CN2112637U - Multi-element packing type combined target - Google Patents
Multi-element packing type combined target Download PDFInfo
- Publication number
- CN2112637U CN2112637U CN 91217202 CN91217202U CN2112637U CN 2112637 U CN2112637 U CN 2112637U CN 91217202 CN91217202 CN 91217202 CN 91217202 U CN91217202 U CN 91217202U CN 2112637 U CN2112637 U CN 2112637U
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- China
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- target
- component
- type combined
- films
- packing type
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Abstract
The utility model relates to a multi-element packing type combined target, which belongs to a metal coating device. The target is characterized in that a primary component is used as base materials for preparation, and a target block is filled with one or more kinds of other component materials to obtain various alloy films in different components or films of the alloy compound. The target has the advantages of easy fabrication, agile composition modes of proportion of every component, direct cooling and high quality of finished films.
Description
The utility model relates to the plating equipment of metallic substance, particularly vacuum coating film equipment.
In vacuum coating technology, no matter be sputtering method or ion plating method, all need target, use any target, just obtain the film of what material or the compound film of this material, therefore, if obtain alloy firm or this alloy cpd film, just need use alloy target material.At present,, comprise metal and nonmetal target for the multi-component target, by following several modes of forming: 1. multi-component congruent melting one, but be difficult to melting sometimes; 2. the powder metallurgy of multi-component, but hot tearing easily in using; 3. machinery is pieced together target, and the composition mode of this kind target is many to be combined as the master with fan-shaped, promptly the material of different constituent elements, make up with sectorial area, than each group element material composition ratio of control, this kind target difficulty of processing is big, and wayward composition with sectorial area, and can only adopt indirect cooling, because every constituent element monomer area is bigger, in some coating process, uneven components, all influenced quality of forming film, so on using, very big limitation is arranged.
The purpose of this utility model be to avoid above-mentioned the deficiencies in the prior art part and provide the composition mode of a kind of easy processing, component ratio flexible, a kind of novel combination target that quality of forming film is higher.
The purpose of this utility model can reach by following measure: with major components is substrate preparation target piece, can fill one or more other constituent elements neatly and form filling type combination target on this target piece.
Be described in further detail below by drawings and Examples:
Fig. 1 is a structural representation of the present utility model.
Fig. 2 is the vertical view of Fig. 1.
The machinery assembly target synoptic diagram that Fig. 3 forms for pressing sectorial area.
Fig. 1,2 has provided the structural representation of this combination target.As seen from the figure, filling element (2) is arranged on base material (1), this filling element can be one or more, but fill element uniform distribution or non-uniform Distribution, but also areal distribution, so the composition mode is comparatively flexible, component ratio is controlled well, and good processing, owing to can directly cool off, so quality of forming film is also higher.Fig. 3 provides the machinery of forming by sectorial area and pieces together target, and (1) is the A constituent element, and (2) are the B constituent element, as seen from the figure, this each fan-shaped constituent element, promptly bad processing is difficult to butt joint again, and can only cool off indirectly, has all influenced quality of forming film.
The utlity model has following advantage:
1. handling ease;
2. it is flexible that component ratio forms mode;
3. target can directly cool off;
4. can be combined into thicker target;
5. life-time service film coating composition kept stable.
Claims (1)
1, a kind of multielement filling type combination target that is used for the metallic substance plating equipment, it is characterized in that in major components be on the target piece of base material (1) preparation, filling element (2) is arranged, this filling element (2) can be one or more other group element materials, but fill element uniform distribution or non-uniform Distribution, but also areal distribution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 91217202 CN2112637U (en) | 1991-07-04 | 1991-07-04 | Multi-element packing type combined target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 91217202 CN2112637U (en) | 1991-07-04 | 1991-07-04 | Multi-element packing type combined target |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2112637U true CN2112637U (en) | 1992-08-12 |
Family
ID=4924920
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 91217202 Granted CN2112637U (en) | 1991-07-04 | 1991-07-04 | Multi-element packing type combined target |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2112637U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111020496A (en) * | 2019-10-10 | 2020-04-17 | 昆山金百辰金属科技有限公司 | Process for plating aluminum-chromium alloy on surface of hub |
-
1991
- 1991-07-04 CN CN 91217202 patent/CN2112637U/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111020496A (en) * | 2019-10-10 | 2020-04-17 | 昆山金百辰金属科技有限公司 | Process for plating aluminum-chromium alloy on surface of hub |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CX01 | Expiry of patent term |