CN211258214U - Pneumatic opening and closing mechanism for top cover window of wafer cabinet body - Google Patents
Pneumatic opening and closing mechanism for top cover window of wafer cabinet body Download PDFInfo
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- CN211258214U CN211258214U CN201922129724.7U CN201922129724U CN211258214U CN 211258214 U CN211258214 U CN 211258214U CN 201922129724 U CN201922129724 U CN 201922129724U CN 211258214 U CN211258214 U CN 211258214U
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- cabinet body
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- top cover
- cover window
- window
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Abstract
The utility model particularly relates to a pneumatic opening and closing mechanism for a top cover window of a wafer cabinet body, which belongs to the field of switches and comprises the wafer cabinet body and the top cover window which are arranged side by side, wherein a cylinder part is arranged between the wafer cabinet body and the top cover window; furthermore, the cylinder part can realize that the top cap window opens and shuts, is different from traditional manual operation, and opening of top cap window is closed, compresses tightly and all utilizes the cylinder part automation to accomplish, reduces manual operation, raises the efficiency and installs the nitrogen spring and reduce the potential safety hazard as the protection.
Description
Technical Field
The utility model relates to a switch field specifically is a supply pneumatic mechanism that opens and shuts of top cap window of wafer cabinet body.
Background
The wafer cabinet is a part which automatically sends the wafer into the reaction chamber after the wafer is placed into the reaction chamber, an operator needs to loosen a pressing mechanism of a top cover window when the wafer is placed into the reaction chamber, then manually opens the top cover window and then places the wafer, the top cover window is manually closed after the wafer is placed into the reaction chamber, the pressing mechanism of the top cover window is screwed down, then the wafer is vacuumized and conveyed, the traditional mechanism is complex in operation, the requirement on the operator is high, the manual screwing degree of the pressing mechanism directly influences whether the next-step vacuum pumping of the cabinet can be finished, if the vacuum degree cannot meet the requirement, the pressing mechanism of the top cover window needs to be screwed down again, and due to the fact that the weight of the top cover window is heavy, the manual opening needs the operator to have certain strength and.
And the wafer cabinet body can convey the wafer only under the condition that the vacuum degree is consistent with that of the reaction cavity, so that the high requirement on whether the O-shaped sealing ring can be tightly pressed and sealed after the top cover window is closed is met, the operation is complex and the efficiency is low under the condition that the wafer door is frequently opened and closed and the pressing device is adjusted, and great burden is increased for an operator.
To the above problem, the utility model provides a supply the pneumatic mechanism that opens and shuts of top cap window of the wafer cabinet body.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a supply the pneumatic mechanism that opens and shuts of top cap window of the wafer cabinet body to solve the problem that provides among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme:
a pneumatic opening and closing mechanism for a top cover window of a wafer cabinet body comprises the wafer cabinet body and the top cover window which are arranged side by side, wherein a cylinder part is arranged between the wafer cabinet body and the top cover window;
furthermore, the cylinder part can realize that the top cap window opens and shuts, is different from traditional manual operation, and opening of top cap window is closed, compresses tightly and all utilizes the cylinder part automation to accomplish, reduces manual operation, raises the efficiency and installs the nitrogen spring and reduce the potential safety hazard as the protection.
The utility model discloses further scheme: the front end of cylinder part is fixed with the dead lever, and rotates respectively at the dead lever and be fixed with a transmission shaft, and the other end of transmission shaft is fixed on the rotation axis, and the rotation axis rotates through two bearing frames that are parallel arrangement to be fixed on supplying the wafer cabinet body to and be fixed with the hinged joint piece on the rotation axis, and the hinged joint piece other end passes through the screw fixation on the top cap window.
The utility model discloses further scheme again: the transmission shaft is arranged in an arc shape.
The utility model discloses further scheme again: the bearing seat and the wafer cabinet body are fixed through screws.
The utility model discloses further scheme again: the hinge connecting blocks are arranged in two and are distributed in parallel.
And then, cylinder part ventilation back cylinder piston rod contracts to utilize the dead lever to drive transmission shaft anticlockwise rotation, the transmission shaft drives the rotation axis and rotates, and the rotation axis realizes stabilizing anticlockwise rotation under the support of bearing frame, and then rotatory rotation axis drives hinged joint piece pulling top cap window anticlockwise rotation and opens.
The utility model discloses further scheme again: the cylinder part is provided with a mounting seat which is rotationally fixed on the wafer cabinet body.
The utility model discloses further scheme again: and a cylinder piston rod is arranged on the cylinder part.
Compared with the prior art, the beneficial effects of the utility model are that:
the cylinder part can realize that the top cap window opens and shuts, is different from traditional manual operation, and opening of top cap window closes, compresses tightly and all utilizes the cylinder part automation to accomplish, reduces manual operation, raises the efficiency and installs the nitrogen spring and reduce the potential safety hazard as the protection.
Drawings
Fig. 1 is a schematic view of the top cover window pneumatic opening and closing mechanism of the wafer cabinet of the present invention.
Fig. 2 is a schematic view of the pneumatic opening and closing mechanism of the top cover window of the wafer cabinet of the present invention.
In the figure: 1-a cylinder part; 2-a wafer supply cabinet; 3-a rotating shaft; 4-bearing seats; 5-a transmission shaft; 6-hinge connecting block; 7-roof window.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
Example 1
The wafer cabinet is a part which automatically sends the wafer into the reaction chamber after the wafer is placed into the reaction chamber, an operator needs to loosen a pressing mechanism of a top cover window when the wafer is placed into the reaction chamber, then manually opens the top cover window and then places the wafer, the top cover window is manually closed after the wafer is placed into the reaction chamber, the pressing mechanism of the top cover window is screwed down, then the wafer is vacuumized and conveyed, the traditional mechanism is complex in operation, the requirement on the operator is high, the manual screwing degree of the pressing mechanism directly influences whether the next-step vacuum pumping of the cabinet can be finished, if the vacuum degree cannot meet the requirement, the pressing mechanism of the top cover window needs to be screwed down again, and due to the fact that the weight of the top cover window is heavy, the manual opening needs the operator to have certain strength and.
And the wafer cabinet body can convey the wafer only under the condition that the vacuum degree is consistent with that of the reaction cavity, so that the high requirement on whether the O-shaped sealing ring can be tightly pressed and sealed after the top cover window is closed is met, the operation is complex and the efficiency is low under the condition that the wafer door is frequently opened and closed and the pressing device is adjusted, and great burden is increased for an operator.
To the above problem, the utility model provides a supply the pneumatic mechanism that opens and shuts of top cap window of the wafer cabinet body.
Specifically, as shown in fig. 1 and 2, a pneumatic opening and closing mechanism for a top cover window of a wafer cabinet comprises a wafer cabinet body 2 and a top cover window 7 which are arranged side by side, wherein a cylinder part 1 is arranged between the wafer cabinet body 2 and the top cover window 7;
furthermore, cylinder part 1 can realize that top cap window 7 opens and shuts, is different from traditional manual operation, and opening of top cap window 7 is closed, compresses tightly and all utilizes cylinder part 1 automation to accomplish, reduces manual operation, raises the efficiency and installs nitrogen spring and reduce the potential safety hazard as the protection.
For further explanation, the following are specific:
the front end of cylinder part 1 is fixed with the dead lever, and rotates respectively at the dead lever and is fixed with a transmission shaft 5, and the other end of transmission shaft 5 is fixed on rotation axis 3, and rotation axis 3 rotates through two bearing frames 4 that are parallel arrangement and fixes on supplying wafer cabinet body 2 to and be fixed with hinged joint piece 6 on rotation axis 3, and the hinged joint piece 6 other end passes through the screw fixation on top cap window 7.
Preferably, the transmission shaft 5 is arc-shaped.
Preferably, the bearing seat 4 and the wafer cabinet 2 are fixed by screws.
Preferably, the hinge connecting blocks 6 are arranged in two and distributed in parallel.
Furthermore, cylinder part 1 ventilates the back cylinder piston rod and contracts to utilize the dead lever to drive transmission shaft 5 anticlockwise rotation, transmission shaft 5 drives rotation axis 3 and rotates, and rotation axis 3 realizes stabilizing anticlockwise rotation under the support of bearing frame 4, and then rotatory rotation axis 3 drives 6 pulling top cap windows 7 anticlockwise rotations of hinge joint piece and opens.
Example 2
The embodiment of the present invention is further defined on the basis of embodiment 1.
As shown in fig. 1 and 2, the cylinder part 1 is provided with a mounting seat, and the mounting seat is rotatably fixed on the wafer supply cabinet 2.
Preferably, the cylinder part 1 is provided with a cylinder piston rod.
The utility model discloses a theory of operation is: the utility model provides a pneumatic mechanism that opens and shuts of top cap window of the wafer cabinet body, cylinder part 1 can realize that top cap window 7 opens and shuts, is different from traditional manual operation, and opening of top cap window 7 closes, compresses tightly and all utilizes cylinder part 1 automation to accomplish, reduces manual operation, raises the efficiency and installs the nitrogen spring and reduce the potential safety hazard as the protection.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (7)
1. The utility model provides a supply pneumatic mechanism that opens and shuts of top cap window of wafer cabinet body, is including being the confession wafer cabinet body (2) and top cap window (7) that set up side by side, its characterized in that, supply the wafer cabinet body (2) with install cylinder part (1) between top cap window (7).
2. The pneumatic opening and closing mechanism for the top cover window of the wafer cabinet body as claimed in claim 1, wherein the front end of the cylinder part (1) is fixed with a fixing rod, and a transmission shaft (5) is respectively fixed on the fixing rod in a rotating manner, the other end of the transmission shaft (5) is fixed on the rotation shaft (3), the rotation shaft (3) is fixed on the wafer cabinet body (2) in a rotating manner through two bearing seats (4) which are arranged in parallel, and a hinge connecting block (6) is fixed on the rotation shaft (3), and the other end of the hinge connecting block (6) is fixed on the top cover window (7) through screws.
3. The pneumatic opening and closing mechanism for the top cover window of the wafer cabinet body as claimed in claim 2, wherein the transmission shaft (5) is arranged in an arc shape.
4. The pneumatic opening and closing mechanism for the top cover window of the wafer cabinet body as claimed in claim 2, wherein the bearing seat (4) and the wafer cabinet body (2) are fixed by screws.
5. The pneumatic opening and closing mechanism for the top cover window of the wafer cabinet body as claimed in claim 2, wherein two hinge connecting blocks (6) are arranged and distributed in parallel.
6. The pneumatic opening and closing mechanism for the top cover window of the wafer cabinet body is characterized in that a mounting seat is arranged on the cylinder part (1), and the mounting seat is rotationally fixed on the wafer cabinet body (2).
7. The pneumatic opening and closing mechanism for the top cover window of the wafer cabinet body as claimed in claim 6, wherein the cylinder part (1) is provided with a cylinder piston rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922129724.7U CN211258214U (en) | 2019-12-03 | 2019-12-03 | Pneumatic opening and closing mechanism for top cover window of wafer cabinet body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922129724.7U CN211258214U (en) | 2019-12-03 | 2019-12-03 | Pneumatic opening and closing mechanism for top cover window of wafer cabinet body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211258214U true CN211258214U (en) | 2020-08-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922129724.7U Active CN211258214U (en) | 2019-12-03 | 2019-12-03 | Pneumatic opening and closing mechanism for top cover window of wafer cabinet body |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211258214U (en) |
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2019
- 2019-12-03 CN CN201922129724.7U patent/CN211258214U/en active Active
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