CN211314478U - Movable rapid high-vacuum air pumping system - Google Patents
Movable rapid high-vacuum air pumping system Download PDFInfo
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- CN211314478U CN211314478U CN201922002725.5U CN201922002725U CN211314478U CN 211314478 U CN211314478 U CN 211314478U CN 201922002725 U CN201922002725 U CN 201922002725U CN 211314478 U CN211314478 U CN 211314478U
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Abstract
The utility model belongs to the vacuum sealing technology, in particular to a movable rapid high vacuum pumping system, which comprises a vacuum chamber, a molecular pump connected with the vacuum chamber and a mechanical pump, wherein the mechanical pump is connected with a side pumping pipeline of the vacuum chamber through a corrugated pipe, and the top of the vacuum chamber is provided with a connecting pipeline; the side air exhaust pipeline is provided with a vacuum chamber isolation valve, and the top of the vacuum chamber is provided with a vacuum chamber air exhaust valve. In order to meet the condition of rapid high vacuum, a vacuum system comprising a mechanical pump, a corrugated pipe, a molecular pump and a pipeline control valve is designed and installed; valve mechanisms are arranged on the vacuum chamber and the air extraction pipeline and comprise an air release valve, a rough extraction valve and a vacuum chamber isolation valve, so that the functions of air inflation, pre-extraction and cooperative air extraction of the vacuum chamber can be realized respectively.
Description
Technical Field
The utility model belongs to the vacuum seal technique, concretely relates to quick high vacuum pumping system of movable.
Background
At present, common composite air pumping systems are complex in structure, cannot be moved and cannot pump to high vacuum of-3 Pa grade, the air pumping systems which can meet the requirements of high vacuum or ultrahigh vacuum grade are expensive in price, equipment is special, and the air pumping systems which are required by small-volume (not more than 10L) sealed space are not suitable, so that the air pumping systems which are simple in structure, portable and capable of pumping to high vacuum quickly need to be designed.
Disclosure of Invention
The utility model aims at providing a quick high vacuum pumping system of movable, its low price, convenient to use.
The technical scheme of the utility model as follows:
a movable rapid high-vacuum pumping system comprises a vacuum chamber, a molecular pump connected with the vacuum chamber, and a mechanical pump, wherein the mechanical pump is connected with a side pumping pipeline of the vacuum chamber through a corrugated pipe, and the top of the vacuum chamber is provided with a connecting pipeline; the side air exhaust pipeline is provided with a vacuum chamber isolation valve, and the top of the vacuum chamber is provided with a vacuum chamber air exhaust valve.
The corrugated pipe is connected with a side air extraction pipeline of the vacuum chamber, and a mechanical pump rough extraction valve is arranged on the subsequent connecting pipeline.
And the vacuum chamber is provided with a resistance gauge and an ionization gauge.
And the resistance gauge and the ionization gauge are respectively connected with a power supply of the vacuum gauge.
The molecular pump is connected with a molecular pump power supply and a display.
The connecting pipeline is a quartz tube or a corrugated tube.
The vacuum chamber, the molecular pump and the mechanical pump are all arranged on the supporting structure.
The supporting structure comprises a supporting bottom plate at the bottom and a supporting frame arranged on the supporting bottom plate.
And a movable pulley is arranged below the supporting bottom plate.
The molecular pump is connected with a heat radiation fan.
The utility model discloses an effect as follows:
a portable movable support frame is designed, and comprises a movable pulley, a support bottom plate and a support rod; 4 pulleys are arranged at 4 angles at the bottom of the support frame in a distributed manner and can slide at any 360 degrees and be locked at any time.
In order to meet the condition of rapid high vacuum, a vacuum system comprising a mechanical pump, a corrugated pipe, a molecular pump and a pipeline control valve is designed and installed; valve mechanisms are arranged on the vacuum chamber and the air extraction pipeline and comprise an air release valve, a rough extraction valve and a vacuum chamber isolation valve, so that the functions of air inflation, pre-extraction and cooperative air extraction of the vacuum chamber can be realized respectively.
The molecular pump power supply is fixed on a support rod on a support frame, the rotating speed of the molecular pump can be displayed in real time, and high and low rotating speed gears are switched, so that the vacuum pump power supply is suitable for rotating speed selection of different vacuum degree requirements.
Drawings
FIG. 1 is a schematic diagram of a mobile rapid high vacuum pumping system;
in the figure: 1. a movable pulley; 2. a mechanical pump; 3. a bellows; 4. a support frame; 5. a molecular pump power supply and a display; 6. a vacuum gauge power supply; 7. a resistance gauge; 8. an ionization gauge; 9. a vacuum chamber vent valve; 10. a mechanical pump rough pumping valve; 11. an isolation valve of the vacuum chamber; 12. a vacuum chamber; 13. a molecular pump; 14. a molecular pump heat dissipation fan; 15. a support base plate; 16. and connecting the pipelines.
Detailed Description
The present invention will be further explained with reference to the drawings and the detailed description.
The designed movable support frame comprises a support base plate 15, a movable pulley 1 arranged below the support base plate 15, a support frame 4 arranged on the support base plate 15, and a molecular pump power supply and display 5 and a vacuum gauge power supply 6 arranged on the support frame 4, as shown in figure 1.
The vacuum chamber 12 is placed on a supporting bottom plate 15, a molecular pump 13 is connected below the vacuum chamber, and a heat radiation fan 14 can be installed on the molecular pump 13 and is used for cooling the molecular pump 13 and preventing the molecular pump from being overheated at high speed to damage a pump body.
The mechanical pump 2 is arranged on the supporting bottom plate 15, the mechanical pump 2 is connected with the corrugated pipe 3, one end of the corrugated pipe 3 is connected with a side air suction pipeline of the vacuum chamber 12, the other end of the corrugated pipe 3 is connected with the mechanical oil pump 2, and the mechanical oil pump is used for realizing the simultaneous or separate air suction of the vacuum chamber 12 and a part to be sucked.
The top of the vacuum chamber 12 is provided with a connecting pipeline 16, and the connecting pipeline 16 is connected with a pipe for placing a sample to be measured under a high vacuum condition or a container for detecting sealed air leakage.
The side pumping pipeline of the vacuum chamber 12 is provided with a vacuum chamber isolation valve 11 for isolating the mechanical pump 2 and the molecular pump 13 to carry out vacuum pumping with different degrees. The top of the vacuum chamber 12 is provided with a vacuum chamber deflation valve 9 for filling external air after the air extraction is finished, so as to realize the separation of the air extraction system and the extracted parts.
After the corrugated pipe 3 is connected with a side air pumping pipeline of the vacuum chamber 12, a mechanical pump rough air pumping valve 10 is arranged on the connected pipeline and used for early-stage low vacuum air pumping of an air pumping system.
The resistance gauge 7 and the ionization gauge 8 are arranged at the top of the vacuum chamber, are connected with the power supply 6 of the vacuum gauge and are respectively used for measuring the air pressure values in the vacuum chamber under the conditions of low vacuum and high vacuum.
The molecular pump power supply and display 5 is arranged on the support frame 4, is connected with the molecular pump 13 and is used for the operation and the starting of the molecular pump 13 and the monitoring of the rotating speed.
The vacuum gauge power supply 6 is connected with the resistance gauge 7 and the ionization gauge 8, is placed at the top of the support frame 4 and is used for supplying power to the resistance gauge 7 and the ionization gauge so as to realize measurement and pressure display.
Example 1: high vacuum encapsulation experiment of quartz tube sample
On the connecting pipeline at the top of the vacuum chamber 12, a silica gel tube is used as a middle pipeline to connect a quartz tube, and a sample needing high vacuum condition is placed in the quartz tube. After the condition that all pipelines are well sealed is ensured, a molecular pump power supply, a display 5 and a mechanical pump 2 power supply are connected, the mechanical pump 2 is started to pre-pump, and meanwhile, a mechanical pump rough pumping valve 10 is opened to perform low-vacuum pumping on the quartz tube. Then the power supply 6 of the vacuum gauge is switched on, and the real-time pressure data in the vacuum chamber 12 measured by the resistance gauge 7 is displayed on the left side of the power supply of the vacuum gauge. When the pressure in the vacuum chamber 12 is pumped to below 5Pa, the rough pumping valve 10 of the mechanical pump is closed, the isolation valve 11 of the vacuum chamber and the molecular pump 13 are opened at the same time, the high vacuum pumping is started to the quartz tube, for the pumping in the sealed environment with the volume below 2L, the low-speed gear (420Hz) of the molecular pump is used, and for the volume above 2L, the high-speed gear (780Hz) is switched to be pumped. And when the data measured by the ionization gauge 8 on the right side of the power supply of the vacuum gauge shows that the data is in an expected vacuum degree, the quartz tube sample can be subjected to flame rotary firing sealing, and finally the quartz tube high-vacuum sealed sample is obtained and used for subsequent related experiments. For the system which completes the air extraction experiment, before the next air extraction, the air release valve 9 of the vacuum chamber needs to be opened, and air is filled in, so that the separation of the air extraction system and the extracted part is realized.
Example 2: leak detection of sealed containers
For containers requiring leak detection, the mobile rapid high vacuum pumping system is connected to a silicone tube or bellows, similar to the above example. Under the condition that all joints are well sealed, a molecular pump power supply and a display 5 and a mechanical pump 2 power supply are switched on, the mechanical pump 2 and a mechanical pump rough pumping valve 10 are opened, the change of data measured by a resistance gauge 7 on the left side of the vacuum gauge power supply is observed while air pumping is carried out, if the atmospheric pressure is always or only slightly reduced from the atmospheric pressure, a large air leakage hole of a container to be detected is displayed, and the position of the air leakage hole can be detected through air leakage sound or alcohol smearing. During the process of applying alcohol on the surface of the sealed container, when the reading on the left side of the vacuum gauge power supply 6 is increased sharply, a leak exists at the position, and repair is needed. The movable quick high-vacuum air pumping system can be used for quickly and effectively detecting leakage of complex pipeline systems and sealing containers, and is convenient and practical.
Claims (10)
1. A movable rapid high-vacuum pumping system, which comprises a vacuum chamber (12) and a molecular pump (13) connected with the vacuum chamber (12), and is characterized in that: the vacuum chamber is characterized by further comprising a mechanical pump (2), wherein the mechanical pump (2) is connected with a side pumping pipeline of the vacuum chamber (12) through a corrugated pipe (3), and a connecting pipeline (16) is arranged at the top of the vacuum chamber (12); the side extraction pipeline is provided with a vacuum chamber isolation valve (11), and the top of the vacuum chamber (12) is provided with a vacuum chamber deflation valve (9).
2. The mobile rapid high vacuum pumping system according to claim 1, wherein: the corrugated pipe (3) is connected with a side pumping pipeline of the vacuum chamber (12), and a mechanical pump rough pumping valve (10) is arranged on the subsequent connecting pipeline.
3. The mobile rapid high vacuum pumping system according to claim 2, wherein: the vacuum chamber (12) is provided with a resistance gauge (7) and an ionization gauge (8).
4. A mobile rapid high vacuum pumping system according to claim 3, characterized in that: the resistance gauge (7) and the ionization gauge (8) are respectively connected with a vacuum gauge power supply (6).
5. The mobile rapid high vacuum pumping system according to claim 1, wherein: the molecular pump (13) is connected with a molecular pump power supply and a display (5).
6. The mobile rapid high vacuum pumping system according to claim 1, wherein: the connecting pipeline (16) is a quartz tube or a corrugated tube.
7. The mobile rapid high vacuum pumping system according to claim 1, wherein: the device also comprises a supporting structure, wherein the vacuum chamber (12), the molecular pump (13) and the mechanical pump (2) are all arranged on the supporting structure.
8. The mobile rapid high vacuum pumping system according to claim 7, wherein: the supporting structure comprises a supporting bottom plate (15) at the bottom and a supporting frame (4) arranged on the supporting bottom plate (15).
9. The mobile rapid high vacuum pumping system according to claim 8, wherein: a movable pulley (1) is arranged below the supporting bottom plate (15).
10. The mobile rapid high vacuum pumping system according to claim 1, wherein: the molecular pump (13) is connected with a heat radiation fan (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922002725.5U CN211314478U (en) | 2019-11-19 | 2019-11-19 | Movable rapid high-vacuum air pumping system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922002725.5U CN211314478U (en) | 2019-11-19 | 2019-11-19 | Movable rapid high-vacuum air pumping system |
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| Publication Number | Publication Date |
|---|---|
| CN211314478U true CN211314478U (en) | 2020-08-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201922002725.5U Active CN211314478U (en) | 2019-11-19 | 2019-11-19 | Movable rapid high-vacuum air pumping system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112112785A (en) * | 2020-09-18 | 2020-12-22 | 上海裕达实业有限公司 | Portable molecular pump unit |
| CN114486115A (en) * | 2021-12-30 | 2022-05-13 | 合肥鑫波焊接波纹管有限公司 | Bellows vacuum leak detection device |
-
2019
- 2019-11-19 CN CN201922002725.5U patent/CN211314478U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112112785A (en) * | 2020-09-18 | 2020-12-22 | 上海裕达实业有限公司 | Portable molecular pump unit |
| CN114486115A (en) * | 2021-12-30 | 2022-05-13 | 合肥鑫波焊接波纹管有限公司 | Bellows vacuum leak detection device |
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