that the device has the characteristics of high frequency selection characteristic and high sensitivity. (3) The intermediate dielectric layer is dynamically controlled by electricity, light, sound, magnetism and heat, so that the effective modulation of the electromagnetic induction-like transparent resonance peak is realized. (4) The device of the utility model has simple structure, adopts COMS compatible micro-processing technology to realize, is easy to prepare, is convenient to use, and can operate under normal temperature and normal pressure.
Drawings
FIG. 1 is a block diagram of a filter based on a dual guided mode resonant grating mode coupling mechanism;
FIG. 2 is an equivalent structure diagram of a filter based on a dual guided mode resonant grating mode coupling mechanism;
fig. 3 is a schematic diagram of a filter based on a dual guided mode resonant grating mode coupling mechanism:
(a) the transmittance curves of the coupled dual guided mode resonant grating filter were compared to the transmittance curves of GMRG1 alone and GMRG2 alone;
(b) local enlarged view of the area near the quasi-electromagnetic induction transparent peak;
(c) distribution of electric field intensity of the device at different wavelengths;
(d) a three-level model;
FIG. 4 is a diagram of simulation results of the adjustment of the transparent peak shape of the device by the refractive index change of the middle dielectric layer.
Detailed Description
The conception, the specific structure and the technical effects of the present invention will be further described with reference to the accompanying drawings, so as to fully understand the objects, the features and the effects of the present invention.
The structure diagram of a filter based on a double-guided mode resonance grating mode coupling mechanism is shown in fig. 1, and the equivalent structure diagram is shown in fig. 2, and the filter is composed of a transparent cover layer a, a first guided mode resonance grating layer GMRG1, an intermediate medium layer B, a second guided mode resonance grating layer GMRG2, and a transparent substrate layer C, and the difference is that the relative positions of the grating layer and the optical waveguide layer are different. In FIG. 2(a), the grating layers are all located above the optical waveguide layer; in FIG. 2(b), the grating layers are all located below the optical waveguide layer; FIG. 2(c) shows the grating layers below and above the optical waveguide layer, respectively; in fig. 2(d), the grating layers are respectively positioned above and below the optical waveguide layer.
Taking the structure of FIG. 1 as an example, the transparent covering layer A is silicon dioxide and has a thickness D1800nm, for reducing the reflection of light by the device. The guided mode resonance grating layers GMRG1 and GMRG2 are both composed of a grating layer and an optical waveguide layer, and the distance D between the grating layer and the optical waveguide layer21.55 μm, silicon, one-dimensional bar grating, and micro-processing to obtain grating height H1120nm, grating period P500 nm, grating ridge width W135 nm, grating over the optical waveguide layer, and optical waveguide layer thickness H2447 nm. The refractive index of the middle medium layer B is 1.444. The transparent substrate layer C is silicon dioxide.
Fig. 3 is a schematic diagram of a filter based on a dual guided mode resonant grating mode coupling mechanism. As shown in fig. 3(a), the first and second separate guided-mode resonance grating layers GMRG1 and GMRG2 respectively generate guided-mode resonances with overlapping resonant peak frequencies for incident light. When two guided-mode resonance gratings are arranged in the same structure, and the distance between the grating waveguide layers is D2At 1.55 μm, coherent resonant coupling occurs due to transmission phase matching of light, and an extremely narrow Electromagnetic Induction Transparent (EIT) -like resonance occurs in a broad absorption peak. FIG. 3(b) is a partial enlarged view of a region near a transparent peak of electromagnetic induction, showing the quality of the transparent peak of electromagnetic inductionThe factor reaches 17229. Fig. 3(c) shows electric field intensity distribution diagrams of devices at different wavelengths, which correspond to the wavelength positions i, ii, and iii shown in fig. 3(b), respectively, where at the wavelength position ii, the electric field intensity is distributed in both the first guided mode resonance grating layer GMRG1 and the second guided mode resonance grating layer GMRG2, and there is a significant coherent resonance coupling phenomenon, and at the wavelength positions i and iii, due to incoherence, the electric field intensity is distributed only in the first guided mode resonance grating layer GMRG1 or the second guided mode resonance grating layer GMRG2, and the intensity is weak. The device principle can be explained by the three-level model shown in fig. 3 (d).
The intermediate medium layer is solid. The dynamic control of the transparent peak position of the device is realized by inducing the material of the intermediate medium layer by exciting in the modes of external electricity, light, sound, magnetism, heat and the like, changing the refractive index of the material and the transmission phase of the light in the device, further influencing the coherent coupling between the guided mode resonance grating layers and finally realizing the large amplitude modulation of the electromagnetic induction-like transparent peak shape.
At a distance D as shown in FIG. 4(a)2Under 5.9 μm, the spectrum curve of the device responding to the change of the refractive index of the intermediate medium layer is red-shifted and the peak shape is greatly changed along with the increase of the refractive index of the medium layer. The larger the spacing between the guided mode resonance grating layers shown in fig. 4(b), the more sensitive the device is to changes in the refractive index of the dielectric layer.
Claims (17)
1. A filter based on a double guided mode resonance grating mode coupling mechanism is characterized in that: the grating comprises a transparent covering layer (A), a first guided mode resonance grating layer (GMRG1), an intermediate medium layer (B), a second guided mode resonance grating layer (GMRG2) and a transparent substrate layer (C); the transparent covering layer (A) has a thickness of D1For reducing reflection of light; first guided mode resonance grating layer (GMRG1) includes first grating layer (10) and first optical waveguide layer (11), and first grating layer (10) material is the same with first optical waveguide layer (11), for the cuboid arch of periodic arrangement in first optical waveguide layer (11) upper surface, and the grating period is P, and highly is H1The width of the grating ridge is W1The first optical waveguide layer (11) is H2Of thicknessA high refractive index medium; under the condition that the distance d between the first guided mode resonance grating layer (GMRG1) and the second guided mode resonance grating layer (GMRG2) is fixed, the intermediate medium layer (B) can realize the light transmission phase regulation and control between the first guided mode resonance grating layer (GMRG1) and the second guided mode resonance grating layer (GMRG2) by changing the refractive index; the second guided mode resonance grating layer (GMRG2) comprises a second grating layer (20) and a second optical waveguide layer (21), the materials and the structures of the second guided mode resonance grating layer and the first guided mode resonance grating layer (GMRG1) can be completely the same, so that the guided mode resonance frequencies of the second guided mode resonance grating layer and the first guided mode resonance grating layer (GMRG1) are overlapped, and the second guided mode resonance grating layer (GMRG2) and the first guided mode resonance grating layer (GMRG1) are matched to realize coherent coupling of an optical mode and generate electromagnetic induction-like transparent resonance; the transparent base layer (C) is used for supporting a device.
2. A filter according to claim 1 based on a dual guided mode resonant grating mode coupling mechanism, wherein: the transparent covering layer (A) is silicon dioxide and has a thickness D1Between 400nm and 1800 nm.
3. A filter according to claim 1 based on a dual guided mode resonant grating mode coupling mechanism, wherein: the first guided mode resonance grating layer (GMRG1) and the second guided mode resonance grating layer (GMRG2) are silicon or silicon nitride.
4. A filter according to claim 1 based on a dual guided mode resonant grating mode coupling mechanism, wherein: the first grating layer (10) and the second grating layer (20) have a grating period P within the range of 400-800 nm, a grating ridge width W within the range of 80-300 nm, and a grating height H1In the range of 30nm to 250 nm.
5. A filter according to claim 1 based on a dual guided mode resonant grating mode coupling mechanism, wherein: the first optical waveguide layer (11) and the second optical waveguide layer (21) have a thickness H2In the range of 250nm to 650 nm.
6. A filter according to claim 1 based on a dual guided mode resonant grating mode coupling mechanism, wherein: the transparent substrate layer (C) is silicon dioxide.
7. A filter according to claim 1 based on a dual guided mode resonant grating mode coupling mechanism, wherein: a distance D between the first guided mode resonance grating layer (GMRG1) and the second guided mode resonance grating layer (GMRG2)2The setting of (2) meets the transmission phase matching principle and is between 1000nm and 8000 nm.
8. A filter according to claim 1 based on a dual guided mode resonant grating mode coupling mechanism, wherein: the middle medium layer (B) is made of an electro-optic material or a ferroelectric material, and the refractive index of the area is electrically controlled.
9. A filter according to claim 8 based on a dual guided mode resonant grating mode coupling mechanism, wherein: the intermediate medium layer (B) is potassium dihydrogen phosphate, ammonium dihydrogen phosphate, lithium niobate, lithium iodate, barium titanate, strontium titanate or potassium tantalate.
10. A filter according to claim 1 based on a dual guided mode resonant grating mode coupling mechanism, wherein: the intermediate medium layer (B) is a phase-change material, and the refractive index of the region is regulated and controlled through temperature.
11. A filter according to claim 10 based on a dual guided mode resonant grating mode coupling scheme, wherein: the intermediate dielectric layer (B) is germanium-antimony-tellurium.
12. A filter according to claim 1 based on a dual guided mode resonant grating mode coupling mechanism, wherein: the intermediate medium layer (B) is made of magneto-optical material, and the refractive index of the region is regulated and controlled through a magnetic field.
13. A filter according to claim 12 based on a dual guided mode resonant grating mode coupling scheme, wherein: the intermediate medium layer (B) is yttrium iron garnet, gadolinium gallium garnet or CdCr2S4。
14. A filter according to claim 1 based on a dual guided mode resonant grating mode coupling mechanism, wherein: the middle medium layer (B) is made of an acousto-optic material, and the refractive index of the region is regulated and controlled through sound waves, mechanical waves or external force.
15. A filter according to claim 14 based on a dual guided mode resonant grating mode coupling scheme, wherein: the intermediate medium layer (B) is lead molybdate, tellurium dioxide, mercuric sulfide or mercurous chloride.
16. A filter according to claim 1 based on a dual guided mode resonant grating mode coupling mechanism, wherein: the intermediate medium layer (B) is made of semiconductor materials, and the refractive index of the region is regulated and controlled through light.
17. A filter according to claim 16 based on a dual guided mode resonant grating mode coupling scheme, wherein: the intermediate dielectric layer (B) is gallium arsenide or tin telluride.
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| CN111142187A (en) * | 2020-01-16 | 2020-05-12 | 中国人民解放军国防科技大学 | Filter based on double guided mode resonance grating mode coupling mechanism |
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| CN111142187A (en) * | 2020-01-16 | 2020-05-12 | 中国人民解放军国防科技大学 | Filter based on double guided mode resonance grating mode coupling mechanism |
| CN111142187B (en) * | 2020-01-16 | 2024-06-11 | 中国人民解放军国防科技大学 | Filter based on double-guided-mode resonance grating mode coupling mechanism |
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