CN211318171U - Atmosphere condition adjustable spectral measurement system - Google Patents
Atmosphere condition adjustable spectral measurement system Download PDFInfo
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- CN211318171U CN211318171U CN201922152078.6U CN201922152078U CN211318171U CN 211318171 U CN211318171 U CN 211318171U CN 201922152078 U CN201922152078 U CN 201922152078U CN 211318171 U CN211318171 U CN 211318171U
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Abstract
The utility model discloses an atmosphere condition adjustable spectral measurement system mainly solves current spectral analysis instrument application scope limited, is difficult to satisfy diversified measured problem. The spectrum measurement system comprises a central control unit, and a gas injection system, a vacuum optical analysis chamber, an analysis chamber vacuum acquisition unit, a detection optical path system and a collection optical path system which are connected with the central control unit through signal cables. The utility model combines the vacuum system and the optical system, realizes the selective adjustment and control of the atmosphere condition of the measured object, can completely eliminate the interference of air to the spectral analysis, satisfies the analysis of specific substances under the condition of required characteristic atmosphere, and can be suitable for the analysis of high activity, toxicity, radioactivity or other harmful substances; the measurement capability of the spectral measurement system is improved, and the measurement application range is expanded. Therefore, the method is suitable for popularization and application.
Description
Technical Field
The utility model relates to a vacuum instrument technique and optical analysis instrument technical field, specifically speaking relates to an atmosphere condition adjustable spectral measurement system.
Background
The atmosphere condition adjustable spectrum measuring system can selectively adjust and control the atmosphere condition of the measured object, thereby achieving the purposes of eliminating the measurement interference introduced by atmosphere, improving the measurement capability and expanding the measurement application range.
At present, various types of spectrum analysis instruments (such as LIBS, Raman spectrum, infrared spectrum and the like) mainly adopt a mode of directly measuring in the atmosphere, using inert gas to purge and measure, and placing in a transparent container such as quartz and the like for analysis and detection. Such spectroscopic analyzers are difficult to measure effectively in special application scenarios where air interferes with the measurement strongly, and the sample has high activity, toxicity, radioactivity and other harmful properties. Furthermore, conventional spectroscopic analysis instruments are also not suitable for measurements that require specific atmospheric conditions to be able to be performed.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an atmosphere condition adjustable spectral measurement system, it is limited mainly to solve current spectral analysis instrument application scope, is difficult to satisfy diversified measuring problem.
In order to achieve the above object, the utility model adopts the following technical scheme:
a spectrum measuring system with adjustable atmosphere conditions comprises a central control unit, a vacuum optical analysis chamber, an analysis chamber vacuum acquisition unit, a detection optical path system and a collection optical path system, wherein the vacuum optical analysis chamber, the analysis chamber vacuum acquisition unit, the detection optical path system and the collection optical path system are connected with the central control unit through signal cables; the central control unit is used for coordinating and controlling each unit and finishing gas configuration, optical measurement and spectrum acquisition under given atmosphere conditions through a controller instruction in the central control unit; the gas injection system is used for obtaining gas with set flow or volume; the vacuum optical analysis chamber is used for enabling the gas injected by the gas injection system to interact with the sample in the vacuum optical analysis chamber under the given atmosphere condition and emitting a spectrum signal to be detected; the analysis chamber vacuum acquisition unit is used for pumping out gas components in the vacuum optical chamber and maintaining the vacuum of the vacuum optical chamber; the detection light path system is used for emitting a detection light source; the collection light path system is used for collecting the spectrum to be detected and transmitting the spectrum to be detected to the outside of the vacuum chamber.
Further, the gas injection system comprises a plurality of gas source tanks, first gas valves arranged on gas outlet pipelines of each gas source tank, gas mass flow meters arranged on gas outlet pipelines of each gas source tank and behind each first gas valve, gas mixing tanks communicated with the gas outlet pipelines of all the gas source tanks, first vacuum pump sets communicated with the gas mixing tanks, first pump set valves arranged between the gas mixing tanks and the first vacuum pump sets, vacuum meters arranged on the gas mixing tanks, and second gas valves arranged at gas outlet ends of the gas mixing tanks; the other end of the second gas valve is communicated with the vacuum optical analysis chamber; the first gas valve, the first vacuum gauge, the first pressure sensor, the first pump set valve and the first vacuum pump set are all connected with the central control unit.
Furthermore, the vacuum optical analysis chamber comprises a first gas filter connected with a second gas valve, a vacuum sample chamber connected with the first gas filter, an optical sealing window arranged on the vacuum sample chamber and used for a detection light source to pass through, a vacuum sealing aviation plug arranged on the vacuum sample chamber, a second gas filter arranged at the other end of the vacuum sample chamber, and a second vacuum gauge connected with the vacuum sample chamber; wherein the second vacuum gauge is connected with the analysis chamber vacuum acquisition unit; the aviation plug is connected with the light collecting path system; and the second gas valve, the second vacuum gauge and the second pressure sensor are all connected with the central control unit.
Further, the analysis chamber vacuum acquisition unit comprises a second pump set valve connected with the second gas filter, and a second vacuum pump set connected with the second pump set valve; and the second vacuum pump set connected with the second pump set valve is connected with the central control unit.
Further, the detection light path system comprises a detection light source and a light path regulator which is matched with the detection light source to enable the detection light to enter the vacuum sample chamber through the optical sealing window; the detection light source and the light path adjuster are connected with the central control unit.
Furthermore, the collection optical path system comprises a spectrum collection mirror arranged in the vacuum sample chamber and connected with the aviation plug, and a spectrometer connected with the aviation plug through an optical fiber or a signal wire; wherein, the spectrometer is connected with the central control unit.
Compared with the prior art, the utility model discloses following beneficial effect has:
the utility model combines the vacuum system and the optical system, realizes the selective adjustment and control of the atmosphere condition of the measured object, can completely eliminate the interference of air to the spectral analysis, satisfies the analysis of specific substances under the condition of required characteristic atmosphere, and can be suitable for the analysis of high activity, toxicity, radioactivity or other harmful substances; the measurement capability of the spectral measurement system is improved, and the measurement application range is expanded.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention.
Wherein, the names corresponding to the reference numbers are:
the method comprises the following steps of 1-a gas source tank, 2-a first gas valve, 3-a gas mass flowmeter, 4-a gas mixing tank, 5-a first vacuum gauge, 6-a first pump set valve, 7-a first vacuum pump set, 8-a second gas valve, 9-a first gas filter, 10-a vacuum sample chamber, 11-an optical sealing window, 12-a second vacuum gauge, 13-an aviation plug, 14-a second gas filter, 15-a second pump set valve, 16-a second vacuum pump set, 17-a detection light source, 18-a light path regulator, 19-a sample to be detected, 20-a spectrum collecting mirror, 21-an optical fiber and 22-a spectrometer.
Detailed Description
The present invention will be further described with reference to the following description and examples, which include but are not limited to the following examples.
Examples
As shown in fig. 1, the utility model discloses a spectral measurement system with adjustable atmosphere conditions, which comprises a central control unit 23, a gas injection system, a vacuum optical analysis chamber, an analysis chamber vacuum acquisition unit, a detection optical path system and a collection optical path system, wherein the gas injection system, the vacuum optical analysis chamber, the analysis chamber vacuum acquisition unit, the detection optical path system and the collection optical path system are connected with the central control unit through signal cables; the central control unit is used for coordinating and controlling each unit and finishing gas configuration, optical measurement and spectrum acquisition under given atmosphere conditions through a controller instruction in the central control unit; the gas injection system is used for obtaining gas with set flow or volume; the vacuum optical analysis chamber is used for enabling the gas injected by the gas injection system to interact with the sample in the vacuum optical analysis chamber under the given atmosphere condition and emitting a spectrum signal to be detected; the analysis chamber vacuum acquisition unit is used for pumping out gas components in the vacuum optical chamber and maintaining the vacuum of the vacuum optical chamber; the detection light path system 17 is used for emitting a detection light source; the collection light path system is used for collecting the spectrum to be detected and transmitting the spectrum to be detected to the outside of the vacuum chamber.
Specifically, the gas injection system comprises a plurality of gas source tanks 1, first gas valves 2 arranged on gas outlet pipelines of each gas source tank 1, gas mass flow meters 3 arranged on gas outlet pipelines of each gas source tank 1 and behind each first gas valve 2, gas mixing tanks 4 communicated with the gas outlet pipelines of all the gas source tanks 1, first vacuum pump sets 7 communicated with the gas mixing tanks 4, first pump set valves 6 arranged between the gas mixing tanks 4 and the first vacuum pump sets 7, vacuum gauges 5 arranged on the gas mixing tanks 4, and second gas valves 8 arranged at gas outlet ends of the gas mixing tanks 4; wherein, the other end of the second gas valve 8 is communicated with the vacuum optical analysis chamber. This gas injection system during operation is firstly to mixing gas pitcher evacuation by first vacuum pump package, then first gas valve opens, and the second gas valve is closed, and gas passes through gas mass flowmeter and gets into mixing gas pitcher with settlement flow or volume to total pressure is strong in mixing gas pitcher record by first pressure sensor, closes first gas valve and gas mass flowmeter after the gas mixing is good.
Specifically, the vacuum optical analysis chamber comprises a first gas filter 9 connected with a second gas valve 8, a vacuum sample chamber 10 connected with the first gas filter 9, an optical sealing window 11 arranged on the vacuum sample chamber 10 and used for detecting the passing of a light source, a vacuum sealing aviation plug 13 arranged on the vacuum sample chamber 10, a second gas filter 14 arranged at the other end of the vacuum sample chamber 10, and a second vacuum gauge 12 connected with the vacuum sample chamber 10; wherein the second vacuum gauge 12 is connected to an analysis chamber vacuum acquisition unit; the aviation plug 13 is connected with the collection light path system. The vacuum optical analysis chamber is used for placing a sample 19 to be analyzed and is communicated with the gas injection system and the analysis chamber vacuum acquisition unit through valves. The detection light irradiates the surface of the sample through the optical sealing window 11, interacts with the sample under the given atmosphere condition and emits a spectral signal to be detected.
In particular, the analysis chamber vacuum acquisition unit comprises a second pump set valve 15 connected to the second gas filter 14, and a second vacuum pump set 16 connected to the second pump set valve 15. When the second gas valve is closed and the second pump set is opened, the gas components in the vacuum optical chamber can be pumped out or the vacuum of the vacuum optical chamber can be maintained, and the vacuum degree of the vacuum optical chamber is measured and recorded by a vacuum gauge and a second pressure sensor.
Specifically, the detection light path system comprises a detection light source 17 and a light path regulator 18 which is used together with the detection light source 17 to enable the detection light to enter the vacuum sample chamber 10 through the optical sealing window 11. The detection light emitted from the detection light source 17 is shaped and transmitted through the optical path adjuster 18 to reach the sample surface through the optical sealing window 11 in a given parameter configuration. The detection light source 17 may be a laser.
The collection optical path system comprises a spectrum collection mirror 20 arranged in the vacuum sample chamber 10 and connected with the aviation plug 13, and a spectrometer 22 connected with the aviation plug 13 through an optical fiber or a signal wire 21. The spectrum to be detected emitted by the interaction of the probe light and the sample is collected by a spectrum collecting mirror 20 under given atmosphere conditions, transmitted to an optical fiber or signal wire 21 outside the vacuum chamber through a vacuum-sealed aviation plug, and finally enters a spectrometer 22.
Wherein, the gas valve, the mass flowmeter, the pressure sensor, the vacuum gauge and the pump set valve of the vacuum part are connected with the central control unit. The central control unit controls the opening and closing of the gas valve and the pump set valve; controlling and adjusting the working mode and parameters of the mass flowmeter; readings of the pressure sensor, vacuum gauge, and for feedback control were recorded.
The laser, the light path adjuster and the spectrometer of the optical part are connected with the central control unit. The central control unit is used for setting laser parameters output by the laser, adjusting the light path and driving the spectrometer to acquire spectral data. Well accuse unit adopts current automated control technique the utility model discloses well no longer give unnecessary details.
Through the design, the spectral measurement system of the utility model realizes the selective adjustment and control of the atmosphere condition of the measured object, can completely eliminate the interference of air to spectral analysis, satisfies the analysis of specific substances under the condition of required characteristic atmosphere, and can also be suitable for the analysis of high-activity, toxicity, radioactivity or other harmful substances; the measurement capability of the spectral measurement system is improved, and the measurement application range is expanded. Therefore, the method has high use value and popularization value.
The above embodiment is only one of the preferred embodiments of the present invention, and should not be used to limit the protection scope of the present invention, but all the insubstantial changes or modifications made in the spirit and the idea of the main design of the present invention, the technical problems solved by the embodiment are still consistent with the present invention, and all should be included in the protection scope of the present invention.
Claims (6)
1. The atmosphere condition adjustable spectrum measuring system is characterized by comprising a central control unit, a gas injection system, a vacuum optical analysis chamber, an analysis chamber vacuum acquisition unit, a detection optical path system and a collection optical path system, wherein the gas injection system, the vacuum optical analysis chamber, the analysis chamber vacuum acquisition unit, the detection optical path system and the collection optical path system are connected with the central control unit through signal cables;
the central control unit is used for coordinating and controlling each unit and finishing gas configuration, optical measurement and spectrum acquisition under given atmosphere conditions through a controller instruction in the central control unit;
the gas injection system is used for obtaining gas with set flow or volume;
the vacuum optical analysis chamber is used for enabling the gas injected by the gas injection system to interact with the sample in the vacuum optical analysis chamber under the given atmosphere condition and emitting a spectrum signal to be detected;
the analysis chamber vacuum acquisition unit is used for pumping out gas components in the vacuum optical chamber and maintaining the vacuum of the vacuum optical chamber;
the detection light path system is used for emitting a detection light source;
the collection light path system is used for collecting the spectrum to be detected and transmitting the spectrum to be detected to the outside of the vacuum chamber.
2. An atmosphere condition adjustable spectral measurement system according to claim 1, the gas injection system comprises a plurality of gas source tanks (1), first gas valves (2) arranged on gas outlet pipelines of each gas source tank (1), a gas mass flow meter (3) arranged on the gas outlet pipelines of each gas source tank (1) and positioned behind each first gas valve (2), a gas mixing tank (4) communicated with the gas outlet pipelines of all the gas source tanks (1), a first vacuum pump set (7) communicated with the gas mixing tank (4), a first pump set valve (6) arranged between the gas mixing tank (4) and the first vacuum pump set (7), a first vacuum gauge (5) and a first pressure sensor arranged on the gas mixing tank (4), and a second gas valve (8) arranged at the gas outlet end of the gas mixing tank (4); the other end of the second gas valve (8) is communicated with the vacuum optical analysis chamber, and the first gas valve (2), the first vacuum gauge (5), the first pressure sensor, the first pump set valve (6) and the first vacuum pump set (7) are all connected with the central control unit.
3. An atmosphere condition adjustable spectrum measuring system according to claim 2, wherein the vacuum optical analysis chamber comprises a first gas filter (9) connected with the second gas valve (8), a vacuum sample chamber (10) connected with the first gas filter (9), an optical sealing window (11) arranged on the vacuum sample chamber (10) for detecting the light source to pass through, a vacuum sealing aviation plug (13) arranged on the vacuum sample chamber (10), a second gas filter (14) arranged at the other end of the vacuum sample chamber (10), and a second vacuum gauge (12) and a second pressure sensor connected with the vacuum sample chamber (10); wherein the second vacuum gauge (12) is connected to an analysis chamber vacuum acquisition unit; the aviation plug (13) is connected with the collection light path system, and the second gas valve (8), the second vacuum gauge (12) and the second pressure sensor are connected with the central control unit.
4. An atmosphere condition adjustable spectral measurement system according to claim 3, wherein said analysis chamber vacuum obtaining unit comprises a second pump set valve (15) connected to the second gas filter (14), and a second vacuum pump set (16) connected to the second pump set valve (15); wherein, the second vacuum pump group (16) connected with the second pump group valve (15) is connected with the central control unit.
5. An atmosphere condition adjustable spectrum measuring system according to claim 4, wherein the detection light path system comprises a detection light source (17), and a light path regulator (18) which is used together with the detection light source (17) to make the detection light enter the vacuum sample chamber (10) through the optical sealing window (11); wherein, the detection light source (17) and the light path adjuster (18) are connected with the central control unit.
6. An atmosphere condition adjustable spectral measurement system according to claim 5, wherein the collection optical path system comprises a spectrum collection mirror (20) arranged in the vacuum sample chamber (10) and connected with the aviation plug (13), and a spectrometer (22) connected with the aviation plug (13) through an optical fiber or a signal wire (21); wherein the spectrometer (22) is connected with a central control unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922152078.6U CN211318171U (en) | 2019-12-04 | 2019-12-04 | Atmosphere condition adjustable spectral measurement system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922152078.6U CN211318171U (en) | 2019-12-04 | 2019-12-04 | Atmosphere condition adjustable spectral measurement system |
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| CN211318171U true CN211318171U (en) | 2020-08-21 |
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| CN201922152078.6U Active CN211318171U (en) | 2019-12-04 | 2019-12-04 | Atmosphere condition adjustable spectral measurement system |
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