CN2112891U - Long life metal vapouration vacuum arc ion source - Google Patents
Long life metal vapouration vacuum arc ion source Download PDFInfo
- Publication number
- CN2112891U CN2112891U CN 91224854 CN91224854U CN2112891U CN 2112891 U CN2112891 U CN 2112891U CN 91224854 CN91224854 CN 91224854 CN 91224854 U CN91224854 U CN 91224854U CN 2112891 U CN2112891 U CN 2112891U
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- negative electrode
- ion source
- electrode
- vapouration
- vacuum arc
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Abstract
The utility model relates to a novel cathode structure of a metal vapouration vacuum arc ion source. The end surface of a triggering electrode is lower than the end surfaces of an insulating sleeve and a cathode; after the insulating sleeve is processed in a metallizing way, the triggering voltage is reduced, the pollution to the insulating sleeve by metal vapouration is reduced, and the triggering number and the stable performance of the ion source in working state are raised. Because an impelling cathode is used, the service life of single cathode extends approximately an order of magnitude.
Description
The utility model relates to a kind of metal vapor vacuum arc source (U.S. is called the MEVVA ion source).
Known metal vapor vacuum arc source mainly forms the district by ion and ion draw-out area two parts are formed.It is one group of electricity lens that there are negative electrode insulated from each other, anode and trigger electrode, ion draw-out area in ion formation district.United States Patent (USP) (United States Patent) 4714860 shows that its trigger electrode is a long metal garden rod, round trigger electrode a garden cylindrical cathode is arranged, and isolates with the tubular insulating case between them.Between trigger electrode and negative electrode, add high voltage pulse, cause the arc discharge between negative electrode and anode, form plasma, produce a large amount of ions.Ion quickens through the lens combination of draw-out area, obtains energy, forms ion beam.Because cathodic metal constantly evaporates in the course of work, metallic vapour is deposited on the insulating case gradually, and insulation resistance constantly changes, and influence triggers the stability of the starting the arc.In addition, trigger, play arc condition, cause the ion source job insecurity or can not work at all because the consumption meeting of negative electrode constantly changes and destroys reasonably.Single cathode life was generally 2 hours, and United States Patent (USP) (United States Patent) 4785220 adopts a plurality of negative electrodes, made the ion source working life increase several times, reached tens hours, but the cathode construction complexity of this rotation, centering, location difficulty.Documents " METAL VAPOR VACUUM ARC ION SOURCE " I.G.BROWNetal.Rev.Sci.Instrum.57(6), 1986, point out that the maximum triggering times of negative electrode of said structure are 300,000 times.Negative electrode is changed into cylindrical, trigger electrode is made cylindrical shape, and the maximum triggering times of single negative electrode are brought up to 700,000 times.
The purpose of this utility model provides long negative electrode and trigger electrode structure of a kind of working stability, life-span, thus the working life that prolongs metal vapor vacuum arc source greatly.
We are through theory analysis and experimental study many times, develop the structure of several metallic cathodes, trigger electrode and its insulating case, make the amount of metal that is deposited on the insulating case with because the amount that causes deposit to evaporate again during triggering is in a basic balance, in other words, insulating case resistance keeps basicly stable value, has guaranteed to trigger the stability of metal vapor vacuum arc discharge and ion source work.Maximum triggering times is doubled, and reaches 1,500,000 times.Developed several " pusher negative electrodes " simultaneously, along with the consumption of negative electrode, manually or automatically advanced negative electrode, constantly replenished cathode material, under the situation of using single negative electrode, the ion source working life extended to more than 16 hours.
Be embodiment below:
Fig. 1 is the structure of a kind of negative electrode and the trigger electrode parts of metal vapor vacuum arc source.Between negative electrode 2 and the trigger electrode 4 is insulating case 3, and insulating case is made of boron nitride, and local surfaces is carried out conductive processing with graphite, has reduced trigger voltage.Insulating case is equal with the end face of negative electrode, and the trigger electrode end face makes metallic vapour greatly reduce the pollution of insulating case than the low 1-2 millimeter of insulating case.Negative electrode is about 3 centimetres, promotes negative electrode by motor 1 by vacuum seal and advances, constantly the cathode material of supplement consumed.5 is anode, and 6 is ion extraction electrode system.
Claims (6)
1, a kind of long-service-life metal steam-to-vacuum arc ion source, mainly form by negative electrode insulated from each other, trigger electrode, anode and ion extraction electrode system, the operative end surface that it is characterized in that negative electrode, trigger electrode and treated insulating case three not at grade, the other end of negative electrode is connected with vacuum-packed propulsive mechanism.
2,, it is characterized in that the trigger electrode end face is lower than the end face of negative electrode and insulating case according to the described structure of claim 1..
3,, it is characterized in that insulating case is through the conductionization processing according to the described structure of claim 1..
4,, it is characterized in that negative electrode can slide or precession in insulating case according to the described structure of claim 1..
5, according to claim 1. or 4. described structures, it is characterized in that negative electrode is very long, can be several centimetres.
6,, it is characterized in that negative electrode is by artificial or drive of motor according to claim 1. or 4. described structures.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 91224854 CN2112891U (en) | 1991-09-14 | 1991-09-14 | Long life metal vapouration vacuum arc ion source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 91224854 CN2112891U (en) | 1991-09-14 | 1991-09-14 | Long life metal vapouration vacuum arc ion source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2112891U true CN2112891U (en) | 1992-08-12 |
Family
ID=4931237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 91224854 Granted CN2112891U (en) | 1991-09-14 | 1991-09-14 | Long life metal vapouration vacuum arc ion source |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2112891U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100349249C (en) * | 2004-12-09 | 2007-11-14 | 中国科学院半导体研究所 | Cold cathode Penning ion source capable of extracting low smelting point metallic ion |
| CN101851747B (en) * | 2009-03-30 | 2012-08-29 | 核工业西南物理研究院 | High-current metal ion source |
| CN105355531A (en) * | 2015-10-30 | 2016-02-24 | 中国电子科技集团公司第四十八研究所 | Filament clamping device for ion sources |
| CN106356269A (en) * | 2016-11-09 | 2017-01-25 | 中国工程物理研究院流体物理研究所 | Creepage trigger structure and vacuum arc ion source composed thereof |
| CN108193170A (en) * | 2014-09-23 | 2018-06-22 | 北京师范大学 | The preparation method and equipment of flexible parent metal circuit board and metal pinning layer |
-
1991
- 1991-09-14 CN CN 91224854 patent/CN2112891U/en active Granted
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100349249C (en) * | 2004-12-09 | 2007-11-14 | 中国科学院半导体研究所 | Cold cathode Penning ion source capable of extracting low smelting point metallic ion |
| CN101851747B (en) * | 2009-03-30 | 2012-08-29 | 核工业西南物理研究院 | High-current metal ion source |
| CN108193170A (en) * | 2014-09-23 | 2018-06-22 | 北京师范大学 | The preparation method and equipment of flexible parent metal circuit board and metal pinning layer |
| CN108193170B (en) * | 2014-09-23 | 2019-10-01 | 北京师范大学 | The preparation method and equipment of flexible parent metal circuit board and metal pinning layer |
| CN105355531A (en) * | 2015-10-30 | 2016-02-24 | 中国电子科技集团公司第四十八研究所 | Filament clamping device for ion sources |
| CN106356269A (en) * | 2016-11-09 | 2017-01-25 | 中国工程物理研究院流体物理研究所 | Creepage trigger structure and vacuum arc ion source composed thereof |
| CN106356269B (en) * | 2016-11-09 | 2017-12-15 | 中国工程物理研究院流体物理研究所 | It is a kind of along face trigger architecture and its vacuum arc ion source of composition |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C15 | Extension of patent right duration from 15 to 20 years for appl. with date before 31.12.1992 and still valid on 11.12.2001 (patent law change 1993) | ||
| RN01 | Renewal of patent term | ||
| C57 | Notification of unclear or unknown address | ||
| DD01 | Delivery of document by public notice |
Addressee: Beijing Normal University Document name: Notice of termination |
|
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |