CN211299994U

CN211299994U - Noninvasive blood glucose meter

Info

Publication number: CN211299994U
Application number: CN201921222719.4U
Authority: CN
Inventors: 崔开宇; 蔡旭升; 朱鸿博; 黄翊东; 冯雪; 刘仿; 张巍
Original assignee: Tsinghua University
Current assignee: Tsinghua University
Priority date: 2019-07-31
Filing date: 2019-07-31
Publication date: 2020-08-21
Anticipated expiration: 2029-07-31

Abstract

The utility model relates to a medical treatment check out test set technical field especially relates to a noninvasive glucose meter. The noninvasive glucose meter of the utility model comprises a light source, a spectrometer and a detection space for the intervention of a body to be measured, wherein the detection space is respectively connected with the light source and the spectrometer, so that the spectrum emitted by the light source can generate incident light entering the spectrometer after passing through the body to be measured; the spectrometer comprises: the light modulation layer is used for carrying out light modulation on incident light so as to obtain a modulated spectrum; the photoelectric detection layer is positioned below the light modulation layer and used for receiving the modulated spectrum and providing differential response to the modulated spectrum; and the signal processing circuit layer is positioned below the photoelectric detection layer and used for reconstructing the differential response to obtain the original spectrum. The noninvasive glucose meter can realize non-contact noninvasive glucose detection, reduces the volume of the spectrometer, and improves the precision of spectral analysis, so that the noninvasive glucose meter has the advantages of high measurement precision, good portability and the like.

Description

Noninvasive blood glucose meter

Technical Field

The utility model relates to a medical treatment check out test set technical field especially relates to a noninvasive glucose meter.

Background

Diabetes Mellitus (DM) is a metabolic disease with multiple causes, is caused by insufficient insulin secretion or insulin utilization disorder, is mainly characterized by chronic hyperglycemia, is accompanied by carbohydrate, fat and protein metabolic disorder, and can cause a series of serious complications. Diabetes is one of the major diseases threatening human health. Diabetes not only greatly reduces the quality of life of patients, but also increases the global economic burden, and thus, the related research on the prevention and treatment of diabetes is not slow.

The blood sugar concentration is an important index for reflecting the state of diabetes, and frequent blood sugar measurement is helpful for monitoring the state of diabetes and maintaining the blood sugar concentration at a normal level in time. Blood sugar detection methods are classified into invasive, minimally invasive and non-invasive methods. Invasive and minimally invasive detection methods have been put into clinical use due to their high accuracy, but these methods often cause patients to feel painful and uncomfortable due to the need of blood collection, and have infection risks, and in addition, the cost per measurement is high, so that noninvasive blood glucose detection techniques are widely concerned by various social circles.

The existing noninvasive glucometer has the serious problem of insufficient measurement precision, the measurement precision of the noninvasive glucometer is greatly influenced by environment and individual difference, and the noninvasive glucometer has the defects of complex operation, no portability, incapability of continuous real-time detection and the like.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

The embodiment of the utility model provides a noninvasive glucose meter for solve the lower problem of measurement accuracy that current noninvasive glucose meter exists.

(II) technical scheme

In order to solve the technical problem, the utility model provides a noninvasive glucose meter, which comprises a light source and a spectrometer, wherein the spectrum emitted by the light source can generate incident light entering the spectrometer after passing through a body to be measured;

the spectrometer comprises:

the light modulation layer is used for carrying out light modulation on the incident light so as to obtain a modulated spectrum;

a photodetection layer located below the light modulation layer for receiving the modulated spectrum and providing a differential response to the modulated spectrum; and

and the signal processing circuit layer is positioned below the photoelectric detection layer and used for reconstructing the differential response to obtain an original spectrum.

In some embodiments, the light modulation layer includes a bottom plate and at least one modulation unit, the bottom plate is disposed on the photodetection layer, each modulation unit is disposed on the bottom plate, a plurality of modulation holes are respectively disposed in each modulation unit, and each modulation hole in each modulation unit is arranged in a two-dimensional pattern structure.

In some embodiments, the two-dimensional graphic structure comprises:

all the modulation holes in each two-dimensional graph structure have the same cross section shape at the same time, and the modulation holes are arrayed according to the size gradient sequence of the structural parameters; and/or

Each of the modulation holes in each of the two-dimensional graph structures has a cross-sectional shape thereof, and the modulation holes are arranged in combination according to a specific cross-sectional shape.

In some embodiments, when the modulation holes are combined and arranged according to respective cross-sectional shapes, the arrangement order is arranged row by row or column by column according to a preset periodic order.

In some embodiments, the bottom of the modulation hole penetrates the bottom plate or does not penetrate the bottom plate.

In some embodiments, the photodetection layer includes at least one detection unit, at least one detection unit is correspondingly disposed below each micro-light modulation unit of the light modulation layer, and all the detection units are electrically connected through the signal processing circuit layer.

In some embodiments, the spectrometer further comprises:

and the light-transmitting medium layer is positioned between the light modulation layer and the photoelectric detection layer.

In some embodiments, the light source and the spectrometer are respectively arranged on two sides of the object to be measured; or

The light source and the spectrometer are both positioned on one side of the body to be measured.

In some embodiments, the noninvasive glucometer further comprises:

the data processing module is connected with the signal processing circuit layer and used for analyzing and calculating the original spectrum to obtain a blood glucose parameter;

and the data display module is connected with the data processing module and is used for displaying the blood sugar parameters.

(III) advantageous effects

The above technical scheme of the utility model following beneficial effect has:

1. noninvasive blood glucose meter include light source, spectrum appearance and supply to await measuring the detection space that the body intervenes, the detection space is connected with light source and spectrum appearance respectively to make the spectrum of light source transmission after waiting to measure the body, can generate the incident light that gets into in the spectrum appearance, this incident light is owing to waiting to measure the body and has received and wait to measure the body influence, so carry out the spectral analysis reconsitution to this incident light through the spectrum appearance, can obtain the spectral data that includes blood glucose parameter, thereby utilize near infrared spectral analysis principle to realize waiting to measure the non-contact of the body to the organism and not have the blood glucose detection of wound.

2. The spectrometer in the noninvasive glucometer comprises: the light modulation layer is used for carrying out light modulation on incident light so as to obtain a modulated spectrum; the photoelectric detection layer is positioned below the light modulation layer and used for receiving the modulated spectrum and providing differential response to the modulated spectrum; and the signal processing circuit layer is positioned below the photoelectric detection layer and used for reconstructing the differential response to obtain the original spectrum. The spectrometer of the noninvasive glucose meter utilizes the light modulation layer to replace various precise optical components in the existing spectrometer, thereby realizing the application type of the spectrometer in the micro-nano structure field, leading the micro-integrated spectrometer to work under the condition of not needing a grating, a prism, a reflecting mirror or other similar space light splitting elements, greatly reducing the volume of the spectrometer, and simultaneously improving the precision of spectral analysis, thereby leading the noninvasive glucose meter to have the advantages of high measurement precision, good portability, real-time online detection, simple operation, stable performance, low manufacturing cost and the like, greatly improving the life quality of a diabetic patient, and having wide market prospect.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic structural view of a noninvasive glucometer according to an embodiment of the present invention;

fig. 2 is a usage state diagram (one) of the noninvasive glucose meter of the embodiment of the invention;

fig. 3 is a schematic structural diagram of a spectrometer according to a first embodiment of the present invention;

fig. 4 is a cross-sectional view of a spectrometer according to a first embodiment of the present invention;

fig. 5 is a schematic view of a light modulation layer according to a first embodiment of the present invention;

fig. 6 is a schematic structural diagram of a photodetection layer according to a first embodiment of the present invention;

fig. 7 is a diagram of the spectrum detection effect of the first embodiment of the present invention;

fig. 8 is a schematic structural view of a light modulation layer according to a second embodiment of the present invention;

fig. 9 is a schematic structural diagram of a spectrometer according to a third embodiment of the present invention;

fig. 10 is a cross-sectional view of a spectrometer according to a third embodiment of the present invention;

fig. 11 is a schematic structural diagram of a spectrometer according to a third embodiment of the present invention;

fig. 12 is a schematic diagram of the relationship between the spectral detection wavelength intensities according to the third embodiment of the present invention;

fig. 13 is a diagram of the spectrum detection effect of the third embodiment of the present invention;

fig. 14 is a cross-sectional view of a spectrometer according to a fourth embodiment of the present invention;

fig. 15 is a cross-sectional view of a spectrometer according to a sixth embodiment of the present invention;

fig. 16 is a cross-sectional view of a spectrometer according to a seventh embodiment of the present invention;

fig. 17 is a schematic view of a spectrometer according to a seventh embodiment of the present invention;

fig. 18 and 19 are process schematic diagrams of a spectrometer modulation hole processing preparation method according to embodiments one to seven of the present invention, respectively;

fig. 20 is a usage state diagram (ii) of the noninvasive glucose meter according to the embodiment of the present invention.

100, a light source; 200. a body to be measured; 300. a spectrometer; 400. a data processing module; 500. a data display module;

1', a substrate; 1. a light modulation layer; 2. a photodetection layer; 3. a signal processing circuit layer; 4. a light-transmitting medium layer; 5. a modulation unit; 6. a micro-nano well; 7. a detection unit; 8. a gap; 11. a first modulation unit; 12. a second modulation unit; 13. a third modulation unit; 14. a fourth modulation unit; 15. a fifth modulation unit;

Detailed Description

The following describes embodiments of the present invention in further detail with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention. Unless otherwise stated, the blood glucose meters mentioned in the present invention are short for noninvasive blood glucose meters.

The detection principle of the existing noninvasive glucometer mainly comprises Raman spectroscopy, polarization measurement, optical coherence tomography, acousto-optic technology, bioelectrical impedance spectroscopy, fluorescence detection technology, mid-infrared spectroscopy, near-infrared spectroscopy and the like. Various detection technical principles have respective advantages and disadvantages, wherein the near infrared spectrum technology becomes one of the most promising noninvasive blood glucose detection technologies due to the advantages of high precision, low cost, high efficiency, real-time monitoring and the like.

Based on foretell near infrared spectrum technique, the utility model discloses each embodiment provides a noninvasive blood glucose meter, and this blood glucose meter can utilize near infrared spectroscopy analysis principle to realize the non-contact noninvasive blood glucose measurement to the organism body of awaiting measuring to have that measurement accuracy is high, the portability is good, can real-time on-line measuring, easy operation, stable performance, low in manufacturing cost etc. advantage, can greatly improve diabetes mellitus patient's quality of life, have wide market prospect.

Specifically, as shown in fig. 1, the noninvasive glucometer includes a light source 100 and a spectrometer 300. The light source 100 is a near infrared light source, and according to the principle of near infrared spectroscopy, the spectrum emitted by the light source 100 can generate incident light entering the spectrometer 300 after passing through the object 200 to be measured. The spectrometer 300 can replace precision optical components in the spectrometer 300 to achieve precise modulation of incident light; the spectrometer 300 can flexibly realize the modulation effect on light with different wavelengths, including but not limited to scattering, absorption, projection, reflection, interference, surface plasmon polariton, resonance and the like of light, and the difference of spectral response among different areas is improved, so that the analysis accuracy of the spectrometer 300 is improved.

As shown in fig. 3 to 19, the spectrometer 300 includes a light modulation layer 1, a photodetection layer 2, and a signal processing circuit layer 3. The light modulation layer 1 has a spectrum-receiving surface facing the object 200 to be measured, and the light modulation layer 1 is used to perform light modulation on incident light to obtain a modulated spectrum. The photodetection layer 2 is located below the light modulation layer 1 for receiving the modulated spectrum and providing a differential response to the modulated spectrum. The signal processing circuit layer 3 is connected below the photoelectric detection layer 2 and is used for reconstructing the differential response to obtain the original spectrum. This spectrum appearance 300 utilizes light modulation layer 1 to replace various accurate optical component among the current spectrum appearance to realize the application nature of spectrum appearance 300 in the micro-nano structure field, make spectrum appearance 300 can carry out work under the condition that does not need grating, prism, speculum or other similar space beam splitting component, reduced spectrum appearance 300's volume greatly, improved spectral analysis's accuracy simultaneously.

In the noninvasive glucometer of this embodiment, the incident light affected by the subject 200 has a component spectrum inside the subject 200, and the spectrum includes blood glucose parameters. The blood glucose meter performs spectrum analysis and reconstruction on the incident light by using the spectrometer 300, so as to obtain original spectrum data of the interior of the body to be measured 200 including blood glucose parameters, and the obtained information of the original spectrum, such as wavelength, intensity and the like, can reflect the concentration of components, such as blood glucose and the like.

Further, the noninvasive glucometer further includes a data processing module 400 and a data display module 500. The data processing module 400 is connected to the spectrometer 300, and the blood glucose parameters including blood glucose concentration and the like can be further calculated and obtained through the data processing module 400 according to the reconstructed data information of the original spectrum. The data processing module 400 includes spectral data preprocessing and a blood glucose concentration prediction model. The spectral data preprocessing refers to preprocessing noise existing in the spectral data of the blood glucose concentration tested by the micro spectrometer 300, and the processing method adopted by the spectral data preprocessing includes, but is not limited to, fourier transform, differential, wavelet transform and the like. The blood glucose concentration prediction model includes the prediction of blood glucose parameters related to blood glucose concentration and the like obtained from the spectral data information, and the algorithms used by the model include, but are not limited to, a least square method, a principal component analysis and an artificial neural network. The data processing module 400 is connected to the data display module 500, and the data display module 500 displays the blood glucose parameter calculated by the data processing module 400.

In order to facilitate the spectrum of the light source 100 to pass through the object 200, the light source 100 and the spectrometer 300 are preferably disposed on two sides of the detection space, respectively, and the detection space is located between the light source 100 and the spectrometer 300. Taking fig. 2 as an example, the light source 100 and the spectrometer 300 are respectively disposed at the upper and lower sides of the detection space, and during lateral detection, the object 200 to be detected is only required to transversely extend into the detection space to ensure that the near infrared spectrum generated by the light source 100 passes through the object 200 to be detected, and the incident light generated by the passing through the object 200 to be detected can directly enter the spectrometer 300. The structure arrangement enables the near infrared spectrum to pass through the body 200 to be detected in a straight line, and the accuracy of spectrum information acquisition is improved.

Alternatively, the light source 100 and the spectrometer 300 may be disposed on the same side of the detection space, such as the light source 100 and the spectrometer 300, as shown in FIG. 20. Taking fig. 20 as an example, the light source 100 and the spectrometer 300 are simultaneously disposed at the lower side of the detection space, and the upper side of the light source 100 and the spectrometer 300 is the detection space. By using the principle of light reflection, the near infrared spectrum generated by the light source 100 can penetrate into the object 200 to be measured, and part or all of the spectrum forms incident light under the action of reflection and is emitted into the spectrometer 300. The structure can enlarge the detection space and improve the use convenience of the glucometer.

It should be noted that the above two arrangements of the spectrometer 300 and the light source 100 are applicable to the spectrometer 300 according to the embodiments of the present invention.

Furthermore, the modulation holes 6 in the same modulation unit 5 on the light modulation layer 1 are arranged to form a two-dimensional graph structure with a specific arrangement rule, the modulation effect on light with different wavelengths is realized by using different two-dimensional graph structures, and the difference of spectral response between different regions can be improved by using the difference of the two-dimensional graph structures, so that the analysis precision of the spectrometer 300 is improved.

The spectrometer 300 of the present invention is described in detail below with reference to several embodiments.

Example one

As shown in fig. 3 and 4, the spectrometer 300 of the first embodiment includes a light modulation layer 1 including a modulation unit 5. All the modulation holes 6 in the modulation unit 5 penetrate the bottom plate. All the modulation holes 6 in the modulation unit 5 have the same specific cross-sectional shape, which is an example of an ellipse in fig. 1 in this embodiment. All the modulation holes 6 are arranged in an array according to the size gradient sequence of the structural parameters to form a two-dimensional graph structure. In the two-dimensional graph structure, all the modulation holes 6 are arranged in an array, and all the modulation holes 6 are arranged row by row and column by column according to the length of the long axis, the length of the short axis and the rotation angle from small to large, so that all the modulation holes 6 integrally form a modulation unit 5 on the bottom plate of the light modulation layer 1.

It can be understood that, as shown in fig. 5, all the modulation holes 6 of the present embodiment are arranged according to the same arrangement rule, that is, the modulation holes 6 are gradually arranged row by row from small to large according to the structural parameters of the length of the long axis, the length of the short axis, and the rotation angle, so that all the modulation holes 6 on the light modulation layer 1 can be regarded as an integral modulation unit 5, or can be arbitrarily divided into a plurality of modulation units 5, and the arbitrarily divided modulation units 5 have different modulation effects on the spectrum, and theoretically, infinite groups of modulated spectrum samples can be obtained, thereby sharply increasing the data amount for reconstructing the original spectrum, and facilitating the recovery of the spectrum pattern of the broadband spectrum. The effect of the modulation of light of different wavelengths by each modulation cell 5 may be determined according to the characteristics of the structural parameters of the modulation aperture 6 in that modulation cell 5.

It is understood that the specific cross-sectional shape of the modulation hole 6 includes a circle, an ellipse, a cross, a regular polygon, a star, a rectangle, etc., and any combination of the above shapes may be used. Correspondingly, the structural parameters of the modulation hole 6 include an inner diameter, a length of a long axis, a length of a short axis, a rotation angle, an angle number or a side length, and the like.

The thickness of the bottom plate of the light modulation layer 1 in the first embodiment is 60nm to 1200nm, and the light modulation layer 1 and the photodetection layer 2 are directly connected or connected through the transparent medium layer 4. The photoelectric detection layer 2 is electrically connected with the signal processing circuit layer 3. As shown in fig. 3, all the modulation holes 6 on the optical detection layer are elliptical, the lengths of the major axes and the minor axes of all the elliptical modulation holes 6 are respectively increased row by row, and the horizontal direction in fig. 3 is taken as the horizontal axis, and the vertical direction is taken as the vertical axis, so that all the elliptical modulation holes 6 rotate from the vertical axis to the horizontal axis row by row, and the rotation is performed from the vertical axis to the horizontal axis, and the rotation is performed by the rotationThe rotation angle gradually increases. All the modulation holes 6 constitute an integral two-dimensional pattern structure which is integrally a matrix structure having an area in the range of 5 μm²～4cm²。

In the manufacturing process of the spectrometer 300 of this embodiment, a silicon-based material is selected as the material of the optical modulation layer 1 and the photoelectric detection layer 2, so that the spectrometer has good compatibility in the manufacturing process. When the light modulation layer 1 is prepared, the light modulation layer 1 may be directly formed on the photodetection layer 2, or the prepared light modulation layer 1 may be transferred to the photodetection layer 2.

Specifically, the direct generation method of the light modulation layer 1 specifically includes: directly depositing and generating a light modulation layer 1 arranged according to the structure shown in fig. 3 on the photoelectric detection layer 2; or a substrate made of a silicon-based material is mounted on the photoelectric detection layer 2, and then micro-nano machining is performed on the substrate according to the structure shown in fig. 3, so that the light modulation layer 1 is obtained.

The process of the direct deposition growth comprises the following steps: firstly, depositing a silicon flat plate with the thickness of 100 nm-400 nm (nanometers) on the photoelectric detection layer 2 by methods of sputtering, chemical vapor deposition and the like. And secondly, drawing a required two-dimensional graph structure on the graph by using a graph transfer method such as photoetching, electron beam exposure and the like, wherein the structure is shown in figure 5. The two-dimensional graph structure specifically comprises: only the minor axis and the rotation angle of the elliptical modulation hole 6 are gradually adjusted, and the major axis of the ellipse is selected from a fixed value of 200 nm-1000 nm, such as 500 nm; the length of the minor axis varies within a range of 120nm to 500nm, the rotation angle of the ellipse varies within a range of 0 to 90 DEG, and the arrangement period of the ellipse is a constant value within a range of 200nm to 1000nm, for example, 500 nm. The overall pattern range of the two-dimensional pattern structure is about a rectangular array structure with a length of 115 μm and a width of 110 μm. And thirdly, etching the silicon flat plate by methods such as reactive ion etching, inductively coupled plasma etching, ion beam etching and the like to obtain the required light modulation layer 1. Finally, the light modulation layer 1 and the photodetection layer 2 are electrically connected to the signal processing circuit layer 3 as a whole.

The transfer preparation method of the light modulation layer 1 specifically includes: firstly, a hole is formed on a substrate through micro-nano processing according to the structure shown in fig. 3 to obtain a prepared light modulation layer 1, and then the prepared light modulation layer 1 is transferred to a photoelectric detection layer 2. Specifically, the process of the transfer method of the light modulation layer 1 is: firstly, preparing the light modulation layer 1 on a silicon chip or an SOI (silicon-on-insulator-silicon chip) according to the parameters, then transferring the light modulation layer 1 to the photoelectric detection layer 2 by a transferring method, and finally electrically connecting the light modulation layer 1 and the photoelectric detection layer 2 to the signal processing circuit layer 3.

As shown in fig. 18 and fig. 19, this embodiment further provides another preparation process of the spectrometer 300, which specifically includes: and a III-V group detector, specifically a GaAs/InGaAs quantum well detector, is arranged in the photoelectric detection layer 2. As shown in fig. 18, a detector comprising a GaAs substrate 1' and an InGaAs quantum well photodetection layer 2 is flip-chip bonded on a CMOS circuit. As shown in fig. 19, the substrate 1 'is directly thinned, and then micro-nano processing is performed on the substrate 1' to form a two-dimensional pattern structure, thereby forming the light modulation layer 1. The difference between the preparation process and the micro-nano processing tapping is that the upper surface of a photoelectric detection layer 2 consisting of a detector is directly used as a substrate 1' for Weiner processing, so that the tight connection between the processed and prepared light modulation layer 1 and the photoelectric detection layer 2 is ensured, and the effect of light modulation effect influenced by gaps is avoided.

It is understood that the spectrometer 300 of the present embodiment that enables modulation of light includes, but is not limited to, one-dimensional, two-dimensional photonic crystals, surface plasmons, metamaterials, and metasurfaces. Specific materials may include silicon, germanium, silicon germanium materials, compounds of silicon, compounds of germanium, metals, group III-V materials, and the like. Wherein the silicon compound includes, but is not limited to, silicon nitride, silicon dioxide, silicon carbide, and the like. The light-transmitting layer material may include a material with a low refractive index such as silicon dioxide and a high molecular polymer. The photoelectric detector can be selected from a silicon detector (the detection range is 780 nm-1100 nm), a III-V semiconductor (such as InGaAs/InAlAs and GaAs/AlGaAs) detector (the detection range is 1000 nm-2600 nm), an antimonide (such as InSb) detector (the detection range is 1 mu m-6.5 mu m), an HgCdTe detector (the detection range is 0.7-25 mu m) and the like.

As shown in fig. 4 and fig. 6, in the spectrometer 300 according to this embodiment, the photodetection layer 2 includes a plurality of detection units 7, each detection unit 7 in the photodetection layer 2 is equipped with at least one photodetector, and the detection range of the photodetector is slightly larger than the structural range of the modulation hole 6. The photoelectric detection layer 2 of an array structure consisting of a plurality of detection units 7 can transmit detected signals to the signal processing circuit layer 3 through electric contacts. The signal processing circuit layer 3 of this embodiment is provided with an algorithm processing system, and the algorithm of the algorithm processing system is used to process the differential response based on the algorithm, so as to reconstruct and obtain the original spectrum. The differential response is obtained by calculating a difference between signals of response spectra obtained by modulating the respective modulation units 5. This reconstruction process is accomplished by the data processing module 400 described above.

In this embodiment, a plurality of modulation holes 6 may correspond to one detection unit 7 at the same time, or each modulation hole 6 may correspond to one or more detection units 7, that is, each modulation unit 5 corresponds to one or more detection units 7 in the vertical direction, so that it is only necessary that at least one modulation hole 6 corresponds to at least one detection unit 7 in the same modulation unit 5. This structural arrangement ensures that the modulation unit 5 can always modulate incident light of at least one wavelength and that the modulated light can be received by the detection unit 7. In order to prevent the detection units 7 from interfering with each other during operation, a gap 8 is preferably left between two adjacent detection units 7.

The complete process of the spectrometer 300 for spectrum detection in this embodiment is as follows: first, when a spectrum is made incident into the spectrometer 300 from above the light modulation layer 1, different response spectra are obtained in different modulation cells 5 by modulation of the light modulation layer 1. The modulated response spectra are respectively irradiated onto the photoelectric detection layer 2, the response spectra received by the correspondingly arranged detection units 7 are different, so that differential responses are obtained, and finally, the signal processing circuit layer 3 processes the differential responses by using an algorithm processing system, so that the original spectra are obtained through reconstruction.

Fig. 5 shows the effect of spectral analysis of the spectrometer 300 actually prepared according to the above embodiment upon spectral analysis. As shown in FIG. 7, the spectrometer 300 can detect a spectrum with a spectral width of 200nm in a spectral range from 550nm to 750nm, and achieve an effect of a spectral measurement accuracy of more than 94.5%.

Example two

The structure, principle, spectrum modulation method and preparation method of the spectrometer 300 of the second embodiment are substantially the same as those of the first embodiment, and the description of the same parts is omitted, except that:

as shown in fig. 8, in the spectrometer 300 of the present embodiment, an integral modulation unit 5 is disposed on the light modulation layer 1. The modulation holes 6 in the two-dimensional pattern structure provided in the modulation unit 5 have respective specific cross-sectional shapes, and the modulation holes 6 are freely combined and arranged in accordance with the specific cross-sectional shapes. Specifically, in the two-dimensional pattern structure, the specific cross-sectional shapes of some of the modulation holes 6 are the same, the modulation holes 6 having the same specific cross-sectional shape constitute a plurality of modulation hole 6 groups, the specific cross-sectional shapes of the modulation hole 6 groups are different from each other, and all the modulation holes 6 are freely combined.

It can be understood that the modulation unit 5 can be regarded as a modulation unit for a specific wavelength spectrum as a whole, and can be freely divided into a plurality of modulation holes 6, so that the modulation unit can be used for modulating a plurality of different wavelength spectrums, and the flexibility and diversity of light modulation can be increased.

EXAMPLE III

The spectrometer 300 of the third embodiment has basically the same structure, principle, spectrum modulation method and preparation method as those of the second embodiment, and the details of the same parts are omitted. The difference lies in that:

as shown in fig. 9 and 10, the spectrometer 300 of the present embodiment has two or more modulation cells 5 arranged on the light modulation layer 1. In each modulation unit 5, when the respective modulation holes 6 are arranged in combination according to a specific cross-sectional shape, the arrangement order thereof is arranged row by row or column by column according to a preset periodic order.

In the present embodiment, all the modulation holes 6 are divided into a plurality of modulation units 5 according to a specific cross-sectional shape, and the specific cross-sectional shapes of the modulation holes 6 in the respective modulation units 5 are different from each other. The modulation holes 6 in the same modulation unit 5 have the same specific cross-sectional shape, but the arrangement sequence of the modulation holes 6 is arranged in an array according to the size gradient sequence of the structural parameters. So that each modulation unit 5 has a different modulation effect and can modulate for different wavelength spectra. The modulation action and/or modulation object of the current modulation unit 5 can be changed by changing the gradient sequence of the structure parameters of the modulation holes 6 in the modulation unit 5 and/or the specific section shape of the modulation holes 6 according to the modulation requirement.

Specifically, as shown in fig. 11, three modulation units 5, namely a first modulation unit 11, a second modulation unit 12, and a third modulation unit 13, are distributed on the bottom plate of the light modulation layer 1. The modulation holes 6 in the first modulation unit 11 are all circular, the structural parameters of each modulation hole 6 are the same, and the first modulation unit 11 has a first modulation mode for the input spectrum; the modulation holes 6 in the second modulation unit 12 are all oval, each modulation hole 6 is arranged periodically and line by line according to the size of the structural parameter, that is, the horizontal oval modulation holes 6 and the vertical oval modulation holes 6 are staggered line by line, and the second modulation unit 12 has a second modulation mode for the input spectrum; the modulation holes 6 in the third modulation unit 13 are all rhombus, and each modulation hole 6 is arranged periodically row by row and column by column according to the size of the structural parameter, that is, the horizontally arranged rhombus modulation holes 6 and the vertically arranged rhombus modulation holes 6 are staggered row by row, and simultaneously, the horizontally arranged rhombus modulation holes 6 and the vertically arranged rhombus modulation holes 6 are staggered column by column, so that the third modulation unit 13 has a third modulation mode for the input spectrum.

It is understood that the "some modulation of light with different wavelengths" of the present embodiment may include, but is not limited to, scattering, absorption, transmission, reflection, interference, surface plasmon, resonance, etc. The first, second and third light modulation modes are distinguished from each other. By arranging the structure of the modulation holes 6 in the modulation units 5, the difference of spectral response between different units can be improved, and the sensitivity of the difference between different spectrums can be improved by increasing the number of units.

It can be understood that, when measuring for different incident spectra, the modulation effect can be changed by changing the structural parameters of the modulation holes 6 in each modulation unit 5, the change of the structural parameters includes but is not limited to one of the modulation hole arrangement period, the modulation hole radius of the two-dimensional graph structure, and the side length, the duty ratio and the thickness of the modulation unit, and any combination thereof, wherein the duty ratio refers to the ratio of the area of the modulation holes 6 to the total area of the light modulation layer 1.

It can be understood that the micro-integrated spectrometer 300 of the present embodiment may use the modulation unit 5 of the first embodiment, the modulation unit 5 of the second embodiment, or a combination of the modulation units 5 of the first and second embodiments.

In this embodiment, the light modulation layer 1 is made of a silicon nitride plate having a thickness of 200nm to 500 nm. The light modulation layer 1 is provided with 100 to 200 modulation units 5 in total, and each modulation unit 5 has a length of 4 to 60 μm and a width of 4 to 60 μm. Various geometric shapes are selected in each modulation unit 5 to be used as the specific section shapes of the modulation holes 6, the modulation units 5 are periodically arranged in the same shape, and the duty ratio is 10% -90%. The remaining structure is the same as in example 1 or example 2.

Fig. 12 and 13 each show the spectral analysis effect of the spectrometer 300 actually prepared according to the above embodiment at the time of spectral analysis. The light modulation layer 1 of the present embodiment mainly detects a single-wavelength spectrum, the wavelength intensity relationship effect is shown in fig. 12, the error between the measured spectrum and the actual spectrum center wavelength is less than 0.4nm, the detection effect is shown in fig. 13, and the accuracy of the light intensity is greater than 99.89%.

Example four

Based on the structure, principle, spectrum modulation method and manufacturing method of the spectrometer 300 according to any of the above embodiments, the fourth embodiment proposes a spectrometer 300 and a spectrum modulation method. The parts of this embodiment that are the same as the parts of the foregoing embodiments are not described again, but the differences are:

as shown in fig. 14, the spectrometer 300 of the fourth embodiment further includes a light-transmissive medium layer 4, and the light-transmissive medium layer 4 is located between the light modulation layer 1 and the photodetection layer 2. Specifically, the thickness of the light-transmitting medium layer 4 is 50nm to 1 μm, and the material may be silicon dioxide.

In the micro-integrated spectrometer 300 of this embodiment, if a process scheme of direct deposition growth is adopted when the light modulation layer 1 is prepared, the light-transmitting dielectric layer 4 may be covered on the spectrum detection layer by chemical vapor deposition, sputtering, spin coating, and the like, and then deposition and etching of the light modulation layer 1 may be performed on the light detection layer. If the transfer process scheme is adopted, the silicon dioxide can be used as a preparation substrate of the light modulation layer 1, the light modulation layer 1 is directly prepared on the upper half part of the substrate through micro-nano drilling, then the lower half part of the silicon dioxide substrate is directly used as a light-transmitting medium layer 4, and the prepared light modulation layer 1 and the prepared light-transmitting medium layer 4 are integrally transferred onto the light detection layer.

It is understood that the light-transmitting medium layer 4 of the present embodiment can also be configured as: the whole light modulation layer 1 above the photoelectric detection layer 2 is supported by an external support structure so as to be suspended relative to the photoelectric detection layer 2, and the air part between the light modulation layer 1 and the photoelectric detection layer 2 is the light-transmitting medium layer 4.

EXAMPLE five

Based on the second embodiment, the fifth embodiment further provides a spectrometer 300 and a spectrum modulation method. The fifth embodiment is the same as the second embodiment, and the differences are as follows:

the light modulation layer 1 of the fifth embodiment is made of a silicon carbide flat substrate having a thickness of 150 to 300 nm. The light modulation layer 1 has a total of 150 to 300 units each having a length of 15 to 20 μm and a width of 15 to 20 μm. The specific cross-sectional shapes of the modulation holes 6 in the same modulation unit 5 are all circular, and the circular hole arrangement period, the hole radius, the duty ratio and other parameters of the modulation holes 5 are different. The specific parameter ranges are as follows: the period range is 180 nm-850 nm, the pore radius range is 20 nm-780 nm, and the duty ratio range is 10% -92%. At least one of the photodetection layers 2 is provided with an InGaAs detector.

The preparation process of the spectrometer 300 of this embodiment adopts a transfer process means of firstly preparing the light modulation layer 1 and then transferring the light modulation layer to the photodetection layer 2.

EXAMPLE six

Based on the structure, principle, spectrum modulation method and preparation method of the spectrometer 300 in any of the above embodiments, the sixth embodiment proposes a spectrometer 300 and a spectrum modulation method. The parts of this embodiment that are the same as the parts of the foregoing embodiments are not described again, but the differences are:

as shown in fig. 15, in the spectrometer 300 of the seventh embodiment, each modulation hole 6 does not penetrate the bottom plate. It can be understood that no matter whether the modulation hole 6 penetrates through the bottom plate, the modulation effect of the light modulation layer 1 is not adversely affected because the silicon-based material or other materials selected for the light modulation layer 1 are all transparent materials, and when a spectrum enters the light modulation layer 1, the spectrum is modulated by the structural influence of each modulation unit 5, but the bottom of the modulation hole 6 does not adversely affect the spectrum modulation.

In the spectrometer 300 of this embodiment, the thickness from the bottom of the modulation hole 6 of the light modulation layer 1 to the bottom of the bottom plate is 60nm to 1200nm, and the thickness of the entire bottom plate is 120nm to 2000 nm.

EXAMPLE seven

Based on the combination of the above embodiments, the seventh embodiment proposes a spectrometer 300 and a spectral modulation method. The seventh embodiment is the same as the above embodiments, and the differences are as follows:

as shown in fig. 16 and 17, in the spectrometer 300 of the seventh embodiment, five modulation units 5 are distributed on the bottom plate of the light modulation layer 1, and are respectively a first modulation unit 11, a second modulation unit 12, a third modulation unit 13, a fourth modulation unit 14 and a fifth modulation unit 15, where the range of the fifth modulation unit 15 is the largest, and the area of the fifth modulation unit is not less than the sum of the first four modulation units.

Specifically, the first modulation unit 11, the second modulation unit 12, the third modulation unit 13, and the fourth modulation unit 14 are arranged in a matrix as a whole, wherein the arrangement of the modulation holes 6 in the first three

modulation units

11, 12, and 13 is the same as the arrangement of the modulation holes 6 in the third embodiment, the specific cross-sectional shapes of the modulation holes 6 of the fourth modulation unit 14 and the first modulation unit 11 are the same and are both circular, but the structural parameters of the modulation holes 6 of the fourth modulation unit 14 are different from the structural parameters of the modulation holes 6 of the first modulation unit 11, specifically, the inner diameter of the modulation holes 6 of the fourth modulation unit 14 is smaller than the inner diameter of the modulation holes 6 of the first modulation unit 11, so that the fourth modulation unit 14 has a fourth modulation mode for the input spectrum. The two-dimensional pattern structure formed by the modulation holes 6 in the fifth modulation unit 15 is the same as that of the first embodiment, and the fifth modulation unit 15 has a fifth modulation mode for the input spectrum.

It can be seen that, in the light modulation layer 1 of the seventh embodiment, by using the difference of the specific cross-sectional shapes of the different modulation holes 6 between different units and the specific arrangement manner of the modulation holes 6 in the same unit, different modulation effects on the spectra of different wavelengths can be realized by changing the specific cross-sectional shapes of the modulation holes 6, the structural parameters of the modulation holes 6, and the arrangement period of the modulation holes 6.

It can be understood that, for the structures of the gradient array modulation units 5 of the first and second embodiments, the arbitrarily divided modulation units 5 have different modulation effects on the spectrum, theoretically, infinite groups of modulated spectrum samples can be obtained, thereby drastically increasing the amount of data used to reconstruct the original spectrum and facilitating the recovery of the spectrum pattern of the broadband spectrum.

With regard to the structure of the periodic modulation unit 5 in the third embodiment, the periodic structure thereof can generate two-dimensional periodic dispersion and resonance effects, and the resonance effects include, but are not limited to, the band control of the photonic crystal and the resonance of the two-dimensional grating. The accuracy of detection for a particular wavelength may be enhanced by resonance effects.

If the modulation units 5 in the above-described first, second, and third embodiments are simultaneously applied to a chip, the above-described two advantages can be combined. When the size range of the top-cut light modulation layer is cut, the spectrometers 300 of the three embodiments can be prepared into structures with micron-scale or even smaller structures, which has great significance for the miniaturized and miniaturized production and use of the micro-integrated spectrometers 300; the light modulation layer 1 described above is matched with a photodetection layer composed of different photodetectors, and can realize spectrum detection of a full band in principle, so that the wide spectrum detection performance of the spectrometer 300 is more excellent.

To sum up, the noninvasive glucose meter of this embodiment includes light source 100, spectrum appearance 300 and supplies the detection space that the body that awaits measuring intervenes, the detection space is connected with light source and spectrum appearance 300 respectively to make the spectrum of light source emission can generate the incident light that gets into in spectrum appearance 300 after the body that awaits measuring, this incident light is because the body that awaits measuring has received the influence through the body that awaits measuring, so carry out spectral analysis reconstruction to this incident light through spectrum appearance 300, can obtain the spectral data that includes the blood sugar parameter, thereby utilize near infrared spectroscopy principle to realize the non-contact noninvasive glucose detection of the body that awaits measuring of living beings.

2. The spectrometer 300 in the noninvasive glucometer includes: the light modulation layer is used for carrying out light modulation on incident light so as to obtain a modulated spectrum; the photoelectric detection layer is positioned below the light modulation layer and used for receiving the modulated spectrum and providing differential response to the modulated spectrum; and the signal processing circuit layer is positioned below the photoelectric detection layer and used for reconstructing the differential response to obtain the original spectrum. This spectrum appearance 300 of noninvasive blood sugar appearance utilizes the light modulation layer to replace all kinds of accurate optical component in the current spectrum appearance 300, thereby realize the applied type of spectrum appearance 300 in the micro-nano structure field, make little integrated spectrum appearance 300 can work under the condition that does not need grating, prism, speculum or other similar space light splitting component, the volume of spectrum appearance 300 has been dwindled greatly, spectral analysis's accuracy has been improved simultaneously, thereby it is high to make noninvasive blood sugar appearance have measurement accuracy, the portability is good, but real-time on-line measuring, easy operation, stable performance, low in manufacturing cost's etc. advantage, can greatly improve diabetes patient's quality of life, wide market prospect has.

The embodiments of the present invention have been presented for purposes of illustration and description, and are not intended to be exhaustive or limited to the invention in the form disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiment was chosen and described in order to best explain the principles of the invention and the practical application, and to enable others of ordinary skill in the art to understand the invention for various embodiments with various modifications as are suited to the particular use contemplated.

In the description of the present invention, unless otherwise specified, "a plurality" and "several" mean two or more; "notched" means, unless otherwise stated, a shape other than a flat cross-section. The terms "upper", "lower", "left", "right", "inner", "outer", "front", "rear", "head", "tail", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Claims

1. The noninvasive glucometer is characterized by comprising a light source and a spectrometer, wherein the spectrum emitted by the light source can generate incident light entering the spectrometer after passing through a body to be measured;

the spectrometer comprises:

2. The noninvasive glucometer according to claim 1, wherein the light modulation layer comprises a bottom plate and at least one modulation unit, the bottom plate is disposed on the photodetection layer, each modulation unit is disposed on the bottom plate, a plurality of modulation holes are respectively disposed in each modulation unit, and each modulation hole in each modulation unit is arranged in a two-dimensional pattern structure.

3. The non-invasive glucometer according to claim 2, wherein said two-dimensional graphic structure comprises:

And each modulation hole in each two-dimensional graph structure has a respective cross-sectional shape, and the modulation holes are combined and arranged according to the cross-sectional shapes.

4. The noninvasive glucometer according to claim 3, wherein when the modulating holes are arranged in combination according to their respective sectional shapes, the arrangement order is arranged row by row or column by column according to a preset periodic order.

5. The non-invasive glucometer according to claim 2, wherein the bottom of the modulation hole penetrates the bottom plate or does not penetrate the bottom plate.

6. The noninvasive glucometer according to claim 1, wherein the photoelectric detection layer comprises at least one detection unit, at least one detection unit is correspondingly arranged below each micro-light modulation unit of the light modulation layer, and all the detection units are electrically connected through the signal processing circuit layer.

7. The noninvasive glucometer of any one of claims 1-6, wherein the spectrometer further comprises:

8. The noninvasive glucometer according to any one of claims 1-6, wherein the light source and the spectrometer are respectively disposed on both sides of the subject; or