CN211295053U - Etching stripping test equipment - Google Patents
Etching stripping test equipment Download PDFInfo
- Publication number
- CN211295053U CN211295053U CN202020266900.1U CN202020266900U CN211295053U CN 211295053 U CN211295053 U CN 211295053U CN 202020266900 U CN202020266900 U CN 202020266900U CN 211295053 U CN211295053 U CN 211295053U
- Authority
- CN
- China
- Prior art keywords
- slide rail
- soaking
- etching
- spraying
- test equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005530 etching Methods 0.000 title claims abstract description 67
- 238000012360 testing method Methods 0.000 title claims abstract description 22
- 238000002791 soaking Methods 0.000 claims abstract description 52
- 238000005507 spraying Methods 0.000 claims abstract description 38
- 239000007788 liquid Substances 0.000 claims abstract description 24
- 239000007921 spray Substances 0.000 claims description 9
- 238000000855 fermentation Methods 0.000 claims description 2
- 230000004151 fermentation Effects 0.000 claims description 2
- 238000007599 discharging Methods 0.000 abstract description 3
- 230000010354 integration Effects 0.000 abstract description 2
- 238000001514 detection method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 241001233242 Lontra Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Abstract
An etching stripping test device effectively solves the problem of collecting etching solution by various etching modes; according to the technical scheme, the etching stripping test equipment comprises a box body, wherein a feeding hole and a discharging hole are formed in two sides of the box body, slide rails are arranged on the inner walls of the same front side and the back side, a conveying frame is fixedly arranged in the slide rails in a sliding mode, a spraying device is arranged above the interior of the box body, a soaking pool is fixedly arranged at the lower portion of the interior of the box body, the slide rails comprise a spraying slide rail and a soaking slide rail, two ends of the spraying slide rail and two ends of the soaking slide rail are overlapped, the spraying slide rail is located above the soaking slide rail, a liquid collecting plate is arranged at the bottom; the utility model discloses the structure is ingenious, realizes spraying the perfect integration of etching and soaking etching, has solved interference and sealed problem again, and the testing result is more accurate.
Description
Technical Field
The utility model relates to an etching equipment technical field especially relates to an etching stripping test equipment.
Background
In the microelectronics industry, wet etching is an etching method for stripping an etched substance by a chemical reaction between a chemical etching solution and the etched substance, and is mainly divided into spray etching, immersion etching, bubble etching and the like according to a contact mode of the etching solution and a workpiece. In order to test the effect of the etching solution, corresponding test equipment needs to be designed for testing, the effect of the etching solution is checked after the etching solution is collected and detected, different test equipment needs to be designed due to different etching modes, and therefore the test cost is increased, and therefore, etching stripping test equipment integrating two etching modes of spraying and soaking is available on the market.
Most of the devices have a problem that interference exists between a conveying device of a workpiece and a soaking pool or the like, or certain defects exist in the sealing of the soaking pool, so that the collection work of the etching solution cannot be perfectly realized.
SUMMERY OF THE UTILITY MODEL
To the above situation, in order to overcome the defects of the prior art, the present invention aims to provide an etching stripping test device, which effectively solves the problem of collecting etching solution by multiple etching methods.
The technical scheme of its solution problem is, test equipment is peeled off in etching, the power distribution box comprises a box body, feed inlet and discharge gate have been seted up to the box both sides, be equipped with the slide rail on the same front and back both sides inner wall, sliding fixation has the carriage in the slide rail, the top is equipped with spray set in the box, the lower part is fixed with the fermentation vat in the box, the slide rail is including spraying the slide rail and soaking the slide rail, spray the slide rail and soak the coincidence of slide rail both ends, it is located the top of soaking the slide rail to spray the slide rail, the bottom half is equipped with the collection liquid board, be equipped with.
The utility model discloses the structure is ingenious, realizes spraying the perfect integration of etching and soaking etching, has solved interference and sealed problem again, and the testing result is more accurate.
Drawings
Fig. 1 is a front view of the present invention.
Fig. 2 is an enlarged schematic view of a portion a in fig. 1 according to the present invention.
Fig. 3 is a left side view of the present invention.
Fig. 4 is a first perspective sectional view of the present invention.
Fig. 5 is an enlarged schematic view of a portion B in fig. 4 according to the present invention.
Fig. 6 is an enlarged schematic view of the portion C in fig. 5 according to the present invention.
Fig. 7 is a second perspective sectional view of the present invention.
Fig. 8 is an enlarged schematic view of a portion D in fig. 7 according to the present invention.
Detailed Description
The following describes the embodiments of the present invention in further detail with reference to fig. 1 to 8.
As can be seen from the drawings 1 to 8, the etching stripping test equipment comprises a box body 1, wherein a feeding port and a discharging port are formed in two sides of the box body 1, slide rails are arranged on the inner walls of the same front side and the back side, a conveying frame 2 is slidably fixed in the slide rails, a workpiece is placed on the conveying frame 2 from the feeding port and is taken out from the discharging port after etching is finished, a spraying device 3 is arranged above the inside of the box body 1, a soaking pool 4 is fixed at the lower part of the inside of the box body 1, the spraying device 3 and the soaking pool 4 respectively finish spraying etching and soaking etching, the slide rails comprise a spraying slide rail and a soaking slide rail, two ends of the spraying slide rail and the soaking slide rail are overlapped, the spraying slide rail is positioned above the soaking slide rail, the workpiece moves upwards along the spraying slide rail when spraying etching is carried out, the spraying device 3 sprays, the workpiece moves downwards along the soaking slide rail, 1 bottom of box is equipped with a liquid collecting plate 5, be equipped with in the box 1 with a liquid collecting box 6 that collects liquid collecting plate 5 and communicate, a liquid collecting box 6 and a soaking pool 4 intercommunication, the etching liquid that falls down when collecting liquid collecting plate 5 and spraying to collect a liquid collecting box 6 with the etching liquid in, soak etching and will make used etching liquid discharge in a liquid collecting box 6 after accomplishing, through the etching liquid in detection and analysis liquid collecting box 6, can reach the etching effect of etching liquid, and the pertinence adjusts.
For the convenience of use, carriage 2 be hoist and mount formula structure, carriage 2 layer board is the otter board, etching liquid can see through the layer board and etch the work piece when spraying etching or soaking etching, carriage 2's power pack is for arranging the drive wheel in the slide rail in, drives carriage 2 and removes.
In order to facilitate operation, both ends of the spraying slide rail and the soaking slide rail are horizontal slide rails 7, the middle section of the spraying slide rail is a spraying horizontal slide rail 8 which is horizontal and higher than the horizontal slide rails 7 at both ends, the horizontal slide rails 7 at both ends are in transitional connection with the spraying horizontal slide rails 8, the middle section of the soaking slide rail is a soaking horizontal slide rail 9 which is horizontal and lower than the horizontal slide rails 7 at both ends, the horizontal slide rails 7 at both ends are in transitional connection with the soaking horizontal slide rails 9, when spraying etching is performed, a workpiece slides in the spraying slide rails, enters the spraying horizontal slide rails 8 from the horizontal slide rails 7, the position of the workpiece is lifted, the workpiece is close to the spraying device 3, spraying etching can be better realized, and; when soaking and etching are carried out, a workpiece enters the soaking horizontal slide rail 9 from the horizontal slide rail 7, the workpiece moves downwards and enters the soaking pool 4, soaking and etching are finished in the soaking pool 4, the conveying frame 2 returns to the horizontal slide rail 7 after soaking and etching are finished, and the workpiece is taken out from the discharge hole.
In order to facilitate switching, a guide plate 10 is arranged at the joint of the spraying slide rail and the soaking slide rail, a reversing rod 11 for controlling the guide plate 10 is arranged on the box body 1, the reversing rod 11 is connected with the guide plate 10 through a connecting rod 12, the end part of the reversing rod 11 extends out of the box body 1, a locking mechanism is arranged on the reversing rod 11, the locking mechanism comprises a locking rod 13 which horizontally slides inside the reversing rod 11, a locking groove 14 which is positioned at the side edge of the reversing rod 11 is formed in the box body 1, when the functions of spraying etching and soaking etching are switched, the locking rod 13 slides out of the locking groove 14, the reversing rod 11 is shifted to move up and down on the box body 1, the reversing rod 11 pushes the guide plate 10 to rotate through the connecting rod 12, a proper slide rail is selected, and then the locking rod 13 is inserted into the locking groove 14, so that the.
In order to more accurately detect the etching solution, the upper end of the soaking pool 4 is conical, the cover plates 15 are respectively arranged on two sides above the soaking pool 4 in a sliding mode, the side edge of the soaking pool 4 is provided with an air cylinder 16 for controlling the cover plates 15 to slide, when spraying etching is selected, the cover plates 15 cover the upper side of the soaking pool 4, and the sprayed etching solution slides onto the liquid collecting plate 5 and flows back into the liquid collecting box 6 to be collected; when soaking etching is selected, the air cylinder 16 pushes the cover plate 15 to move, the top of the soaking pool 4 is opened, and workpieces can enter the soaking pool 4 conveniently.
The rear side of the box body 1 is provided with a raw material barrel of etching liquid, and the raw material barrel is connected with the soaking pool 4 and the spraying device 3 to provide the etching liquid for workpiece etching.
Compared with the prior art, the utility model, following beneficial effect has: 1) the spray etching and the soaking etching are integrated, so that the etching solution can be conveniently collected for detection and analysis; 2) the operation is simple, no mechanism generates interference in the whole process, and the movement of the workpiece is not influenced; 3) the soaking pool 4 is of an integral structure, leakage caused by sealing problems can be avoided, and the detection result of the etching solution is more accurate.
Claims (6)
1. The utility model provides an etching stripping test equipment, a serial communication port, including box (1), feed inlet and discharge gate have been seted up to box (1) both sides, be equipped with the slide rail on the same front and back both sides inner wall, sliding fixation has carriage (2) in the slide rail, the top is equipped with spray set (3) in box (1), lower part is fixed with fermentation vat (4) in box (1), the slide rail is including spraying the slide rail and soaking the slide rail, spray the slide rail and soak the coincidence of slide rail both ends, it is located the top of soaking the slide rail to spray the slide rail, box (1) bottom is equipped with album liquid board (5), be equipped with in box (1) and collect liquid case (6) that liquid board (5) communicate, collect liquid case (6) and.
2. The etching stripping test equipment according to claim 1, wherein the conveying frame (2) is of a hoisting structure, and the conveying frame (2) is aligned with the feed inlet and the discharge outlet.
3. The etching stripping test equipment according to claim 1, wherein the two ends of the spraying slide rail and the soaking slide rail are both horizontal slide rails (7), the middle section of the spraying slide rail is a spraying horizontal slide rail (8) which is horizontal and higher than the horizontal slide rails (7) at the two ends, the horizontal slide rails (7) at the two ends and the spraying horizontal slide rail (8) are in transitional connection, the middle section of the soaking slide rail is a soaking horizontal slide rail (9) which is horizontal and lower than the horizontal slide rails at the two ends, and the horizontal slide rails (7) at the two ends and the soaking horizontal slide rail (9) are in transitional connection.
4. The etching stripping test equipment according to claim 3, wherein a guide plate (10) is arranged at the joint of the spraying slide rail and the soaking slide rail, a reversing rod (11) for controlling the guide plate (10) is arranged on the box body (1), the reversing rod (11) is connected with the guide plate (10) through a connecting rod (12), the end part of the reversing rod (11) extends out of the box body (1), and a locking mechanism is arranged on the reversing rod (11).
5. The etching stripping test equipment according to claim 4, characterized in that the locking mechanism comprises a locking rod (13) which horizontally slides in the reversing rod (11), and a locking groove (14) which is positioned at the side of the reversing rod (11) is arranged on the box body (1).
6. The etching stripping test equipment according to claim 1, wherein the upper end of the soaking pool (4) is conical, cover plates (15) are respectively arranged on two sides above the soaking pool (4) in a sliding manner, and air cylinders (16) for controlling the cover plates (15) to slide are arranged on the side edges of the soaking pool (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020266900.1U CN211295053U (en) | 2020-03-06 | 2020-03-06 | Etching stripping test equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020266900.1U CN211295053U (en) | 2020-03-06 | 2020-03-06 | Etching stripping test equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211295053U true CN211295053U (en) | 2020-08-18 |
Family
ID=72034753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020266900.1U Active CN211295053U (en) | 2020-03-06 | 2020-03-06 | Etching stripping test equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211295053U (en) |
-
2020
- 2020-03-06 CN CN202020266900.1U patent/CN211295053U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 453000 west section of Weisan Road, Zhaojing Town, Huojia County, Xinxiang City, Henan Province Patentee after: Henan Yifeng Electronic New Materials Co.,Ltd. Address before: 453800 west section of Weisan Road, Zhaojing Town, Huojia County, Xinxiang City, Henan Province Patentee before: Henan Yifeng Chemical Co.,Ltd. |
|
| CP03 | Change of name, title or address |